[Scan]
initial_time=2015-12-15T17:40:51
final_time=2015-12-15T17:41:11
ip_count=19
run=1017
dataset=1
scan=34
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=27.0
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09557E0
qbias_imon=-1.08805E-4
ql1_vset=
ql1_vmon=-8.18372E-1
ql1_imon=1.36405E-8
ql2_vset=
ql2_vmon=-7.98678E-1
ql2_imon=2.00585E-9
ql3_vset=
ql3_vmon=-9.13119E0
ql3_imon=6.93655E-10
ql4_vset=
ql4_vmon=-9.14178E0
ql4_imon=-4.66108E-11
mult1=-9.60575E-9
mult2=-2.71738E-9
rf_tmon=-4.3561E-3
rf_agc=3.31321E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=6.65188E-3
ql5_imon=1.71608E-9
bslens_vset=-6.2E0
bslens_vmon=-6.67996E0
bslens_imon=2.55217E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20067E1
lens5a_imon=1.97442E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12517E2
lens4a_imon=2.05017E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53941E1
cs_ef1b_imon=2.86413E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04635E2
lens23_imon=1.02226E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0527E1
cs_ea1_imon=2.50471E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38398E0
lens1_imon=2.718E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64855E1
os_ef1alow_imon=2.95603E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03973E1
cs_ea2_imon=1.5357E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84544E1
cs_ef1a_imon=2.9463E-5
olens2_vset=9.7E-1
olens2_vmon=9.70507E-1
olens2_imon=1.25924E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11069E1
os_restr1_imon=4.29995E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15137E1
os_ea1_imon=2.367E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63966E1
os_ef1bup_imon=3.08253E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26592E0
cs_ionrep_imon=1.20981E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91865E2
cs_nozzle_imon=1.93251E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01827E1
cs_anode1_imon=2.97693E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20575E0
olens4_imon=3.2666E-8
tplens_vset=1.4E-1
tplens_vmon=1.56993E0
tplens_imon=-3.6784E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26514E1
iondef3_imon=1.49748E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26826E1
iondef2_imon=1.55877E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0296E2
lens6_imon=2.98353E-4
ql6_vset=1.0E-1
ql6_vmon=9.30309E-2
ql6_imon=4.03768E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29235E0
ionrepsh_imon=1.76353E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33489E1
lens5b_imon=2.18243E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7482E1
cs_ef2b_imon=3.12506E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.29476E0
os_ea2_imon=-7.78805E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06095E2
lens4b_imon=2.00525E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71324E1
cs_ef2a_imon=3.1838E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06837E0
os_ef2alow_imon=-2.68077E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.95622E-1
os_ef2bup_imon=-5.39816E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10937E1
os_restr2_imon=3.44905E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23074E2
cs_ionfoca_imon=6.29676E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01791E1
cs_anode2_imon=2.24641E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73169E1
iondef1_imon=1.09517E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68302E1
iondef4_imon=1.07945E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71789E1
olens3_imon=4.42356E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82141E-1
olens1_imon=7.40424E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.17279E0
cs_ionaccel_imon=-1.78338E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02047E2
cs_ionfocb_imon=1.47039E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56477E1
einzel_imon=7.7455E-6
window_vset=0.0E0
window_vmon=2.02927E-1
window_imon=-1.15269E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82633E2
mask1_imon=2.39196E-4
mask2_vset=0.0E0
mask2_vmon=-1.86338E1
mask2_imon=-8.13916E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92666E3
multa_neg_imon=7.54143E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93741E3
defgrida_imon=6.49239E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50137E3
multb_neg_imon=7.24222E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.39856E0
defgridb_imon=6.02014E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33338E1
os_fil1_imon=9.4206E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06686E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6389E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30874E1
cs_fil1_imon=9.95266E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62372E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66562E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.15109E-2
