[Scan]
initial_time=2015-12-15T17:45:18
final_time=2015-12-15T17:45:37
ip_count=19
run=1017
dataset=1
scan=44
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=27.0
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09472E0
qbias_imon=-1.08857E-4
ql1_vset=
ql1_vmon=-8.17609E-1
ql1_imon=1.36092E-8
ql2_vset=
ql2_vmon=-7.98392E-1
ql2_imon=2.07239E-9
ql3_vset=
ql3_vmon=-9.13091E0
ql3_imon=4.47631E-10
ql4_vset=
ql4_vmon=-9.14173E0
ql4_imon=-2.97546E-11
mult1=-9.46345E-9
mult2=-2.71661E-9
rf_tmon=-4.81885E-3
rf_agc=3.35198E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.96046E-3
ql5_imon=1.72209E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66133E0
bslens_imon=2.6423E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19845E1
lens5a_imon=1.97514E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12494E2
lens4a_imon=2.05093E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53826E1
cs_ef1b_imon=2.85368E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04587E2
lens23_imon=1.02121E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04688E1
cs_ea1_imon=2.49029E-5
lens1_vset=-5.0E0
lens1_vmon=-5.37857E0
lens1_imon=2.56659E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64572E1
os_ef1alow_imon=2.95531E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0351E1
cs_ea2_imon=1.56273E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84346E1
cs_ef1a_imon=2.9445E-5
olens2_vset=9.7E-1
olens2_vmon=9.7034E-1
olens2_imon=1.24748E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11328E1
os_restr1_imon=4.30031E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15348E1
os_ea1_imon=2.38971E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63779E1
os_ef1bup_imon=3.09046E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26051E0
cs_ionrep_imon=1.19214E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91894E2
cs_nozzle_imon=1.9342E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01863E1
cs_anode1_imon=2.97585E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20601E0
olens4_imon=3.25421E-8
tplens_vset=1.4E-1
tplens_vmon=1.57714E0
tplens_imon=-4.07495E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26242E1
iondef3_imon=1.47838E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26524E1
iondef2_imon=1.5703E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02961E2
lens6_imon=2.9818E-4
ql6_vset=1.0E-1
ql6_vmon=9.2721E-2
ql6_imon=4.04099E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28514E0
ionrepsh_imon=1.7729E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34018E1
lens5b_imon=2.17738E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74717E1
cs_ef2b_imon=3.13263E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.28755E0
os_ea2_imon=-6.99496E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06134E2
lens4b_imon=2.0036E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71186E1
cs_ef2a_imon=3.17191E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05456E0
os_ef2alow_imon=-2.63752E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.98625E-1
os_ef2bup_imon=-5.30446E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11057E1
os_restr2_imon=3.42815E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23091E2
cs_ionfoca_imon=6.30469E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01359E1
cs_anode2_imon=2.2511E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73063E1
iondef1_imon=1.06849E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68106E1
iondef4_imon=1.0881E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71789E1
olens3_imon=4.43518E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82547E-1
olens1_imon=7.35978E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11573E0
cs_ionaccel_imon=-1.89871E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02091E2
cs_ionfocb_imon=1.47183E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56231E1
einzel_imon=7.71307E-6
window_vset=0.0E0
window_vmon=1.75296E-1
window_imon=-1.00132E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82618E2
mask1_imon=2.39124E-4
mask2_vset=0.0E0
mask2_vmon=-1.8614E1
mask2_imon=-7.70669E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92665E3
multa_neg_imon=7.26385E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93699E3
defgrida_imon=6.46355E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50135E3
multb_neg_imon=7.31071E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.43164E0
defgridb_imon=6.17875E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33321E1
os_fil1_imon=9.38888E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06855E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63942E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30913E1
cs_fil1_imon=9.95501E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62966E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66092E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.21558E-2
