[Scan]
initial_time=2015-12-15T17:41:45
final_time=2015-12-15T17:42:04
ip_count=19
run=1017
dataset=1
scan=36
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=27.0
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09565E0
qbias_imon=-1.08808E-4
ql1_vset=
ql1_vmon=-8.18133E-1
ql1_imon=1.36674E-8
ql2_vset=
ql2_vmon=-7.98821E-1
ql2_imon=1.95372E-9
ql3_vset=
ql3_vmon=-9.1311E0
ql3_imon=7.35581E-10
ql4_vset=
ql4_vmon=-9.14197E0
ql4_imon=-4.29392E-11
mult1=-9.0902E-9
mult2=-2.74057E-9
rf_tmon=-5.19737E-3
rf_agc=3.2216E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=6.00815E-3
ql5_imon=1.69953E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66133E0
bslens_imon=2.69998E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20097E1
lens5a_imon=1.97838E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1248E2
lens4a_imon=2.04988E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53778E1
cs_ef1b_imon=2.86557E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04621E2
lens23_imon=1.02052E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04736E1
cs_ea1_imon=2.50182E-5
lens1_vset=-5.0E0
lens1_vmon=-5.32089E0
lens1_imon=2.6423E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64987E1
os_ef1alow_imon=2.97405E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0372E1
cs_ea2_imon=1.52704E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84196E1
cs_ef1a_imon=2.95171E-5
olens2_vset=9.7E-1
olens2_vmon=9.70459E-1
olens2_imon=1.25436E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1146E1
os_restr1_imon=4.29166E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15173E1
os_ea1_imon=2.37205E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63599E1
os_ef1bup_imon=3.08685E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25751E0
cs_ionrep_imon=1.16907E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9189E2
cs_nozzle_imon=1.9338E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01833E1
cs_anode1_imon=2.97441E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20599E0
olens4_imon=3.25316E-8
tplens_vset=1.4E-1
tplens_vmon=1.57714E0
tplens_imon=-4.90409E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26645E1
iondef3_imon=1.50433E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26633E1
iondef2_imon=1.5822E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02963E2
lens6_imon=2.98371E-4
ql6_vset=1.0E-1
ql6_vmon=9.29356E-2
ql6_imon=4.04552E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26952E0
ionrepsh_imon=1.77759E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34006E1
lens5b_imon=2.17522E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74489E1
cs_ef2b_imon=3.11785E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.33501E0
os_ea2_imon=-8.00434E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06113E2
lens4b_imon=2.00576E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71534E1
cs_ef2a_imon=3.17767E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04855E0
os_ef2alow_imon=-2.54742E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.92018E-1
os_ef2bup_imon=-5.4342E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10703E1
os_restr2_imon=3.42563E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23072E2
cs_ionfoca_imon=6.28666E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02031E1
cs_anode2_imon=2.25326E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73165E1
iondef1_imon=1.09265E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68364E1
iondef4_imon=1.08774E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71788E1
olens3_imon=4.36074E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82642E-1
olens1_imon=7.38854E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.0971E0
cs_ionaccel_imon=-2.08972E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02062E2
cs_ionfocb_imon=1.47248E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56273E1
einzel_imon=7.48962E-6
window_vset=0.0E0
window_vmon=2.16141E-1
window_imon=-1.01574E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82618E2
mask1_imon=2.38954E-4
mask2_vset=0.0E0
mask2_vmon=-1.8647E1
mask2_imon=-7.13005E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92656E3
multa_neg_imon=6.88533E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93719E3
defgrida_imon=6.43831E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50132E3
multb_neg_imon=7.3756E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.42863E0
defgridb_imon=5.95885E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33344E1
os_fil1_imon=9.41645E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07023E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63938E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30908E1
cs_fil1_imon=9.96852E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63008E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66501E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.16399E-2
