[Scan]
initial_time=2015-12-15T17:39:05
final_time=2015-12-15T17:39:24
ip_count=19
run=1017
dataset=1
scan=30
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=27.0
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09572E0
qbias_imon=-1.08825E-4
ql1_vset=
ql1_vmon=-8.18825E-1
ql1_imon=1.37188E-8
ql2_vset=
ql2_vmon=-7.98988E-1
ql2_imon=1.96055E-9
ql3_vset=
ql3_vmon=-9.13074E0
ql3_imon=9.85765E-10
ql4_vset=
ql4_vmon=-9.14185E0
ql4_imon=-6.02484E-11
mult1=-9.523E-9
mult2=-2.66446E-9
rf_tmon=-5.84265E-3
rf_agc=3.25068E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=6.12736E-3
ql5_imon=1.68794E-9
bslens_vset=-6.2E0
bslens_vmon=-6.6581E0
bslens_imon=2.4696E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20056E1
lens5a_imon=1.97215E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12489E2
lens4a_imon=2.05056E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53983E1
cs_ef1b_imon=2.8598E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04649E2
lens23_imon=1.02022E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05123E1
cs_ea1_imon=2.52016E-5
lens1_vset=-5.0E0
lens1_vmon=-5.3646E0
lens1_imon=2.71569E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64927E1
os_ef1alow_imon=2.9618E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03837E1
cs_ea2_imon=1.5347E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84418E1
cs_ef1a_imon=2.94053E-5
olens2_vset=9.7E-1
olens2_vmon=9.70626E-1
olens2_imon=1.26166E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11304E1
os_restr1_imon=4.30031E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1544E1
os_ea1_imon=2.37288E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63575E1
os_ef1bup_imon=3.08469E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23679E0
cs_ionrep_imon=1.18834E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91892E2
cs_nozzle_imon=1.93442E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01917E1
cs_anode1_imon=2.98775E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20597E0
olens4_imon=3.26636E-8
tplens_vset=1.4E-1
tplens_vmon=1.5845E0
tplens_imon=-3.62263E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26231E1
iondef3_imon=1.49393E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26756E1
iondef2_imon=1.55086E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02921E2
lens6_imon=2.98364E-4
ql6_vset=1.0E-1
ql6_vmon=9.29832E-2
ql6_imon=4.02213E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27658E0
ionrepsh_imon=1.77896E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33272E1
lens5b_imon=2.19033E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74531E1
cs_ef2b_imon=3.1265E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.30719E0
os_ea2_imon=-7.03849E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06109E2
lens4b_imon=2.00424E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7112E1
cs_ef2a_imon=3.17191E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07979E0
os_ef2alow_imon=-2.69158E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.87813E-1
os_ef2bup_imon=-5.45222E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10823E1
os_restr2_imon=3.43536E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2308E2
cs_ionfoca_imon=6.31361E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01437E1
cs_anode2_imon=2.26371E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73175E1
iondef1_imon=1.10239E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67787E1
iondef4_imon=1.07728E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71789E1
olens3_imon=4.42294E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.8238E-1
olens1_imon=7.44343E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14155E0
cs_ionaccel_imon=-1.88069E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02061E2
cs_ionfocb_imon=1.47053E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56237E1
einzel_imon=7.68063E-6
window_vset=0.0E0
window_vmon=1.84306E-1
window_imon=-1.09863E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82621E2
mask1_imon=2.39185E-4
mask2_vset=0.0E0
mask2_vmon=-1.86158E1
mask2_imon=-8.31936E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92617E3
multa_neg_imon=7.38403E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93714E3
defgrida_imon=6.82207E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50119E3
multb_neg_imon=7.22242E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.36678E0
defgridb_imon=6.15726E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33358E1
os_fil1_imon=9.41123E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07035E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64301E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30899E1
cs_fil1_imon=9.95741E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62996E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66621E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.20001E-2
