[Scan]
initial_time=2015-12-15T17:36:52
final_time=2015-12-15T17:37:11
ip_count=19
run=1017
dataset=1
scan=25
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=27.0
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09533E0
qbias_imon=-1.08856E-4
ql1_vset=
ql1_vmon=-8.19468E-1
ql1_imon=1.38715E-8
ql2_vset=
ql2_vmon=-7.99036E-1
ql2_imon=2.00416E-9
ql3_vset=
ql3_vmon=-9.1306E0
ql3_imon=1.83258E-9
ql4_vset=
ql4_vmon=-9.14195E0
ql4_imon=-1.22356E-10
mult1=-8.51225E-9
mult2=-2.6694E-9
rf_tmon=-4.46251E-3
rf_agc=3.33791E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.67436E-3
ql5_imon=1.68142E-9
bslens_vset=-6.2E0
bslens_vmon=-6.63129E0
bslens_imon=2.60264E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19989E1
lens5a_imon=1.97262E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12459E2
lens4a_imon=2.0501E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53694E1
cs_ef1b_imon=2.86918E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0462E2
lens23_imon=1.02089E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05156E1
cs_ea1_imon=2.50795E-5
lens1_vset=-5.0E0
lens1_vmon=-5.40681E0
lens1_imon=2.74323E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64885E1
os_ef1alow_imon=2.96396E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03684E1
cs_ea2_imon=1.54867E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84214E1
cs_ef1a_imon=2.94882E-5
olens2_vset=9.7E-1
olens2_vmon=9.70411E-1
olens2_imon=1.26047E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11424E1
os_restr1_imon=4.30247E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15324E1
os_ea1_imon=2.35258E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63737E1
os_ef1bup_imon=3.07929E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24909E0
cs_ionrep_imon=1.20008E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91823E2
cs_nozzle_imon=1.93276E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01809E1
cs_anode1_imon=2.98522E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20566E0
olens4_imon=3.28194E-8
tplens_vset=1.4E-1
tplens_vmon=1.59817E0
tplens_imon=-4.65174E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26204E1
iondef3_imon=1.49784E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26697E1
iondef2_imon=1.57571E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02945E2
lens6_imon=2.98342E-4
ql6_vset=1.0E-1
ql6_vmon=9.29356E-2
ql6_imon=4.03732E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26171E0
ionrepsh_imon=1.79237E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33507E1
lens5b_imon=2.15827E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74639E1
cs_ef2b_imon=3.12109E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.28875E0
os_ea2_imon=-7.57175E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06102E2
lens4b_imon=2.00594E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7136E1
cs_ef2a_imon=3.17731E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04255E0
os_ef2alow_imon=-2.81051E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.2085E-1
os_ef2bup_imon=-5.35491E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10907E1
os_restr2_imon=3.43644E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23036E2
cs_ionfoca_imon=6.30649E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01929E1
cs_anode2_imon=2.26335E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73132E1
iondef1_imon=1.08796E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68182E1
iondef4_imon=1.08089E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7179E1
olens3_imon=4.38277E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82785E-1
olens1_imon=7.4317E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13675E0
cs_ionaccel_imon=-2.00683E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02073E2
cs_ionfocb_imon=1.47237E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56309E1
einzel_imon=7.42835E-6
window_vset=0.0E0
window_vmon=1.56075E-1
window_imon=-9.29243E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82603E2
mask1_imon=2.38929E-4
mask2_vset=0.0E0
mask2_vmon=-1.86344E1
mask2_imon=-5.11183E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92656E3
multa_neg_imon=7.44049E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93726E3
defgrida_imon=6.1391E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50122E3
multb_neg_imon=6.82404E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.38352E0
defgridb_imon=6.12108E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33332E1
os_fil1_imon=9.41813E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07161E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64123E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30909E1
cs_fil1_imon=9.96203E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62558E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66538E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.22848E-2
