[Scan]
initial_time=2015-12-15T17:36:25
final_time=2015-12-15T17:36:45
ip_count=19
run=1017
dataset=1
scan=24
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=27.0
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09572E0
qbias_imon=-1.0879E-4
ql1_vset=
ql1_vmon=-8.19802E-1
ql1_imon=1.39266E-8
ql2_vset=
ql2_vmon=-7.99131E-1
ql2_imon=1.98472E-9
ql3_vset=
ql3_vmon=-9.13081E0
ql3_imon=2.19464E-9
ql4_vset=
ql4_vmon=-9.1419E0
ql4_imon=-1.55139E-10
mult1=-8.90959E-9
mult2=-2.73658E-9
rf_tmon=-4.93901E-3
rf_agc=3.32555E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.81741E-3
ql5_imon=1.68147E-9
bslens_vset=-6.2E0
bslens_vmon=-6.64811E0
bslens_imon=2.17726E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19785E1
lens5a_imon=1.97586E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12519E2
lens4a_imon=2.04941E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53568E1
cs_ef1b_imon=2.86125E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04632E2
lens23_imon=1.02215E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05361E1
cs_ea1_imon=2.50903E-5
lens1_vset=-5.0E0
lens1_vmon=-5.35514E0
lens1_imon=2.68916E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64795E1
os_ef1alow_imon=2.9672E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0366E1
cs_ea2_imon=1.54579E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8452E1
cs_ef1a_imon=2.93837E-5
olens2_vset=9.7E-1
olens2_vmon=9.7034E-1
olens2_imon=1.25808E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1122E1
os_restr1_imon=4.31797E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15486E1
os_ea1_imon=2.36123E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63659E1
os_ef1bup_imon=3.06451E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2545E0
cs_ionrep_imon=1.18638E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91872E2
cs_nozzle_imon=1.93218E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01893E1
cs_anode1_imon=2.99387E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20606E0
olens4_imon=3.27906E-8
tplens_vset=1.4E-1
tplens_vmon=1.6198E0
tplens_imon=-3.4621E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26609E1
iondef3_imon=1.49676E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.27131E1
iondef2_imon=1.57463E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02945E2
lens6_imon=2.98436E-4
ql6_vset=1.0E-1
ql6_vmon=9.29594E-2
ql6_imon=4.01576E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29656E0
ionrepsh_imon=1.80463E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33724E1
lens5b_imon=2.15467E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74591E1
cs_ef2b_imon=3.12217E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.27012E0
os_ea2_imon=-7.93225E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06081E2
lens4b_imon=2.00738E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7127E1
cs_ef2a_imon=3.1784E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07198E0
os_ef2alow_imon=-2.71681E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.02229E-1
os_ef2bup_imon=-5.38735E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10745E1
os_restr2_imon=3.42851E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23075E2
cs_ionfoca_imon=6.31514E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01833E1
cs_anode2_imon=2.25073E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73183E1
iondef1_imon=1.10202E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6784E1
iondef4_imon=1.08089E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=4.33735E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82523E-1
olens1_imon=7.42861E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14576E0
cs_ionaccel_imon=-1.97439E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02073E2
cs_ionfocb_imon=1.47334E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56285E1
einzel_imon=7.50043E-6
window_vset=0.0E0
window_vmon=1.70491E-1
window_imon=-9.97719E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82611E2
mask1_imon=2.3894E-4
mask2_vset=0.0E0
mask2_vmon=-1.86224E1
mask2_imon=-7.45441E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92634E3
multa_neg_imon=7.00789E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93684E3
defgrida_imon=6.2148E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50158E3
multb_neg_imon=7.00789E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.24517E0
defgridb_imon=6.16794E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33325E1
os_fil1_imon=9.41027E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07173E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64297E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30931E1
cs_fil1_imon=9.94654E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62564E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66478E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.17689E-2