os_fil2_imon=-2.68399E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.90506E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.25755E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.37032E-1
cs_fil2_imon=-2.76207E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.65919E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22349E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=2.00534E-1
chamber_ion_pmon=1.17023E-7
chamber_cvt_pmon=2.52276E-3
foreline_cvt_pmon=2.52276E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.98335E-1
res40_imon=-2.64833E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=182
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	5.0E0	0.0E0	1.47E2	4.1E1	-2.09627E0	-8.18682E-1	-7.98702E-1	-9.13072E0	-9.14166E0	5.98431E-3	9.29117E-2	2.73381E1	-3.26626E1	-3.26148E1	2.68112E1	1.16727E-7	2.52318E-3	2.52318E-3	6.31288E-3	1.99803E-1
2.0E0	2.7E1	0.0E0	3.16E2	1.6E2	-2.09557E0	-8.18563E-1	-7.98702E-1	-9.13069E0	-9.1414E0	6.38962E-3	9.27448E-2	2.73009E1	-3.26675E1	-3.26236E1	2.68256E1	1.16674E-7	2.51525E-3	2.51525E-3	6.31817E-3	1.98661E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09518E0	-8.18515E-1	-7.98702E-1	-9.13067E0	-9.14204E0	6.27041E-3	9.31025E-2	2.72974E1	-3.26661E1	-3.2659E1	2.67968E1	1.1699E-7	2.5225E-3	2.5225E-3	6.29067E-3	1.99577E-1
4.0E0	6.0E0	0.0E0	6.55E2	3.98E2	-2.09603E0	-8.18515E-1	-7.98774E-1	-9.13041E0	-9.14183E0	6.24657E-3	9.29594E-2	2.72962E1	-3.26537E1	-3.26514E1	2.68204E1	1.16973E-7	2.51739E-3	2.51739E-3	6.31817E-3	1.9934E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09526E0	-8.18539E-1	-7.98893E-1	-9.13072E0	-9.14166E0	6.24657E-3	9.30548E-2	2.72984E1	-3.26572E1	-3.26083E1	2.67957E1	1.16873E-7	2.52169E-3	2.52169E-3	6.29128E-3	1.99E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09572E0	-8.18729E-1	-7.98774E-1	-9.13076E0	-9.14176E0	6.38962E-3	9.26971E-2	2.73105E1	-3.26819E1	-3.26314E1	2.68123E1	1.17042E-7	2.51915E-3	2.51915E-3	6.30182E-3	1.99401E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09603E0	-8.1861E-1	-7.98655E-1	-9.13079E0	-9.14168E0	6.1512E-3	9.27687E-2	2.73157E1	-3.26378E1	-3.26089E1	2.68166E1	1.17223E-7	2.51847E-3	2.51847E-3	6.31817E-3	1.99E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09642E0	-8.18729E-1	-7.98535E-1	-9.13088E0	-9.14209E0	6.10352E-3	9.28402E-2	2.73021E1	-3.2641E1	-3.2632E1	2.6807E1	1.1693E-7	2.51552E-3	2.51552E-3	6.31837E-3	1.99456E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09557E0	-8.18706E-1	-7.98988E-1	-9.13107E0	-9.14207E0	6.1512E-3	9.27925E-2	2.72847E1	-3.26681E1	-3.26272E1	2.68124E1	1.1688E-7	2.52318E-3	2.52318E-3	6.31837E-3	1.98937E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09557E0	-8.19016E-1	-7.98821E-1	-9.13098E0	-9.14199E0	6.10352E-3	9.28402E-2	2.73139E1	-3.26644E1	-3.26296E1	2.68172E1	1.17083E-7	2.52099E-3	2.52099E-3	6.32386E-3	1.98592E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09634E0	-8.18658E-1	-7.98631E-1	-9.13103E0	-9.14178E0	5.84126E-3	9.2721E-2	2.73259E1	-3.26842E1	-3.25954E1	2.6786E1	1.16823E-7	2.52815E-3	2.52815E-3	6.31817E-3	1.9883E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0968E0	-8.18634E-1	-7.98988E-1	-9.1311E0	-9.14176E0	6.41346E-3	9.29117E-2	2.73207E1	-3.26693E1	-3.2635E1	2.68118E1	1.16938E-7	2.51804E-3	2.51804E-3	6.32978E-3	1.99931E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09642E0	-8.18968E-1	-7.99012E-1	-9.13064E0	-9.14197E0	6.34193E-3	9.28879E-2	2.73594E1	-3.26832E1	-3.26266E1	2.67885E1	1.16923E-7	2.52061E-3	2.52061E-3	6.30202E-3	2.01562E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09572E0	-8.18658E-1	-7.9906E-1	-9.13072E0	-9.14178E0	6.55651E-3	9.30548E-2	2.73075E1	-3.26711E1	-3.26831E1	2.68119E1	1.16727E-7	2.51552E-3	2.51552E-3	6.32386E-3	2.02424E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.0951E0	-8.18872E-1	-7.99108E-1	-9.13062E0	-9.14204E0	6.19888E-3	9.30071E-2	2.72947E1	-3.2675E1	-3.26334E1	2.68238E1	1.16727E-7	2.52209E-3	2.52209E-3	6.3074E-3	2.01722E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09533E0	-8.18706E-1	-7.99036E-1	-9.13084E0	-9.14202E0	5.96046E-3	9.30786E-2	2.73123E1	-3.26579E1	-3.2626E1	2.6786E1	1.1688E-7	2.52428E-3	2.52428E-3	6.32936E-3	2.00847E-1
2.0E1	3.0E0	0.0E0	8.08E2	5.58E2	-2.09503E0	-8.18825E-1	-7.98798E-1	-9.13093E0	-9.14211E0	5.55515E-3	9.29117E-2	2.73296E1	-3.26414E1	-3.26419E1	2.68117E1	1.16835E-7	2.5225E-3	2.5225E-3	6.30182E-3	1.99931E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09565E0	-8.18825E-1	-7.98774E-1	-9.13091E0	-9.14233E0	6.27041E-3	9.29356E-2	2.73069E1	-3.27184E1	-3.2574E1	2.68094E1	1.16909E-7	2.52509E-3	2.52509E-3	6.323E-3	1.99611E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09565E0	-8.18563E-1	-7.98631E-1	-9.13093E0	-9.14209E0	6.10352E-3	9.2721E-2	2.73027E1	-3.26825E1	-3.2626E1	2.68016E1	1.16938E-7	2.52027E-3	2.52027E-3	6.33538E-3	1.99224E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09572E0	-8.18825E-1	-7.98988E-1	-9.13074E0	-9.14185E0	6.12736E-3	9.29832E-2	2.73175E1	-3.26756E1	-3.26231E1	2.67787E1	1.17023E-7	2.52276E-3	2.52276E-3	6.31817E-3	2.00534E-1