[Scan]
initial_time=2015-12-15T17:45:44
final_time=2015-12-15T17:46:04
ip_count=19
run=1017
dataset=1
scan=45
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=27.0
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09595E0
qbias_imon=-1.08798E-4
ql1_vset=
ql1_vmon=-8.17037E-1
ql1_imon=1.3605E-8
ql2_vset=
ql2_vmon=-7.98655E-1
ql2_imon=2.03896E-9
ql3_vset=
ql3_vmon=-9.13093E0
ql3_imon=4.34744E-10
ql4_vset=
ql4_vmon=-9.14171E0
ql4_imon=-2.26855E-11
mult1=-9.9324E-9
mult2=-2.75286E-9
rf_tmon=-5.60814E-3
rf_agc=3.31831E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.84126E-3
ql5_imon=1.70374E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66914E0
bslens_imon=2.67835E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19899E1
lens5a_imon=1.96252E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12498E2
lens4a_imon=2.04963E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53736E1
cs_ef1b_imon=2.84863E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04618E2
lens23_imon=1.01973E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0491E1
cs_ea1_imon=2.51408E-5
lens1_vset=-5.0E0
lens1_vmon=-5.39719E0
lens1_imon=2.39355E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64158E1
os_ef1alow_imon=2.97189E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03931E1
cs_ea2_imon=1.53425E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84556E1
cs_ef1a_imon=2.94414E-5
olens2_vset=9.7E-1
olens2_vmon=9.70006E-1
olens2_imon=1.2546E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11532E1
os_restr1_imon=4.30464E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1539E1
os_ea1_imon=2.36015E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63497E1
os_ef1bup_imon=3.08505E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.27673E0
cs_ionrep_imon=1.20873E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91852E2
cs_nozzle_imon=1.93406E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01971E1
cs_anode1_imon=2.97297E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20573E0
olens4_imon=3.25528E-8
tplens_vset=1.4E-1
tplens_vmon=1.57534E0
tplens_imon=-1.94802E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.263E1
iondef3_imon=1.47153E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26687E1
iondef2_imon=1.57175E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02934E2
lens6_imon=2.98256E-4
ql6_vset=1.0E-1
ql6_vmon=9.28402E-2
ql6_imon=4.02521E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27914E0
ionrepsh_imon=1.79237E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33742E1
lens5b_imon=2.19324E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7482E1
cs_ef2b_imon=3.13299E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.36265E0
os_ea2_imon=-8.22064E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06062E2
lens4b_imon=2.00468E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71474E1
cs_ef2a_imon=3.17299E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06657E0
os_ef2alow_imon=-2.65554E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.98625E-1
os_ef2bup_imon=-5.39095E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11045E1
os_restr2_imon=3.43067E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23114E2
cs_ionfoca_imon=6.29928E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01917E1
cs_anode2_imon=2.25398E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73085E1
iondef1_imon=1.08003E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68345E1
iondef4_imon=1.0762E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71788E1
olens3_imon=4.4276E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.8238E-1
olens1_imon=7.37147E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14035E0
cs_ionaccel_imon=-1.88429E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02044E2
cs_ionfocb_imon=1.47219E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56009E1
einzel_imon=7.45358E-6
window_vset=0.0E0
window_vmon=1.52471E-1
window_imon=-1.26081E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82616E2
mask1_imon=2.39037E-4
mask2_vset=0.0E0
mask2_vmon=-1.86002E1
mask2_imon=-8.60768E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92613E3
multa_neg_imon=7.8839E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9374E3
defgrida_imon=6.5717E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50096E3
multb_neg_imon=7.31792E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.50984E0
defgridb_imon=5.94443E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33327E1
os_fil1_imon=9.40852E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06296E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6402E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30918E1
cs_fil1_imon=9.95242E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63273E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66138E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.33166E-2