os_fil2_imon=-2.86419E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.89305E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.25473E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.37291E-1
cs_fil2_imon=-2.47976E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.17866E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22324E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32936E-3
inlet_lpb_pmon=2.01372E-1
chamber_ion_pmon=1.16829E-7
chamber_cvt_pmon=2.52538E-3
foreline_cvt_pmon=2.52538E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.9353E-1
res40_imon=-2.41768E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=153
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	5.0E0	0.0E0	1.47E2	4.1E1	-2.09557E0	-8.2016E-1	-7.98988E-1	-9.13057E0	-9.14171E0	6.10352E-3	9.26495E-2	2.73457E1	-3.26816E1	-3.26446E1	2.68184E1	1.1688E-7	2.52538E-3	2.52538E-3	6.33486E-3	2.00499E-1
2.0E0	3.3E1	0.0E0	3.16E2	1.6E2	-2.09549E0	-8.20017E-1	-7.98607E-1	-9.13048E0	-9.14161E0	6.03199E-3	9.24826E-2	2.73326E1	-3.26554E1	-3.25985E1	2.67932E1	1.17023E-7	2.52599E-3	2.52599E-3	6.3074E-3	1.99E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09526E0	-8.20088E-1	-7.9875E-1	-9.13041E0	-9.14199E0	5.93662E-3	9.30309E-2	2.73138E1	-3.26359E1	-3.26631E1	2.68088E1	1.17048E-7	2.51847E-3	2.51847E-3	6.31009E-3	1.99E-1
4.0E0	5.0E0	0.0E0	6.55E2	3.98E2	-2.09449E0	-8.19826E-1	-7.98726E-1	-9.13048E0	-9.1419E0	5.84126E-3	9.32693E-2	2.73003E1	-3.26609E1	-3.2638E1	2.68136E1					
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09533E0	-8.19731E-1	-7.98535E-1	-9.1306E0	-9.14209E0	5.76973E-3	9.31025E-2	2.72998E1	-3.26903E1	-3.26296E1	2.68028E1	1.16804E-7	2.52209E-3	2.52209E-3	6.32112E-3	2.00499E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09611E0	-8.19612E-1	-7.98965E-1	-9.13038E0	-9.1418E0	5.84126E-3	9.30309E-2	2.73129E1	-3.26488E1	-3.2653E1	2.6819E1					
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09549E0	-8.20065E-1	-7.98893E-1	-9.13041E0	-9.1418E0	5.48363E-3	9.28879E-2	2.73111E1	-3.26272E1	-3.26476E1	2.68227E1	1.17083E-7	2.51771E-3	2.51771E-3	6.3074E-3	2.00499E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09572E0	-8.19993E-1	-7.99012E-1	-9.13043E0	-9.14199E0	5.79357E-3	9.2864E-2	2.72751E1	-3.26446E1	-3.2647E1	2.68269E1	1.16873E-7	2.52492E-3	2.52492E-3	6.29128E-3	1.9968E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09541E0	-8.20088E-1	-7.98869E-1	-9.13067E0	-9.14209E0	5.79357E-3	9.29356E-2	2.73093E1	-3.2641E1	-3.26422E1	2.68286E1	1.16981E-7	2.51771E-3	2.51771E-3	6.29098E-3	1.99803E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0951E0	-8.20065E-1	-7.98798E-1	-9.1301E0	-9.14166E0	5.81741E-3	9.29832E-2	2.73216E1	-3.26644E1	-3.26354E1	2.68053E1	1.16778E-7	2.5199E-3	2.5199E-3	6.3074E-3	2.00847E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09526E0	-8.19755E-1	-7.98893E-1	-9.13062E0	-9.14185E0	5.88894E-3	9.29832E-2	2.72829E1	-3.26398E1	-3.26536E1	2.68112E1	1.16829E-7	2.51552E-3	2.51552E-3	6.32386E-3	2.00325E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09526E0	-8.19802E-1	-7.98917E-1	-9.13017E0	-9.14192E0	5.36442E-3	9.28164E-2	2.73446E1	-3.26496E1	-3.26266E1	2.68204E1	1.16873E-7	2.52061E-3	2.52061E-3	6.31817E-3	2.0079E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09503E0	-8.19683E-1	-7.98607E-1	-9.13045E0	-9.14192E0	5.67436E-3	9.2864E-2	2.72992E1	-3.26549E1	-3.26331E1	2.68154E1					
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09526E0	-8.19612E-1	-7.98774E-1	-9.13079E0	-9.14197E0	5.72205E-3	9.29117E-2	2.73297E1	-3.26302E1	-3.25852E1	2.6798E1	1.16902E-7	2.52134E-3	2.52134E-3	6.31283E-3	1.99569E-1
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09394E0	-8.20184E-1	-7.9906E-1	-9.13079E0	-9.14178E0	5.72205E-3	9.27925E-2	2.73588E1	-3.26785E1	-3.26124E1	2.68076E1					
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09433E0	-8.19969E-1	-7.99131E-1	-9.13072E0	-9.14178E0	5.79357E-3	9.3174E-2	2.73177E1	-3.26404E1	-3.26236E1	2.68146E1	1.1688E-7	2.5188E-3	2.5188E-3	6.27461E-3	1.99977E-1
2.0E1	2.0E0	0.0E0	8.08E2	5.58E2	-2.09441E0	-8.20136E-1	-7.98845E-1	-9.13095E0	-9.14195E0	6.05583E-3	9.29594E-2	2.73039E1	-3.26861E1	-3.26134E1	2.68274E1	1.16873E-7	2.51632E-3	2.51632E-3	6.33977E-3	1.9934E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09456E0	-8.19969E-1	-7.99108E-1	-9.13079E0	-9.14195E0	5.96046E-3	9.28402E-2	2.73161E1	-3.2688E1	-3.26266E1	2.68088E1	1.16778E-7	2.52867E-3	2.52867E-3	6.31288E-3	1.99803E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.0951E0	-8.19921E-1	-7.99298E-1	-9.13086E0	-9.14207E0	5.67436E-3	9.28879E-2	2.73123E1	-3.26843E1	-3.25809E1	2.68147E1	1.16965E-7	2.51919E-3	2.51919E-3	6.31798E-3	2.00735E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09572E0	-8.19802E-1	-7.99131E-1	-9.13081E0	-9.1419E0	5.81741E-3	9.29594E-2	2.73183E1	-3.27131E1	-3.26609E1	2.6784E1	1.16829E-7	2.52538E-3	2.52538E-3	6.32936E-3	2.01372E-1