[Scan]
initial_time=2015-12-15T17:46:12
final_time=2015-12-15T17:46:31
ip_count=19
run=1017
dataset=1
scan=46
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=27.0
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0948E0
qbias_imon=-1.08825E-4
ql1_vset=
ql1_vmon=-8.178E-1
ql1_imon=1.35893E-8
ql2_vset=
ql2_vmon=-7.98607E-1
ql2_imon=2.05776E-9
ql3_vset=
ql3_vmon=-9.13134E0
ql3_imon=4.61364E-10
ql4_vset=
ql4_vmon=-9.14197E0
ql4_imon=-4.10676E-11
mult1=-9.31897E-9
mult2=-2.64675E-9
rf_tmon=-5.72008E-3
rf_agc=3.2949E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=6.07967E-3
ql5_imon=1.719E-9
bslens_vset=-6.2E0
bslens_vmon=-6.64085E0
bslens_imon=2.42292E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20078E1
lens5a_imon=1.98474E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12466E2
lens4a_imon=2.04955E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53784E1
cs_ef1b_imon=2.85728E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04632E2
lens23_imon=1.02241E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04923E1
cs_ea1_imon=2.5022E-5
lens1_vset=-5.0E0
lens1_vmon=-5.37551E0
lens1_imon=2.49725E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65395E1
os_ef1alow_imon=2.97297E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03619E1
cs_ea2_imon=1.54125E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.844E1
cs_ef1a_imon=2.95459E-5
olens2_vset=9.7E-1
olens2_vmon=9.70197E-1
olens2_imon=1.25312E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11292E1
os_restr1_imon=4.30608E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15158E1
os_ea1_imon=2.37833E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63701E1
os_ef1bup_imon=3.07857E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23735E0
cs_ionrep_imon=1.2174E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91903E2
cs_nozzle_imon=1.93551E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01821E1
cs_anode1_imon=2.97765E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20563E0
olens4_imon=3.25308E-8
tplens_vset=1.4E-1
tplens_vmon=1.58126E0
tplens_imon=-5.07712E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2638E1
iondef3_imon=1.49489E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26759E1
iondef2_imon=1.57559E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02955E2
lens6_imon=2.9836E-4
ql6_vset=1.0E-1
ql6_vmon=9.30309E-2
ql6_imon=4.06125E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27746E0
ionrepsh_imon=1.7837E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33575E1
lens5b_imon=2.18507E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74922E1
cs_ef2b_imon=3.12073E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.31699E0
os_ea2_imon=-6.20973E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06128E2
lens4b_imon=2.0041E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7133E1
cs_ef2a_imon=3.17299E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.01131E0
os_ef2alow_imon=-2.7096E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.01629E-1
os_ef2bup_imon=-5.38375E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10943E1
os_restr2_imon=3.43248E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23048E2
cs_ionfoca_imon=6.29574E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01647E1
cs_anode2_imon=2.26587E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73249E1
iondef1_imon=1.07299E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68058E1
iondef4_imon=1.07764E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=4.4139E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81998E-1
olens1_imon=7.3831E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11753E0
cs_ionaccel_imon=-1.94556E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02063E2
cs_ionfocb_imon=1.47136E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56315E1
einzel_imon=7.54729E-6
window_vset=0.0E0
window_vmon=1.6088E-1
window_imon=-1.00493E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82619E2
mask1_imon=2.39084E-4
mask2_vset=0.0E0
mask2_vmon=-1.862E1
mask2_imon=-7.74273E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92642E3
multa_neg_imon=7.51613E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93724E3
defgrida_imon=6.35166E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50128E3
multb_neg_imon=6.94628E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.34945E0
defgridb_imon=6.11452E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3332E1
os_fil1_imon=9.4188E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.0671E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63871E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30917E1
cs_fil1_imon=9.949E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63651E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66277E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.07863E-2
