[Scan]
initial_time=2015-12-15T17:43:05
final_time=2015-12-15T17:43:24
ip_count=19
run=1017
dataset=1
scan=39
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=27.0
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0951E0
qbias_imon=-1.08779E-4
ql1_vset=
ql1_vmon=-8.17919E-1
ql1_imon=1.36573E-8
ql2_vset=
ql2_vmon=-7.9844E-1
ql2_imon=1.98607E-9
ql3_vset=
ql3_vmon=-9.13105E0
ql3_imon=5.43153E-10
ql4_vset=
ql4_vmon=-9.14187E0
ql4_imon=-3.78013E-11
mult1=-9.53482E-9
mult2=-2.7017E-9
rf_tmon=-4.52717E-3
rf_agc=3.35038E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.96046E-3
ql5_imon=1.78818E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66013E0
bslens_imon=2.60625E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19989E1
lens5a_imon=1.97262E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12494E2
lens4a_imon=2.05039E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53718E1
cs_ef1b_imon=2.85007E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04635E2
lens23_imon=1.02031E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04856E1
cs_ea1_imon=2.49822E-5
lens1_vset=-5.0E0
lens1_vmon=-5.42123E0
lens1_imon=2.52694E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64548E1
os_ef1alow_imon=2.96937E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03774E1
cs_ea2_imon=1.52993E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84352E1
cs_ef1a_imon=2.94306E-5
olens2_vset=9.7E-1
olens2_vmon=9.70292E-1
olens2_imon=1.25385E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11201E1
os_restr1_imon=4.29743E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15552E1
os_ea1_imon=2.37673E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63798E1
os_ef1bup_imon=3.08253E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24188E0
cs_ionrep_imon=1.19178E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91876E2
cs_nozzle_imon=1.9346E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01875E1
cs_anode1_imon=2.98811E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20551E0
olens4_imon=3.25684E-8
tplens_vset=1.4E-1
tplens_vmon=1.56693E0
tplens_imon=-4.111E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26065E1
iondef3_imon=1.50325E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2675E1
iondef2_imon=1.55156E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0293E2
lens6_imon=2.98454E-4
ql6_vset=1.0E-1
ql6_vmon=9.30548E-2
ql6_imon=4.07671E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28034E0
ionrepsh_imon=1.77831E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3373E1
lens5b_imon=2.17161E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74802E1
cs_ef2b_imon=3.11929E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.31458E0
os_ea2_imon=-7.49965E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06099E2
lens4b_imon=2.00644E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71336E1
cs_ef2a_imon=3.17984E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06777E0
os_ef2alow_imon=-2.76727E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.91417E-1
os_ef2bup_imon=-5.39816E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11027E1
os_restr2_imon=3.4332E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23087E2
cs_ionfoca_imon=6.30469E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01815E1
cs_anode2_imon=2.25254E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72974E1
iondef1_imon=1.08183E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68268E1
iondef4_imon=1.08233E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7179E1
olens3_imon=4.49101E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.8207E-1
olens1_imon=7.40065E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13014E0
cs_ionaccel_imon=-1.83023E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02076E2
cs_ionfocb_imon=1.47251E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56579E1
einzel_imon=7.70226E-6
window_vset=0.0E0
window_vmon=1.35052E-1
window_imon=-1.10944E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82619E2
mask1_imon=2.39026E-4
mask2_vset=0.0E0
mask2_vmon=-1.86098E1
mask2_imon=-7.34629E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92634E3
multa_neg_imon=7.85866E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93728E3
defgrida_imon=6.71229E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50122E3
multb_neg_imon=7.11604E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.30532E0
defgridb_imon=5.87594E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33316E1
os_fil1_imon=9.40606E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06596E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64014E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30914E1
cs_fil1_imon=9.96209E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62906E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6643E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.0995E-2
