[Scan]
initial_time=2015-12-15T17:39:32
final_time=2015-12-15T17:39:51
ip_count=19
run=1017
dataset=1
scan=31
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=27.0
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09557E0
qbias_imon=-1.08814E-4
ql1_vset=
ql1_vmon=-8.18372E-1
ql1_imon=1.37969E-8
ql2_vset=
ql2_vmon=-7.99155E-1
ql2_imon=2.04214E-9
ql3_vset=
ql3_vmon=-9.13107E0
ql3_imon=9.0667E-10
ql4_vset=
ql4_vmon=-9.14207E0
ql4_imon=-2.74062E-11
mult1=-9.97222E-9
mult2=-2.54099E-9
rf_tmon=-4.22632E-3
rf_agc=3.40524E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=6.05583E-3
ql5_imon=1.71433E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66433E0
bslens_imon=2.44042E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19947E1
lens5a_imon=1.98307E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12532E2
lens4a_imon=2.05172E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53802E1
cs_ef1b_imon=2.85548E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04634E2
lens23_imon=1.02056E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04868E1
cs_ea1_imon=2.50363E-5
lens1_vset=-5.0E0
lens1_vmon=-5.36355E0
lens1_imon=2.4981E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64416E1
os_ef1alow_imon=2.98198E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03792E1
cs_ea2_imon=1.5512E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8452E1
cs_ef1a_imon=2.92648E-5
olens2_vset=9.7E-1
olens2_vmon=9.70674E-1
olens2_imon=1.25782E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11532E1
os_restr1_imon=4.30211E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15732E1
os_ea1_imon=2.35835E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63719E1
os_ef1bup_imon=3.06811E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24789E0
cs_ionrep_imon=1.20656E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91899E2
cs_nozzle_imon=1.93478E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01731E1
cs_anode1_imon=2.99099E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20556E0
olens4_imon=3.2722E-8
tplens_vset=1.4E-1
tplens_vmon=1.59397E0
tplens_imon=-4.50754E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2649E1
iondef3_imon=1.49136E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26484E1
iondef2_imon=1.55156E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02954E2
lens6_imon=2.98231E-4
ql6_vset=1.0E-1
ql6_vmon=9.28402E-2
ql6_imon=4.01775E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26892E0
ionrepsh_imon=1.78228E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33363E1
lens5b_imon=2.18783E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74717E1
cs_ef2b_imon=3.10704E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.3272E0
os_ea2_imon=-5.40878E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06107E2
lens4b_imon=2.00507E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71005E1
cs_ef2a_imon=3.18596E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05216E0
os_ef2alow_imon=-2.73123E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.97424E-1
os_ef2bup_imon=-5.5207E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10697E1
os_restr2_imon=3.42851E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23077E2
cs_ionfoca_imon=6.29892E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01689E1
cs_anode2_imon=2.2738E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73476E1
iondef1_imon=1.06958E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67644E1
iondef4_imon=1.08557E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7179E1
olens3_imon=4.44239E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82213E-1
olens1_imon=7.42512E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12534E0
cs_ionaccel_imon=-1.99241E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02081E2
cs_ionfocb_imon=1.4719E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56333E1
einzel_imon=7.58693E-6
window_vset=0.0E0
window_vmon=1.45263E-1
window_imon=-1.22477E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82606E2
mask1_imon=2.39232E-4
mask2_vset=0.0E0
mask2_vmon=-1.86038E1
mask2_imon=-7.92292E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92638E3
multa_neg_imon=7.71447E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93694E3
defgrida_imon=6.30132E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5009E3
multb_neg_imon=7.13046E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.32337E0
defgridb_imon=5.71011E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33331E1
os_fil1_imon=9.39897E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07113E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64392E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30918E1
cs_fil1_imon=9.94227E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61963E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66602E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.20268E-2
