[Scan]
initial_time=2015-12-15T17:37:45
final_time=2015-12-15T17:38:05
ip_count=19
run=1017
dataset=1
scan=27
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=27.0
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09526E0
qbias_imon=-1.08774E-4
ql1_vset=
ql1_vmon=-8.19421E-1
ql1_imon=1.3813E-8
ql2_vset=
ql2_vmon=-7.9906E-1
ql2_imon=2.02007E-9
ql3_vset=
ql3_vmon=-9.13067E0
ql3_imon=1.37502E-9
ql4_vset=
ql4_vmon=-9.14166E0
ql4_imon=-8.61883E-11
mult1=-9.38939E-9
mult2=-2.7748E-9
rf_tmon=-4.98073E-3
rf_agc=3.26244E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.96046E-3
ql5_imon=1.69683E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66621E0
bslens_imon=2.56095E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.1999E1
lens5a_imon=1.98262E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12516E2
lens4a_imon=2.04937E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53839E1
cs_ef1b_imon=2.86197E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04606E2
lens23_imon=1.02004E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04764E1
cs_ea1_imon=2.49973E-5
lens1_vset=-5.0E0
lens1_vmon=-5.3702E0
lens1_imon=2.56449E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65317E1
os_ef1alow_imon=2.9845E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03891E1
cs_ea2_imon=1.55329E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8449E1
cs_ef1a_imon=2.94198E-5
olens2_vset=9.7E-1
olens2_vmon=9.70292E-1
olens2_imon=1.25926E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11213E1
os_restr1_imon=4.31401E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15158E1
os_ea1_imon=2.36629E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63864E1
os_ef1bup_imon=3.07496E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26979E0
cs_ionrep_imon=1.21457E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91887E2
cs_nozzle_imon=1.9324E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01923E1
cs_anode1_imon=2.99495E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20568E0
olens4_imon=3.26471E-8
tplens_vset=1.4E-1
tplens_vmon=1.57477E0
tplens_imon=-5.00633E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26254E1
iondef3_imon=1.48569E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26738E1
iondef2_imon=1.5678E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02955E2
lens6_imon=2.98342E-4
ql6_vset=1.0E-1
ql6_vmon=9.29832E-2
ql6_imon=4.05635E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26979E0
ionrepsh_imon=1.78937E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33357E1
lens5b_imon=2.16773E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74477E1
cs_ef2b_imon=3.11425E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.29988E0
os_ea2_imon=-7.0238E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06104E2
lens4b_imon=2.00676E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7151E1
cs_ef2a_imon=3.17299E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06297E0
os_ef2alow_imon=-2.56544E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.99827E-1
os_ef2bup_imon=-5.39456E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10979E1
os_restr2_imon=3.43716E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2306E2
cs_ionfoca_imon=6.28796E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01827E1
cs_anode2_imon=2.24965E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73063E1
iondef1_imon=1.09706E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68213E1
iondef4_imon=1.0881E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7179E1
olens3_imon=4.39535E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82165E-1
olens1_imon=7.44282E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12053E0
cs_ionaccel_imon=-1.96719E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02068E2
cs_ionfocb_imon=1.47399E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56339E1
einzel_imon=7.40313E-6
window_vset=0.0E0
window_vmon=1.6028E-1
window_imon=-1.01574E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82595E2
mask1_imon=2.39217E-4
mask2_vset=0.0E0
mask2_vmon=-1.86206E1
mask2_imon=-8.96807E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92611E3
multa_neg_imon=7.2259E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93703E3
defgrida_imon=6.42245E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50097E3
multb_neg_imon=7.2259E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.34355E0
defgridb_imon=6.13222E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33311E1
os_fil1_imon=9.41771E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06921E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6416E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30906E1
cs_fil1_imon=9.94377E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62294E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66831E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.2939E-2
