[Scan]
initial_time=2015-12-15T17:40:25
final_time=2015-12-15T17:40:44
ip_count=19
run=1017
dataset=1
scan=33
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=27.0
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09533E0
qbias_imon=-1.08789E-4
ql1_vset=
ql1_vmon=-8.18443E-1
ql1_imon=1.37021E-8
ql2_vset=
ql2_vmon=-7.98845E-1
ql2_imon=2.03383E-9
ql3_vset=
ql3_vmon=-9.13084E0
ql3_imon=7.59673E-10
ql4_vset=
ql4_vmon=-9.14202E0
ql4_imon=-5.45263E-11
mult1=-9.33101E-9
mult2=-2.7246E-9
rf_tmon=-5.17333E-3
rf_agc=3.24624E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=6.03199E-3
ql5_imon=1.71528E-9
bslens_vset=-6.2E0
bslens_vmon=-6.6397E0
bslens_imon=2.45484E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19664E1
lens5a_imon=1.96901E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12472E2
lens4a_imon=2.05003E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5352E1
cs_ef1b_imon=2.84935E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04623E2
lens23_imon=1.02258E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04808E1
cs_ea1_imon=2.4993E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38277E0
lens1_imon=2.80452E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64668E1
os_ef1alow_imon=2.96072E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03985E1
cs_ea2_imon=1.53173E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84184E1
cs_ef1a_imon=2.93765E-5
olens2_vset=9.7E-1
olens2_vmon=9.70006E-1
olens2_imon=1.26042E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1149E1
os_restr1_imon=4.30391E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15101E1
os_ea1_imon=2.34104E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63743E1
os_ef1bup_imon=3.0901E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22566E0
cs_ionrep_imon=1.18385E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91861E2
cs_nozzle_imon=1.93233E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02338E1
cs_anode1_imon=3.0018E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20566E0
olens4_imon=3.26118E-8
tplens_vset=1.4E-1
tplens_vmon=1.5465E0
tplens_imon=-3.10161E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26284E1
iondef3_imon=1.49893E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26735E1
iondef2_imon=1.57066E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02981E2
lens6_imon=2.98306E-4
ql6_vset=1.0E-1
ql6_vmon=9.28879E-2
ql6_imon=4.05226E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27493E0
ionrepsh_imon=1.78804E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33447E1
lens5b_imon=2.1644E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74754E1
cs_ef2b_imon=3.13118E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.27493E0
os_ea2_imon=-7.35545E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06111E2
lens4b_imon=2.00666E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71294E1
cs_ef2a_imon=3.17407E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07979E0
os_ef2alow_imon=-2.77808E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.01028E-1
os_ef2bup_imon=-5.47384E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10757E1
os_restr2_imon=3.42635E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23051E2
cs_ionfoca_imon=6.30253E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01262E1
cs_anode2_imon=2.26227E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72913E1
iondef1_imon=1.1049E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67782E1
iondef4_imon=1.07873E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71789E1
olens3_imon=4.42624E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82237E-1
olens1_imon=7.42227E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13855E0
cs_ionaccel_imon=-1.95637E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02084E2
cs_ionfocb_imon=1.4741E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56501E1
einzel_imon=7.51485E-6
window_vset=0.0E0
window_vmon=1.45263E-1
window_imon=-1.04097E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82601E2
mask1_imon=2.38958E-4
mask2_vset=0.0E0
mask2_vmon=-1.85797E1
mask2_imon=-8.49956E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92624E3
multa_neg_imon=7.80819E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93736E3
defgrida_imon=6.5753E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50142E3
multb_neg_imon=7.05476E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.27525E0
defgridb_imon=5.84349E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3336E1
os_fil1_imon=9.40906E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07209E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64139E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30928E1
cs_fil1_imon=9.95392E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62816E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66452E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.24138E-2