os_fil2_imon=-2.75006E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.9351E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.36429E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36126E-1
cs_fil2_imon=-2.45574E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=3.73377E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22336E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32936E-3
inlet_lpb_pmon=2.00151E-1
chamber_ion_pmon=1.16981E-7
chamber_cvt_pmon=2.51225E-3
foreline_cvt_pmon=2.51225E-3
chamber_tmon=1.40055E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.94731E-1
res40_imon=-2.45372E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=215
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	6.0E0	0.0E0	1.47E2	4.1E1	-2.0965E0	-8.183E-1	-7.98893E-1	-9.131E0	-9.14145E0	6.10352E-3	9.28879E-2	2.73027E1	-3.26408E1	-3.2639E1	2.68244E1	1.16778E-7	2.52318E-3	2.52318E-3	6.31288E-3	1.98937E-1
2.0E0	2.6E1	0.0E0	3.16E2	1.6E2	-2.09657E0	-8.18038E-1	-7.98821E-1	-9.13079E0	-9.14161E0	6.1512E-3	9.30071E-2	2.73235E1	-3.2686E1	-3.26419E1	2.67972E1	1.17023E-7	2.52599E-3	2.52599E-3	6.30202E-3	1.99E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09696E0	-8.18062E-1	-7.98941E-1	-9.13081E0	-9.14173E0	6.00815E-3	9.30071E-2	2.73416E1	-3.26654E1	-3.26573E1	2.6798E1	1.16886E-7	2.52139E-3	2.52139E-3	6.34661E-3	1.99754E-1
4.0E0	9.0E0	0.0E0	6.55E2	3.98E2	-2.09704E0	-8.18038E-1	-7.98655E-1	-9.131E0	-9.14164E0	6.10352E-3	9.30071E-2	2.73169E1	-3.26596E1	-3.26024E1	2.6801E1	1.16769E-7	2.51603E-3	2.51603E-3	6.30212E-3	2.00064E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09533E0	-8.18157E-1	-7.98702E-1	-9.13107E0	-9.14176E0	6.17504E-3	9.32217E-2	2.73363E1	-3.26795E1	-3.2644E1	2.68034E1	1.16873E-7	2.52384E-3	2.52384E-3	6.33436E-3	2.00192E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0958E0	-8.17847E-1	-7.98345E-1	-9.13093E0	-9.1419E0	6.10352E-3	9.30071E-2	2.73045E1	-3.26464E1	-3.26038E1	2.68184E1	1.17032E-7	2.52099E-3	2.52099E-3	6.29098E-3	2.00325E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09533E0	-8.18133E-1	-7.98583E-1	-9.13115E0	-9.14195E0	6.10352E-3	9.34124E-2	2.72698E1	-3.26306E1	-3.2626E1	2.68169E1	1.16727E-7	2.52428E-3	2.52428E-3	6.30192E-3	2.00151E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09627E0	-8.17823E-1	-7.98202E-1	-9.13086E0	-9.14154E0	6.29425E-3	9.2864E-2	2.73424E1	-3.26687E1	-3.26302E1	2.68148E1	1.16916E-7	2.51814E-3	2.51814E-3	6.29157E-3	2.00903E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09619E0	-8.18062E-1	-7.98345E-1	-9.13098E0	-9.14171E0	5.88894E-3	9.28164E-2	2.73405E1	-3.26579E1	-3.262E1	2.68142E1	1.16886E-7	2.52697E-3	2.52697E-3	6.31299E-3	2.00463E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09627E0	-8.18157E-1	-7.98488E-1	-9.13081E0	-9.14156E0	5.79357E-3	9.30309E-2	2.73069E1	-3.26725E1	-3.26217E1	2.68298E1	1.16674E-7	2.52599E-3	2.52599E-3	6.31278E-3	2.00192E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09572E0	-8.18348E-1	-7.98655E-1	-9.13062E0	-9.14161E0	5.93662E-3	9.28164E-2	2.7347E1	-3.26903E1	-3.26136E1	2.6807E1	1.16835E-7	2.51915E-3	2.51915E-3	6.30182E-3	2.00463E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09572E0	-8.18086E-1	-7.98845E-1	-9.13093E0	-9.14185E0	6.03199E-3	9.29594E-2	2.72961E1	-3.26603E1	-3.26074E1	2.67662E1	1.16973E-7	2.51954E-3	2.51954E-3	6.31817E-3	2.00363E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09541E0	-8.17919E-1	-7.98869E-1	-9.13072E0	-9.14152E0	5.91278E-3	9.29594E-2	2.72805E1	-3.26675E1	-3.26518E1	2.68244E1	1.16829E-7	2.52099E-3	2.52099E-3	6.29645E-3	1.99977E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09541E0	-8.17895E-1	-7.9844E-1	-9.13112E0	-9.14192E0	5.96046E-3	9.29356E-2	2.73075E1	-3.26362E1	-3.26705E1	2.67974E1	1.16829E-7	2.5199E-3	2.5199E-3	6.32936E-3	2.01547E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09588E0	-8.17919E-1	-7.98535E-1	-9.13131E0	-9.14166E0	5.98431E-3	9.27925E-2	2.73195E1	-3.26651E1	-3.26464E1	2.67992E1	1.17185E-7	2.52099E-3	2.52099E-3	6.31288E-3	1.99803E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09541E0	-8.17871E-1	-7.98512E-1	-9.13115E0	-9.14197E0	5.93662E-3	9.31501E-2	2.73303E1	-3.26861E1	-3.26122E1	2.68262E1	1.1688E-7	2.5199E-3	2.5199E-3	6.3074E-3	2.01022E-1
2.0E1	4.0E0	0.0E0	8.08E2	5.58E2	-2.0965E0	-8.17871E-1	-7.98488E-1	-9.13088E0	-9.14199E0	6.10352E-3	9.30548E-2	2.72721E1	-3.26669E1	-3.26026E1	2.68148E1	1.16835E-7	2.5147E-3	2.5147E-3	6.3074E-3	2.0064E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09634E0	-8.1811E-1	-7.98678E-1	-9.13124E0	-9.14199E0	6.17504E-3	9.2864E-2	2.72697E1	-3.27062E1	-3.2636E1	2.68011E1	1.16873E-7	2.51847E-3	2.51847E-3	6.32356E-3	2.00534E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09595E0	-8.18038E-1	-7.98726E-1	-9.13093E0	-9.14204E0	6.34193E-3	9.30548E-2	2.73423E1	-3.25877E1	-3.26036E1	2.6817E1	1.17023E-7	2.51632E-3	2.51632E-3	6.31278E-3	2.00705E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09565E0	-8.18133E-1	-7.98821E-1	-9.1311E0	-9.14197E0	6.00815E-3	9.29356E-2	2.73165E1	-3.26633E1	-3.26645E1	2.68364E1	1.16981E-7	2.51225E-3	2.51225E-3	6.32936E-3	2.00151E-1