[Scan]
initial_time=2015-12-15T17:35:59
final_time=2015-12-15T17:36:18
ip_count=19
run=1017
dataset=1
scan=23
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=27.0
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09449E0
qbias_imon=-1.08779E-4
ql1_vset=
ql1_vmon=-8.2047E-1
ql1_imon=1.39823E-8
ql2_vset=
ql2_vmon=-7.98869E-1
ql2_imon=2.02368E-9
ql3_vset=
ql3_vmon=-9.13074E0
ql3_imon=2.89365E-9
ql4_vset=
ql4_vmon=-9.14149E0
ql4_imon=-2.02465E-10
mult1=-9.36932E-9
mult2=-2.68994E-9
rf_tmon=-5.5772E-3
rf_agc=3.23122E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.55515E-3
ql5_imon=1.63593E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66361E0
bslens_imon=2.54306E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19731E1
lens5a_imon=1.96922E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12546E2
lens4a_imon=2.04931E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53717E1
cs_ef1b_imon=2.85602E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04604E2
lens23_imon=1.02382E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05337E1
cs_ea1_imon=2.47902E-5
lens1_vset=-5.0E0
lens1_vmon=-5.36827E0
lens1_imon=2.66059E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64833E1
os_ef1alow_imon=2.96867E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04345E1
cs_ea2_imon=1.52993E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84432E1
cs_ef1a_imon=2.94173E-5
olens2_vset=9.7E-1
olens2_vmon=9.70411E-1
olens2_imon=1.25487E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11223E1
os_restr1_imon=4.30253E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1503E1
os_ea1_imon=2.35304E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63748E1
os_ef1bup_imon=3.08095E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25944E0
cs_ionrep_imon=1.18614E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91857E2
cs_nozzle_imon=1.93552E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02002E1
cs_anode1_imon=2.97129E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20587E0
olens4_imon=3.29244E-8
tplens_vset=1.4E-1
tplens_vmon=1.59613E0
tplens_imon=-5.60603E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26189E1
iondef3_imon=1.49357E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26738E1
iondef2_imon=1.56556E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02961E2
lens6_imon=2.98493E-4
ql6_vset=1.0E-1
ql6_vmon=9.29832E-2
ql6_imon=3.97328E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24781E0
ionrepsh_imon=1.76684E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3375E1
lens5b_imon=2.18959E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74601E1
cs_ef2b_imon=3.12661E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.31882E0
os_ea2_imon=-7.2956E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06125E2
lens4b_imon=2.00645E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7137E1
cs_ef2a_imon=3.17115E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04832E0
os_ef2alow_imon=-2.64917E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.90147E-1
os_ef2bup_imon=-5.37376E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11111E1
os_restr2_imon=3.43313E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23052E2
cs_ionfoca_imon=6.28496E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01952E1
cs_anode2_imon=2.25721E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73122E1
iondef1_imon=1.12223E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6807E1
iondef4_imon=1.08092E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=4.30514E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.8269E-1
olens1_imon=7.45621E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12328E0
cs_ionaccel_imon=-1.89317E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02074E2
cs_ionfocb_imon=1.47106E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56424E1
einzel_imon=7.58679E-6
window_vset=0.0E0
window_vmon=1.54597E-1
window_imon=-1.15588E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82622E2
mask1_imon=2.39084E-4
mask2_vset=0.0E0
mask2_vmon=-1.85851E1
mask2_imon=-7.36708E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92636E3
multa_neg_imon=7.50524E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93755E3
defgrida_imon=6.59067E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50129E3
multb_neg_imon=7.10122E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.34226E0
defgridb_imon=6.16093E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33323E1
os_fil1_imon=9.41659E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06549E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64086E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30882E1
cs_fil1_imon=9.9539E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63077E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66634E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.25257E-2
