[Scan]
initial_time=2015-12-15T17:43:58
final_time=2015-12-15T17:44:17
ip_count=19
run=1017
dataset=1
scan=41
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=27.0
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09634E0
qbias_imon=-1.08819E-4
ql1_vset=
ql1_vmon=-8.17823E-1
ql1_imon=1.36603E-8
ql2_vset=
ql2_vmon=-7.98798E-1
ql2_imon=2.02423E-9
ql3_vset=
ql3_vmon=-9.131E0
ql3_imon=4.93717E-10
ql4_vset=
ql4_vmon=-9.14173E0
ql4_imon=-3.69072E-11
mult1=-9.45141E-9
mult2=-2.66272E-9
rf_tmon=-5.60593E-3
rf_agc=3.20238E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.48363E-3
ql5_imon=1.73298E-9
bslens_vset=-6.2E0
bslens_vmon=-6.67034E0
bslens_imon=2.46225E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.1986E1
lens5a_imon=1.98795E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12482E2
lens4a_imon=2.04994E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53893E1
cs_ef1b_imon=2.85116E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04607E2
lens23_imon=1.01948E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04731E1
cs_ea1_imon=2.50547E-5
lens1_vset=-5.0E0
lens1_vmon=-5.34195E0
lens1_imon=2.56142E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64554E1
os_ef1alow_imon=2.96901E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03782E1
cs_ea2_imon=1.53838E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84334E1
cs_ef1a_imon=2.92828E-5
olens2_vset=9.7E-1
olens2_vmon=9.70244E-1
olens2_imon=1.24772E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11244E1
os_restr1_imon=4.30572E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1552E1
os_ea1_imon=2.37471E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63371E1
os_ef1bup_imon=3.06956E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24781E0
cs_ionrep_imon=1.19422E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91876E2
cs_nozzle_imon=1.93196E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01983E1
cs_anode1_imon=2.98594E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20592E0
olens4_imon=3.24402E-8
tplens_vset=1.4E-1
tplens_vmon=1.57348E0
tplens_imon=-4.32049E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26362E1
iondef3_imon=1.48438E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26482E1
iondef2_imon=1.56335E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0295E2
lens6_imon=2.98309E-4
ql6_vset=1.0E-1
ql6_vmon=9.26971E-2
ql6_imon=4.03818E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26128E0
ionrepsh_imon=1.78116E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33621E1
lens5b_imon=2.18519E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74609E1
cs_ef2b_imon=3.11352E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.3225E0
os_ea2_imon=-7.55271E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06101E2
lens4b_imon=2.00615E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7124E1
cs_ef2a_imon=3.17479E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.03474E0
os_ef2alow_imon=-2.68437E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.85411E-1
os_ef2bup_imon=-5.38735E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10799E1
os_restr2_imon=3.42887E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23087E2
cs_ionfoca_imon=6.29304E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02464E1
cs_anode2_imon=2.24857E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72985E1
iondef1_imon=1.0866E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67926E1
iondef4_imon=1.08197E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=4.45974E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82189E-1
olens1_imon=7.37306E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14936E0
cs_ionaccel_imon=-1.95998E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02073E2
cs_ionfocb_imon=1.4723E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56357E1
einzel_imon=7.63738E-6
window_vset=0.0E0
window_vmon=1.92115E-1
window_imon=-1.06259E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82649E2
mask1_imon=2.3912E-4
mask2_vset=0.0E0
mask2_vmon=-1.8614E1
mask2_imon=-6.76965E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92614E3
multa_neg_imon=7.29588E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93712E3
defgrida_imon=6.37029E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50123E3
multb_neg_imon=7.18202E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.37904E0
defgridb_imon=6.10584E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33338E1
os_fil1_imon=9.41381E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07587E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6373E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30924E1
cs_fil1_imon=9.95416E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63051E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66202E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.09488E-2