os_fil2_imon=-2.65996E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.89305E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.62982E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.38327E-1
cs_fil2_imon=-2.19145E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.04612E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22221E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31299E-3
inlet_lpb_pmon=2.0064E-1
chamber_ion_pmon=1.1699E-7
chamber_cvt_pmon=2.51359E-3
foreline_cvt_pmon=2.51359E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.35576E-1
res40_imon=-2.47174E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=160
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09565E0	-8.17752E-1	-7.98368E-1	-9.13084E0	-9.14178E0	5.79357E-3	9.2721E-2	2.73328E1	-3.26555E1	-3.26319E1	2.68184E1	1.1693E-7	2.51225E-3	2.51225E-3	6.34037E-3	1.99977E-1
2.0E0	2.4E1	0.0E0	3.16E2	1.6E2	-2.09588E0	-8.1737E-1	-7.98297E-1	-9.13088E0	-9.1418E0	5.96046E-3	9.29356E-2	2.73565E1	-3.26829E1	-3.26199E1	2.6828E1	1.16981E-7	2.52209E-3	2.52209E-3	6.30192E-3	2.00151E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09595E0	-8.17323E-1	-7.98368E-1	-9.13079E0	-9.1419E0	5.84126E-3	9.3174E-2	2.72835E1	-3.26681E1	-3.26089E1	2.68099E1	1.1693E-7	2.52538E-3	2.52538E-3	6.32386E-3	2.00151E-1
4.0E0	3.0E0	0.0E0	6.55E2	3.98E2	-2.09495E0	-8.17513E-1	-7.98011E-1	-9.13043E0	-9.14183E0	5.96046E-3	9.30548E-2	2.73099E1	-3.26651E1	-3.26512E1	2.68088E1	1.17063E-7	2.52871E-3	2.52871E-3	6.3445E-3	1.99896E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09526E0	-8.17513E-1	-7.98321E-1	-9.13091E0	-9.14159E0	5.8651E-3	9.28402E-2	2.73257E1	-3.2662E1	-3.26425E1	2.68262E1	1.16823E-7	2.51632E-3	2.51632E-3	6.30202E-3	1.9985E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0958E0	-8.17537E-1	-7.98512E-1	-9.13117E0	-9.14183E0	5.8651E-3	9.29117E-2	2.73081E1	-3.26825E1	-3.26104E1	2.68119E1	1.17083E-7	2.52318E-3	2.52318E-3	6.32936E-3	1.98937E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09603E0	-8.17299E-1	-7.98225E-1	-9.131E0	-9.14183E0	5.50747E-3	9.24826E-2	2.72889E1	-3.26585E1	-3.26188E1	2.68176E1	1.17032E-7	2.52209E-3	2.52209E-3	6.32386E-3	1.98764E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0968E0	-8.17156E-1	-7.97868E-1	-9.13107E0	-9.1419E0	5.50747E-3	9.28402E-2	2.72898E1	-3.26714E1	-3.26284E1	2.68118E1	1.16823E-7	2.52384E-3	2.52384E-3	6.31278E-3	2.00192E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09549E0	-8.17204E-1	-7.97939E-1	-9.13095E0	-9.14192E0	5.55515E-3	9.25064E-2	2.73093E1	-3.26428E1	-3.25936E1	2.68322E1	1.16677E-7	2.5188E-3	2.5188E-3	6.32386E-3	2.00499E-1
1.3E1	1.0E0	0.0E0	5.25E2	3.53E2	-2.09642E0	-8.17513E-1	-7.98082E-1	-9.13093E0	-9.14192E0	6.00815E-3	9.26018E-2	2.73135E1	-3.26723E1	-3.26609E1	2.6792E1	1.16973E-7	2.51739E-3	2.51739E-3	6.3074E-3	2.00192E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09603E0	-8.17609E-1	-7.98178E-1	-9.13093E0	-9.1418E0	5.74589E-3	9.2721E-2	2.73111E1	-3.26801E1	-3.2638E1	2.68322E1	1.1693E-7	2.51826E-3	2.51826E-3	6.31563E-3	1.9989E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09634E0	-8.17323E-1	-7.98559E-1	-9.13095E0	-9.14166E0	5.79357E-3	9.27687E-2	2.73129E1	-3.26573E1	-3.26224E1	2.68112E1					
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0965E0	-8.17752E-1	-7.98512E-1	-9.13126E0	-9.1418E0	5.67436E-3	9.24826E-2	2.72817E1	-3.26434E1	-3.25972E1	2.6786E1	1.16626E-7	2.51771E-3	2.51771E-3	6.31288E-3	1.99803E-1
1.7E1	2.0E0	0.0E0	6.87E2	4.7E2	-2.0965E0	-8.17847E-1	-7.9875E-1	-9.13138E0	-9.14204E0	5.84126E-3	9.29594E-2	2.73225E1	-3.26903E1	-3.26008E1	2.68238E1	1.16778E-7	2.52538E-3	2.52538E-3	6.35692E-3	2.00151E-1
1.8E1	3.0E0	0.0E0	7.27E2	5.0E2	-2.09657E0	-8.17585E-1	-7.98821E-1	-9.13115E0	-9.14178E0	5.88894E-3	9.28164E-2	2.72796E1	-3.26839E1	-3.26457E1	2.67931E1	1.16835E-7	2.51915E-3	2.51915E-3	6.32418E-3	1.99931E-1
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.0951E0	-8.17776E-1	-7.98631E-1	-9.13115E0	-9.14195E0	5.60284E-3	9.26256E-2	2.73063E1	-3.2694E1	-3.26204E1	2.68001E1	1.16769E-7	2.52659E-3	2.52659E-3	6.31798E-3	2.00064E-1
2.0E1	5.0E0	0.0E0	8.08E2	5.58E2	-2.09611E0	-8.17585E-1	-7.98726E-1	-9.13105E0	-9.14159E0	5.31673E-3	9.30309E-2	2.7324E1	-3.2659E1	-3.26478E1	2.68028E1	1.16783E-7	2.52697E-3	2.52697E-3	6.3074E-3	2.01174E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09619E0	-8.17323E-1	-7.98297E-1	-9.1311E0	-9.14183E0	5.6982E-3	9.26971E-2	2.73167E1	-3.26909E1	-3.26028E1	2.68121E1	1.1693E-7	2.51552E-3	2.51552E-3	6.31837E-3	2.00673E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09642E0	-8.17251E-1	-7.98631E-1	-9.1311E0	-9.14187E0	5.6982E-3	9.27448E-2	2.7349E1	-3.26675E1	-3.26446E1	2.68107E1	1.16861E-7	2.51886E-3	2.51886E-3	6.3126E-3	2.006E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09595E0	-8.17037E-1	-7.98655E-1	-9.13093E0	-9.14171E0	5.84126E-3	9.28402E-2	2.73085E1	-3.26687E1	-3.263E1	2.68345E1	1.1699E-7	2.51359E-3	2.51359E-3	6.31299E-3	2.0064E-1