[Scan]
initial_time=2015-12-15T17:43:31
final_time=2015-12-15T17:43:51
ip_count=19
run=1017
dataset=1
scan=40
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=27.0
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09557E0
qbias_imon=-1.08796E-4
ql1_vset=
ql1_vmon=-8.17823E-1
ql1_imon=1.35765E-8
ql2_vset=
ql2_vmon=-7.98798E-1
ql2_imon=2.0288E-9
ql3_vset=
ql3_vmon=-9.13093E0
ql3_imon=5.21815E-10
ql4_vset=
ql4_vmon=-9.14185E0
ql4_imon=-3.44634E-11
mult1=-9.33101E-9
mult2=-2.75454E-9
rf_tmon=-5.65399E-3
rf_agc=3.29911E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.6982E-3
ql5_imon=1.72858E-9
bslens_vset=-6.2E0
bslens_vmon=-6.67683E0
bslens_imon=2.62113E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.1973E1
lens5a_imon=1.9851E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12525E2
lens4a_imon=2.05033E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53736E1
cs_ef1b_imon=2.8462E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04629E2
lens23_imon=1.01979E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05006E1
cs_ea1_imon=2.53229E-5
lens1_vset=-5.0E0
lens1_vmon=-5.32832E0
lens1_imon=2.52202E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.646E1
os_ef1alow_imon=2.97606E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04038E1
cs_ea2_imon=1.52993E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84415E1
cs_ef1a_imon=2.93997E-5
olens2_vset=9.7E-1
olens2_vmon=9.70554E-1
olens2_imon=1.25099E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11448E1
os_restr1_imon=4.30793E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15146E1
os_ea1_imon=2.37656E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63851E1
os_ef1bup_imon=3.07018E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.29575E0
cs_ionrep_imon=1.2089E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91864E2
cs_nozzle_imon=1.93261E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01927E1
cs_anode1_imon=2.98031E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20592E0
olens4_imon=3.25105E-8
tplens_vset=1.4E-1
tplens_vmon=1.62256E0
tplens_imon=-2.06863E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26014E1
iondef3_imon=1.49949E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26813E1
iondef2_imon=1.56355E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02941E2
lens6_imon=2.98367E-4
ql6_vset=1.0E-1
ql6_vmon=9.29832E-2
ql6_imon=4.0331E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.281E0
ionrepsh_imon=1.77946E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3354E1
lens5b_imon=2.20348E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7489E1
cs_ef2b_imon=3.12538E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.34884E0
os_ea2_imon=-9.4306E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06114E2
lens4b_imon=2.00648E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71334E1
cs_ef2a_imon=3.18129E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.0749E0
os_ef2alow_imon=-2.59487E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.9821E-1
os_ef2bup_imon=-5.41146E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10994E1
os_restr2_imon=3.42863E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23095E2
cs_ionfoca_imon=6.29928E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01615E1
cs_anode2_imon=2.25351E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73027E1
iondef1_imon=1.07653E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6807E1
iondef4_imon=1.08371E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71788E1
olens3_imon=4.44542E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82451E-1
olens1_imon=7.3622E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11068E0
cs_ionaccel_imon=-1.82349E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02082E2
cs_ionfocb_imon=1.47106E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56452E1
einzel_imon=7.74445E-6
window_vset=0.0E0
window_vmon=1.47043E-1
window_imon=-1.08395E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82639E2
mask1_imon=2.39208E-4
mask2_vset=0.0E0
mask2_vmon=-1.86043E1
mask2_imon=-6.98262E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92641E3
multa_neg_imon=7.64355E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93725E3
defgrida_imon=6.04727E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50119E3
multb_neg_imon=7.28961E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.46757E0
defgridb_imon=5.91631E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33315E1
os_fil1_imon=9.41335E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06663E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6399E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30848E1
cs_fil1_imon=9.94671E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63074E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66051E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.1926E-2