os_fil2_imon=-2.56986E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.80295E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.421E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35867E-1
cs_fil2_imon=-2.45574E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.0281E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22248E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31837E-3
inlet_lpb_pmon=1.99977E-1
chamber_ion_pmon=1.1693E-7
chamber_cvt_pmon=2.51771E-3
foreline_cvt_pmon=2.51771E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.36777E-1
res40_imon=-2.49697E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=209
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	9.0E0	0.0E0	1.47E2	4.1E1	-2.0941E0	-8.18062E-1	-7.98368E-1	-9.13091E0	-9.14152E0	6.1512E-3	9.28879E-2	2.72998E1	-3.26089E1	-3.26467E1	2.68151E1	1.1693E-7	2.52209E-3	2.52209E-3	6.3074E-3	1.99283E-1
2.0E0	3.3E1	0.0E0	3.16E2	1.6E2	-2.09503E0	-8.17871E-1	-7.98368E-1	-9.13105E0	-9.14159E0	6.12736E-3	9.2864E-2	2.72892E1	-3.2678E1	-3.26364E1	2.68094E1	1.16923E-7	2.52169E-3	2.52169E-3	6.33436E-3	2.00363E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09642E0	-8.18062E-1	-7.98678E-1	-9.13095E0	-9.14159E0	5.98431E-3	9.31263E-2	2.73248E1	-3.26642E1	-3.26399E1	2.68036E1	1.17042E-7	2.52027E-3	2.52027E-3	6.29624E-3	1.99754E-1
4.0E0	5.0E0	0.0E0	6.55E2	3.98E2	-2.09673E0	-8.18348E-1	-7.98392E-1	-9.13076E0	-9.14173E0	5.8651E-3	9.30309E-2	2.73267E1	-3.26669E1	-3.26356E1	2.67986E1	1.16867E-7	2.51709E-3	2.51709E-3	6.32858E-3	2.00231E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09696E0	-8.18205E-1	-7.98798E-1	-9.13072E0	-9.14171E0	6.1512E-3	9.30071E-2	2.72991E1	-3.26699E1	-3.26452E1	2.67962E1	1.16778E-7	2.51334E-3	2.51334E-3	6.33486E-3	2.00673E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09657E0	-8.18229E-1	-7.98702E-1	-9.13091E0	-9.14147E0	5.74589E-3	9.30071E-2	2.73364E1	-3.26917E1	-3.26401E1	2.68113E1	1.16626E-7	2.52867E-3	2.52867E-3	6.31288E-3	2.00151E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09704E0	-8.18014E-1	-7.98821E-1	-9.13088E0	-9.14161E0	5.93662E-3	9.31501E-2	2.72964E1	-3.26703E1	-3.25872E1	2.68366E1	1.16987E-7	2.52014E-3	2.52014E-3	6.30384E-3	2.00262E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09711E0	-8.1799E-1	-7.98702E-1	-9.13088E0	-9.14154E0	5.84126E-3	9.3317E-2	2.72775E1	-3.26641E1	-3.26439E1	2.68163E1	1.16792E-7	2.52038E-3	2.52038E-3	6.30019E-3	2.0035E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0951E0	-8.17847E-1	-7.98464E-1	-9.13072E0	-9.14161E0	5.93662E-3	9.32455E-2	2.72856E1	-3.26266E1	-3.26254E1	2.68151E1	1.1673E-7	2.52088E-3	2.52088E-3	6.33706E-3	2.00064E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09557E0	-8.18086E-1	-7.98607E-1	-9.13086E0	-9.14159E0	5.96046E-3	9.28879E-2	2.72877E1	-3.26392E1	-3.26476E1	2.68214E1	1.17223E-7	2.51632E-3	2.51632E-3	6.31817E-3	1.9951E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09541E0	-8.18253E-1	-7.98512E-1	-9.13098E0	-9.14187E0	5.62668E-3	9.30071E-2	2.73293E1	-3.2652E1	-3.26691E1	2.68178E1	1.1688E-7	2.5188E-3	2.5188E-3	6.34588E-3	1.99977E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0958E0	-8.18181E-1	-7.98464E-1	-9.13098E0	-9.14161E0	5.84126E-3	9.32217E-2	2.73045E1	-3.26933E1	-3.26741E1	2.68178E1	1.17073E-7	2.52169E-3	2.52169E-3	6.32896E-3	2.00021E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0958E0	-8.17919E-1	-7.98321E-1	-9.13103E0	-9.14147E0	6.05583E-3	9.26495E-2	2.73352E1	-3.26508E1	-3.2606E1	2.68163E1	1.1693E-7	2.52428E-3	2.52428E-3	6.32936E-3	2.00499E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.0958E0	-8.18062E-1	-7.98631E-1	-9.13103E0	-9.14166E0	5.65052E-3	9.30548E-2	2.73124E1	-3.26676E1	-3.26523E1	2.68007E1	1.17023E-7	2.52169E-3	2.52169E-3	6.31817E-3	2.01391E-1
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09611E0	-8.18038E-1	-7.98702E-1	-9.13124E0	-9.14178E0	6.10352E-3	9.30309E-2	2.73039E1	-3.26774E1	-3.26609E1	2.68256E1	1.17042E-7	2.51915E-3	2.51915E-3	6.32418E-3	2.0153E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09518E0	-8.18276E-1	-7.98726E-1	-9.13119E0	-9.14173E0	5.91278E-3	9.27448E-2	2.72871E1	-3.26457E1	-3.26341E1	2.68142E1	1.16677E-7	2.52538E-3	2.52538E-3	6.31837E-3	2.01897E-1
2.0E1	6.0E0	0.0E0	8.08E2	5.58E2	-2.0948E0	-8.18133E-1	-7.98702E-1	-9.13088E0	-9.14161E0	5.79357E-3	9.29117E-2	2.73008E1	-3.26848E1	-3.26352E1	2.68118E1	1.16923E-7	2.52276E-3	2.52276E-3	6.32356E-3	2.01219E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09441E0	-8.18014E-1	-7.98678E-1	-9.13117E0	-9.14149E0	5.43594E-3	9.28402E-2	2.73092E1	-3.26046E1	-3.267E1	2.68151E1	1.16938E-7	2.51693E-3	2.51693E-3	6.32418E-3	2.00285E-1
2.2E1	2.0E0	0.0E0	8.89E2	6.17E2	-2.09441E0	-8.1811E-1	-7.98559E-1	-9.13103E0	-9.1414E0	6.07967E-3	9.30548E-2	2.72895E1	-3.26681E1	-3.26158E1	2.68334E1	1.16965E-7	2.52659E-3	2.52659E-3	6.30212E-3	2.01072E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0951E0	-8.17919E-1	-7.9844E-1	-9.13105E0	-9.14187E0	5.96046E-3	9.30548E-2	2.72974E1	-3.2675E1	-3.26065E1	2.68268E1	1.1693E-7	2.51771E-3	2.51771E-3	6.31837E-3	1.99977E-1