[Scan]
initial_time=2015-12-15T17:42:38
final_time=2015-12-15T17:42:57
ip_count=19
run=1017
dataset=1
scan=38
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=27.0
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09572E0
qbias_imon=-1.08761E-4
ql1_vset=
ql1_vmon=-8.17871E-1
ql1_imon=1.36439E-8
ql2_vset=
ql2_vmon=-7.98678E-1
ql2_imon=2.00663E-9
ql3_vset=
ql3_vmon=-9.13086E0
ql3_imon=5.96023E-10
ql4_vset=
ql4_vmon=-9.14156E0
ql4_imon=-4.49657E-11
mult1=-9.22264E-9
mult2=-2.73658E-9
rf_tmon=-4.3502E-3
rf_agc=3.32915E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=6.07967E-3
ql5_imon=1.72035E-9
bslens_vset=-6.2E0
bslens_vmon=-6.67455E0
bslens_imon=2.40437E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19977E1
lens5a_imon=1.96901E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12471E2
lens4a_imon=2.04938E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53919E1
cs_ef1b_imon=2.85363E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04638E2
lens23_imon=1.02197E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05222E1
cs_ea1_imon=2.53787E-5
lens1_vset=-5.0E0
lens1_vmon=-5.42002E0
lens1_imon=2.60985E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64771E1
os_ef1alow_imon=2.96049E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04165E1
cs_ea2_imon=1.54615E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84468E1
cs_ef1a_imon=2.95094E-5
olens2_vset=9.7E-1
olens2_vmon=9.70316E-1
olens2_imon=1.25248E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11253E1
os_restr1_imon=4.30581E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14939E1
os_ea1_imon=2.3706E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63703E1
os_ef1bup_imon=3.08328E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22386E0
cs_ionrep_imon=1.18962E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91898E2
cs_nozzle_imon=1.93297E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01974E1
cs_anode1_imon=2.9704E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20589E0
olens4_imon=3.25125E-8
tplens_vset=1.4E-1
tplens_vmon=1.57835E0
tplens_imon=-3.4621E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26218E1
iondef3_imon=1.50902E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2635E1
iondef2_imon=1.57932E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02939E2
lens6_imon=2.98299E-4
ql6_vset=1.0E-1
ql6_vmon=9.31978E-2
ql6_imon=4.03068E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26832E0
ionrepsh_imon=1.78985E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33532E1
lens5b_imon=2.16692E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74778E1
cs_ef2b_imon=3.11052E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.28635E0
os_ea2_imon=-6.77866E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06116E2
lens4b_imon=2.00356E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71234E1
cs_ef2a_imon=3.17846E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05721E0
os_ef2alow_imon=-2.67625E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.82287E-1
os_ef2bup_imon=-5.34423E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10911E1
os_restr2_imon=3.43995E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23069E2
cs_ionfoca_imon=6.29856E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.0188E1
cs_anode2_imon=2.2659E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73009E1
iondef1_imon=1.09048E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68346E1
iondef4_imon=1.07981E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=4.4378E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82189E-1
olens1_imon=7.37772E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.18381E0
cs_ionaccel_imon=-1.81641E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02056E2
cs_ionfocb_imon=1.47173E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56417E1
einzel_imon=7.66307E-6
window_vset=0.0E0
window_vmon=1.553E-1
window_imon=-1.04503E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82627E2
mask1_imon=2.39088E-4
mask2_vset=0.0E0
mask2_vmon=-1.86073E1
mask2_imon=-6.87646E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92678E3
multa_neg_imon=7.5234E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93741E3
defgrida_imon=6.31574E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50133E3
multb_neg_imon=7.36478E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.25119E0
defgridb_imon=5.97688E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3333E1
os_fil1_imon=9.40232E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06568E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63962E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30912E1
cs_fil1_imon=9.96193E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62908E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66078E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.21558E-2
