[Scan]
initial_time=2015-12-15T17:38:12
final_time=2015-12-15T17:38:31
ip_count=19
run=1017
dataset=1
scan=28
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=27.0
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09688E0
qbias_imon=-1.08837E-4
ql1_vset=
ql1_vmon=-8.18944E-1
ql1_imon=1.37744E-8
ql2_vset=
ql2_vmon=-7.98893E-1
ql2_imon=2.04523E-9
ql3_vset=
ql3_vmon=-9.13053E0
ql3_imon=1.20347E-9
ql4_vset=
ql4_vmon=-9.14187E0
ql4_imon=-6.18577E-11
mult1=-9.07816E-9
mult2=-2.66272E-9
rf_tmon=-5.13728E-3
rf_agc=3.23783E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.74589E-3
ql5_imon=1.68178E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65088E0
bslens_imon=2.72731E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19954E1
lens5a_imon=1.96492E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12483E2
lens4a_imon=2.04682E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53534E1
cs_ef1b_imon=2.85741E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04606E2
lens23_imon=1.01838E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04882E1
cs_ea1_imon=2.48557E-5
lens1_vset=-5.0E0
lens1_vmon=-5.3643E0
lens1_imon=2.6282E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64904E1
os_ef1alow_imon=2.96375E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03796E1
cs_ea2_imon=1.54515E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84394E1
cs_ef1a_imon=2.9502E-5
olens2_vset=9.7E-1
olens2_vmon=9.70531E-1
olens2_imon=1.2606E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11251E1
os_restr1_imon=4.30416E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15477E1
os_ea1_imon=2.38009E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63954E1
os_ef1bup_imon=3.07844E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.27864E0
cs_ionrep_imon=1.1728E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91883E2
cs_nozzle_imon=1.93179E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01815E1
cs_anode1_imon=2.99329E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20575E0
olens4_imon=3.27448E-8
tplens_vset=1.4E-1
tplens_vmon=1.56652E0
tplens_imon=-4.40464E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26248E1
iondef3_imon=1.48781E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26819E1
iondef2_imon=1.58019E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02939E2
lens6_imon=2.98342E-4
ql6_vset=1.0E-1
ql6_vmon=9.31025E-2
ql6_imon=4.01999E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27628E0
ionrepsh_imon=1.7968E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33622E1
lens5b_imon=2.16915E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74849E1
cs_ef2b_imon=3.11632E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.3164E0
os_ea2_imon=-7.20077E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06079E2
lens4b_imon=2.00368E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71327E1
cs_ef2a_imon=3.17748E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08294E0
os_ef2alow_imon=-2.7692E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.80434E-1
os_ef2bup_imon=-5.35131E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11013E1
os_restr2_imon=3.43222E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2307E2
cs_ionfoca_imon=6.3053E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02226E1
cs_anode2_imon=2.26245E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73003E1
iondef1_imon=1.09989E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6819E1
iondef4_imon=1.08642E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71791E1
olens3_imon=4.41135E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82451E-1
olens1_imon=7.44743E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.1591E0
cs_ionaccel_imon=-1.98726E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02069E2
cs_ionfocb_imon=1.47219E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56457E1
einzel_imon=7.50365E-6
window_vset=0.0E0
window_vmon=1.40072E-1
window_imon=-1.08717E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82626E2
mask1_imon=2.39122E-4
mask2_vset=0.0E0
mask2_vmon=-1.86217E1
mask2_imon=-7.15322E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92632E3
multa_neg_imon=7.36747E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93717E3
defgrida_imon=6.7056E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50134E3
multb_neg_imon=7.01353E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.42623E0
defgridb_imon=6.0048E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3332E1
os_fil1_imon=9.41204E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06901E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64304E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30873E1
cs_fil1_imon=9.94925E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63131E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66572E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.12929E-2