os_fil2_imon=-2.84617E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.88704E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.66467E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.37809E-1
cs_fil2_imon=-2.82815E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=6.8572E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22268E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29128E-3
inlet_lpb_pmon=2.00363E-1
chamber_ion_pmon=1.16774E-7
chamber_cvt_pmon=2.51417E-3
foreline_cvt_pmon=2.51417E-3
chamber_tmon=1.40093E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.24163E-1
res40_imon=-2.54022E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=155
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	5.0E0	0.0E0	1.47E2	4.1E1	-2.09565E0	-8.1811E-1	-7.98297E-1	-9.13129E0	-9.14183E0	5.88894E-3	9.30548E-2	2.73187E1	-3.26785E1	-3.26236E1	2.68209E1	1.16956E-7	2.51935E-3	2.51935E-3	6.29645E-3	2.0076E-1
2.0E0	3.4E1	0.0E0	3.16E2	1.6E2	-2.09526E0	-8.18014E-1	-7.98535E-1	-9.13098E0	-9.1418E0	5.8651E-3	9.2864E-2	2.72898E1	-3.26627E1	-3.26199E1	2.68356E1					
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09557E0	-8.18014E-1	-7.98464E-1	-9.13079E0	-9.14195E0	5.98431E-3	9.31263E-2	2.73138E1	-3.26758E1	-3.26335E1	2.68047E1	1.1688E-7	2.52099E-3	2.52099E-3	6.31288E-3	1.9911E-1
4.0E0	4.0E0	0.0E0	6.55E2	3.98E2	-2.09595E0	-8.18276E-1	-7.99084E-1	-9.13112E0	-9.14202E0	5.67436E-3	9.30071E-2	2.73137E1	-3.2675E1	-3.25954E1	2.67926E1	1.16923E-7	2.51739E-3	2.51739E-3	6.32356E-3	2.00192E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09549E0	-8.18419E-1	-7.99036E-1	-9.131E0	-9.14173E0	6.29425E-3	9.3174E-2	2.73015E1	-3.26843E1	-3.26308E1	2.6819E1	1.16783E-7	2.52027E-3	2.52027E-3	6.32418E-3	1.99048E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09603E0	-8.17919E-1	-7.99108E-1	-9.1311E0	-9.14161E0	5.79357E-3	9.35078E-2	2.72763E1	-3.26789E1	-3.26428E1	2.68016E1	1.17032E-7	2.52099E-3	2.52099E-3	6.32386E-3	1.99283E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09595E0	-8.17847E-1	-7.98869E-1	-9.13093E0	-9.14204E0	6.07967E-3	9.31501E-2	2.72751E1	-3.26885E1	-3.26248E1	2.6819E1	1.16973E-7	2.52276E-3	2.52276E-3	6.32896E-3	1.9883E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09549E0	-8.18062E-1	-7.98702E-1	-9.13084E0	-9.14183E0	5.76973E-3	9.29356E-2	2.73003E1	-3.2644E1	-3.26044E1	2.68094E1	1.1699E-7	2.51915E-3	2.51915E-3	6.32418E-3	2.00818E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09541E0	-8.17871E-1	-7.98893E-1	-9.13095E0	-9.14211E0	5.98431E-3	9.31978E-2	2.73153E1	-3.26518E1	-3.26116E1	2.68154E1	1.16973E-7	2.52492E-3	2.52492E-3	6.32896E-3	2.00876E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09572E0	-8.17895E-1	-7.98512E-1	-9.13081E0	-9.14202E0	5.81741E-3	9.31978E-2	2.73351E1	-3.26603E1	-3.26176E1	2.6822E1	1.16835E-7	2.52139E-3	2.52139E-3	6.33538E-3	2.0064E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09603E0	-8.17847E-1	-7.98607E-1	-9.13088E0	-9.14187E0	5.76973E-3	9.31501E-2	2.73327E1	-3.26476E1	-3.2614E1	2.68172E1	1.17023E-7	2.51525E-3	2.51525E-3	6.3074E-3	2.01047E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09595E0	-8.17847E-1	-7.98631E-1	-9.13112E0	-9.14183E0	5.72205E-3	9.29832E-2	2.73141E1	-3.26597E1	-3.262E1	2.6819E1	1.16835E-7	2.52027E-3	2.52027E-3	6.31299E-3	2.0064E-1
1.6E1	2.0E0	0.0E0	6.47E2	4.41E2	-2.09503E0	-8.17847E-1	-7.98845E-1	-9.13105E0	-9.14197E0	5.8651E-3	9.26971E-2	2.73057E1	-3.26496E1	-3.26296E1	2.67956E1	1.17083E-7	2.5188E-3	2.5188E-3	6.32386E-3	2.00847E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09503E0	-8.17966E-1	-7.98655E-1	-9.13119E0	-9.14199E0	5.60284E-3	9.30309E-2	2.73246E1	-3.26779E1	-3.26526E1	2.68366E1	1.16923E-7	2.52492E-3	2.52492E-3	6.33436E-3	2.00363E-1
1.8E1	3.0E0	0.0E0	7.27E2	5.0E2	-2.09565E0	-8.17895E-1	-7.98321E-1	-9.131E0	-9.14195E0	5.76973E-3	9.31263E-2	2.73087E1	-3.26512E1	-3.26014E1	2.68082E1	1.16873E-7	2.51847E-3	2.51847E-3	6.32896E-3	2.00876E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09526E0	-8.17895E-1	-7.98774E-1	-9.13126E0	-9.14183E0	5.6982E-3	9.29594E-2	2.73093E1	-3.26482E1	-3.26464E1	2.6792E1	1.16981E-7	2.51552E-3	2.51552E-3	6.32936E-3	2.00673E-1
2.0E1	7.0E0	0.0E0	8.08E2	5.58E2	-2.09541E0	-8.17752E-1	-7.98488E-1	-9.13107E0	-9.14195E0	5.96046E-3	9.29356E-2	2.7308E1	-3.26785E1	-3.26077E1	2.68208E1	1.16923E-7	2.51525E-3	2.51525E-3	6.32896E-3	1.9883E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09595E0	-8.1768E-1	-7.9844E-1	-9.13107E0	-9.14176E0	5.88894E-3	9.28402E-2	2.72973E1	-3.26561E1	-3.26609E1	2.68016E1	1.1688E-7	2.51771E-3	2.51771E-3	6.3074E-3	1.98764E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09557E0	-8.17895E-1	-7.98297E-1	-9.13119E0	-9.14173E0	5.65052E-3	9.30071E-2	2.73433E1	-3.26689E1	-3.26527E1	2.68308E1	1.16973E-7	2.52384E-3	2.52384E-3	6.31817E-3	1.9917E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09634E0	-8.17823E-1	-7.98798E-1	-9.131E0	-9.14173E0	5.48363E-3	9.26971E-2	2.72985E1	-3.26482E1	-3.26362E1	2.67926E1	1.16774E-7	2.51417E-3	2.51417E-3	6.29128E-3	2.00363E-1