[Scan]
initial_time=2015-12-15T17:47:32
final_time=2015-12-15T17:47:51
ip_count=19
run=1017
dataset=1
scan=49
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=27.0
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0951E0
qbias_imon=-1.0877E-4
ql1_vset=
ql1_vmon=-8.17823E-1
ql1_imon=1.35627E-8
ql2_vset=
ql2_vmon=-7.9875E-1
ql2_imon=2.04606E-9
ql3_vset=
ql3_vmon=-9.13124E0
ql3_imon=3.75557E-10
ql4_vset=
ql4_vmon=-9.14152E0
ql4_imon=-2.6083E-11
mult1=-9.27081E-9
mult2=-2.71262E-9
rf_tmon=-5.05317E-3
rf_agc=3.29971E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.8651E-3
ql5_imon=1.76033E-9
bslens_vset=-6.2E0
bslens_vmon=-6.6373E0
bslens_imon=2.56659E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20019E1
lens5a_imon=1.96505E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12498E2
lens4a_imon=2.05104E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53628E1
cs_ef1b_imon=2.8508E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04608E2
lens23_imon=1.02085E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04844E1
cs_ea1_imon=2.50038E-5
lens1_vset=-5.0E0
lens1_vmon=-5.4038E0
lens1_imon=2.52333E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64921E1
os_ef1alow_imon=2.98126E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03816E1
cs_ea2_imon=1.56634E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.844E1
cs_ef1a_imon=2.94558E-5
olens2_vset=9.7E-1
olens2_vmon=9.70244E-1
olens2_imon=1.24744E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11376E1
os_restr1_imon=4.30464E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15834E1
os_ea1_imon=2.38647E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63839E1
os_ef1bup_imon=3.08181E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23768E0
cs_ionrep_imon=1.2181E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91895E2
cs_nozzle_imon=1.93243E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01797E1
cs_anode1_imon=2.98234E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20585E0
olens4_imon=3.24547E-8
tplens_vset=1.4E-1
tplens_vmon=1.55612E0
tplens_imon=-1.65963E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25954E1
iondef3_imon=1.48667E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26969E1
iondef2_imon=1.59698E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02963E2
lens6_imon=2.9822E-4
ql6_vset=1.0E-1
ql6_vmon=9.26256E-2
ql6_imon=4.05324E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26291E0
ionrepsh_imon=1.80535E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33556E1
lens5b_imon=2.15935E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74663E1
cs_ef2b_imon=3.12902E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.29416E0
os_ea2_imon=-6.31002E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06129E2
lens4b_imon=2.00561E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71324E1
cs_ef2a_imon=3.16722E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05396E0
os_ef2alow_imon=-2.64473E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.87213E-1
os_ef2bup_imon=-5.4306E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10931E1
os_restr2_imon=3.43248E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2307E2
cs_ionfoca_imon=6.30793E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01767E1
cs_anode2_imon=2.25902E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73135E1
iondef1_imon=1.0858E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68131E1
iondef4_imon=1.07476E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71789E1
olens3_imon=4.39605E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82237E-1
olens1_imon=7.34374E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13074E0
cs_ionaccel_imon=-1.99602E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02063E2
cs_ionfocb_imon=1.47053E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56375E1
einzel_imon=7.61576E-6
window_vset=0.0E0
window_vmon=1.89112E-1
window_imon=-1.14548E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82614E2
mask1_imon=2.39048E-4
mask2_vset=0.0E0
mask2_vmon=-1.8605E1
mask2_imon=-7.13005E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92614E3
multa_neg_imon=7.3756E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93708E3
defgrida_imon=6.38063E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50146E3
multb_neg_imon=7.2314E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.44066E0
defgridb_imon=5.98409E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33329E1
os_fil1_imon=9.40924E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06897E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63297E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30911E1
cs_fil1_imon=9.93927E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62978E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6599E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.25427E-2
