[Scan]
initial_time=2015-12-15T17:35:32
final_time=2015-12-15T17:35:52
ip_count=19
run=1017
dataset=1
scan=22
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=27.0
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0958E0
qbias_imon=-1.08786E-4
ql1_vset=
ql1_vmon=-8.20684E-1
ql1_imon=1.42651E-8
ql2_vset=
ql2_vmon=-7.98893E-1
ql2_imon=1.96805E-9
ql3_vset=
ql3_vmon=-9.13012E0
ql3_imon=3.93364E-9
ql4_vset=
ql4_vmon=-9.14159E0
ql4_imon=-3.10397E-10
mult1=-1.01377E-8
mult2=-2.65474E-9
rf_tmon=-5.04115E-3
rf_agc=3.28289E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.79357E-3
ql5_imon=1.60959E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66031E0
bslens_imon=2.34151E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19813E1
lens5a_imon=1.98474E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12532E2
lens4a_imon=2.05072E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53875E1
cs_ef1b_imon=2.85116E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04594E2
lens23_imon=1.02171E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05023E1
cs_ea1_imon=2.50999E-5
lens1_vset=-5.0E0
lens1_vmon=-5.37728E0
lens1_imon=2.50786E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64512E1
os_ef1alow_imon=2.97405E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04203E1
cs_ea2_imon=1.55789E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8437E1
cs_ef1a_imon=2.94666E-5
olens2_vset=9.7E-1
olens2_vmon=9.70531E-1
olens2_imon=1.261E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11526E1
os_restr1_imon=4.30355E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15423E1
os_ea1_imon=2.37514E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63725E1
os_ef1bup_imon=3.08649E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2639E0
cs_ionrep_imon=1.19687E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91878E2
cs_nozzle_imon=1.9319E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02031E1
cs_anode1_imon=2.97621E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20599E0
olens4_imon=3.30948E-8
tplens_vset=1.4E-1
tplens_vmon=1.56888E0
tplens_imon=-5.11252E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26224E1
iondef3_imon=1.49524E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26759E1
iondef2_imon=1.57311E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02963E2
lens6_imon=2.98448E-4
ql6_vset=1.0E-1
ql6_vmon=9.32932E-2
ql6_imon=3.96938E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26803E0
ionrepsh_imon=1.78158E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33923E1
lens5b_imon=2.17516E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74567E1
cs_ef2b_imon=3.13082E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.27628E0
os_ea2_imon=-6.70525E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06078E2
lens4b_imon=2.00463E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71432E1
cs_ef2a_imon=3.16218E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04975E0
os_ef2alow_imon=-2.59067E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.13041E-1
os_ef2bup_imon=-5.51709E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10913E1
os_restr2_imon=3.43356E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23087E2
cs_ionfoca_imon=6.27805E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01995E1
cs_anode2_imon=2.25866E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73159E1
iondef1_imon=1.1052E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68106E1
iondef4_imon=1.09062E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71789E1
olens3_imon=4.22833E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82785E-1
olens1_imon=7.43728E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10491E0
cs_ionaccel_imon=-2.02124E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02081E2
cs_ionfocb_imon=1.47158E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56117E1
einzel_imon=7.64099E-6
window_vset=0.0E0
window_vmon=1.27243E-1
window_imon=-1.25E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82605E2
mask1_imon=2.39264E-4
mask2_vset=0.0E0
mask2_vmon=-1.86194E1
mask2_imon=-8.93203E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92642E3
multa_neg_imon=7.41348E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93722E3
defgrida_imon=6.43661E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50116E3
multb_neg_imon=7.25067E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.32583E0
defgridb_imon=6.15699E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33341E1
os_fil1_imon=9.41615E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07347E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64062E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30893E1
cs_fil1_imon=9.95741E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62402E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66585E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.11662E-2
