[Scan]
initial_time=2015-12-15T17:47:58
final_time=2015-12-15T17:48:18
ip_count=19
run=1017
dataset=1
scan=50
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=27.0
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09557E0
qbias_imon=-1.08786E-4
ql1_vset=
ql1_vmon=-8.17776E-1
ql1_imon=1.35802E-8
ql2_vset=
ql2_vmon=-7.98178E-1
ql2_imon=1.97484E-9
ql3_vset=
ql3_vmon=-9.1306E0
ql3_imon=4.16064E-10
ql4_vset=
ql4_vmon=-9.1418E0
ql4_imon=-3.6931E-11
mult1=-9.68019E-9
mult2=-2.72061E-9
rf_tmon=-5.79218E-3
rf_agc=3.1459E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=6.46114E-3
ql5_imon=1.76406E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65796E0
bslens_imon=2.5291E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20025E1
lens5a_imon=1.98793E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12481E2
lens4a_imon=2.04976E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53604E1
cs_ef1b_imon=2.86233E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04609E2
lens23_imon=1.02107E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05077E1
cs_ea1_imon=2.51707E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38554E0
lens1_imon=2.69191E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64494E1
os_ef1alow_imon=2.96E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04097E1
cs_ea2_imon=1.53099E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84472E1
cs_ef1a_imon=2.95171E-5
olens2_vset=9.7E-1
olens2_vmon=9.70507E-1
olens2_imon=1.24985E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11195E1
os_restr1_imon=4.29274E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15541E1
os_ea1_imon=2.36523E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63833E1
os_ef1bup_imon=3.0901E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24561E0
cs_ionrep_imon=1.18413E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91866E2
cs_nozzle_imon=1.93257E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01923E1
cs_anode1_imon=2.97189E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2057E0
olens4_imon=3.24604E-8
tplens_vset=1.4E-1
tplens_vmon=1.56357E0
tplens_imon=-3.62597E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26116E1
iondef3_imon=1.48746E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26398E1
iondef2_imon=1.58762E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02946E2
lens6_imon=2.98406E-4
ql6_vset=1.0E-1
ql6_vmon=9.26018E-2
ql6_imon=4.03796E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2751E0
ionrepsh_imon=1.77946E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33628E1
lens5b_imon=2.17233E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74748E1
cs_ef2b_imon=3.12073E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.34058E0
os_ea2_imon=-6.95301E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06099E2
lens4b_imon=2.00336E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71282E1
cs_ef2a_imon=3.16794E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06297E0
os_ef2alow_imon=-2.62311E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.09437E-1
os_ef2bup_imon=-5.47384E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11009E1
os_restr2_imon=3.42635E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23096E2
cs_ionfoca_imon=6.29928E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01881E1
cs_anode2_imon=2.23812E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72588E1
iondef1_imon=1.07901E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68286E1
iondef4_imon=1.09458E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71789E1
olens3_imon=4.4965E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82285E-1
olens1_imon=7.35152E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11272E0
cs_ionaccel_imon=-1.87348E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02082E2
cs_ionfocb_imon=1.47284E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56075E1
einzel_imon=7.48241E-6
window_vset=0.0E0
window_vmon=1.62682E-1
window_imon=-1.05538E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82612E2
mask1_imon=2.39073E-4
mask2_vset=0.0E0
mask2_vmon=-1.86212E1
mask2_imon=-7.77877E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92668E3
multa_neg_imon=7.47012E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93726E3
defgrida_imon=6.21716E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50117E3
multb_neg_imon=7.15157E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.3524E0
defgridb_imon=6.14992E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33337E1
os_fil1_imon=9.42745E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06789E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64078E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30874E1
cs_fil1_imon=9.95909E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6406E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66286E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.2939E-2