os_fil2_imon=-2.75006E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.78493E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.29855E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36514E-1
cs_fil2_imon=-2.34762E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=7.93839E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22345E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=
inlet_lpb_pmon=
chamber_ion_pmon=
chamber_cvt_pmon=
foreline_cvt_pmon=
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.73107E-1
res40_imon=-2.70239E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=156
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.09526E0	-8.18539E-1	-7.99084E-1	-9.13045E0	-9.14211E0	6.29425E-3	9.26256E-2	2.73075E1	-3.26431E1	-3.26567E1	2.68111E1	1.1693E-7	2.5199E-3	2.5199E-3	6.31288E-3	1.98764E-1
2.0E0	2.7E1	0.0E0	3.16E2	1.6E2	-2.09526E0	-8.18133E-1	-7.99036E-1	-9.13079E0	-9.14202E0	6.17504E-3	9.27448E-2	2.73124E1	-3.26364E1	-3.26223E1	2.68094E1	1.16923E-7	2.51525E-3	2.51525E-3	6.3074E-3	1.9917E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09565E0	-8.18443E-1	-7.98941E-1	-9.13091E0	-9.14187E0	6.24657E-3	9.24826E-2	2.73139E1	-3.26732E1	-3.26531E1	2.68047E1	1.17042E-7	2.51693E-3	2.51693E-3	6.32418E-3	1.97643E-1
4.0E0	1.0E0	0.0E0	6.55E2	3.98E2	-2.09588E0	-8.18539E-1	-7.98917E-1	-9.13076E0	-9.14185E0	6.00815E-3	9.3174E-2	2.73234E1	-3.26508E1	-3.26307E1	2.68232E1	1.16923E-7	2.51847E-3	2.51847E-3	6.32356E-3	1.9968E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09549E0	-8.18372E-1	-7.98941E-1	-9.13095E0	-9.14137E0	6.1512E-3	9.27687E-2	2.73339E1	-3.26476E1	-3.26452E1	2.68233E1	1.16823E-7	2.52707E-3	2.52707E-3	6.31817E-3	2.00534E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0951E0	-8.18491E-1	-7.98774E-1	-9.13093E0	-9.14178E0	6.22272E-3	9.29356E-2	2.73297E1	-3.26741E1	-3.26248E1	2.6828E1	1.17007E-7	2.52264E-3	2.52264E-3	6.32386E-3	2.01897E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09541E0	-8.18348E-1	-7.98988E-1	-9.131E0	-9.14228E0	6.05583E-3	9.29117E-2	2.72998E1	-3.26455E1	-3.26242E1	2.681E1					
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09495E0	-8.18396E-1	-7.99131E-1	-9.13064E0	-9.14166E0	5.93662E-3	9.30071E-2	2.72751E1	-3.26723E1	-3.26579E1	2.68154E1	1.16973E-7	2.51739E-3	2.51739E-3	6.31817E-3	2.01219E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09394E0	-8.18515E-1	-7.98774E-1	-9.13086E0	-9.14199E0	6.1512E-3	9.28402E-2	2.72915E1	-3.26691E1	-3.26201E1	2.67944E1	1.16829E-7	2.51771E-3	2.51771E-3	6.32936E-3	2.00673E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0951E0	-8.18372E-1	-7.98798E-1	-9.13091E0	-9.14173E0	6.19888E-3	9.26733E-2	2.73003E1	-3.26524E1	-3.262E1	2.68221E1	1.16823E-7	2.52276E-3	2.52276E-3	6.31278E-3	1.98491E-1
1.4E1	3.0E0	0.0E0	5.66E2	3.82E2	-2.09402E0	-8.1799E-1	-7.98607E-1	-9.13079E0	-9.14228E0	6.05583E-3	9.29832E-2	2.7285E1	-3.26531E1	-3.2616E1	2.68118E1	1.16873E-7	2.51203E-3	2.51203E-3	6.33436E-3	1.9968E-1
1.5E1	1.0E0	0.0E0	6.06E2	4.11E2	-2.09418E0	-8.18396E-1	-7.98488E-1	-9.13074E0	-9.14199E0	5.98431E-3	9.28402E-2	2.73171E1	-3.26308E1	-3.26314E1	2.68208E1	1.16981E-7	2.52099E-3	2.52099E-3	6.32386E-3	1.9963E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09441E0	-8.18443E-1	-7.9875E-1	-9.13048E0	-9.14195E0	5.8651E-3	9.29117E-2	2.73159E1	-3.26266E1	-3.26561E1	2.67908E1	1.17073E-7	2.52061E-3	2.52061E-3	6.31817E-3	2.01391E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09565E0	-8.18443E-1	-7.98631E-1	-9.13067E0	-9.14207E0	5.93662E-3	9.30071E-2	2.73237E1	-3.26987E1	-3.2638E1	2.68076E1	1.16981E-7	2.5188E-3	2.5188E-3	6.31288E-3	2.00673E-1
1.8E1	3.0E0	0.0E0	7.27E2	5.0E2	-2.09549E0	-8.18491E-1	-7.98917E-1	-9.13086E0	-9.1419E0	6.05583E-3	9.30786E-2	2.73201E1	-3.26416E1	-3.26116E1	2.68172E1	1.1699E-7	2.52362E-3	2.52362E-3	6.28511E-3	2.01708E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09549E0	-8.18276E-1	-7.9906E-1	-9.13105E0	-9.14176E0	6.1512E-3	9.29356E-2	2.73111E1	-3.26825E1	-3.26278E1	2.68118E1	1.16873E-7	2.51739E-3	2.51739E-3	6.31278E-3	2.01047E-1
2.0E1	2.0E0	0.0E0	8.08E2	5.58E2	-2.09495E0	-8.18372E-1	-7.98869E-1	-9.131E0	-9.14176E0	6.07967E-3	9.31025E-2	2.73234E1	-3.26838E1	-3.26425E1	2.68256E1	1.1688E-7	2.5188E-3	2.5188E-3	6.32936E-3	2.00325E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09441E0	-8.18491E-1	-7.99012E-1	-9.13115E0	-9.14223E0	6.10352E-3	9.29356E-2	2.7382E1	-3.27119E1	-3.25179E1	2.68318E1	1.16981E-7	2.5199E-3	2.5199E-3	6.3074E-3	2.01197E-1
2.2E1	2.0E0	0.0E0	8.89E2	6.17E2	-2.09565E0	-8.18348E-1	-7.98941E-1	-9.13103E0	-9.1419E0	5.8651E-3	9.28402E-2	2.73369E1	-3.26567E1	-3.26476E1	2.68206E1	1.17053E-7	2.52351E-3	2.52351E-3	6.32916E-3	2.00344E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09557E0	-8.18372E-1	-7.99155E-1	-9.13107E0	-9.14207E0	6.05583E-3	9.28402E-2	2.73476E1	-3.26484E1	-3.2649E1	2.67644E1