os_fil2_imon=-2.90623E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.88704E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.59631E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34313E-1
cs_fil2_imon=-2.71402E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=7.33773E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22302E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32936E-3
inlet_lpb_pmon=2.00673E-1
chamber_ion_pmon=1.17236E-7
chamber_cvt_pmon=2.5188E-3
foreline_cvt_pmon=2.5188E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.16044E-1
res40_imon=-2.63392E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=164
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E1	0.0E0	1.47E2	4.1E1	-2.09603E0	-8.18348E-1	-7.99036E-1	-9.13072E0	-9.14185E0	5.91278E-3	9.27687E-2	2.72951E1	-3.26962E1	-3.26337E1	2.67827E1	1.16774E-7	2.52061E-3	2.52061E-3	6.3074E-3	1.9951E-1
2.0E0	3.5E1	0.0E0	3.16E2	1.6E2	-2.09495E0	-8.18181E-1	-7.98726E-1	-9.13067E0	-9.14216E0	5.8651E-3	9.29117E-2	2.73081E1	-3.26579E1	-3.2626E1	2.68214E1	1.16774E-7	2.52599E-3	2.52599E-3	6.35601E-3	1.98661E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09503E0	-8.18276E-1	-7.98702E-1	-9.13093E0	-9.14199E0	5.76973E-3	9.30548E-2	2.73665E1	-3.2681E1	-3.26359E1	2.68059E1	1.17134E-7	2.5188E-3	2.5188E-3	6.30192E-3	1.98937E-1
4.0E0	1.0E0	0.0E0	6.55E2	3.98E2	-2.09402E0	-8.18133E-1	-7.98821E-1	-9.1306E0	-9.14195E0	5.84126E-3	9.28879E-2	2.72979E1	-3.26422E1	-3.26591E1	2.68244E1	1.16867E-7	2.51709E-3	2.51709E-3	6.33388E-3	1.98894E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09394E0	-8.17966E-1	-7.98965E-1	-9.13084E0	-9.14185E0	5.8651E-3	9.30071E-2	2.72925E1	-3.26476E1	-3.26188E1	2.6837E1	1.1693E-7	2.52757E-3	2.52757E-3	6.31837E-3	1.99456E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09526E0	-8.17895E-1	-7.98941E-1	-9.13115E0	-9.14168E0	5.88894E-3	9.2864E-2	2.7329E1	-3.26801E1	-3.26277E1	2.68285E1	1.17236E-7	2.52318E-3	2.52318E-3	6.3074E-3	2.00673E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09533E0	-8.18014E-1	-7.98821E-1	-9.13107E0	-9.14195E0	5.72205E-3	9.29832E-2	2.73112E1	-3.26597E1	-3.26389E1	2.68052E1	1.16671E-7	2.52131E-3	2.52131E-3	6.29157E-3	2.00903E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09588E0	-8.17847E-1	-7.98917E-1	-9.13098E0	-9.14218E0	5.84126E-3	9.31263E-2	2.73057E1	-3.26508E1	-3.2629E1	2.68424E1	1.16829E-7	2.52099E-3	2.52099E-3	6.32386E-3	2.00151E-1
1.2E1	1.0E0	0.0E0	4.85E2	3.23E2	-2.09611E0	-8.1811E-1	-7.98941E-1	-9.131E0	-9.14195E0	5.88894E-3	9.29117E-2	2.72871E1	-3.26554E1	-3.26404E1	2.6792E1	1.16826E-7	2.51755E-3	2.51755E-3	6.31555E-3	2.00085E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09657E0	-8.18276E-1	-7.98869E-1	-9.13098E0	-9.14164E0	5.96046E-3	9.29832E-2	2.72877E1	-3.26386E1	-3.26645E1	2.68076E1					
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09549E0	-8.18062E-1	-7.98726E-1	-9.13095E0	-9.14159E0	6.00815E-3	9.30071E-2	2.72721E1	-3.2647E1	-3.26458E1	2.68016E1	1.16727E-7	2.52318E-3	2.52318E-3	6.33486E-3	1.99803E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09595E0	-8.18253E-1	-7.98678E-1	-9.13115E0	-9.14207E0	6.05583E-3	9.2721E-2	2.73033E1	-3.26651E1	-3.2614E1	2.67812E1	1.1693E-7	2.52428E-3	2.52428E-3	6.30192E-3	2.00847E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09572E0	-8.18062E-1	-7.98726E-1	-9.13112E0	-9.14199E0	6.17504E-3	9.29117E-2	2.73086E1	-3.26555E1	-3.26272E1	2.68028E1	1.16829E-7	2.52209E-3	2.52209E-3	6.32386E-3	2.01022E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09549E0	-8.18062E-1	-7.98774E-1	-9.13098E0	-9.14171E0	6.27041E-3	9.30071E-2	2.72943E1	-3.2629E1	-3.26506E1	2.68406E1	1.1688E-7	2.52647E-3	2.52647E-3	6.32936E-3	2.00847E-1
1.8E1	3.0E0	0.0E0	7.27E2	5.0E2	-2.09588E0	-8.18229E-1	-7.98726E-1	-9.13074E0	-9.1418E0	5.88894E-3	9.29356E-2	2.73069E1	-3.27065E1	-3.26014E1	2.68172E1	1.17273E-7	2.51525E-3	2.51525E-3	6.32896E-3	2.01047E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09549E0	-8.18396E-1	-7.98869E-1	-9.13091E0	-9.14173E0	6.03199E-3	9.29117E-2	2.73405E1	-3.26443E1	-3.26413E1	2.6819E1	1.16778E-7	2.52099E-3	2.52099E-3	6.3074E-3	2.00325E-1
2.0E1	6.0E0	0.0E0	8.08E2	5.58E2	-2.09472E0	-8.18324E-1	-7.98821E-1	-9.13062E0	-9.14197E0	5.81741E-3	9.31025E-2	2.73333E1	-3.26549E1	-3.26098E1	2.68154E1	1.1693E-7	2.52318E-3	2.52318E-3	6.31288E-3	2.00151E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09541E0	-8.18038E-1	-7.98678E-1	-9.13084E0	-9.14164E0	6.22272E-3	9.29356E-2	2.74195E1	-3.2685E1	-3.25057E1	2.68256E1	1.1693E-7	2.52209E-3	2.52209E-3	6.3074E-3	1.99803E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09549E0	-8.18276E-1	-7.98726E-1	-9.13112E0	-9.14152E0	6.22272E-3	9.2864E-2	2.73057E1	-3.26951E1	-3.26452E1	2.6828E1	1.17023E-7	2.52169E-3	2.52169E-3	6.32356E-3	2.01219E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09557E0	-8.18372E-1	-7.98678E-1	-9.13119E0	-9.14178E0	6.65188E-3	9.30309E-2	2.73169E1	-3.26826E1	-3.26514E1	2.68302E1	1.17236E-7	2.5188E-3	2.5188E-3	6.32936E-3	2.00673E-1