[Scan]
initial_time=2015-12-15T17:37:19
final_time=2015-12-15T17:37:38
ip_count=19
run=1017
dataset=1
scan=26
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=27.0
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09595E0
qbias_imon=-1.08776E-4
ql1_vset=
ql1_vmon=-8.1923E-1
ql1_imon=1.38705E-8
ql2_vset=
ql2_vmon=-7.99012E-1
ql2_imon=1.96549E-9
ql3_vset=
ql3_vmon=-9.13091E0
ql3_imon=1.65166E-9
ql4_vset=
ql4_vmon=-9.14161E0
ql4_imon=-8.37445E-11
mult1=-9.63202E-9
mult2=-2.67869E-9
rf_tmon=-5.05918E-3
rf_agc=3.32975E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.81741E-3
ql5_imon=1.71078E-9
bslens_vset=-6.2E0
bslens_vmon=-6.68804E0
bslens_imon=2.54326E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19618E1
lens5a_imon=1.97235E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12487E2
lens4a_imon=2.04951E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53863E1
cs_ef1b_imon=2.86305E-5
lens23_vset=-2.05E2
lens23_vmon=-2.046E2
lens23_imon=1.01965E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04864E1
cs_ea1_imon=2.50504E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38731E0
lens1_imon=2.50432E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64596E1
os_ef1alow_imon=2.96324E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04038E1
cs_ea2_imon=1.53524E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84406E1
cs_ef1a_imon=2.94738E-5
olens2_vset=9.7E-1
olens2_vmon=9.70316E-1
olens2_imon=1.2563E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11346E1
os_restr1_imon=4.29418E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15211E1
os_ea1_imon=2.367E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63701E1
os_ef1bup_imon=3.08145E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26213E0
cs_ionrep_imon=1.22165E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91864E2
cs_nozzle_imon=1.9353E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01953E1
cs_anode1_imon=2.97513E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20589E0
olens4_imon=3.26917E-8
tplens_vset=1.4E-1
tplens_vmon=1.5907E0
tplens_imon=-3.62597E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2632E1
iondef3_imon=1.49949E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26591E1
iondef2_imon=1.58939E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02973E2
lens6_imon=2.98378E-4
ql6_vset=1.0E-1
ql6_vmon=9.31263E-2
ql6_imon=4.02489E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2639E0
ionrepsh_imon=1.80317E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33693E1
lens5b_imon=2.17729E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74904E1
cs_ef2b_imon=3.12578E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.26331E0
os_ea2_imon=-6.66986E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0608E2
lens4b_imon=2.00283E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7115E1
cs_ef2a_imon=3.17155E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.10622E0
os_ef2alow_imon=-2.65554E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.81206E-1
os_ef2bup_imon=-5.40537E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10883E1
os_restr2_imon=3.4368E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23099E2
cs_ionfoca_imon=6.2915E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01983E1
cs_anode2_imon=2.24929E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72787E1
iondef1_imon=1.07972E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68166E1
iondef4_imon=1.07692E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71789E1
olens3_imon=4.36786E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82308E-1
olens1_imon=7.41945E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13675E0
cs_ionaccel_imon=-1.86627E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02062E2
cs_ionfocb_imon=1.47093E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56501E1
einzel_imon=7.75632E-6
window_vset=0.0E0
window_vmon=1.72894E-1
window_imon=-1.22116E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82627E2
mask1_imon=2.39091E-4
mask2_vset=0.0E0
mask2_vmon=-1.85918E1
mask2_imon=-6.69758E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9253E3
multa_neg_imon=7.68248E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93713E3
defgrida_imon=6.11098E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50106E3
multb_neg_imon=7.40287E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.42032E0
defgridb_imon=6.07559E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33325E1
os_fil1_imon=9.40078E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07203E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64058E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30864E1
cs_fil1_imon=9.94876E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63477E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66479E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.11662E-2