os_fil2_imon=-2.59094E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.81442E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.56333E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35054E-1
cs_fil2_imon=-2.19581E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=7.35193E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22208E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=2.00705E-1
chamber_ion_pmon=1.16923E-7
chamber_cvt_pmon=2.52492E-3
foreline_cvt_pmon=2.52492E-3
chamber_tmon=
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.39492E-1
res40_imon=-2.48517E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=151
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	9.0E0	0.0E0	1.47E2	4.1E1	-2.0948E0	-8.17943E-1	-7.98821E-1	-9.13105E0	-9.14183E0	5.81741E-3	9.29832E-2	2.72793E1	-3.26693E1	-3.26248E1	2.68377E1	1.16829E-7	2.52428E-3	2.52428E-3	6.29645E-3	1.99803E-1
2.0E0	3.0E1	0.0E0	3.16E2	1.6E2	-2.09557E0	-8.17871E-1	-7.98607E-1	-9.13119E0	-9.1418E0	5.93662E-3	9.30548E-2	2.73131E1	-3.26756E1	-3.26162E1	2.68169E1	1.1688E-7	2.51771E-3	2.51771E-3	6.3074E-3	2.01022E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09549E0	-8.17823E-1	-7.98655E-1	-9.13086E0	-9.14195E0	5.84126E-3	9.30071E-2	2.72981E1	-3.26834E1	-3.26498E1	2.68163E1	1.16835E-7	2.5225E-3	2.5225E-3	6.35223E-3	1.99931E-1
4.0E0	3.0E0	0.0E0	6.55E2	3.98E2	-2.09433E0	-8.17919E-1	-7.98678E-1	-9.131E0	-9.14171E0	5.98431E-3	9.30071E-2	2.7311E1	-3.26726E1	-3.26054E1	2.67746E1	1.16818E-7	2.52765E-3	2.52765E-3	6.32328E-3	1.99729E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09472E0	-8.1811E-1	-7.98345E-1	-9.13122E0	-9.14192E0	6.03199E-3	9.27687E-2	2.73027E1	-3.26597E1	-3.26338E1	2.68186E1	1.16724E-7	2.51739E-3	2.51739E-3	6.31278E-3	2.00363E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09456E0	-8.18133E-1	-7.98559E-1	-9.13093E0	-9.14192E0	6.00815E-3	9.32455E-2	2.73291E1	-3.26554E1	-3.26308E1	2.68184E1	1.16981E-7	2.52099E-3	2.52099E-3	6.3514E-3	1.99977E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09503E0	-8.18276E-1	-7.98559E-1	-9.131E0	-9.14176E0	5.96046E-3	9.29594E-2	2.73195E1	-3.26741E1	-3.26242E1	2.67926E1	1.16829E-7	2.5188E-3	2.5188E-3	6.31837E-3	2.01197E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09526E0	-8.18086E-1	-7.98488E-1	-9.13093E0	-9.14187E0	5.93662E-3	9.28402E-2	2.72903E1	-3.26496E1	-3.25853E1	2.68094E1	1.16829E-7	2.51225E-3	2.51225E-3	6.32386E-3	2.01197E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0958E0	-8.18181E-1	-7.98559E-1	-9.13124E0	-9.14154E0	5.76973E-3	9.26971E-2	2.73086E1	-3.26868E1	-3.26359E1	2.68377E1	1.16724E-7	2.52384E-3	2.52384E-3	6.29128E-3	2.00192E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09549E0	-8.18229E-1	-7.98535E-1	-9.13134E0	-9.14142E0	5.53131E-3	9.31501E-2	2.73171E1	-3.26314E1	-3.26224E1	2.68064E1	1.16671E-7	2.52236E-3	2.52236E-3	6.33919E-3	1.99896E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09518E0	-8.1811E-1	-7.98583E-1	-9.1311E0	-9.1419E0	5.8651E-3	9.26733E-2	2.73147E1	-3.26482E1	-3.26164E1	2.68178E1	1.17032E-7	2.51771E-3	2.51771E-3	6.31288E-3	1.99977E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0958E0	-8.18014E-1	-7.98512E-1	-9.13095E0	-9.1419E0	6.00815E-3	9.30071E-2	2.73017E1	-3.26898E1	-3.26294E1	2.68043E1	1.16981E-7	2.52209E-3	2.52209E-3	6.31837E-3	1.9963E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09518E0	-8.17919E-1	-7.98488E-1	-9.13131E0	-9.14185E0	5.79357E-3	9.2864E-2	2.73267E1	-3.26609E1	-3.26188E1	2.67962E1	1.16909E-7	2.5199E-3	2.5199E-3	6.3074E-3	2.00105E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09441E0	-8.18086E-1	-7.98678E-1	-9.13119E0	-9.14161E0	5.76973E-3	9.32217E-2	2.73027E1	-3.26938E1	-3.26349E1	2.67914E1	1.17032E-7	2.5199E-3	2.5199E-3	6.31288E-3	2.01022E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09541E0	-8.18086E-1	-7.98869E-1	-9.13095E0	-9.14161E0	5.98431E-3	9.30548E-2	2.73417E1	-3.26699E1	-3.26278E1	2.68292E1	1.16973E-7	2.52169E-3	2.52169E-3	6.3074E-3	2.00192E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09611E0	-8.18086E-1	-7.98535E-1	-9.13119E0	-9.14171E0	5.93662E-3	9.30548E-2	2.73231E1	-3.26909E1	-3.26212E1	2.6798E1	1.16724E-7	2.52061E-3	2.52061E-3	6.31817E-3	1.9883E-1
2.0E1	6.0E0	0.0E0	8.08E2	5.58E2	-2.09611E0	-8.17943E-1	-7.98607E-1	-9.13122E0	-9.14171E0	5.84126E-3	9.31501E-2	2.72769E1	-3.265E1	-3.26308E1	2.6816E1	1.17093E-7	2.52362E-3	2.52362E-3	6.29067E-3	1.99577E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09634E0	-8.1768E-1	-7.98631E-1	-9.1315E0	-9.1418E0	5.98431E-3	9.30071E-2	2.73134E1	-3.26738E1	-3.26767E1	2.68088E1	1.1688E-7	2.5188E-3	2.5188E-3	6.31837E-3	1.99977E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09595E0	-8.17966E-1	-7.98559E-1	-9.13119E0	-9.14199E0	5.81741E-3	9.29832E-2	2.72821E1	-3.26496E1	-3.26319E1	2.68331E1	1.16873E-7	2.51847E-3	2.51847E-3	6.31817E-3	1.9883E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09557E0	-8.17823E-1	-7.98798E-1	-9.13093E0	-9.14185E0	5.6982E-3	9.29832E-2	2.73027E1	-3.26813E1	-3.26014E1	2.6807E1	1.16923E-7	2.52492E-3	2.52492E-3	6.31278E-3	2.00705E-1