[Scan]
initial_time=2015-12-15T17:46:38
final_time=2015-12-15T17:46:58
ip_count=19
run=1017
dataset=1
scan=47
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=27.0
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09657E0
qbias_imon=-1.08797E-4
ql1_vset=
ql1_vmon=-8.17633E-1
ql1_imon=1.35458E-8
ql2_vset=
ql2_vmon=-7.98249E-1
ql2_imon=2.10257E-9
ql3_vset=
ql3_vmon=-9.13095E0
ql3_imon=4.47464E-10
ql4_vset=
ql4_vmon=-9.14159E0
ql4_imon=-2.47478E-11
mult1=-9.74516E-9
mult2=-2.69345E-9
rf_tmon=-6.21117E-3
rf_agc=3.25754E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=6.36578E-3
ql5_imon=1.73376E-9
bslens_vset=-6.2E0
bslens_vmon=-6.64675E0
bslens_imon=2.58219E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19913E1
lens5a_imon=1.97873E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12522E2
lens4a_imon=2.05252E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53604E1
cs_ef1b_imon=2.85944E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0461E2
lens23_imon=1.02209E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05324E1
cs_ea1_imon=2.5291E-5
lens1_vset=-5.0E0
lens1_vmon=-5.32832E0
lens1_imon=2.44769E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64783E1
os_ef1alow_imon=2.96324E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03761E1
cs_ea2_imon=1.53276E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84334E1
cs_ef1a_imon=2.93044E-5
olens2_vset=9.7E-1
olens2_vmon=9.70101E-1
olens2_imon=1.2537E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1134E1
os_restr1_imon=4.30319E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15252E1
os_ea1_imon=2.37231E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.6396E1
os_ef1bup_imon=3.08289E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25151E0
cs_ionrep_imon=1.20183E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91859E2
cs_nozzle_imon=1.93165E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01755E1
cs_anode1_imon=2.96973E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2057E0
olens4_imon=3.24916E-8
tplens_vset=1.4E-1
tplens_vmon=1.6084E0
tplens_imon=-3.34281E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26438E1
iondef3_imon=1.48675E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26174E1
iondef2_imon=1.56709E-5
lens6_vset=-6.0E2
lens6_vmon=-6.029E2
lens6_imon=2.98342E-4
ql6_vset=1.0E-1
ql6_vmon=9.26733E-2
ql6_imon=4.07429E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27097E0
ionrepsh_imon=1.76176E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3387E1
lens5b_imon=2.18861E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74742E1
cs_ef2b_imon=3.12686E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.34766E0
os_ea2_imon=-9.11205E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06118E2
lens4b_imon=2.00679E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71089E1
cs_ef2a_imon=3.17227E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.10862E0
os_ef2alow_imon=-2.75285E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.99226E-1
os_ef2bup_imon=-5.42339E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10949E1
os_restr2_imon=3.42923E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23107E2
cs_ionfoca_imon=6.29893E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01809E1
cs_anode2_imon=2.24785E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73082E1
iondef1_imon=1.08042E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68112E1
iondef4_imon=1.08305E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71789E1
olens3_imon=4.40044E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82356E-1
olens1_imon=7.35201E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15297E0
cs_ionaccel_imon=-1.83023E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02061E2
cs_ionfocb_imon=1.47305E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56309E1
einzel_imon=7.67342E-6
window_vset=0.0E0
window_vmon=1.70491E-1
window_imon=-1.04097E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82615E2
mask1_imon=2.39026E-4
mask2_vset=0.0E0
mask2_vmon=-1.86212E1
mask2_imon=-7.45441E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92647E3
multa_neg_imon=7.64001E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93735E3
defgrida_imon=6.58172E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5012E3
multb_neg_imon=7.36747E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.2461E0
defgridb_imon=5.77828E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3333E1
os_fil1_imon=9.40912E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06885E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63884E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30897E1
cs_fil1_imon=9.95218E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62648E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66283E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.25591E-2