os_fil2_imon=-2.73805E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.845E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.54308E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35996E-1
cs_fil2_imon=-2.55184E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.10018E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22349E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30202E-3
inlet_lpb_pmon=2.00876E-1
chamber_ion_pmon=1.17473E-7
chamber_cvt_pmon=2.51954E-3
foreline_cvt_pmon=2.51954E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.40071E-1
res40_imon=-2.46814E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=158
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09565E0	-8.1749E-1	-7.98321E-1	-9.13091E0	-9.14187E0	5.72205E-3	9.2864E-2	2.73135E1	-3.26524E1	-3.26338E1	2.67932E1	1.16829E-7	2.5199E-3	2.5199E-3	6.32386E-3	1.99283E-1
2.0E0	3.4E1	1.0E0	3.16E2	1.6E2	-2.09565E0	-8.17561E-1	-7.98106E-1	-9.13076E0	-9.14195E0	5.31673E-3	9.2721E-2	2.73063E1	-3.26844E1	-3.26284E1	2.6822E1	1.16774E-7	2.51525E-3	2.51525E-3	6.29128E-3	1.9934E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09565E0	-8.17513E-1	-7.98249E-1	-9.1311E0	-9.1419E0	5.93662E-3	9.2721E-2	2.73219E1	-3.26897E1	-3.26392E1	2.68334E1	1.17032E-7	2.52647E-3	2.52647E-3	6.32386E-3	1.9911E-1
4.0E0	7.0E0	0.0E0	6.55E2	3.98E2	-2.09526E0	-8.17823E-1	-7.98368E-1	-9.13122E0	-9.14183E0	5.76973E-3	9.2864E-2	2.73016E1	-3.26726E1	-3.26148E1	2.68128E1	1.16981E-7	2.52647E-3	2.52647E-3	6.32386E-3	1.99977E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0951E0	-8.17871E-1	-7.98535E-1	-9.13112E0	-9.14164E0	5.81741E-3	9.30071E-2	2.73057E1	-3.26825E1	-3.2626E1	2.68184E1	1.17073E-7	2.52061E-3	2.52061E-3	6.32356E-3	2.00534E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09518E0	-8.17752E-1	-7.98798E-1	-9.13129E0	-9.14178E0	5.72205E-3	9.28879E-2	2.72916E1	-3.26438E1	-3.26566E1	2.68136E1	1.1688E-7	2.52209E-3	2.52209E-3	6.3074E-3	2.01022E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09394E0	-8.17776E-1	-7.98535E-1	-9.13153E0	-9.14161E0	6.05583E-3	9.27925E-2	2.73081E1	-3.26915E1	-3.26026E1	2.68274E1	1.16886E-7	2.5147E-3	2.5147E-3	6.32978E-3	2.00818E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09495E0	-8.17752E-1	-7.9844E-1	-9.13134E0	-9.14178E0	5.88894E-3	9.2864E-2	2.73021E1	-3.26482E1	-3.2608E1	2.67944E1	1.17032E-7	2.52099E-3	2.52099E-3	6.32936E-3	2.00673E-1
1.2E1	1.0E0	0.0E0	4.85E2	3.23E2	-2.09441E0	-8.17633E-1	-7.98512E-1	-9.13124E0	-9.14171E0	6.10352E-3	9.28402E-2	2.72877E1	-3.26573E1	-3.26314E1	2.67962E1	1.17023E-7	2.52061E-3	2.52061E-3	6.31817E-3	2.01219E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09433E0	-8.17537E-1	-7.98512E-1	-9.13167E0	-9.1418E0	6.05583E-3	9.28879E-2	2.73134E1	-3.26703E1	-3.2649E1	2.6804E1	1.16981E-7	2.5199E-3	2.5199E-3	6.31837E-3	2.01722E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.0951E0	-8.17633E-1	-7.98368E-1	-9.13131E0	-9.14152E0	5.88894E-3	9.2864E-2	2.73231E1	-3.26494E1	-3.26308E1	2.68118E1	1.1688E-7	2.52647E-3	2.52647E-3	6.31837E-3	2.01547E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09595E0	-8.17728E-1	-7.98106E-1	-9.13105E0	-9.14185E0	5.98431E-3	9.26256E-2	2.73177E1	-3.26657E1	-3.26512E1	2.6798E1	1.16873E-7	2.52707E-3	2.52707E-3	6.32356E-3	2.01734E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09526E0	-8.1768E-1	-7.98321E-1	-9.13124E0	-9.14173E0	5.79357E-3	9.27687E-2	2.73122E1	-3.26579E1	-3.26337E1	2.6816E1	1.1831E-7	2.5188E-3	2.5188E-3	6.3074E-3	2.00847E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09526E0	-8.178E-1	-7.98512E-1	-9.13105E0	-9.14145E0	5.65052E-3	9.24826E-2	2.73405E1	-3.26795E1	-3.26609E1	2.68186E1	1.1929E-7	2.51552E-3	2.51552E-3	6.32386E-3	2.02248E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.0951E0	-8.17823E-1	-7.98273E-1	-9.13095E0	-9.14195E0	5.76973E-3	9.28164E-2	2.73135E1	-3.26753E1	-3.2617E1	2.68166E1	1.1929E-7	2.51847E-3	2.51847E-3	6.31817E-3	2.02251E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09541E0	-8.1768E-1	-7.98631E-1	-9.13138E0	-9.14187E0	5.81741E-3	9.26733E-2	2.72915E1	-3.2652E1	-3.26419E1	2.67968E1	1.1929E-7	2.51552E-3	2.51552E-3	6.32936E-3	2.00499E-1
2.0E1	5.0E0	0.0E0	8.08E2	5.58E2	-2.09541E0	-8.17609E-1	-7.98583E-1	-9.13117E0	-9.14176E0	5.96046E-3	9.27925E-2	2.73137E1	-3.26615E1	-3.26058E1	2.68106E1	1.19186E-7	2.51225E-3	2.51225E-3	6.31288E-3	2.00151E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09603E0	-8.17585E-1	-7.98368E-1	-9.13136E0	-9.14218E0	6.19888E-3	9.30309E-2	2.72762E1	-3.26402E1	-3.26343E1	2.68202E1	1.1929E-7	2.51552E-3	2.51552E-3	6.31837E-3	2.00151E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.0958E0	-8.17442E-1	-7.98559E-1	-9.13138E0	-9.14183E0	5.79357E-3	9.2721E-2	2.73098E1	-3.26478E1	-3.26354E1	2.68314E1	1.1929E-7	2.5131E-3	2.5131E-3	6.32356E-3	2.00021E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0948E0	-8.178E-1	-7.98607E-1	-9.13134E0	-9.14197E0	6.07967E-3	9.30309E-2	2.73249E1	-3.26759E1	-3.2638E1	2.68058E1	1.17473E-7	2.51954E-3	2.51954E-3	6.30202E-3	2.00876E-1