os_fil2_imon=-2.78009E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.7549E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.38869E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.37679E-1
cs_fil2_imon=-2.45574E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=7.578E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22322E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=1.9917E-1
chamber_ion_pmon=1.16575E-7
chamber_cvt_pmon=2.52169E-3
foreline_cvt_pmon=2.52169E-3
chamber_tmon=1.40055E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.62295E-1
res40_imon=-2.65194E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=158
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	6.0E0	0.0E0	1.47E2	4.1E1	-2.09657E0	-8.19468E-1	-7.98869E-1	-9.13084E0	-9.14207E0	5.6982E-3	9.27448E-2	2.73057E1	-3.26773E1	-3.26561E1	2.67998E1	1.17023E-7	2.51954E-3	2.51954E-3	6.28056E-3	2.01047E-1
2.0E0	2.7E1	0.0E0	3.16E2	1.6E2	-2.09642E0	-8.19349E-1	-7.99251E-1	-9.13091E0	-9.14183E0	5.6982E-3	9.29832E-2	2.73247E1	-3.2634E1	-3.26076E1	2.68142E1	1.17123E-7	2.52276E-3	2.52276E-3	6.3074E-3	2.01391E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09627E0	-8.19802E-1	-7.99012E-1	-9.13091E0	-9.14197E0	5.79357E-3	9.30309E-2	2.73115E1	-3.2659E1	-3.26457E1	2.68128E1	1.16886E-7	2.52139E-3	2.52139E-3	6.32418E-3	2.01708E-1
4.0E0	4.0E0	0.0E0	6.55E2	3.98E2	-2.09557E0	-8.19659E-1	-7.98798E-1	-9.13103E0	-9.14195E0	5.79357E-3	9.28164E-2	2.72737E1	-3.26952E1	-3.26281E1	2.68114E1	1.16769E-7	2.53189E-3	2.53189E-3	6.32328E-3	2.01409E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09627E0	-8.19898E-1	-7.98798E-1	-9.13112E0	-9.14199E0	5.6982E-3	9.30309E-2	2.73191E1	-3.27017E1	-3.264E1	2.68063E1	1.17064E-7	2.52054E-3	2.52054E-3	6.31225E-3	2.00873E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09657E0	-8.19492E-1	-7.98893E-1	-9.13086E0	-9.14207E0	5.8651E-3	9.28879E-2	2.73357E1	-3.2638E1	-3.26795E1	2.67998E1	1.16847E-7	2.52222E-3	2.52222E-3	6.33648E-3	2.0057E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09642E0	-8.1985E-1	-7.98941E-1	-9.13105E0	-9.14211E0	5.81741E-3	9.28402E-2	2.72787E1	-3.26392E1	-3.25912E1	2.68046E1	1.17083E-7	2.52977E-3	2.52977E-3	6.30192E-3	1.98592E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09565E0	-8.19921E-1	-7.99179E-1	-9.13098E0	-9.1419E0	5.98431E-3	9.3174E-2	2.73141E1	-3.26524E1	-3.26338E1	2.6819E1	1.16626E-7	2.52757E-3	2.52757E-3	6.3074E-3	1.98592E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09495E0	-8.19659E-1	-7.99131E-1	-9.13093E0	-9.14195E0	5.76973E-3	9.29117E-2	2.72892E1	-3.2649E1	-3.26219E1	2.68238E1	1.17032E-7	2.53087E-3	2.53087E-3	6.31837E-3	1.99803E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09495E0	-8.1954E-1	-7.99179E-1	-9.13107E0	-9.14214E0	5.74589E-3	9.30548E-2	2.72666E1	-3.26633E1	-3.2596E1	2.68286E1	1.17027E-7	2.52026E-3	2.52026E-3	6.32644E-3	1.99655E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09565E0	-8.19397E-1	-7.99298E-1	-9.13072E0	-9.14199E0	5.8651E-3	9.29117E-2	2.73075E1	-3.26639E1	-3.26506E1	2.68118E1					
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09557E0	-8.19492E-1	-7.9906E-1	-9.13081E0	-9.14171E0	5.60284E-3	9.27925E-2	2.73081E1	-3.26476E1	-3.25858E1	2.68112E1	1.17083E-7	2.5199E-3	2.5199E-3	6.34037E-3	1.9963E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09441E0	-8.19325E-1	-7.99131E-1	-9.13072E0	-9.14187E0	5.76973E-3	9.31263E-2	2.7269E1	-3.26627E1	-3.26434E1	2.68124E1	1.1688E-7	2.52538E-3	2.52538E-3	6.31563E-3	2.00847E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09572E0	-8.19612E-1	-7.99036E-1	-9.13072E0	-9.14202E0	5.79357E-3	9.30071E-2	2.7252E1	-3.26714E1	-3.26596E1	2.67978E1					
1.8E1	3.0E0	0.0E0	7.27E2	5.0E2	-2.09456E0	-8.19397E-1	-7.98893E-1	-9.13033E0	-9.14192E0	5.53131E-3	9.34124E-2	2.73033E1	-3.26554E1	-3.26254E1	2.68184E1	1.16973E-7	2.51954E-3	2.51954E-3	6.30202E-3	2.00021E-1
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.09472E0	-8.19468E-1	-7.98154E-1	-9.13076E0	-9.14173E0	5.74589E-3	9.32217E-2	2.73231E1	-3.26458E1	-3.26404E1	2.68244E1	1.17023E-7	2.52169E-3	2.52169E-3	6.33977E-3	2.00705E-1
2.0E1	6.0E0	0.0E0	8.08E2	5.58E2	-2.09549E0	-8.19373E-1	-7.98702E-1	-9.13074E0	-9.14202E0	5.72205E-3	9.34601E-2	2.73159E1	-3.26825E1	-3.26278E1	2.68202E1	1.16886E-7	2.5225E-3	2.5225E-3	6.31858E-3	2.01174E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09541E0	-8.19206E-1	-7.98965E-1	-9.13064E0	-9.14204E0	5.57899E-3	9.3317E-2	2.73364E1	-3.2675E1	-3.2616E1	2.6825E1	1.17173E-7	2.52169E-3	2.52169E-3	6.31817E-3	1.98491E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09565E0	-8.19349E-1	-7.98774E-1	-9.13105E0	-9.14164E0	5.88894E-3	9.31263E-2	2.73204E1	-3.26579E1	-3.26231E1	2.68233E1	1.16829E-7	2.52318E-3	2.52318E-3	6.33486E-3	1.98419E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09595E0	-8.1923E-1	-7.99012E-1	-9.13091E0	-9.14161E0	5.81741E-3	9.31263E-2	2.72787E1	-3.26591E1	-3.2632E1	2.68166E1	1.16575E-7	2.52169E-3	2.52169E-3	6.31817E-3	1.9917E-1