os_fil2_imon=-2.70801E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.89906E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.41585E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3755E-1
cs_fil2_imon=-2.65395E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=3.13311E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22287E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32386E-3
inlet_lpb_pmon=2.00151E-1
chamber_ion_pmon=1.16778E-7
chamber_cvt_pmon=2.52099E-3
foreline_cvt_pmon=2.52099E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.01629E-1
res40_imon=-2.49697E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=154
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	8.0E0	0.0E0	1.47E2	4.1E1	-2.09495E0	-8.18181E-1	-7.98941E-1	-9.13112E0	-9.14166E0	6.00815E-3	9.31263E-2	2.72866E1	-3.26747E1	-3.26277E1	2.68105E1	1.16873E-7	2.51525E-3	2.51525E-3	6.32356E-3	2.00363E-1
2.0E0	3.2E1	0.0E0	3.16E2	1.6E2	-2.0948E0	-8.18086E-1	-7.98512E-1	-9.13086E0	-9.14192E0	5.98431E-3	9.31025E-2	2.73219E1	-3.26697E1	-3.26254E1	2.6792E1	1.16923E-7	2.51954E-3	2.51954E-3	6.30202E-3	2.01047E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09441E0	-8.18348E-1	-7.98893E-1	-9.131E0	-9.14173E0	6.00815E-3	9.3317E-2	2.73051E1	-3.26417E1	-3.26585E1	2.67914E1	1.16886E-7	2.52473E-3	2.52473E-3	6.33538E-3	1.99754E-1
4.0E0	5.0E0	0.0E0	6.55E2	3.98E2	-2.09433E0	-8.18253E-1	-7.98655E-1	-9.13088E0	-9.14168E0	5.93662E-3	9.2864E-2	2.73232E1	-3.26535E1	-3.25948E1	2.68207E1	1.16808E-7	2.51549E-3	2.51549E-3	6.3074E-3	2.00307E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09541E0	-8.18157E-1	-7.98607E-1	-9.13076E0	-9.14137E0	5.74589E-3	9.27687E-2	2.73081E1	-3.26993E1	-3.26314E1	2.68238E1	1.16954E-7	2.51874E-3	2.51874E-3	6.33648E-3	1.99283E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09533E0	-8.18086E-1	-7.98774E-1	-9.13072E0	-9.14164E0	5.81741E-3	9.30309E-2	2.72927E1	-3.2682E1	-3.2616E1	2.68151E1	1.17123E-7	2.52492E-3	2.52492E-3	6.32356E-3	1.99E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09495E0	-8.18467E-1	-7.98821E-1	-9.13074E0	-9.14168E0	5.67436E-3	9.31978E-2	2.72913E1	-3.26639E1	-3.259E1	2.68226E1	1.16674E-7	2.52707E-3	2.52707E-3	6.32356E-3	1.9883E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0951E0	-8.18372E-1	-7.9875E-1	-9.1311E0	-9.14199E0	5.93662E-3	9.30071E-2	2.73039E1	-3.26484E1	-3.26248E1	2.6834E1	1.16829E-7	2.52099E-3	2.52099E-3	6.31837E-3	1.99456E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09611E0	-8.183E-1	-7.98774E-1	-9.13134E0	-9.1418E0	6.12736E-3	9.30548E-2	2.72817E1	-3.26807E1	-3.26218E1	2.6816E1	1.17023E-7	2.51739E-3	2.51739E-3	6.3074E-3	2.00363E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0951E0	-8.18682E-1	-7.98702E-1	-9.13107E0	-9.14187E0	6.1512E-3	9.31501E-2	2.73399E1	-3.26849E1	-3.25749E1	2.68334E1	1.1688E-7	2.5199E-3	2.5199E-3	6.33486E-3	2.00673E-1
1.4E1	3.0E0	0.0E0	5.66E2	3.82E2	-2.09503E0	-8.18205E-1	-7.98821E-1	-9.13084E0	-9.14166E0	6.03199E-3	9.29356E-2	2.73243E1	-3.26296E1	-3.26579E1	2.6789E1	1.16677E-7	2.52099E-3	2.52099E-3	6.32936E-3	2.00673E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09487E0	-8.18229E-1	-7.98726E-1	-9.13124E0	-9.14168E0	5.91278E-3	9.28164E-2	2.73297E1	-3.26603E1	-3.26549E1	2.68238E1	1.17185E-7	2.52099E-3	2.52099E-3	6.29645E-3	2.00151E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09533E0	-8.18229E-1	-7.98678E-1	-9.13122E0	-9.14199E0	5.98431E-3	9.29356E-2	2.72986E1	-3.26679E1	-3.26266E1	2.6819E1	1.1693E-7	2.52538E-3	2.52538E-3	6.30192E-3	1.99977E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09533E0	-8.18229E-1	-7.98655E-1	-9.13126E0	-9.14166E0	6.05583E-3	9.31025E-2	2.72979E1	-3.26416E1	-3.2641E1	2.68118E1	1.16829E-7	2.5188E-3	2.5188E-3	6.29098E-3	2.01197E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09549E0	-8.18276E-1	-7.98869E-1	-9.13117E0	-9.14187E0	6.1512E-3	9.31263E-2	2.73189E1	-3.2641E1	-3.2632E1	2.68401E1	1.1688E-7	2.53527E-3	2.53527E-3	6.31837E-3	2.00673E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09557E0	-8.18419E-1	-7.98821E-1	-9.13112E0	-9.14195E0	5.88894E-3	9.29832E-2	2.73163E1	-3.26596E1	-3.2626E1	2.67974E1	1.17023E-7	2.52061E-3	2.52061E-3	6.3074E-3	2.00705E-1
2.0E1	4.0E0	0.0E0	8.08E2	5.58E2	-2.09572E0	-8.18324E-1	-7.98917E-1	-9.13091E0	-9.14166E0	5.74589E-3	9.30071E-2	2.73351E1	-3.26591E1	-3.26669E1	2.67956E1	1.17123E-7	2.52169E-3	2.52169E-3	6.32356E-3	2.00876E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0965E0	-8.18372E-1	-7.99179E-1	-9.1311E0	-9.1418E0	6.00815E-3	9.29832E-2	2.73488E1	-3.27829E1	-3.26661E1	2.67932E1	1.1693E-7	2.5188E-3	2.5188E-3	6.32386E-3	1.99977E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09487E0	-8.18396E-1	-7.98965E-1	-9.13086E0	-9.14197E0	6.00815E-3	9.32217E-2	2.73027E1	-3.26921E1	-3.26536E1	2.68028E1	1.16727E-7	2.52209E-3	2.52209E-3	6.32386E-3	2.00673E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09533E0	-8.18443E-1	-7.98845E-1	-9.13084E0	-9.14202E0	6.03199E-3	9.28879E-2	2.72913E1	-3.26735E1	-3.26284E1	2.67782E1	1.16778E-7	2.52099E-3	2.52099E-3	6.32386E-3	2.00151E-1