[Scan]
initial_time=2015-12-15T17:44:24
final_time=2015-12-15T17:44:44
ip_count=19
run=1017
dataset=1
scan=42
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=27.0
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09595E0
qbias_imon=-1.08759E-4
ql1_vset=
ql1_vmon=-8.17871E-1
ql1_imon=1.36491E-8
ql2_vset=
ql2_vmon=-7.98917E-1
ql2_imon=2.02665E-9
ql3_vset=
ql3_vmon=-9.13088E0
ql3_imon=4.94254E-10
ql4_vset=
ql4_vmon=-9.14204E0
ql4_imon=-3.05295E-11
mult1=-8.78918E-9
mult2=-2.70065E-9
rf_tmon=-4.35621E-3
rf_agc=3.32855E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=6.00815E-3
ql5_imon=1.78142E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65472E0
bslens_imon=2.27099E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20079E1
lens5a_imon=1.96937E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12462E2
lens4a_imon=2.04923E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53604E1
cs_ef1b_imon=2.858E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04606E2
lens23_imon=1.02215E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04844E1
cs_ea1_imon=2.51444E-5
lens1_vset=-5.0E0
lens1_vmon=-5.39299E0
lens1_imon=2.71079E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64777E1
os_ef1alow_imon=2.95567E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04051E1
cs_ea2_imon=1.53714E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84016E1
cs_ef1a_imon=2.93765E-5
olens2_vset=9.7E-1
olens2_vmon=9.70531E-1
olens2_imon=1.25044E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11388E1
os_restr1_imon=4.3086E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15191E1
os_ea1_imon=2.36736E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63521E1
os_ef1bup_imon=3.07821E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25751E0
cs_ionrep_imon=1.20116E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91869E2
cs_nozzle_imon=1.9329E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02055E1
cs_anode1_imon=2.97765E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20549E0
olens4_imon=3.25314E-8
tplens_vset=1.4E-1
tplens_vmon=1.59277E0
tplens_imon=-5.33668E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26302E1
iondef3_imon=1.48703E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26506E1
iondef2_imon=1.55913E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02963E2
lens6_imon=2.98364E-4
ql6_vset=1.0E-1
ql6_vmon=9.26256E-2
ql6_imon=4.04172E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29536E0
ionrepsh_imon=1.7848E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33526E1
lens5b_imon=2.18243E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74639E1
cs_ef2b_imon=3.11965E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.30978E0
os_ea2_imon=-6.85076E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.061E2
lens4b_imon=2.00468E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7133E1
cs_ef2a_imon=3.17731E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07378E0
os_ef2alow_imon=-2.60509E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.89015E-1
os_ef2bup_imon=-5.36573E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10769E1
os_restr2_imon=3.42202E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23082E2
cs_ionfoca_imon=6.30541E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01725E1
cs_anode2_imon=2.25326E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73213E1
iondef1_imon=1.08075E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68184E1
iondef4_imon=1.09711E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7179E1
olens3_imon=4.39011E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82141E-1
olens1_imon=7.36751E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14155E0
cs_ionaccel_imon=-1.97439E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02057E2
cs_ionfocb_imon=1.47262E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56621E1
einzel_imon=7.67703E-6
window_vset=0.0E0
window_vmon=1.11626E-1
window_imon=-9.83303E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82635E2
mask1_imon=2.39106E-4
mask2_vset=0.0E0
mask2_vmon=-1.86374E1
mask2_imon=-6.73362E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92644E3
multa_neg_imon=7.53782E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9372E3
defgrida_imon=6.39505E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50148E3
multb_neg_imon=6.93219E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.31735E0
defgridb_imon=6.13189E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33322E1
os_fil1_imon=9.42955E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07005E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63953E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30906E1
cs_fil1_imon=9.96678E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63051E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66171E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.22848E-2