os_fil2_imon=-2.71402E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.92909E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.33174E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34442E-1
cs_fil2_imon=-3.10445E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.61675E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2241E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29703E-3
inlet_lpb_pmon=1.98955E-1
chamber_ion_pmon=1.17102E-7
chamber_cvt_pmon=2.52613E-3
foreline_cvt_pmon=2.52613E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.15153E-1
res40_imon=-2.48976E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=149
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09572E0	-8.19325E-1	-7.98678E-1	-9.13053E0	-9.1418E0	5.6982E-3	9.3174E-2	2.7324E1	-3.26478E1	-3.2616E1	2.68238E1	1.16873E-7	2.51417E-3	2.51417E-3	6.32896E-3	2.01562E-1
2.0E0	3.0E1	0.0E0	3.16E2	1.6E2	-2.09533E0	-8.19659E-1	-7.9906E-1	-9.13064E0	-9.14197E0	5.60284E-3	9.31978E-2	2.73063E1	-3.26444E1	-3.26248E1	2.68207E1	1.16823E-7	2.52061E-3	2.52061E-3	6.32896E-3	2.00192E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09464E0	-8.19445E-1	-7.99108E-1	-9.13081E0	-9.14171E0	5.79357E-3	9.32455E-2	2.7324E1	-3.26608E1	-3.2639E1	2.68041E1	1.17042E-7	2.51693E-3	2.51693E-3	6.31858E-3	1.99224E-1
4.0E0	4.0E0	0.0E0	6.55E2	3.98E2	-2.09541E0	-8.19159E-1	-7.99131E-1	-9.13064E0	-9.14154E0	5.8651E-3	9.28164E-2	2.7321E1	-3.26526E1	-3.259E1	2.68286E1	1.16867E-7	2.52236E-3	2.52236E-3	6.32328E-3	2.00567E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09526E0	-8.19016E-1	-7.99322E-1	-9.13079E0	-9.14195E0	5.72205E-3	9.32217E-2	2.72818E1	-3.26921E1	-3.2604E1	2.68166E1	1.16981E-7	2.52428E-3	2.52428E-3	6.32386E-3	2.00151E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0951E0	-8.19278E-1	-7.99417E-1	-9.13074E0	-9.14171E0	5.57899E-3	9.29356E-2	2.73198E1	-3.26496E1	-3.26337E1	2.68214E1	1.16829E-7	2.52538E-3	2.52538E-3	6.32386E-3	1.99977E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09495E0	-8.19135E-1	-7.99084E-1	-9.13072E0	-9.14176E0	5.67436E-3	9.26256E-2	2.72781E1	-3.26543E1	-3.25809E1	2.68388E1	1.16829E-7	2.52318E-3	2.52318E-3	6.32936E-3	2.00499E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09503E0	-8.19468E-1	-7.98631E-1	-9.13053E0	-9.14221E0	5.43594E-3	9.28879E-2	2.73087E1	-3.26524E1	-3.26591E1	2.684E1	1.17083E-7	2.51662E-3	2.51662E-3	6.32386E-3	2.00847E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09456E0	-8.19325E-1	-7.99203E-1	-9.13081E0	-9.14164E0	5.8651E-3	9.29117E-2	2.73063E1	-3.26658E1	-3.26676E1	2.68196E1	1.1688E-7	2.52318E-3	2.52318E-3	6.31837E-3	2.00325E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09533E0	-8.19016E-1	-7.99179E-1	-9.13074E0	-9.14171E0	6.10352E-3	9.30548E-2	2.73027E1	-3.26349E1	-3.26242E1	2.6828E1	1.16886E-7	2.51915E-3	2.51915E-3	6.3074E-3	2.01352E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09526E0	-8.1923E-1	-7.98655E-1	-9.13067E0	-9.14183E0	5.88894E-3	9.29356E-2	2.73254E1	-3.26944E1	-3.26254E1	2.68123E1	1.16923E-7	2.52276E-3	2.52276E-3	6.3074E-3	1.9934E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09526E0	-8.18825E-1	-7.98798E-1	-9.13064E0	-9.14154E0	5.55515E-3	9.31025E-2	2.73544E1	-3.26834E1	-3.26216E1	2.67907E1	1.16813E-7	2.52405E-3	2.52405E-3	6.323E-3	2.0027E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09472E0	-8.18872E-1	-7.98941E-1	-9.1305E0	-9.14171E0	5.74589E-3	9.33886E-2	2.7288E1	-3.2698E1	-3.26272E1	2.68007E1	1.16847E-7	2.52338E-3	2.52338E-3	6.3016E-3	2.00386E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09426E0	-8.19016E-1	-7.99203E-1	-9.13033E0	-9.14171E0	5.88894E-3	9.3317E-2	2.73393E1	-3.26777E1	-3.26482E1	2.68052E1	1.16873E-7	2.51525E-3	2.51525E-3	6.30202E-3	2.00021E-1
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09426E0	-8.18944E-1	-7.99131E-1	-9.13074E0	-9.14145E0	5.65052E-3	9.32455E-2	2.73033E1	-3.26573E1	-3.2629E1	2.68238E1	1.16778E-7	2.52428E-3	2.52428E-3	6.33486E-3	2.00151E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09449E0	-8.19302E-1	-7.99084E-1	-9.1306E0	-9.14173E0	5.67436E-3	9.28879E-2	2.73225E1	-3.26819E1	-3.26254E1	2.68262E1	1.1688E-7	2.52099E-3	2.52099E-3	6.28552E-3	1.99803E-1
2.0E1	2.0E0	0.0E0	8.08E2	5.58E2	-2.09464E0	-8.19325E-1	-7.98965E-1	-9.1305E0	-9.14183E0	5.43594E-3	9.30786E-2	2.73315E1	-3.26464E1	-3.2608E1	2.6792E1	1.16829E-7	2.5188E-3	2.5188E-3	6.33486E-3	2.00325E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09518E0	-8.1923E-1	-7.99489E-1	-9.13045E0	-9.14176E0	5.67436E-3	9.29117E-2	2.73081E1	-3.26801E1	-3.26452E1	2.68076E1	1.1688E-7	2.52099E-3	2.52099E-3	6.29098E-3	2.00847E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09441E0	-8.19206E-1	-7.99394E-1	-9.13048E0	-9.14183E0	5.76973E-3	9.2864E-2	2.73079E1	-3.26522E1	-3.26266E1	2.68366E1	1.16923E-7	2.51847E-3	2.51847E-3	6.30202E-3	2.00192E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09526E0	-8.19421E-1	-7.9906E-1	-9.13067E0	-9.14166E0	5.96046E-3	9.29832E-2	2.73063E1	-3.26738E1	-3.26254E1	2.68213E1	1.17102E-7	2.52613E-3	2.52613E-3	6.29703E-3	1.98955E-1