os_fil2_imon=-2.84874E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.9529E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.25201E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36019E-1
cs_fil2_imon=-2.50122E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.50112E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22275E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.35059E-3
inlet_lpb_pmon=2.01562E-1
chamber_ion_pmon=1.16873E-7
chamber_cvt_pmon=2.52061E-3
foreline_cvt_pmon=2.52061E-3
chamber_tmon=1.40055E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.07281E-1
res40_imon=-2.40777E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=162
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09518E0	-8.19111E-1	-7.99084E-1	-9.13055E0	-9.14218E0	5.84126E-3	9.30548E-2	2.73375E1	-3.26873E1	-3.26446E1	2.67968E1	1.16973E-7	2.51096E-3	2.51096E-3	6.32356E-3	1.9968E-1
2.0E0	3.7E1	0.0E0	3.16E2	1.6E2	-2.0951E0	-8.1923E-1	-7.99036E-1	-9.13057E0	-9.1418E0	6.19888E-3	9.28879E-2	2.73189E1	-3.26663E1	-3.26134E1	2.67998E1	1.17023E-7	2.51632E-3	2.51632E-3	6.34518E-3	2.00876E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09588E0	-8.19087E-1	-7.99084E-1	-9.13081E0	-9.14178E0	6.22272E-3	9.28164E-2	2.73034E1	-3.26498E1	-3.26451E1	2.6807E1	1.17042E-7	2.51804E-3	2.51804E-3	6.31858E-3	2.0064E-1
4.0E0	7.0E0	0.0E0	6.55E2	3.98E2	-2.09549E0	-8.19278E-1	-7.99179E-1	-9.13064E0	-9.14185E0	5.76973E-3	9.28879E-2	2.72859E1	-3.26585E1	-3.26032E1	2.68076E1	1.16965E-7	2.52025E-3	2.52025E-3	6.32328E-3	1.99729E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09449E0	-8.19206E-1	-7.99203E-1	-9.13067E0	-9.14216E0	6.07967E-3	9.27687E-2	2.72797E1	-3.26431E1	-3.26614E1	2.681E1	1.16677E-7	2.51552E-3	2.51552E-3	6.34037E-3	1.99456E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0948E0	-8.18849E-1	-7.98917E-1	-9.13088E0	-9.14187E0	5.88894E-3	9.28879E-2	2.73195E1	-3.26591E1	-3.2614E1	2.68088E1	1.17023E-7	2.51632E-3	2.51632E-3	6.30202E-3	1.9934E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09565E0	-8.18992E-1	-7.99012E-1	-9.13081E0	-9.14197E0	6.03199E-3	9.31501E-2	2.73183E1	-3.26434E1	-3.2611E1	2.67873E1	1.17032E-7	2.5188E-3	2.5188E-3	6.31288E-3	1.99803E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0951E0	-8.19087E-1	-7.98821E-1	-9.13074E0	-9.14183E0	6.12736E-3	9.2864E-2	2.73153E1	-3.26849E1	-3.26284E1	2.68124E1	1.17032E-7	2.51662E-3	2.51662E-3	6.32936E-3	2.00499E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09557E0	-8.19111E-1	-7.98845E-1	-9.1306E0	-9.14171E0	5.98431E-3	9.28879E-2	2.72892E1	-3.26543E1	-3.26354E1	2.68034E1	1.16923E-7	2.51954E-3	2.51954E-3	6.32356E-3	2.00876E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09526E0	-8.18849E-1	-7.98726E-1	-9.13081E0	-9.14195E0	6.10352E-3	9.26971E-2	2.73015E1	-3.2644E1	-3.26356E1	2.6798E1	1.17236E-7	2.52099E-3	2.52099E-3	6.32936E-3	2.00499E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09588E0	-8.18849E-1	-7.98631E-1	-9.13081E0	-9.14195E0	6.05583E-3	9.29832E-2	2.73075E1	-3.26735E1	-3.26302E1	2.68142E1	1.16829E-7	2.52867E-3	2.52867E-3	6.30192E-3	2.00151E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09557E0	-8.19087E-1	-7.98488E-1	-9.13079E0	-9.14218E0	5.81741E-3	9.31025E-2	2.72644E1	-3.26148E1	-3.26537E1	2.6818E1	1.1693E-7	2.5199E-3	2.5199E-3	6.30192E-3	1.99977E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09495E0	-8.18896E-1	-7.98488E-1	-9.1306E0	-9.14185E0	5.55515E-3	9.26971E-2	2.72883E1	-3.26428E1	-3.26134E1	2.68176E1	1.16977E-7	2.51376E-3	2.51376E-3	6.32099E-3	1.99397E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09588E0	-8.19063E-1	-7.98655E-1	-9.13079E0	-9.14187E0	5.79357E-3	9.29356E-2	2.73315E1	-3.26482E1	-3.262E1	2.6804E1					
1.8E1	3.0E0	0.0E0	7.27E2	5.0E2	-2.09603E0	-8.19087E-1	-7.9875E-1	-9.13095E0	-9.14197E0	6.12736E-3	9.29594E-2	2.72672E1	-3.26524E1	-3.26176E1	2.6818E1	1.16981E-7	2.5199E-3	2.5199E-3	6.3074E-3	1.99456E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09634E0	-8.19063E-1	-7.98559E-1	-9.13086E0	-9.14202E0	5.81741E-3	9.28164E-2	2.73057E1	-3.26633E1	-3.26296E1	2.681E1	1.16973E-7	2.51954E-3	2.51954E-3	6.31278E-3	1.9985E-1
2.0E1	4.0E0	0.0E0	8.08E2	5.58E2	-2.09565E0	-8.18992E-1	-7.98607E-1	-9.131E0	-9.14195E0	5.88894E-3	9.30548E-2	2.72874E1	-3.26785E1	-3.26201E1	2.681E1	1.16835E-7	2.52362E-3	2.52362E-3	6.31858E-3	2.00463E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09603E0	-8.18896E-1	-7.99036E-1	-9.13103E0	-9.14221E0	5.84126E-3	9.27925E-2	2.73117E1	-3.26597E1	-3.26567E1	2.68172E1	1.16873E-7	2.51954E-3	2.51954E-3	6.32356E-3	2.00021E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09627E0	-8.18729E-1	-7.98798E-1	-9.13079E0	-9.14192E0	5.88894E-3	9.31263E-2	2.72992E1	-3.2649E1	-3.26413E1	2.68146E1	1.16823E-7	2.51954E-3	2.51954E-3	6.32896E-3	2.02079E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09688E0	-8.18944E-1	-7.98893E-1	-9.13053E0	-9.14187E0	5.74589E-3	9.31025E-2	2.73003E1	-3.26819E1	-3.26248E1	2.6819E1	1.16873E-7	2.52061E-3	2.52061E-3	6.35059E-3	2.01562E-1