[Scan]
initial_time=2015-12-15T17:38:38
final_time=2015-12-15T17:38:58
ip_count=19
run=1017
dataset=1
scan=29
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=27.0
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09572E0
qbias_imon=-1.0882E-4
ql1_vset=
ql1_vmon=-8.19659E-1
ql1_imon=1.37607E-8
ql2_vset=
ql2_vmon=-7.98726E-1
ql2_imon=2.03407E-9
ql3_vset=
ql3_vmon=-9.13076E0
ql3_imon=1.07661E-9
ql4_vset=
ql4_vmon=-9.14121E0
ql4_imon=-4.95315E-11
mult1=-9.42843E-9
mult2=-2.69974E-9
rf_tmon=-5.78956E-3
rf_agc=3.26838E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.8651E-3
ql5_imon=1.67046E-9
bslens_vset=-6.2E0
bslens_vmon=-6.6403E0
bslens_imon=2.51252E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20073E1
lens5a_imon=1.9892E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12496E2
lens4a_imon=2.04916E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53718E1
cs_ef1b_imon=2.8735E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04617E2
lens23_imon=1.02161E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0503E1
cs_ea1_imon=2.50795E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38878E0
lens1_imon=2.8658E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64777E1
os_ef1alow_imon=2.9827E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03967E1
cs_ea2_imon=1.54976E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8434E1
cs_ef1a_imon=2.94125E-5
olens2_vset=9.7E-1
olens2_vmon=9.70554E-1
olens2_imon=1.26388E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11352E1
os_restr1_imon=4.30211E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15342E1
os_ea1_imon=2.35258E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.639E1
os_ef1bup_imon=3.07424E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23167E0
cs_ionrep_imon=1.20404E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91847E2
cs_nozzle_imon=1.93539E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02007E1
cs_anode1_imon=2.99099E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2058E0
olens4_imon=3.27414E-8
tplens_vset=1.4E-1
tplens_vmon=1.59337E0
tplens_imon=-5.58903E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26384E1
iondef3_imon=1.51082E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26708E1
iondef2_imon=1.56814E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02961E2
lens6_imon=2.98386E-4
ql6_vset=1.0E-1
ql6_vmon=9.31501E-2
ql6_imon=4.08349E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28394E0
ionrepsh_imon=1.79417E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33976E1
lens5b_imon=2.16656E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74585E1
cs_ef2b_imon=3.12722E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.28755E0
os_ea2_imon=-6.70656E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06092E2
lens4b_imon=2.00536E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7139E1
cs_ef2a_imon=3.1838E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.03834E0
os_ef2alow_imon=-2.65194E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.76401E-1
os_ef2bup_imon=-5.32969E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10925E1
os_restr2_imon=3.435E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23078E2
cs_ionfoca_imon=6.30541E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02049E1
cs_anode2_imon=2.26083E-5
iondef1_vset=2.763E1
iondef1_vmon=2.7311E1
iondef1_imon=1.09409E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67804E1
iondef4_imon=1.07656E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71791E1
olens3_imon=4.42114E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82189E-1
olens1_imon=7.4505E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13975E0
cs_ionaccel_imon=-1.93115E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0206E2
cs_ionfocb_imon=1.47172E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56207E1
einzel_imon=7.73109E-6
window_vset=0.0E0
window_vmon=1.72293E-1
window_imon=-1.01934E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82622E2
mask1_imon=2.38983E-4
mask2_vset=0.0E0
mask2_vmon=-1.86248E1
mask2_imon=-7.56253E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92671E3
multa_neg_imon=7.57748E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93719E3
defgrida_imon=6.60053E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50112E3
multb_neg_imon=7.20617E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.50382E0
defgridb_imon=5.88675E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33344E1
os_fil1_imon=9.42672E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07257E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64315E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30839E1
cs_fil1_imon=9.9502E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62612E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66593E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.30586E-2