os_fil2_imon=-2.8762E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.73087E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.31402E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35996E-1
cs_fil2_imon=-2.43772E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.17226E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22237E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=2.00192E-1
chamber_ion_pmon=1.16873E-7
chamber_cvt_pmon=2.52384E-3
foreline_cvt_pmon=2.52384E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.88724E-1
res40_imon=-2.55103E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=210
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.09557E0	-8.17585E-1	-7.98869E-1	-9.13136E0	-9.1418E0	6.05583E-3	9.26495E-2	2.73237E1	-3.27029E1	-3.26314E1	2.67998E1	1.16829E-7	2.51771E-3	2.51771E-3	6.32936E-3	2.01197E-1
2.0E0	2.4E1	1.0E0	3.16E2	1.6E2	-2.09533E0	-8.17704E-1	-7.98607E-1	-9.13124E0	-9.14156E0	5.84126E-3	9.28164E-2	2.73186E1	-3.26731E1	-3.26346E1	2.68274E1	1.16575E-7	2.51417E-3	2.51417E-3	6.32356E-3	2.00534E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09533E0	-8.17537E-1	-7.98607E-1	-9.1311E0	-9.14168E0	6.03199E-3	9.27448E-2	2.72868E1	-3.26997E1	-3.26354E1	2.68202E1	1.16783E-7	2.52473E-3	2.52473E-3	6.32418E-3	2.00285E-1
4.0E0	4.0E0	0.0E0	6.55E2	3.98E2	-2.0958E0	-8.17633E-1	-7.98345E-1	-9.13081E0	-9.14185E0	6.36578E-3	9.25779E-2	2.73225E1	-3.26801E1	-3.2635E1	2.681E1	1.17173E-7	2.51954E-3	2.51954E-3	6.31278E-3	2.00363E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09526E0	-8.1768E-1	-7.98583E-1	-9.13103E0	-9.14173E0	6.17504E-3	9.26256E-2	2.73393E1	-3.26484E1	-3.26408E1	2.68348E1	1.16829E-7	2.52318E-3	2.52318E-3	6.29645E-3	2.00499E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09503E0	-8.1737E-1	-7.98368E-1	-9.13072E0	-9.14187E0	5.98431E-3	9.29117E-2	2.73099E1	-3.26332E1	-3.26086E1	2.6816E1	1.17023E-7	2.52061E-3	2.52061E-3	6.31278E-3	2.00705E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09503E0	-8.17513E-1	-7.98488E-1	-9.13093E0	-9.1418E0	6.1512E-3	9.2864E-2	2.73045E1	-3.26639E1	-3.26314E1	2.68214E1	1.1693E-7	2.5188E-3	2.5188E-3	6.33486E-3	2.00499E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0951E0	-8.17776E-1	-7.98345E-1	-9.13091E0	-9.14147E0	6.05583E-3	9.28402E-2	2.73027E1	-3.2675E1	-3.26148E1	2.6795E1	1.16778E-7	2.51771E-3	2.51771E-3	6.30192E-3	1.9963E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09472E0	-8.17823E-1	-7.98821E-1	-9.13105E0	-9.14185E0	6.12736E-3	9.28164E-2	2.73081E1	-3.26627E1	-3.2623E1	2.68238E1	1.16724E-7	2.52061E-3	2.52061E-3	6.3074E-3	2.00021E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09456E0	-8.17657E-1	-7.98559E-1	-9.13112E0	-9.14197E0	6.19888E-3	9.2721E-2	2.73393E1	-3.26651E1	-3.26506E1	2.68124E1	1.17236E-7	2.51552E-3	2.51552E-3	6.31837E-3	2.00325E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09619E0	-8.1737E-1	-7.98464E-1	-9.131E0	-9.14154E0	6.22272E-3	9.26971E-2	2.72648E1	-3.26843E1	-3.2626E1	2.67968E1	1.16727E-7	2.51771E-3	2.51771E-3	6.31837E-3	1.9963E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09565E0	-8.1749E-1	-7.98488E-1	-9.13067E0	-9.14161E0	6.29425E-3	9.28402E-2	2.73004E1	-3.26531E1	-3.26349E1	2.68221E1	1.1688E-7	2.5199E-3	2.5199E-3	6.3074E-3	1.99977E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09503E0	-8.17585E-1	-7.98583E-1	-9.13098E0	-9.14176E0	6.10352E-3	9.30309E-2	2.72774E1	-3.2695E1	-3.26036E1	2.67848E1	1.16823E-7	2.51847E-3	2.51847E-3	6.31278E-3	2.00534E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09503E0	-8.17442E-1	-7.98726E-1	-9.13088E0	-9.1418E0	5.76973E-3	9.24587E-2	2.73153E1	-3.26506E1	-3.26338E1	2.67908E1	1.16829E-7	2.52647E-3	2.52647E-3	6.32936E-3	2.00673E-1
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09611E0	-8.17394E-1	-7.98965E-1	-9.13105E0	-9.14176E0	5.93662E-3	9.2721E-2	2.73027E1	-3.2675E1	-3.26065E1	2.67949E1	1.16674E-7	2.51632E-3	2.51632E-3	6.3074E-3	2.00876E-1
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.09549E0	-8.17609E-1	-7.98583E-1	-9.131E0	-9.14166E0	5.76973E-3	9.28879E-2	2.73169E1	-3.26431E1	-3.26331E1	2.68106E1	1.16923E-7	2.51632E-3	2.51632E-3	6.32356E-3	1.9985E-1
2.0E1	5.0E0	0.0E0	8.08E2	5.58E2	-2.09495E0	-8.17299E-1	-7.98392E-1	-9.13079E0	-9.14147E0	5.98431E-3	9.2721E-2	2.73228E1	-3.26791E1	-3.26549E1	2.68221E1	1.16973E-7	2.51632E-3	2.51632E-3	6.31278E-3	2.00534E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09642E0	-8.17466E-1	-7.98273E-1	-9.13105E0	-9.1418E0	5.91278E-3	9.29832E-2	2.73333E1	-3.26933E1	-3.262E1	2.68064E1	1.16973E-7	2.52061E-3	2.52061E-3	6.33977E-3	2.00876E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09634E0	-8.17847E-1	-7.98392E-1	-9.13076E0	-9.14187E0	5.84126E-3	9.25541E-2	2.73151E1	-3.26679E1	-3.26779E1	2.68184E1	1.17388E-7	2.51662E-3	2.51662E-3	6.31837E-3	2.00325E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09557E0	-8.17776E-1	-7.98178E-1	-9.1306E0	-9.1418E0	6.46114E-3	9.26018E-2	2.72588E1	-3.26398E1	-3.26116E1	2.68286E1	1.16873E-7	2.52384E-3	2.52384E-3	6.31817E-3	2.00192E-1