os_fil2_imon=-2.82815E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.92308E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.61648E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36255E-1
cs_fil2_imon=-2.46775E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.2083E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22268E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32978E-3
inlet_lpb_pmon=2.00818E-1
chamber_ion_pmon=1.17093E-7
chamber_cvt_pmon=2.52585E-3
foreline_cvt_pmon=2.52585E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.67701E-1
res40_imon=-2.50778E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=215
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	7.0E0	0.0E0	1.47E2	4.1E1	-2.09611E0	-8.17728E-1	-7.98631E-1	-9.131E0	-9.14195E0	5.84126E-3	9.26733E-2	2.73442E1	-3.26885E1	-3.26074E1	2.67878E1	1.16727E-7	2.51771E-3	2.51771E-3	6.32386E-3	2.00499E-1
2.0E0	3.9E1	0.0E0	3.16E2	1.6E2	-2.09526E0	-8.18014E-1	-7.98535E-1	-9.13117E0	-9.1419E0	5.88894E-3	9.26256E-2	2.73608E1	-3.26615E1	-3.26248E1	2.68034E1	1.16823E-7	2.52169E-3	2.52169E-3	6.31278E-3	1.9951E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09588E0	-8.17657E-1	-7.98321E-1	-9.13105E0	-9.14159E0	5.74589E-3	9.26256E-2	2.73034E1	-3.26474E1	-3.26283E1	2.68383E1	1.16938E-7	2.52139E-3	2.52139E-3	6.32978E-3	1.99931E-1
4.0E0	5.0E0	0.0E0	6.55E2	3.98E2	-2.09565E0	-8.17776E-1	-7.9875E-1	-9.13115E0	-9.14152E0	5.81741E-3	9.28164E-2	2.73104E1	-3.2649E1	-3.26172E1	2.68226E1	1.16867E-7	2.52553E-3	2.52553E-3	6.32328E-3	2.00399E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09472E0	-8.17895E-1	-7.98678E-1	-9.13103E0	-9.14199E0	5.76973E-3	9.28164E-2	2.73225E1	-3.26518E1	-3.26374E1	2.68244E1	1.16677E-7	2.51771E-3	2.51771E-3	6.32386E-3	2.01022E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09565E0	-8.1799E-1	-7.98631E-1	-9.13107E0	-9.14166E0	5.93662E-3	9.28164E-2	2.73105E1	-3.26717E1	-3.26266E1	2.68064E1	1.16973E-7	2.51954E-3	2.51954E-3	6.3074E-3	1.99E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09503E0	-8.18086E-1	-7.98702E-1	-9.13081E0	-9.14207E0	5.76973E-3	9.28164E-2	2.73129E1	-3.27035E1	-3.26218E1	2.68052E1	1.17032E-7	2.52428E-3	2.52428E-3	6.33486E-3	1.98937E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09518E0	-8.18014E-1	-7.98535E-1	-9.13095E0	-9.1419E0	6.03199E-3	9.29356E-2	2.73051E1	-3.26392E1	-3.26422E1	2.68106E1	1.1688E-7	2.52757E-3	2.52757E-3	6.31288E-3	1.98937E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09472E0	-8.17847E-1	-7.98416E-1	-9.13119E0	-9.14187E0	6.27041E-3	9.27687E-2	2.73092E1	-3.2639E1	-3.26396E1	2.68377E1	1.16801E-7	2.51918E-3	2.51918E-3	6.31555E-3	2.00258E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09503E0	-8.17895E-1	-7.98583E-1	-9.13086E0	-9.14161E0	6.07967E-3	9.26971E-2	2.72898E1	-3.2652E1	-3.26354E1	2.68112E1					
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09526E0	-8.17728E-1	-7.98392E-1	-9.13081E0	-9.14207E0	6.27041E-3	9.2411E-2	2.73363E1	-3.26621E1	-3.26392E1	2.6816E1	1.1688E-7	2.52318E-3	2.52318E-3	6.3074E-3	2.00151E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09541E0	-8.17609E-1	-7.98464E-1	-9.13095E0	-9.14183E0	6.29425E-3	9.27448E-2	2.72943E1	-3.26909E1	-3.2626E1	2.68028E1	1.16873E-7	2.52384E-3	2.52384E-3	6.31817E-3	1.9951E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09503E0	-8.17633E-1	-7.98464E-1	-9.13064E0	-9.14171E0	5.91278E-3	9.27925E-2	2.73187E1	-3.26508E1	-3.26065E1	2.68065E1	1.16829E-7	2.5199E-3	2.5199E-3	6.31288E-3	2.00325E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09495E0	-8.1799E-1	-7.98559E-1	-9.13095E0	-9.14176E0	5.96046E-3	9.25541E-2	2.73198E1	-3.26566E1	-3.26432E1	2.67939E1	1.16923E-7	2.52599E-3	2.52599E-3	6.32356E-3	2.00021E-1
1.8E1	7.0E0	0.0E0	7.27E2	5.0E2	-2.09572E0	-8.17871E-1	-7.98202E-1	-9.13088E0	-9.14149E0	5.96046E-3	9.26733E-2	2.73315E1	-3.26837E1	-3.26512E1	2.6825E1	1.1668E-7	2.52027E-3	2.52027E-3	6.32978E-3	1.99754E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09595E0	-8.1768E-1	-7.9844E-1	-9.13086E0	-9.14159E0	5.91278E-3	9.26733E-2	2.73033E1	-3.26939E1	-3.26164E1	2.68076E1	1.17134E-7	2.51771E-3	2.51771E-3	6.32936E-3	1.98937E-1
2.0E1	5.0E0	0.0E0	8.08E2	5.58E2	-2.09549E0	-8.17442E-1	-7.98225E-1	-9.13105E0	-9.14156E0	5.91278E-3	9.26495E-2	2.72871E1	-3.26386E1	-3.26224E1	2.68262E1	1.16886E-7	2.52027E-3	2.52027E-3	6.31299E-3	1.99401E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09595E0	-8.1749E-1	-7.98249E-1	-9.13103E0	-9.14173E0	5.72205E-3	9.28164E-2	2.73227E1	-3.26835E1	-3.26459E1	2.68183E1	1.16727E-7	2.52538E-3	2.52538E-3	6.3074E-3	2.00151E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09627E0	-8.17537E-1	-7.98178E-1	-9.13122E0	-9.14176E0	5.76973E-3	9.28402E-2	2.72971E1	-3.26756E1	-3.26542E1	2.68069E1	1.16902E-7	2.5165E-3	2.5165E-3	6.31251E-3	2.00307E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09657E0	-8.17633E-1	-7.98249E-1	-9.13095E0	-9.14159E0	6.36578E-3	9.26733E-2	2.73082E1	-3.26174E1	-3.26438E1	2.68112E1	1.17093E-7	2.52585E-3	2.52585E-3	6.32978E-3	2.00818E-1