[Scan]
initial_time=2015-12-15T17:50:38
final_time=2015-12-15T17:50:58
ip_count=19
run=1017
dataset=1
scan=56
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=27.0
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09441E0
qbias_imon=-1.088E-4
ql1_vset=
ql1_vmon=-8.17323E-1
ql1_imon=1.35374E-8
ql2_vset=
ql2_vmon=-7.98321E-1
ql2_imon=2.02916E-9
ql3_vset=
ql3_vmon=-9.13103E0
ql3_imon=3.55506E-10
ql4_vset=
ql4_vmon=-9.14197E0
ql4_imon=-2.70009E-11
mult1=-9.70033E-9
mult2=-2.68602E-9
rf_tmon=-2.5923E-3
rf_agc=3.41822E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=6.12736E-3
ql5_imon=1.71119E-9
bslens_vset=-6.2E0
bslens_vmon=-6.68236E0
bslens_imon=2.51973E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19953E1
lens5a_imon=1.97838E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12498E2
lens4a_imon=2.05003E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53724E1
cs_ef1b_imon=2.858E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04614E2
lens23_imon=1.02143E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05048E1
cs_ea1_imon=2.5148E-5
lens1_vset=-5.0E0
lens1_vmon=-5.36535E0
lens1_imon=2.65311E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64524E1
os_ef1alow_imon=2.96973E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03762E1
cs_ea2_imon=1.55624E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84376E1
cs_ef1a_imon=2.95135E-5
olens2_vset=9.7E-1
olens2_vmon=9.70292E-1
olens2_imon=1.2503E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11292E1
os_restr1_imon=4.30283E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1536E1
os_ea1_imon=2.37781E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63689E1
os_ef1bup_imon=3.08794E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23708E0
cs_ionrep_imon=1.20188E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91866E2
cs_nozzle_imon=1.93359E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01869E1
cs_anode1_imon=2.97081E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2058E0
olens4_imon=3.24971E-8
tplens_vset=1.4E-1
tplens_vmon=1.56513E0
tplens_imon=-3.35395E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26408E1
iondef3_imon=1.47261E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26779E1
iondef2_imon=1.56634E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0297E2
lens6_imon=2.9831E-4
ql6_vset=1.0E-1
ql6_vmon=9.34124E-2
ql6_imon=4.11391E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28635E0
ionrepsh_imon=1.77362E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33802E1
lens5b_imon=2.16945E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74471E1
cs_ef2b_imon=3.11605E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.30918E0
os_ea2_imon=-7.13916E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06135E2
lens4b_imon=2.00543E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71552E1
cs_ef2a_imon=3.1802E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.03894E0
os_ef2alow_imon=-2.66996E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.16645E-1
os_ef2bup_imon=-5.3405E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10937E1
os_restr2_imon=3.43716E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23061E2
cs_ionfoca_imon=6.30108E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01551E1
cs_anode2_imon=2.25037E-5
iondef1_vset=2.763E1
iondef1_vmon=2.7324E1
iondef1_imon=1.09012E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68118E1
iondef4_imon=1.07116E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=4.40152E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82141E-1
olens1_imon=7.35604E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13134E0
cs_ionaccel_imon=-1.96358E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02058E2
cs_ionfocb_imon=1.47215E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56297E1
einzel_imon=7.48962E-6
window_vset=0.0E0
window_vmon=1.48267E-1
window_imon=-9.86907E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82615E2
mask1_imon=2.38994E-4
mask2_vset=0.0E0
mask2_vmon=-1.85954E1
mask2_imon=-7.16609E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92634E3
multa_neg_imon=7.31792E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93709E3
defgrida_imon=6.70147E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50158E3
multb_neg_imon=6.76636E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.40457E0
defgridb_imon=6.18236E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33325E1
os_fil1_imon=9.4069E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06158E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63938E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3089E1
cs_fil1_imon=9.95266E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63597E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66412E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.25427E-2
os_fil2_imon=-2.70801E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.91107E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.40038E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36255E-1