os_fil2_imon=-2.7861E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.76691E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.3746E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3755E-1
cs_fil2_imon=-2.8762E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.08216E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22318E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31779E-3
inlet_lpb_pmon=1.9994E-1
chamber_ion_pmon=1.17053E-7
chamber_cvt_pmon=2.52509E-3
foreline_cvt_pmon=2.52509E-3
chamber_tmon=1.40055E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.01939E-1
res40_imon=-2.48616E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=205
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.09657E0	-8.19945E-1	-7.98798E-1	-9.13105E0	-9.14199E0	5.84126E-3	9.31978E-2	2.73157E1	-3.27228E1	-3.26455E1	2.68059E1	1.1688E-7	2.52538E-3	2.52538E-3	6.34037E-3	1.9963E-1
2.0E0	3.5E1	0.0E0	3.16E2	1.6E2	-2.09595E0	-8.19778E-1	-7.98702E-1	-9.13084E0	-9.14185E0	5.6982E-3	9.30309E-2	2.73261E1	-3.26657E1	-3.26356E1	2.68269E1	1.17073E-7	2.51417E-3	2.51417E-3	6.32896E-3	2.00534E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09565E0	-8.20088E-1	-7.98774E-1	-9.13084E0	-9.14195E0	5.84126E-3	9.25541E-2	2.73275E1	-3.26614E1	-3.26467E1	2.68227E1	1.16829E-7	2.52538E-3	2.52538E-3	6.32386E-3	2.00673E-1
4.0E0	3.0E0	0.0E0	6.55E2	3.98E2	-2.09518E0	-8.19755E-1	-7.9906E-1	-9.13091E0	-9.14202E0	5.96046E-3	9.27448E-2	2.73177E1	-3.26975E1	-3.265E1	2.6837E1	1.16873E-7	2.51847E-3	2.51847E-3	6.30202E-3	2.00876E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09533E0	-8.19683E-1	-7.99108E-1	-9.13095E0	-9.1419E0	5.8651E-3	9.28164E-2	2.73015E1	-3.26603E1	-3.26128E1	2.68028E1	1.17083E-7	2.52209E-3	2.52209E-3	6.31288E-3	2.01722E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09541E0	-8.19564E-1	-7.99108E-1	-9.13022E0	-9.1418E0	5.6982E-3	9.28402E-2	2.73129E1	-3.26567E1	-3.26302E1	2.68466E1	1.1693E-7	2.52099E-3	2.52099E-3	6.32661E-3	2.01197E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09588E0	-8.19969E-1	-7.98845E-1	-9.13033E0	-9.14192E0	5.6982E-3	9.31263E-2	2.73081E1	-3.26573E1	-3.2611E1	2.68202E1					
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09572E0	-8.19755E-1	-7.98845E-1	-9.13067E0	-9.1419E0	5.8651E-3	9.29356E-2	2.73243E1	-3.26597E1	-3.26494E1	2.68118E1	1.17286E-7	2.52209E-3	2.52209E-3	6.29645E-3	2.01372E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09557E0	-8.19731E-1	-7.98535E-1	-9.13055E0	-9.14192E0	5.96046E-3	9.28879E-2	2.72727E1	-3.26549E1	-3.26326E1	2.68154E1	1.1693E-7	2.51334E-3	2.51334E-3	6.31837E-3	2.00673E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09711E0	-8.19731E-1	-7.9875E-1	-9.13055E0	-9.14199E0	5.81741E-3	9.30309E-2	2.72895E1	-3.26633E1	-3.26242E1	2.68256E1	1.1693E-7	2.52209E-3	2.52209E-3	6.3514E-3	2.00151E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.0968E0	-8.19993E-1	-7.98988E-1	-9.13045E0	-9.14166E0	5.84126E-3	9.2864E-2	2.73129E1	-3.26717E1	-3.25972E1	2.68142E1	1.16829E-7	2.52209E-3	2.52209E-3	6.34037E-3	1.99977E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0951E0	-8.19945E-1	-7.98774E-1	-9.13064E0	-9.14185E0	5.53131E-3	9.31025E-2	2.7254E1	-3.25791E1	-3.27017E1	2.68028E1	1.16778E-7	2.51771E-3	2.51771E-3	6.29098E-3	1.9963E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09464E0	-8.19874E-1	-7.98869E-1	-9.13064E0	-9.14183E0	5.88894E-3	9.30548E-2	2.73075E1	-3.26482E1	-3.26344E1	2.6837E1	1.17236E-7	2.51552E-3	2.51552E-3	6.34037E-3	1.99977E-1
1.7E1	2.0E0	0.0E0	6.87E2	4.7E2	-2.0958E0	-8.1985E-1	-7.99203E-1	-9.13079E0	-9.14173E0	6.07967E-3	9.2864E-2	2.73069E1	-3.26482E1	-3.26482E1	2.68244E1	1.1688E-7	2.52428E-3	2.52428E-3	6.29098E-3	2.00325E-1
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09595E0	-8.19826E-1	-7.99251E-1	-9.13079E0	-9.1418E0	6.1512E-3	9.31263E-2	2.73177E1	-3.26813E1	-3.25954E1	2.67914E1	1.17185E-7	2.52209E-3	2.52209E-3	6.31837E-3	2.00499E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09449E0	-8.19635E-1	-7.98917E-1	-9.13074E0	-9.14168E0	5.79357E-3	9.30071E-2	2.72877E1	-3.26747E1	-3.26452E1	2.68172E1	1.16829E-7	2.52318E-3	2.52318E-3	6.32936E-3	1.99977E-1
2.0E1	5.0E0	0.0E0	8.08E2	5.58E2	-2.09449E0	-8.19612E-1	-7.98869E-1	-9.13079E0	-9.14192E0	6.1512E-3	9.32455E-2	2.73605E1	-3.26443E1	-3.26714E1	2.68124E1	1.17134E-7	2.52099E-3	2.52099E-3	6.29645E-3	2.00673E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09611E0	-8.19492E-1	-7.98845E-1	-9.13091E0	-9.14214E0	5.98431E-3	9.30548E-2	2.73034E1	-3.26799E1	-3.26301E1	2.68134E1	1.16823E-7	2.51525E-3	2.51525E-3	6.29665E-3	2.00192E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09565E0	-8.19278E-1	-7.98965E-1	-9.13081E0	-9.14178E0	5.91278E-3	9.31978E-2	2.73267E1	-3.2659E1	-3.26323E1	2.68043E1	1.16867E-7	2.51603E-3	2.51603E-3	6.32328E-3	1.98727E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09533E0	-8.19468E-1	-7.99036E-1	-9.1306E0	-9.14195E0	5.67436E-3	9.29356E-2	2.73132E1	-3.26697E1	-3.26204E1	2.68182E1	1.17053E-7	2.52509E-3	2.52509E-3	6.31779E-3	1.9994E-1