os_fil2_imon=-2.64795E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.88704E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.45581E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36643E-1
cs_fil2_imon=-2.3296E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.0281E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22287E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31837E-3
inlet_lpb_pmon=1.98764E-1
chamber_ion_pmon=1.1693E-7
chamber_cvt_pmon=2.52209E-3
foreline_cvt_pmon=2.52209E-3
chamber_tmon=1.40093E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.81516E-1
res40_imon=-2.63392E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=182
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09734E0	-8.17513E-1	-7.98845E-1	-9.13093E0	-9.14199E0	5.91278E-3	9.26018E-2	2.73175E1	-3.26944E1	-3.26172E1	2.68166E1	1.16724E-7	2.52061E-3	2.52061E-3	6.34518E-3	2.00705E-1
2.0E0	3.8E1	0.0E0	3.16E2	1.6E2	-2.09642E0	-8.17823E-1	-7.99131E-1	-9.13105E0	-9.14176E0	5.96046E-3	9.26971E-2	2.73315E1	-3.26561E1	-3.262E1	2.6837E1	1.16576E-7	2.51552E-3	2.51552E-3	6.32386E-3	2.01022E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09642E0	-8.17871E-1	-7.99108E-1	-9.13093E0	-9.14145E0	6.05583E-3	9.28402E-2	2.72898E1	-3.26986E1	-3.26213E1	2.68088E1	1.16724E-7	2.52276E-3	2.52276E-3	6.32356E-3	2.00534E-1
4.0E0	6.0E0	0.0E0	6.55E2	3.98E2	-2.09518E0	-8.178E-1	-7.98678E-1	-9.1311E0	-9.14173E0	5.76973E-3	9.3174E-2	2.72913E1	-3.26759E1	-3.26657E1	2.68076E1	1.16973E-7	2.51632E-3	2.51632E-3	6.30202E-3	2.00363E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09603E0	-8.17728E-1	-7.98345E-1	-9.13093E0	-9.14183E0	5.84126E-3	9.27925E-2	2.72955E1	-3.26561E1	-3.2617E1	2.68472E1	1.1688E-7	2.5199E-3	2.5199E-3	6.3074E-3	2.00325E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09518E0	-8.17442E-1	-7.98583E-1	-9.13064E0	-9.14161E0	5.79357E-3	9.26733E-2	2.73311E1	-3.26567E1	-3.26113E1	2.68406E1	1.16829E-7	2.52099E-3	2.52099E-3	6.32936E-3	1.99803E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09533E0	-8.17704E-1	-7.98655E-1	-9.13057E0	-9.14137E0	5.6982E-3	9.29117E-2	2.73111E1	-3.26344E1	-3.26062E1	2.68196E1	1.16778E-7	2.5199E-3	2.5199E-3	6.34037E-3	2.00151E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0958E0	-8.17657E-1	-7.98464E-1	-9.13081E0	-9.14161E0	5.6982E-3	9.29356E-2	2.73063E1	-3.26747E1	-3.26284E1	2.68022E1	1.16873E-7	2.51847E-3	2.51847E-3	6.32356E-3	2.00705E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0958E0	-8.178E-1	-7.98249E-1	-9.13105E0	-9.14166E0	5.76973E-3	9.31978E-2	2.73139E1	-3.26543E1	-3.2639E1	2.68118E1	1.1688E-7	2.5199E-3	2.5199E-3	6.32386E-3	1.99283E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09627E0	-8.17895E-1	-7.98297E-1	-9.13098E0	-9.14156E0	6.10352E-3	9.32455E-2	2.72996E1	-3.26964E1	-3.26407E1	2.68064E1	1.17032E-7	2.52647E-3	2.52647E-3	6.30192E-3	2.00673E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09588E0	-8.18014E-1	-7.9844E-1	-9.13107E0	-9.14164E0	6.19888E-3	9.27925E-2	2.73466E1	-3.26927E1	-3.2626E1	2.6825E1	1.1693E-7	2.51771E-3	2.51771E-3	6.30192E-3	2.01197E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09619E0	-8.17966E-1	-7.98059E-1	-9.13119E0	-9.14173E0	6.03199E-3	9.30309E-2	2.73279E1	-3.26711E1	-3.26464E1	2.68244E1	1.1699E-7	2.51804E-3	2.51804E-3	6.30182E-3	2.0064E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09696E0	-8.1749E-1	-7.98297E-1	-9.13103E0	-9.14173E0	5.98431E-3	9.28879E-2	2.72961E1	-3.26657E1	-3.26242E1	2.68214E1	1.16624E-7	2.52276E-3	2.52276E-3	6.33436E-3	2.00534E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09619E0	-8.17347E-1	-7.98512E-1	-9.13103E0	-9.14178E0	5.65052E-3	9.30309E-2	2.73051E1	-3.26651E1	-3.25906E1	2.68136E1	1.17083E-7	2.51771E-3	2.51771E-3	6.3074E-3	1.9963E-1
1.8E1	4.0E0	0.0E0	7.27E2	5.0E2	-2.09696E0	-8.17537E-1	-7.9844E-1	-9.13103E0	-9.14183E0	5.93662E-3	9.2864E-2	2.72774E1	-3.26496E1	-3.26142E1	2.67978E1	1.1688E-7	2.52428E-3	2.52428E-3	6.33486E-3	2.00151E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.0958E0	-8.17728E-1	-7.98082E-1	-9.13107E0	-9.14199E0	5.91278E-3	9.2721E-2	2.73099E1	-3.26615E1	-3.265E1	2.68268E1	1.16624E-7	2.51847E-3	2.51847E-3	6.31817E-3	2.00192E-1
2.0E1	1.0E0	0.0E0	8.08E2	5.58E2	-2.0958E0	-8.17871E-1	-7.98082E-1	-9.13067E0	-9.14156E0	6.00815E-3	9.26495E-2	2.73111E1	-3.26669E1	-3.26224E1	2.6807E1	1.17032E-7	2.52428E-3	2.52428E-3	6.31288E-3	2.00673E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09595E0	-8.17776E-1	-7.98178E-1	-9.131E0	-9.14154E0	6.31809E-3	9.27687E-2	2.72249E1	-3.25782E1	-3.26585E1	2.68262E1	1.17032E-7	2.5199E-3	2.5199E-3	6.31837E-3	2.00151E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.0951E0	-8.17728E-1	-7.98345E-1	-9.13112E0	-9.14178E0	5.98431E-3	9.25779E-2	2.73204E1	-3.26207E1	-3.26526E1	2.68244E1	1.17273E-7	2.52169E-3	2.52169E-3	6.30202E-3	2.00534E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09472E0	-8.17609E-1	-7.98392E-1	-9.13091E0	-9.14173E0	5.96046E-3	9.2721E-2	2.73063E1	-3.26524E1	-3.26242E1	2.68106E1	1.1693E-7	2.52209E-3	2.52209E-3	6.31837E-3	1.98764E-1