os_fil2_imon=-2.72068E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.80852E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.41843E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36961E-1
cs_fil2_imon=-1.98941E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=7.23398E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22298E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32936E-3
inlet_lpb_pmon=2.00325E-1
chamber_ion_pmon=1.16778E-7
chamber_cvt_pmon=2.52099E-3
foreline_cvt_pmon=2.52099E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.22056E-1
res40_imon=-2.61256E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=151
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	5.0E0	0.0E0	1.47E2	4.1E1	-2.09565E0	-8.17919E-1	-7.98726E-1	-9.13112E0	-9.14183E0	6.00815E-3	9.28164E-2	2.72951E1	-3.26496E1	-3.26537E1	2.68214E1	1.16829E-7	2.52209E-3	2.52209E-3	6.31837E-3	1.98247E-1
2.0E0	2.7E1	0.0E0	3.16E2	1.6E2	-2.0951E0	-8.1811E-1	-7.98869E-1	-9.13069E0	-9.14195E0	5.84126E-3	9.30071E-2	2.73069E1	-3.26885E1	-3.26284E1	2.68136E1	1.16973E-7	2.52492E-3	2.52492E-3	6.29128E-3	2.00363E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09487E0	-8.18181E-1	-7.98821E-1	-9.13117E0	-9.1419E0	5.93662E-3	9.29832E-2	2.73305E1	-3.26408E1	-3.26313E1	2.68337E1	1.16778E-7	2.5199E-3	2.5199E-3	6.31837E-3	2.01372E-1
4.0E0	8.0E0	0.0E0	6.55E2	3.98E2	-2.09533E0	-8.18133E-1	-7.9906E-1	-9.1311E0	-9.14187E0	5.74589E-3	9.30071E-2	2.7288E1	-3.26526E1	-3.26331E1	2.68298E1	1.16774E-7	2.51847E-3	2.51847E-3	6.31278E-3	2.01734E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09449E0	-8.18014E-1	-7.99036E-1	-9.13107E0	-9.14185E0	5.53131E-3	9.29594E-2	2.73033E1	-3.26362E1	-3.2632E1	2.68148E1	1.16873E-7	2.52276E-3	2.52276E-3	6.32896E-3	1.9951E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0948E0	-8.18157E-1	-7.9875E-1	-9.13117E0	-9.14211E0	5.79357E-3	9.29594E-2	2.73116E1	-3.26408E1	-3.26384E1	2.67962E1	1.17083E-7	2.52209E-3	2.52209E-3	6.31837E-3	1.99977E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09557E0	-8.18133E-1	-7.98821E-1	-9.13098E0	-9.14199E0	5.88894E-3	9.32217E-2	2.72943E1	-3.2638E1	-3.26242E1	2.681E1	1.16774E-7	2.51739E-3	2.51739E-3	6.34518E-3	1.9917E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09572E0	-8.17895E-1	-7.98798E-1	-9.13067E0	-9.14197E0	6.00815E-3	9.31025E-2	2.73417E1	-3.26657E1	-3.26176E1	2.68082E1	1.1688E-7	2.51771E-3	2.51771E-3	6.32386E-3	1.98937E-1
1.2E1	1.0E0	0.0E0	4.85E2	3.23E2	-2.09603E0	-8.1811E-1	-7.98988E-1	-9.13088E0	-9.14173E0	5.79357E-3	9.2864E-2	2.72996E1	-3.26389E1	-3.26297E1	2.68202E1	1.16727E-7	2.51662E-3	2.51662E-3	6.31837E-3	1.99456E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09557E0	-8.17919E-1	-7.98988E-1	-9.13098E0	-9.14173E0	5.96046E-3	9.32217E-2	2.73252E1	-3.26632E1	-3.26496E1	2.68238E1	1.16938E-7	2.52362E-3	2.52362E-3	6.32418E-3	1.98344E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09572E0	-8.1768E-1	-7.9875E-1	-9.13105E0	-9.14173E0	5.84126E-3	9.32217E-2	2.72961E1	-3.26705E1	-3.2614E1	2.68172E1	1.16823E-7	2.52384E-3	2.52384E-3	6.32356E-3	1.98491E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09634E0	-8.17871E-1	-7.98774E-1	-9.13088E0	-9.14185E0	5.84126E-3	9.28879E-2	2.73363E1	-3.26699E1	-3.26296E1	2.6807E1	1.17032E-7	2.52647E-3	2.52647E-3	6.35692E-3	1.97903E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09557E0	-8.18086E-1	-7.98535E-1	-9.131E0	-9.14185E0	5.8651E-3	9.28402E-2	2.73405E1	-3.26807E1	-3.2623E1	2.67992E1	1.16829E-7	2.52099E-3	2.52099E-3	6.31837E-3	1.98937E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09572E0	-8.178E-1	-7.98392E-1	-9.13086E0	-9.14164E0	5.8651E-3	9.26733E-2	2.73187E1	-3.26797E1	-3.2593E1	2.68064E1	1.17134E-7	2.52538E-3	2.52538E-3	6.31288E-3	2.01372E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09557E0	-8.1749E-1	-7.98368E-1	-9.13105E0	-9.14161E0	5.84126E-3	9.26971E-2	2.7299E1	-3.26597E1	-3.26634E1	2.6783E1	1.16873E-7	2.52169E-3	2.52169E-3	6.33436E-3	2.00192E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09565E0	-8.18038E-1	-7.98583E-1	-9.13084E0	-9.14192E0	6.00815E-3	9.28879E-2	2.7337E1	-3.26744E1	-3.26337E1	2.6816E1	1.16938E-7	2.51693E-3	2.51693E-3	6.31858E-3	2.01174E-1
2.0E1	1.0E0	0.0E0	8.08E2	5.58E2	-2.09541E0	-8.18348E-1	-7.98488E-1	-9.13069E0	-9.14187E0	5.76973E-3	9.31025E-2	2.73016E1	-3.26573E1	-3.2636E1	2.68163E1	1.16873E-7	2.52384E-3	2.52384E-3	6.31278E-3	2.00534E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0965E0	-8.1811E-1	-7.98631E-1	-9.13103E0	-9.14154E0	6.05583E-3	9.30548E-2	2.73151E1	-3.2688E1	-3.25835E1	2.68124E1	1.16873E-7	2.52276E-3	2.52276E-3	6.31278E-3	2.00705E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09603E0	-8.18086E-1	-7.98368E-1	-9.13091E0	-9.1419E0	6.36578E-3	9.30071E-2	2.72913E1	-3.26921E1	-3.26404E1	2.68058E1	1.17173E-7	2.5131E-3	2.5131E-3	6.31278E-3	2.00021E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09572E0	-8.17871E-1	-7.98678E-1	-9.13086E0	-9.14156E0	6.07967E-3	9.31978E-2	2.73009E1	-3.2635E1	-3.26218E1	2.68346E1	1.16778E-7	2.52099E-3	2.52099E-3	6.32936E-3	2.00325E-1