os_fil2_imon=-2.72003E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.68882E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.42665E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.38068E-1
cs_fil2_imon=-2.75006E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=4.99516E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22348E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33436E-3
inlet_lpb_pmon=1.9934E-1
chamber_ion_pmon=1.17023E-7
chamber_cvt_pmon=2.51954E-3
foreline_cvt_pmon=2.51954E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.65899E-1
res40_imon=-2.60148E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=205
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09464E0	-8.21424E-1	-7.99108E-1	-9.13103E0	-9.14183E0	5.98431E-3	9.30071E-2	2.7347E1	-3.26567E1	-3.26543E1	2.67989E1	1.1693E-7	2.52428E-3	2.52428E-3	6.31288E-3	2.00325E-1
2.0E0	3.6E1	0.0E0	3.16E2	1.6E2	-2.09572E0	-8.2159E-1	-7.99227E-1	-9.13093E0	-9.14152E0	6.00815E-3	9.32217E-2	2.73339E1	-3.26738E1	-3.26327E1	2.6787E1	1.16916E-7	2.51814E-3	2.51814E-3	6.31798E-3	1.99896E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09557E0	-8.21376E-1	-7.99155E-1	-9.13107E0	-9.14178E0	6.07967E-3	9.3174E-2	2.73234E1	-3.26649E1	-3.26767E1	2.68151E1	1.1699E-7	2.52139E-3	2.52139E-3	6.34099E-3	2.00996E-1
4.0E0	2.0E0	0.0E0	6.55E2	3.98E2	-2.09464E0	-8.20971E-1	-7.99108E-1	-9.13124E0	-9.14192E0	5.91278E-3	9.31978E-2	2.73153E1	-3.26681E1	-3.2638E1	2.68082E1	1.16973E-7	2.51847E-3	2.51847E-3	6.32896E-3	2.00363E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09541E0	-8.20804E-1	-7.99203E-1	-9.13088E0	-9.1419E0	5.48363E-3	9.31025E-2	2.72892E1	-3.26732E1	-3.26213E1	2.6798E1	1.16829E-7	2.51443E-3	2.51443E-3	6.31837E-3	2.00499E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0968E0	-8.20804E-1	-7.99131E-1	-9.13079E0	-9.14154E0	5.84126E-3	9.29356E-2	2.72653E1	-3.26578E1	-3.26187E1	2.68214E1	1.16956E-7	2.52209E-3	2.52209E-3	6.31014E-3	2.00935E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09526E0	-8.20732E-1	-7.98917E-1	-9.1306E0	-9.14154E0	5.53131E-3	9.29117E-2	2.73204E1	-3.26708E1	-3.26172E1	2.6804E1					
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09503E0	-8.20875E-1	-7.98869E-1	-9.13055E0	-9.14168E0	5.65052E-3	9.31263E-2	2.73213E1	-3.26663E1	-3.26518E1	2.68148E1	1.17032E-7	2.51662E-3	2.51662E-3	6.34037E-3	2.00325E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0951E0	-8.20851E-1	-7.98917E-1	-9.13043E0	-9.14176E0	5.48363E-3	9.3174E-2	2.73093E1	-3.26603E1	-3.25966E1	2.68196E1	1.16778E-7	2.51552E-3	2.51552E-3	6.28552E-3	2.00325E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09595E0	-8.20994E-1	-7.99203E-1	-9.13017E0	-9.14173E0	5.65052E-3	9.27925E-2	2.72986E1	-3.26396E1	-3.26343E1	2.67944E1	1.16973E-7	2.52384E-3	2.52384E-3	6.33977E-3	1.9968E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.0958E0	-8.21042E-1	-7.98988E-1	-9.13017E0	-9.14176E0	5.79357E-3	9.27687E-2	2.73261E1	-3.26999E1	-3.25972E1	2.68118E1	1.16829E-7	2.51771E-3	2.51771E-3	6.34037E-3	2.00151E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09557E0	-8.20899E-1	-7.98965E-1	-9.12991E0	-9.14161E0	5.76973E-3	9.29594E-2	2.73213E1	-3.26735E1	-3.2614E1	2.68163E1	1.16823E-7	2.51847E-3	2.51847E-3	6.30202E-3	2.00363E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09557E0	-8.20947E-1	-7.98965E-1	-9.13033E0	-9.14166E0	5.81741E-3	9.32932E-2	2.73051E1	-3.26759E1	-3.25984E1	2.68058E1	1.17032E-7	2.52209E-3	2.52209E-3	6.31837E-3	2.01197E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.0951E0	-8.20923E-1	-7.98893E-1	-9.13007E0	-9.14183E0	5.50747E-3	9.32455E-2	2.73393E1	-3.26891E1	-3.26573E1	2.68094E1	1.17032E-7	2.52099E-3	2.52099E-3	6.31288E-3	2.00325E-1
1.8E1	3.0E0	0.0E0	7.27E2	5.0E2	-2.09526E0	-8.20923E-1	-7.98965E-1	-9.13019E0	-9.14173E0	5.48363E-3	9.31501E-2	2.73009E1	-3.26458E1	-3.26248E1	2.68208E1	1.1693E-7	2.52428E-3	2.52428E-3	6.31288E-3	2.00499E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09541E0	-8.20875E-1	-7.98965E-1	-9.13038E0	-9.14187E0	5.62668E-3	9.34601E-2	2.73517E1	-3.26242E1	-3.26012E1	2.6804E1	1.16973E-7	2.51847E-3	2.51847E-3	6.31817E-3	2.00192E-1
2.0E1	4.0E0	0.0E0	8.08E2	5.58E2	-2.09503E0	-8.20851E-1	-7.98726E-1	-9.13045E0	-9.14187E0	5.57899E-3	9.32217E-2	2.73444E1	-3.27102E1	-3.26329E1	2.68154E1	1.16727E-7	2.5199E-3	2.5199E-3	6.29098E-3	2.00325E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09487E0	-8.20684E-1	-7.98869E-1	-9.13048E0	-9.14176E0	5.6982E-3	9.30309E-2	2.73057E1	-3.26695E1	-3.26191E1	2.68159E1	1.16938E-7	2.52139E-3	2.52139E-3	6.32978E-3	1.99931E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09518E0	-8.20851E-1	-7.98845E-1	-9.13036E0	-9.1418E0	5.48363E-3	9.34124E-2	2.72886E1	-3.26443E1	-3.26136E1	2.68064E1	1.16769E-7	2.51919E-3	2.51919E-3	6.29157E-3	1.99896E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0958E0	-8.20684E-1	-7.98893E-1	-9.13012E0	-9.14159E0	5.79357E-3	9.32932E-2	2.73159E1	-3.26759E1	-3.26224E1	2.68106E1	1.17023E-7	2.51954E-3	2.51954E-3	6.33436E-3	1.9934E-1