os_fil2_imon=-2.87019E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.89305E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.67493E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3742E-1
cs_fil2_imon=-2.44372E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.15424E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22206E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=2.00534E-1
chamber_ion_pmon=1.16873E-7
chamber_cvt_pmon=2.51525E-3
foreline_cvt_pmon=2.51525E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.44876E-1
res40_imon=-2.50778E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=177
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	6.0E0	0.0E0	1.47E2	4.1E1	-2.09449E0	-8.1706E-1	-7.98368E-1	-9.13115E0	-9.14154E0	6.36578E-3	9.23872E-2	2.73151E1	-3.2695E1	-3.26461E1	2.68157E1	1.16778E-7	2.52647E-3	2.52647E-3	6.3074E-3	1.99977E-1
2.0E0	4.3E1	0.0E0	3.16E2	1.6E2	-2.09526E0	-8.1737E-1	-7.9813E-1	-9.13126E0	-9.14202E0	6.46114E-3	9.21726E-2	2.72806E1	-3.26652E1	-3.26254E1	2.68113E1	1.17073E-7	2.51739E-3	2.51739E-3	6.32896E-3	2.01391E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09464E0	-8.17442E-1	-7.98249E-1	-9.13153E0	-9.14195E0	6.05583E-3	9.2411E-2	2.73045E1	-3.26289E1	-3.26476E1	2.68192E1	1.16731E-7	2.52139E-3	2.52139E-3	6.31299E-3	1.99931E-1
4.0E0	2.0E0	0.0E0	6.55E2	3.98E2	-2.09449E0	-8.178E-1	-7.98297E-1	-9.13119E0	-9.14168E0	6.24657E-3	9.2864E-2	2.73087E1	-3.26729E1	-3.26026E1	2.68175E1	1.16867E-7	2.51709E-3	2.51709E-3	6.31798E-3	2.00567E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09526E0	-8.17561E-1	-7.98202E-1	-9.13129E0	-9.14202E0	6.19888E-3	9.26971E-2	2.72883E1	-3.26915E1	-3.2629E1	2.68208E1	1.16724E-7	2.52492E-3	2.52492E-3	6.32356E-3	1.9917E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09572E0	-8.17513E-1	-7.98082E-1	-9.13124E0	-9.14185E0	5.88894E-3	9.24826E-2	2.73057E1	-3.26705E1	-3.26278E1	2.68346E1	1.1688E-7	2.5188E-3	2.5188E-3	6.32936E-3	1.98592E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09595E0	-8.17394E-1	-7.9813E-1	-9.13134E0	-9.1419E0	5.93662E-3	9.26495E-2	2.72998E1	-3.26638E1	-3.26278E1	2.68034E1	1.1688E-7	2.51771E-3	2.51771E-3	6.28006E-3	1.9911E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09533E0	-8.1749E-1	-7.98202E-1	-9.13122E0	-9.14168E0	5.93662E-3	9.27687E-2	2.73009E1	-3.26482E1	-3.26206E1	2.68214E1	1.16575E-7	2.51954E-3	2.51954E-3	6.32896E-3	2.00363E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09657E0	-8.17251E-1	-7.9844E-1	-9.13138E0	-9.14171E0	5.84126E-3	9.2721E-2	2.73057E1	-3.2638E1	-3.2647E1	2.67908E1	1.1693E-7	2.5199E-3	2.5199E-3	6.32386E-3	2.00325E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09533E0	-8.17275E-1	-7.9813E-1	-9.13129E0	-9.14178E0	5.79357E-3	9.23634E-2	2.73093E1	-3.26753E1	-3.2611E1	2.68064E1	1.16778E-7	2.5188E-3	2.5188E-3	6.29645E-3	1.9963E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09565E0	-8.17347E-1	-7.98106E-1	-9.13105E0	-9.14154E0	5.96046E-3	9.25541E-2	2.73299E1	-3.26944E1	-3.26189E1	2.68169E1	1.16981E-7	2.5188E-3	2.5188E-3	6.34037E-3	1.97903E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0951E0	-8.17442E-1	-7.98249E-1	-9.13155E0	-9.1419E0	6.00815E-3	9.26018E-2	2.73399E1	-3.26663E1	-3.26422E1	2.68034E1	1.16873E-7	2.52169E-3	2.52169E-3	6.3074E-3	1.97815E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09333E0	-8.17275E-1	-7.98225E-1	-9.13138E0	-9.14171E0	5.84126E-3	9.2268E-2	2.73051E1	-3.26549E1	-3.26307E1	2.68262E1	1.16626E-7	2.52538E-3	2.52538E-3	6.30192E-3	1.99803E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09426E0	-8.17347E-1	-7.97892E-1	-9.13105E0	-9.1418E0	5.91278E-3	9.26256E-2	2.73051E1	-3.26645E1	-3.26777E1	2.68418E1	1.16973E-7	2.52061E-3	2.52061E-3	6.32896E-3	1.9985E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09379E0	-8.17561E-1	-7.98273E-1	-9.13131E0	-9.14154E0	5.96046E-3	9.25779E-2	2.73193E1	-3.26209E1	-3.26402E1	2.68116E1	1.17018E-7	2.52363E-3	2.52363E-3	6.32075E-3	2.0123E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09394E0	-8.17561E-1	-7.98273E-1	-9.13124E0	-9.14154E0	5.76973E-3	9.2721E-2	2.72964E1	-3.26254E1	-3.2616E1	2.67795E1					
2.0E1	4.0E0	0.0E0	8.08E2	5.58E2	-2.09518E0	-8.17609E-1	-7.98249E-1	-9.13122E0	-9.14173E0	5.93662E-3	9.2721E-2	2.73144E1	-3.26932E1	-3.26399E1	2.68453E1	1.16841E-7	2.52293E-3	2.52293E-3	6.33021E-3	2.00968E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09503E0	-8.17299E-1	-7.98368E-1	-9.1315E0	-9.1418E0	5.98431E-3	9.25779E-2	2.73157E1	-3.27003E1	-3.25888E1	2.68082E1	1.16818E-7	2.51709E-3	2.51709E-3	6.33388E-3	2.00399E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09433E0	-8.17537E-1	-7.9844E-1	-9.13129E0	-9.14178E0	5.8651E-3	9.27925E-2	2.72939E1	-3.26809E1	-3.26396E1	2.68169E1	1.16923E-7	2.52276E-3	2.52276E-3	6.32896E-3	2.01219E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0951E0	-8.17823E-1	-7.9875E-1	-9.13124E0	-9.14152E0	5.8651E-3	9.26256E-2	2.73135E1	-3.26969E1	-3.25954E1	2.68131E1	1.16873E-7	2.51525E-3	2.51525E-3	6.31817E-3	2.00534E-1