[Scan]
initial_time=2015-12-15T17:41:18
final_time=2015-12-15T17:41:38
ip_count=19
run=1017
dataset=1
scan=35
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=27.0
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09565E0
qbias_imon=-1.08804E-4
ql1_vset=
ql1_vmon=-8.18086E-1
ql1_imon=1.36554E-8
ql2_vset=
ql2_vmon=-7.98607E-1
ql2_imon=1.97009E-9
ql3_vset=
ql3_vmon=-9.13129E0
ql3_imon=6.87707E-10
ql4_vset=
ql4_vmon=-9.14195E0
ql4_imon=-4.96268E-11
mult1=-9.07378E-9
mult2=-2.70366E-9
rf_tmon=-4.92831E-3
rf_agc=3.33445E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.84126E-3
ql5_imon=1.71369E-9
bslens_vset=-6.2E0
bslens_vmon=-6.67092E0
bslens_imon=2.31566E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20135E1
lens5a_imon=1.96967E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12481E2
lens4a_imon=2.04892E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53702E1
cs_ef1b_imon=2.86506E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04617E2
lens23_imon=1.02246E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0493E1
cs_ea1_imon=2.49944E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38009E0
lens1_imon=2.54509E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65205E1
os_ef1alow_imon=2.98565E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03876E1
cs_ea2_imon=1.53966E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84388E1
cs_ef1a_imon=2.9356E-5
olens2_vset=9.7E-1
olens2_vmon=9.70173E-1
olens2_imon=1.25632E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11604E1
os_restr1_imon=4.3059E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15219E1
os_ea1_imon=2.37048E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63485E1
os_ef1bup_imon=3.0628E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25442E0
cs_ionrep_imon=1.191E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91909E2
cs_nozzle_imon=1.93462E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01792E1
cs_anode1_imon=2.97487E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20575E0
olens4_imon=3.26534E-8
tplens_vset=1.4E-1
tplens_vmon=1.56727E0
tplens_imon=-3.40159E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26349E1
iondef3_imon=1.4969E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26714E1
iondef2_imon=1.56643E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02958E2
lens6_imon=2.98283E-4
ql6_vset=1.0E-1
ql6_vmon=9.28164E-2
ql6_imon=4.02848E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.23761E0
ionrepsh_imon=1.81081E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33918E1
lens5b_imon=2.17233E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74368E1
cs_ef2b_imon=3.11249E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.28918E0
os_ea2_imon=-6.5997E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06114E2
lens4b_imon=2.00477E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71107E1
cs_ef2a_imon=3.17748E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04992E0
os_ef2alow_imon=-2.67536E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.82171E-1
os_ef2bup_imon=-5.254E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10926E1
os_restr2_imon=3.42909E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23087E2
cs_ionfoca_imon=6.30902E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01983E1
cs_anode2_imon=2.26523E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73016E1
iondef1_imon=1.08428E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68178E1
iondef4_imon=1.08573E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7179E1
olens3_imon=4.39283E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.8238E-1
olens1_imon=7.39591E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13072E0
cs_ionaccel_imon=-1.96294E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02053E2
cs_ionfocb_imon=1.47139E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56156E1
einzel_imon=7.56621E-6
window_vset=0.0E0
window_vmon=1.41809E-1
window_imon=-9.79441E-7
mask1_vset=-4.8E2
mask1_vmon=-4.8262E2
mask1_imon=2.3906E-4
mask2_vset=0.0E0
mask2_vmon=-1.85898E1
mask2_imon=-5.97163E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92669E3
multa_neg_imon=7.42221E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93725E3
defgrida_imon=6.42106E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50131E3
multb_neg_imon=7.12325E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.3311E0
defgridb_imon=6.12211E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3333E1
os_fil1_imon=9.41198E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06136E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64199E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30894E1
cs_fil1_imon=9.94798E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62997E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66562E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.29481E-2