os_fil2_imon=-2.73204E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.7609E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.49319E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3496E-1
cs_fil2_imon=-2.52181E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=5.05522E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22167E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=2.00363E-1
chamber_ion_pmon=1.16923E-7
chamber_cvt_pmon=2.52061E-3
foreline_cvt_pmon=2.52061E-3
chamber_tmon=1.40093E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.30771E-1
res40_imon=-2.65194E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=150
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09449E0	-8.17633E-1	-7.9844E-1	-9.13088E0	-9.14178E0	5.62668E-3	9.26256E-2	2.72871E1	-3.26434E1	-3.26173E1	2.68214E1	1.16783E-7	2.51804E-3	2.51804E-3	6.29067E-3	1.99931E-1
2.0E0	3.2E1	0.0E0	3.16E2	1.6E2	-2.0951E0	-8.178E-1	-7.9844E-1	-9.13076E0	-9.14195E0	5.93662E-3	9.30071E-2	2.73051E1	-3.26591E1	-3.2646E1	2.68202E1	1.17014E-7	2.51709E-3	2.51709E-3	6.32328E-3	1.99227E-1
3.0E0	0.0E0	1.0E0	4.85E2	2.79E2	-2.09449E0	-8.17752E-1	-7.98464E-1	-9.13112E0	-9.14173E0	5.8651E-3	9.26495E-2	2.73161E1	-3.26724E1	-3.2633E1	2.68286E1	1.16683E-7	2.51384E-3	2.51384E-3	6.3245E-3	1.98984E-1
4.0E0	6.0E0	0.0E0	6.55E2	3.98E2	-2.09518E0	-8.178E-1	-7.98273E-1	-9.13081E0	-9.14176E0	5.72205E-3	9.27925E-2	2.72933E1	-3.27015E1	-3.26425E1	2.68227E1	1.16916E-7	2.52448E-3	2.52448E-3	6.32858E-3	2.00064E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09549E0	-8.17776E-1	-7.98607E-1	-9.13095E0	-9.14202E0	5.43594E-3	9.29117E-2	2.73088E1	-3.26652E1	-3.26352E1	2.68292E1	1.16873E-7	2.51739E-3	2.51739E-3	6.32356E-3	2.00705E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09627E0	-8.18014E-1	-7.98726E-1	-9.13115E0	-9.14195E0	5.57899E-3	9.27448E-2	2.73119E1	-3.26328E1	-3.26084E1	2.68065E1	1.16783E-7	2.51915E-3	2.51915E-3	6.32418E-3	2.00818E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09549E0	-8.17919E-1	-7.98678E-1	-9.13119E0	-9.14192E0	5.88894E-3	9.2864E-2	2.73069E1	-3.26536E1	-3.26034E1	2.68172E1	1.17005E-7	2.52405E-3	2.52405E-3	6.30221E-3	1.99611E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09627E0	-8.17657E-1	-7.98631E-1	-9.13112E0	-9.14199E0	6.07967E-3	9.27687E-2	2.73429E1	-3.26621E1	-3.26212E1	2.68082E1	1.16934E-7	2.52008E-3	2.52008E-3	6.3074E-3	1.99954E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09518E0	-8.178E-1	-7.98893E-1	-9.13098E0	-9.14192E0	6.10352E-3	9.24826E-2	2.73051E1	-3.26408E1	-3.26178E1	2.68442E1					
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09611E0	-8.17966E-1	-7.98655E-1	-9.13091E0	-9.14218E0	5.91278E-3	9.30071E-2	2.73207E1	-3.26735E1	-3.26146E1	2.68112E1	1.16923E-7	2.52384E-3	2.52384E-3	6.31817E-3	2.00192E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.0965E0	-8.178E-1	-7.98488E-1	-9.13093E0	-9.14187E0	5.93662E-3	9.24826E-2	2.73201E1	-3.26488E1	-3.26242E1	2.68286E1	1.17032E-7	2.52099E-3	2.52099E-3	6.35692E-3	2.00673E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09526E0	-8.17895E-1	-7.98726E-1	-9.13093E0	-9.14168E0	5.67436E-3	9.31025E-2	2.73117E1	-3.265E1	-3.26506E1	2.68106E1	1.1693E-7	2.5188E-3	2.5188E-3	6.3074E-3	2.00499E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09619E0	-8.17657E-1	-7.98368E-1	-9.13107E0	-9.14166E0	5.62668E-3	9.27925E-2	2.72895E1	-3.26729E1	-3.26284E1	2.68268E1	1.1693E-7	2.5199E-3	2.5199E-3	6.32936E-3	1.98937E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09565E0	-8.17752E-1	-7.98583E-1	-9.13129E0	-9.1418E0	5.65052E-3	9.26971E-2	2.7308E1	-3.26614E1	-3.26335E1	2.6803E1	1.16973E-7	2.51203E-3	2.51203E-3	6.31817E-3	1.98322E-1
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09572E0	-8.17657E-1	-7.98535E-1	-9.13107E0	-9.14173E0	6.07967E-3	9.29832E-2	2.72659E1	-3.26438E1	-3.26456E1	2.67951E1	1.16818E-7	2.51814E-3	2.51814E-3	6.3074E-3	1.98727E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09449E0	-8.17871E-1	-7.98774E-1	-9.13107E0	-9.14173E0	6.03199E-3	9.29117E-2	2.73243E1	-3.26645E1	-3.26362E1	2.68238E1	1.16893E-7	2.52407E-3	2.52407E-3	6.33592E-3	1.98984E-1
2.0E1	3.0E0	0.0E0	8.08E2	5.58E2	-2.09449E0	-8.1799E-1	-7.98798E-1	-9.13093E0	-9.14209E0	5.96046E-3	9.28402E-2	2.73339E1	-3.26687E1	-3.26284E1	2.68146E1	1.16829E-7	2.52647E-3	2.52647E-3	6.28552E-3	2.00151E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09526E0	-8.178E-1	-7.98631E-1	-9.131E0	-9.14218E0	6.17504E-3	9.2864E-2	2.72774E1	-3.26366E1	-3.27021E1	2.67848E1	1.16981E-7	2.51225E-3	2.51225E-3	6.31837E-3	2.00847E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09588E0	-8.17776E-1	-7.98631E-1	-9.131E0	-9.14237E0	5.74589E-3	9.28164E-2	2.73252E1	-3.26832E1	-3.26526E1	2.6836E1	1.17173E-7	2.51632E-3	2.51632E-3	6.29665E-3	2.00534E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09595E0	-8.17871E-1	-7.98917E-1	-9.13088E0	-9.14204E0	6.00815E-3	9.26256E-2	2.73213E1	-3.26506E1	-3.26302E1	2.68184E1	1.16923E-7	2.52061E-3	2.52061E-3	6.31278E-3	2.00363E-1