cs_fil2_imon=-2.4197E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.50011E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22255E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30171E-3
inlet_lpb_pmon=2.01331E-1
chamber_ion_pmon=1.17104E-7
chamber_cvt_pmon=2.52066E-3
foreline_cvt_pmon=2.52066E-3
chamber_tmon=1.40093E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.19959E-1
res40_imon=-2.56184E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=182
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	5.0E0	0.0E0	1.47E2	4.1E1	-2.09495E0	-8.17561E-1	-7.98559E-1	-9.13122E0	-9.1418E0	6.12736E-3	9.3317E-2	2.72915E1	-3.26809E1	-3.26372E1	2.68041E1	1.1688E-7	2.52099E-3	2.52099E-3	6.34588E-3	1.99977E-1
2.0E0	2.8E1	0.0E0	3.16E2	1.6E2	-2.09533E0	-8.17442E-1	-7.98464E-1	-9.13131E0	-9.14209E0	6.07967E-3	9.30786E-2	2.73263E1	-3.26609E1	-3.2621E1	2.67982E1	1.17032E-7	2.5199E-3	2.5199E-3	6.29645E-3	1.99803E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09441E0	-8.17513E-1	-7.98678E-1	-9.13141E0	-9.14178E0	6.05583E-3	9.32932E-2	2.72875E1	-3.26943E1	-3.26596E1	2.68001E1	1.1699E-7	2.51693E-3	2.51693E-3	6.32978E-3	1.99401E-1
4.0E0	5.0E0	0.0E0	6.55E2	3.98E2	-2.09433E0	-8.17513E-1	-7.98225E-1	-9.13129E0	-9.14207E0	5.8651E-3	9.3317E-2	2.73273E1	-3.26464E1	-3.26206E1	2.67926E1	1.16769E-7	2.51603E-3	2.51603E-3	6.31798E-3	1.98561E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09456E0	-8.17561E-1	-7.9813E-1	-9.13129E0	-9.14197E0	5.8651E-3	9.3174E-2	2.73117E1	-3.26837E1	-3.26194E1	2.68022E1	1.17023E-7	2.52384E-3	2.52384E-3	6.33436E-3	1.9951E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0951E0	-8.17323E-1	-7.98655E-1	-9.13122E0	-9.14176E0	5.91278E-3	9.31978E-2	2.73157E1	-3.26838E1	-3.26207E1	2.68221E1	1.1688E-7	2.5199E-3	2.5199E-3	6.3074E-3	2.00499E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09503E0	-8.17347E-1	-7.98631E-1	-9.13095E0	-9.1418E0	5.91278E-3	9.31501E-2	2.72817E1	-3.26549E1	-3.26278E1	2.6837E1	1.16829E-7	2.51552E-3	2.51552E-3	6.31837E-3	2.00151E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09472E0	-8.17323E-1	-7.9875E-1	-9.13093E0	-9.1418E0	5.98431E-3	9.31978E-2	2.73045E1	-3.27053E1	-3.26687E1	2.67938E1	1.17236E-7	2.52099E-3	2.52099E-3	6.31288E-3	1.9963E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0951E0	-8.17204E-1	-7.98655E-1	-9.13107E0	-9.14178E0	5.74589E-3	9.31263E-2	2.73369E1	-3.2675E1	-3.26432E1	2.68294E1	1.17023E-7	2.52061E-3	2.52061E-3	6.32356E-3	1.9968E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09557E0	-8.17013E-1	-7.98607E-1	-9.1311E0	-9.14183E0	5.36442E-3	9.30786E-2	2.73063E1	-3.26614E1	-3.26301E1	2.68105E1	1.17093E-7	2.51359E-3	2.51359E-3	6.30182E-3	1.99754E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09642E0	-8.17204E-1	-7.98774E-1	-9.13093E0	-9.14202E0	5.72205E-3	9.32932E-2	2.72799E1	-3.26663E1	-3.26494E1	2.68046E1	1.16823E-7	2.52384E-3	2.52384E-3	6.3074E-3	1.9917E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09711E0	-8.16917E-1	-7.98941E-1	-9.13091E0	-9.14192E0	5.81741E-3	9.3317E-2	2.73027E1	-3.26795E1	-3.26194E1	2.68196E1	1.16783E-7	2.52362E-3	2.52362E-3	6.34099E-3	2.00108E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09572E0	-8.16917E-1	-7.98488E-1	-9.13124E0	-9.1419E0	5.98431E-3	9.33647E-2	2.73476E1	-3.26655E1	-3.26956E1	2.68124E1	1.16873E-7	2.52384E-3	2.52384E-3	6.32896E-3	2.00534E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09557E0	-8.1749E-1	-7.98702E-1	-9.13115E0	-9.14149E0	5.6982E-3	9.33409E-2	2.72815E1	-3.26962E1	-3.26526E1	2.68082E1	1.1693E-7	2.52757E-3	2.52757E-3	6.32386E-3	1.98419E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.0948E0	-8.17251E-1	-7.98392E-1	-9.13117E0	-9.1418E0	5.8651E-3	9.32455E-2	2.73253E1	-3.26682E1	-3.26162E1	2.68294E1	1.16873E-7	2.51954E-3	2.51954E-3	6.3074E-3	1.9647E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09371E0	-8.1737E-1	-7.98488E-1	-9.13103E0	-9.14173E0	6.05583E-3	9.3317E-2	2.73137E1	-3.26836E1	-3.26168E1	2.68058E1	1.1699E-7	2.52697E-3	2.52697E-3	6.32418E-3	1.95902E-1
2.0E1	1.0E1	0.0E0	8.08E2	5.58E2	-2.09387E0	-8.17442E-1	-7.98798E-1	-9.131E0	-9.14176E0	6.05583E-3	9.30071E-2	2.72945E1	-3.26402E1	-3.26496E1	2.6801E1	1.17134E-7	2.51007E-3	2.51007E-3	6.33486E-3	1.96021E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09472E0	-8.17251E-1	-7.98488E-1	-9.13107E0	-9.14166E0	6.05583E-3	9.31501E-2	2.73196E1	-3.26764E1	-3.26017E1	2.68227E1	1.16727E-7	2.52209E-3	2.52209E-3	6.3074E-3	1.98247E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0948E0	-8.17561E-1	-7.98512E-1	-9.13098E0	-9.14204E0	6.00815E-3	9.3317E-2	2.73198E1	-3.26744E1	-3.26193E1	2.68088E1	1.16765E-7	2.51783E-3	2.51783E-3	6.3282E-3	2.00105E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09441E0	-8.17323E-1	-7.98321E-1	-9.13103E0	-9.14197E0	6.12736E-3	9.34124E-2	2.7324E1	-3.26779E1	-3.26408E1	2.68118E1	1.17104E-7	2.52066E-3	2.52066E-3	6.30171E-3	2.01331E-1