os_fil2_imon=-2.73805E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.72486E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.29855E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3496E-1
cs_fil2_imon=-2.59389E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.89945E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22274E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32896E-3
inlet_lpb_pmon=1.9951E-1
chamber_ion_pmon=1.17023E-7
chamber_cvt_pmon=2.52061E-3
foreline_cvt_pmon=2.52061E-3
chamber_tmon=1.40055E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.8512E-1
res40_imon=-2.5258E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=212
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09642E0	-8.19039E-1	-7.98678E-1	-9.13067E0	-9.14197E0	5.8651E-3	9.33409E-2	2.73794E1	-3.2688E1	-3.26419E1	2.67899E1	1.16973E-7	2.5131E-3	2.5131E-3	6.32356E-3	1.99E-1
2.0E0	2.8E1	0.0E0	3.16E2	1.6E2	-2.0958E0	-8.18849E-1	-7.9844E-1	-9.13062E0	-9.14166E0	5.84126E-3	9.3317E-2	2.72941E1	-3.26707E1	-3.26376E1	2.6807E1	1.16778E-7	2.52757E-3	2.52757E-3	6.32386E-3	1.99283E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09572E0	-8.19159E-1	-7.98726E-1	-9.13086E0	-9.14204E0	5.93662E-3	9.29832E-2	2.73086E1	-3.26718E1	-3.26335E1	2.67885E1	1.1693E-7	2.51771E-3	2.51771E-3	6.32936E-3	2.00151E-1
4.0E0	1.0E0	0.0E0	6.55E2	3.98E2	-2.09595E0	-8.18992E-1	-7.98893E-1	-9.13084E0	-9.14195E0	6.1512E-3	9.31263E-2	2.7337E1	-3.26638E1	-3.26484E1	2.68214E1	1.16923E-7	2.51739E-3	2.51739E-3	6.33436E-3	1.98322E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09572E0	-8.18896E-1	-7.98941E-1	-9.13107E0	-9.14185E0	6.05583E-3	9.32693E-2	2.72973E1	-3.26512E1	-3.26236E1	2.68111E1	1.16774E-7	2.52061E-3	2.52061E-3	6.33977E-3	1.9934E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09657E0	-8.19063E-1	-7.98583E-1	-9.13081E0	-9.14171E0	6.10352E-3	9.32217E-2	2.73311E1	-3.26844E1	-3.26596E1	2.68076E1	1.17083E-7	2.52428E-3	2.52428E-3	6.34037E-3	2.00499E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09627E0	-8.19349E-1	-7.98488E-1	-9.13069E0	-9.14176E0	6.1512E-3	9.30786E-2	2.72993E1	-3.26532E1	-3.26249E1	2.68192E1	1.16823E-7	2.51847E-3	2.51847E-3	6.3074E-3	2.00876E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09673E0	-8.19302E-1	-7.98821E-1	-9.13086E0	-9.14168E0	6.12736E-3	9.2864E-2	2.72794E1	-3.2637E1	-3.26346E1	2.68282E1	1.16769E-7	2.52025E-3	2.52025E-3	6.33388E-3	1.99061E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09665E0	-8.19612E-1	-7.99012E-1	-9.13064E0	-9.14187E0	6.17504E-3	9.27448E-2	2.72877E1	-3.26392E1	-3.26326E1	2.67787E1	1.1699E-7	2.5225E-3	2.5225E-3	6.32418E-3	1.98872E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09773E0	-8.19278E-1	-7.98965E-1	-9.13067E0	-9.14176E0	6.05583E-3	9.29117E-2	2.73003E1	-3.26603E1	-3.26206E1	2.68166E1	1.17032E-7	2.52264E-3	2.52264E-3	6.31014E-3	1.9937E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09611E0	-8.19254E-1	-7.98845E-1	-9.13081E0	-9.14164E0	6.29425E-3	9.26495E-2	2.73104E1	-3.26679E1	-3.26136E1	2.68148E1					
1.5E1	1.0E0	0.0E0	6.06E2	4.11E2	-2.0965E0	-8.1923E-1	-7.99108E-1	-9.1306E0	-9.1418E0	6.1512E-3	9.3174E-2	2.73165E1	-3.26512E1	-3.26272E1	2.67986E1	1.16724E-7	2.52169E-3	2.52169E-3	6.31278E-3	2.00876E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09634E0	-8.19254E-1	-7.98845E-1	-9.13072E0	-9.14185E0	5.98431E-3	9.30071E-2	2.73183E1	-3.26855E1	-3.26296E1	2.68232E1	1.16626E-7	2.5188E-3	2.5188E-3	6.30192E-3	2.00673E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09619E0	-8.19278E-1	-7.98655E-1	-9.13086E0	-9.14156E0	5.88894E-3	9.31263E-2	2.73285E1	-3.26699E1	-3.26182E1	2.6789E1	1.17083E-7	2.5188E-3	2.5188E-3	6.29098E-3	2.00151E-1
1.8E1	3.0E0	0.0E0	7.27E2	5.0E2	-2.09588E0	-8.1923E-1	-7.98845E-1	-9.13081E0	-9.14199E0	5.74589E-3	9.29832E-2	2.72937E1	-3.26759E1	-3.2644E1	2.6822E1	1.16829E-7	2.52099E-3	2.52099E-3	6.30192E-3	2.00673E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09565E0	-8.19087E-1	-7.98893E-1	-9.13072E0	-9.14183E0	5.91278E-3	9.31025E-2	2.73159E1	-3.26567E1	-3.26416E1	2.6819E1	1.17185E-7	2.5188E-3	2.5188E-3	6.33486E-3	2.01022E-1
2.0E1	3.0E0	0.0E0	8.08E2	5.58E2	-2.09526E0	-8.19206E-1	-7.98941E-1	-9.13084E0	-9.1418E0	6.34193E-3	9.32693E-2	2.72799E1	-3.26512E1	-3.26567E1	2.681E1	1.17083E-7	2.52538E-3	2.52538E-3	6.31288E-3	1.99803E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09495E0	-8.18968E-1	-7.98965E-1	-9.13072E0	-9.14159E0	5.98431E-3	9.28879E-2	2.73128E1	-3.26933E1	-3.25894E1	2.67978E1	1.16774E-7	2.52492E-3	2.52492E-3	6.31278E-3	2.00534E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09611E0	-8.18968E-1	-7.98559E-1	-9.13091E0	-9.14152E0	5.8651E-3	9.31263E-2	2.73423E1	-3.26549E1	-3.26419E1	2.67986E1	1.16873E-7	2.52276E-3	2.52276E-3	6.31817E-3	2.00021E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09572E0	-8.19659E-1	-7.98726E-1	-9.13076E0	-9.14121E0	5.8651E-3	9.31501E-2	2.7311E1	-3.26708E1	-3.26384E1	2.67804E1	1.17023E-7	2.52061E-3	2.52061E-3	6.32896E-3	1.9951E-1