os_fil2_imon=-2.68122E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.86602E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.34948E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.37047E-1
cs_fil2_imon=-2.40052E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=7.99384E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22394E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.28468E-3
inlet_lpb_pmon=1.99343E-1
chamber_ion_pmon=1.16841E-7
chamber_cvt_pmon=2.52066E-3
foreline_cvt_pmon=2.52066E-3
chamber_tmon=1.40039E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.71038E-1
res40_imon=-2.51069E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=170
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	5.0E0	0.0E0	1.47E2	4.1E1	-2.0951E0	-8.20184E-1	-7.99131E-1	-9.13036E0	-9.14161E0	5.65052E-3	9.32932E-2	2.73111E1	-3.26951E1	-3.26206E1	2.6816E1	1.16893E-7	2.52066E-3	2.52066E-3	6.34164E-3	1.99883E-1
2.0E0	2.8E1	0.0E0	3.16E2	1.6E2	-2.09541E0	-8.20136E-1	-7.99108E-1	-9.1305E0	-9.14164E0	5.93662E-3	9.31501E-2	2.73333E1	-3.26713E1	-3.26193E1	2.68076E1	1.16923E-7	2.51847E-3	2.51847E-3	6.32356E-3	1.9985E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0958E0	-8.20231E-1	-7.99131E-1	-9.13033E0	-9.14173E0	5.81741E-3	9.28402E-2	2.72935E1	-3.26515E1	-3.26196E1	2.68186E1	1.16886E-7	2.51915E-3	2.51915E-3	6.32978E-3	2.00108E-1
4.0E0	3.0E0	0.0E0	6.55E2	3.98E2	-2.0958E0	-8.19993E-1	-7.99108E-1	-9.13064E0	-9.14173E0	5.72205E-3	9.26733E-2	2.73135E1	-3.27191E1	-3.26026E1	2.68124E1	1.16724E-7	2.51847E-3	2.51847E-3	6.31817E-3	2.00021E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0958E0	-8.20351E-1	-7.99251E-1	-9.13053E0	-9.14178E0	5.34058E-3	9.30548E-2	2.72913E1	-3.26579E1	-3.26236E1	2.67986E1	1.17032E-7	2.52099E-3	2.52099E-3	6.32936E-3	1.99456E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09533E0	-8.20303E-1	-7.99179E-1	-9.13012E0	-9.14171E0	5.57899E-3	9.25779E-2	2.73363E1	-3.26488E1	-3.26152E1	2.68034E1	1.17023E-7	2.52061E-3	2.52061E-3	6.2645E-3	1.99E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09441E0	-8.2016E-1	-7.98774E-1	-9.13045E0	-9.14164E0	5.45979E-3	9.26733E-2	2.73363E1	-3.26735E1	-3.26368E1	2.68166E1	1.16829E-7	2.51771E-3	2.51771E-3	6.34037E-3	1.9963E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09549E0	-8.20255E-1	-7.98965E-1	-9.13038E0	-9.14164E0	5.79357E-3	9.25541E-2	2.72862E1	-3.26266E1	-3.26402E1	2.68082E1	1.16727E-7	2.52318E-3	2.52318E-3	6.3074E-3	1.99283E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0951E0	-8.20184E-1	-7.99251E-1	-9.13019E0	-9.14161E0	5.8651E-3	9.28402E-2	2.73099E1	-3.26693E1	-3.26008E1	2.68215E1	1.16829E-7	2.52099E-3	2.52099E-3	6.30192E-3	2.00151E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09503E0	-8.20374E-1	-7.98917E-1	-9.13029E0	-9.14168E0	5.88894E-3	9.26733E-2	2.73435E1	-3.26867E1	-3.26296E1	2.68178E1	1.16923E-7	2.52492E-3	2.52492E-3	6.31278E-3	2.01047E-1
1.4E1	2.0E0	0.0E0	5.66E2	3.82E2	-2.09572E0	-8.20231E-1	-7.99036E-1	-9.13014E0	-9.14154E0	5.74589E-3	9.31025E-2	2.73429E1	-3.26188E1	-3.26717E1	2.67889E1	1.17032E-7	2.5188E-3	2.5188E-3	6.34588E-3	2.01897E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0951E0	-8.20327E-1	-7.98845E-1	-9.13031E0	-9.14159E0	5.72205E-3	9.30548E-2	2.72757E1	-3.26855E1	-3.26837E1	2.68186E1	1.1688E-7	2.51662E-3	2.51662E-3	6.32386E-3	1.99803E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09588E0	-8.20637E-1	-7.98655E-1	-9.13024E0	-9.14183E0	5.72205E-3	9.29832E-2	2.73195E1	-3.26867E1	-3.2632E1	2.6807E1	1.16778E-7	2.5199E-3	2.5199E-3	6.29098E-3	1.99977E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09611E0	-8.20565E-1	-7.9875E-1	-9.13048E0	-9.1419E0	5.79357E-3	9.28879E-2	2.73611E1	-3.26956E1	-3.26402E1	2.68112E1	1.1688E-7	2.5188E-3	2.5188E-3	6.29098E-3	2.00325E-1
1.8E1	5.0E0	0.0E0	7.27E2	5.0E2	-2.09503E0	-8.2016E-1	-7.98655E-1	-9.13064E0	-9.14192E0	5.45979E-3	9.30071E-2	2.72865E1	-3.26362E1	-3.2617E1	2.6822E1	1.17032E-7	2.5199E-3	2.5199E-3	6.31837E-3	2.00151E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09518E0	-8.20184E-1	-7.98607E-1	-9.1305E0	-9.1418E0	5.55515E-3	9.26495E-2	2.73302E1	-3.26738E1	-3.26444E1	2.68244E1	1.16823E-7	2.52384E-3	2.52384E-3	6.33977E-3	2.01047E-1
2.0E1	6.0E0	0.0E0	8.08E2	5.58E2	-2.09464E0	-8.20231E-1	-7.98678E-1	-9.13074E0	-9.14156E0	5.43594E-3	9.30548E-2	2.72886E1	-3.2636E1	-3.26508E1	2.67956E1	1.1699E-7	2.52809E-3	2.52809E-3	6.31299E-3	2.00818E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09348E0	-8.20303E-1	-7.98821E-1	-9.13072E0	-9.14197E0	5.53131E-3	9.28402E-2	2.73001E1	-3.26752E1	-3.26182E1	2.68076E1	1.16727E-7	2.52099E-3	2.52099E-3	6.32936E-3	2.00499E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09394E0	-8.20279E-1	-7.98845E-1	-9.13069E0	-9.14154E0	5.38826E-3	9.28402E-2	2.7279E1	-3.26877E1	-3.26107E1	2.6814E1	1.16902E-7	2.5216E-3	2.5216E-3	6.31251E-3	1.99983E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09449E0	-8.2047E-1	-7.98869E-1	-9.13074E0	-9.14149E0	5.55515E-3	9.29832E-2	2.73122E1	-3.26738E1	-3.26189E1	2.6807E1	1.16841E-7	2.52066E-3	2.52066E-3	6.28468E-3	1.99343E-1