os_fil2_imon=-2.8082E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.85444E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.33391E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36269E-1
cs_fil2_imon=-2.42592E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.14201E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22304E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=1.9883E-1
chamber_ion_pmon=1.17073E-7
chamber_cvt_pmon=2.51954E-3
foreline_cvt_pmon=2.51954E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.68677E-1
res40_imon=-2.51898E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=185
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09557E0	-8.18324E-1	-7.98655E-1	-9.13069E0	-9.14159E0	5.93662E-3	9.26971E-2	2.72913E1	-3.26909E1	-3.2626E1	2.68172E1	1.16861E-7	2.5199E-3	2.5199E-3	6.3126E-3	2.00765E-1
2.0E0	2.6E1	0.0E0	3.16E2	1.6E2	-2.0958E0	-8.1811E-1	-7.98559E-1	-9.13043E0	-9.14166E0	5.72205E-3	9.26971E-2	2.73186E1	-3.26407E1	-3.26395E1	2.6802E1	1.1688E-7	2.51552E-3	2.51552E-3	6.31837E-3	1.99977E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09619E0	-8.1799E-1	-7.98392E-1	-9.13069E0	-9.14156E0	5.88894E-3	9.27687E-2	2.7311E1	-3.26349E1	-3.26354E1	2.68163E1	1.17052E-7	2.51498E-3	2.51498E-3	6.26769E-3	1.99523E-1
4.0E0	5.0E0	0.0E0	6.55E2	3.98E2	-2.0965E0	-8.18276E-1	-7.98559E-1	-9.13055E0	-9.1419E0	5.98431E-3	9.26733E-2	2.73321E1	-3.26831E1	-3.26362E1	2.68046E1	1.16965E-7	2.52342E-3	2.52342E-3	6.31798E-3	1.98561E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09603E0	-8.18253E-1	-7.98488E-1	-9.13086E0	-9.14178E0	6.07967E-3	9.26971E-2	2.72943E1	-3.26795E1	-3.2623E1	2.68172E1	1.16981E-7	2.5199E-3	2.5199E-3	6.32936E-3	1.99283E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09696E0	-8.17966E-1	-7.98821E-1	-9.13084E0	-9.1418E0	6.10352E-3	9.26256E-2	2.73163E1	-3.26549E1	-3.26042E1	2.68046E1	1.16727E-7	2.52318E-3	2.52318E-3	6.29645E-3	1.98764E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09603E0	-8.18181E-1	-7.98631E-1	-9.13098E0	-9.14173E0	6.22272E-3	9.28402E-2	2.73225E1	-3.26735E1	-3.26038E1	2.68308E1	1.1688E-7	2.52318E-3	2.52318E-3	6.3074E-3	2.02248E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0958E0	-8.18372E-1	-7.98702E-1	-9.131E0	-9.14178E0	5.6982E-3	9.30548E-2	2.73126E1	-3.2651E1	-3.2605E1	2.67915E1	1.16873E-7	2.51954E-3	2.51954E-3	6.32896E-3	2.00534E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09588E0	-8.18491E-1	-7.98726E-1	-9.13105E0	-9.14183E0	5.74589E-3	9.31501E-2	2.73009E1	-3.26452E1	-3.26176E1	2.68382E1	1.17073E-7	2.51747E-3	2.51747E-3	6.33021E-3	2.00244E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09619E0	-8.18038E-1	-7.98655E-1	-9.13107E0	-9.14185E0	6.03199E-3	9.30548E-2	2.73252E1	-3.26767E1	-3.2629E1	2.67978E1	1.17032E-7	2.52318E-3	2.52318E-3	6.32386E-3	2.00499E-1
1.4E1	2.0E0	0.0E0	5.66E2	3.82E2	-2.09588E0	-8.1811E-1	-7.98869E-1	-9.13122E0	-9.14202E0	5.8651E-3	9.28164E-2	2.72907E1	-3.2647E1	-3.26362E1	2.68001E1	1.16774E-7	2.52061E-3	2.52061E-3	6.29665E-3	2.00876E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09565E0	-8.18348E-1	-7.98798E-1	-9.13095E0	-9.14178E0	5.98431E-3	9.29594E-2	2.73273E1	-3.26675E1	-3.25972E1	2.6825E1	1.16938E-7	2.52585E-3	2.52585E-3	6.29067E-3	2.0153E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09526E0	-8.18396E-1	-7.98821E-1	-9.13098E0	-9.14199E0	6.17504E-3	9.2864E-2	2.72959E1	-3.26578E1	-3.26229E1	2.68286E1	1.1693E-7	2.52318E-3	2.52318E-3	6.31288E-3	1.99977E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09495E0	-8.18419E-1	-7.98941E-1	-9.13079E0	-9.14197E0	5.74589E-3	9.30071E-2	2.73111E1	-3.26633E1	-3.26332E1	2.67986E1	1.1693E-7	2.51826E-3	2.51826E-3	6.31837E-3	1.98592E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09565E0	-8.18491E-1	-7.99179E-1	-9.13115E0	-9.14185E0	5.8651E-3	9.29832E-2	2.73428E1	-3.26413E1	-3.26195E1	2.68204E1					
1.9E1	2.0E0	0.0E0	7.68E2	5.29E2	-2.09627E0	-8.18348E-1	-7.9906E-1	-9.13122E0	-9.14168E0	5.62668E-3	9.26256E-2	2.72979E1	-3.26585E1	-3.26386E1	2.6816E1	1.17073E-7	2.52276E-3	2.52276E-3	6.33977E-3	2.00021E-1
2.0E1	3.0E0	0.0E0	8.08E2	5.58E2	-2.09526E0	-8.18157E-1	-7.98726E-1	-9.13115E0	-9.14197E0	5.74589E-3	9.29356E-2	2.73151E1	-3.26555E1	-3.26413E1	2.68118E1	1.17083E-7	2.52318E-3	2.52318E-3	6.3074E-3	1.99977E-1
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-2.09533E0	-8.18062E-1	-7.98607E-1	-9.13088E0	-9.14192E0	5.93662E-3	9.31978E-2	2.73611E1	-3.26933E1	-3.25924E1	2.68118E1	1.16873E-7	2.51847E-3	2.51847E-3	6.30202E-3	1.9951E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09541E0	-8.18133E-1	-7.98583E-1	-9.131E0	-9.14195E0	6.00815E-3	9.26733E-2	2.73075E1	-3.26753E1	-3.26434E1	2.6818E1	1.16727E-7	2.5188E-3	2.5188E-3	6.31837E-3	1.99456E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09565E0	-8.18086E-1	-7.98607E-1	-9.13129E0	-9.14195E0	5.84126E-3	9.28164E-2	2.73016E1	-3.26714E1	-3.26349E1	2.68178E1	1.17073E-7	2.51954E-3	2.51954E-3	6.31278E-3	1.9883E-1