[Scan]
initial_time=2015-12-15T17:51:05
final_time=2015-12-15T17:51:24
ip_count=19
run=1017
dataset=1
scan=57
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=27.0
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09657E0
qbias_imon=-1.08784E-4
ql1_vset=
ql1_vmon=-8.17251E-1
ql1_imon=1.35296E-8
ql2_vset=
ql2_vmon=-7.98106E-1
ql2_imon=2.03381E-9
ql3_vset=
ql3_vmon=-9.13091E0
ql3_imon=2.90346E-10
ql4_vset=
ql4_vmon=-9.14173E0
ql4_imon=-3.31044E-11
mult1=-9.55847E-9
mult2=-2.75265E-9
rf_tmon=-4.70414E-3
rf_agc=3.41468E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=6.03199E-3
ql5_imon=1.67429E-9
bslens_vset=-6.2E0
bslens_vmon=-6.63189E0
bslens_imon=2.49089E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20031E1
lens5a_imon=1.98704E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12502E2
lens4a_imon=2.04927E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5361E1
cs_ef1b_imon=2.86161E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04621E2
lens23_imon=1.02244E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04922E1
cs_ea1_imon=2.51156E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38578E0
lens1_imon=2.62427E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64747E1
os_ef1alow_imon=2.96504E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0378E1
cs_ea2_imon=1.52164E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8434E1
cs_ef1a_imon=2.93981E-5
olens2_vset=9.7E-1
olens2_vmon=9.69934E-1
olens2_imon=1.24816E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11256E1
os_restr1_imon=4.31581E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15402E1
os_ea1_imon=2.36195E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63659E1
os_ef1bup_imon=3.08469E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24609E0
cs_ionrep_imon=1.2062E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91903E2
cs_nozzle_imon=1.93427E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01923E1
cs_anode1_imon=2.98162E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20582E0
olens4_imon=3.25533E-8
tplens_vset=1.4E-1
tplens_vmon=1.58856E0
tplens_imon=-2.27247E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26437E1
iondef3_imon=1.48919E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26726E1
iondef2_imon=1.55949E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02927E2
lens6_imon=2.98364E-4
ql6_vset=1.0E-1
ql6_vmon=9.29117E-2
ql6_imon=4.04388E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27853E0
ionrepsh_imon=1.77362E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34012E1
lens5b_imon=2.19216E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74705E1
cs_ef2b_imon=3.12001E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.35904E0
os_ea2_imon=-8.25669E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0615E2
lens4b_imon=2.00576E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71168E1
cs_ef2a_imon=3.17948E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06117E0
os_ef2alow_imon=-2.64113E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.92018E-1
os_ef2bup_imon=-5.39456E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10997E1
os_restr2_imon=3.42455E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23078E2
cs_ionfoca_imon=6.28991E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01833E1
cs_anode2_imon=2.24713E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72727E1
iondef1_imon=1.06813E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68226E1
iondef4_imon=1.08017E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7179E1
olens3_imon=4.31831E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82404E-1
olens1_imon=7.34237E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12233E0
cs_ionaccel_imon=-1.92033E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0209E2
cs_ionfocb_imon=1.47068E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56219E1
einzel_imon=7.58693E-6
window_vset=0.0E0
window_vmon=1.36854E-1
window_imon=-1.0698E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82622E2
mask1_imon=2.39088E-4
mask2_vset=0.0E0
mask2_vmon=-1.86296E1
mask2_imon=-7.88688E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9265E3
multa_neg_imon=7.41525E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93744E3
defgrida_imon=6.34098E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50115E3
multb_neg_imon=6.88533E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.31134E0
defgridb_imon=6.14992E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33331E1
os_fil1_imon=9.40762E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07053E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63553E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3089E1
cs_fil1_imon=9.95332E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6245E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65983E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.30586E-2
os_fil2_imon=-2.87019E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.90506E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.58342E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34701E-1
cs_fil2_imon=-2.61792E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.29239E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22262E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29684E-3
inlet_lpb_pmon=1.99227E-1
chamber_ion_pmon=1.16769E-7
chamber_cvt_pmon=2.52448E-3
foreline_cvt_pmon=2.52448E-3
chamber_tmon=1.40055E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.23252E-1
res40_imon=-2.53661E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=214
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.09464E0	-8.17537E-1	-7.98225E-1	-9.13112E0	-9.14204E0	6.17504E-3	9.28879E-2	2.73327E1	-3.26254E1	-3.26524E1	2.68182E1	1.17032E-7	2.51771E-3	2.51771E-3	6.3074E-3	2.01722E-1
2.0E0	3.5E1	0.0E0	3.16E2	1.6E2	-2.09472E0	-8.17132E-1	-7.98035E-1	-9.13103E0	-9.14178E0	5.65052E-3	9.29594E-2	2.73216E1	-3.26389E1	-3.26236E1	2.67941E1	1.18378E-7	2.52384E-3	2.52384E-3	6.31278E-3	2.00534E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09533E0	-8.17394E-1	-7.98249E-1	-9.13115E0	-9.14178E0	6.10352E-3	9.29832E-2	2.73271E1	-3.26561E1	-3.26434E1	2.67856E1	1.1929E-7	2.51248E-3	2.51248E-3	6.3074E-3	2.00285E-1
4.0E0	3.0E0	0.0E0	6.55E2	3.98E2	-2.09495E0	-8.1737E-1	-7.98178E-1	-9.13117E0	-9.14183E0	5.88894E-3	9.29594E-2	2.73129E1	-3.26633E1	-3.26699E1	2.6816E1	1.19214E-7	2.52061E-3	2.52061E-3	6.31278E-3	2.01907E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0948E0	-8.17466E-1	-7.98059E-1	-9.13115E0	-9.1418E0	6.12736E-3	9.28402E-2	2.7321E1	-3.26868E1	-3.26266E1	2.68148E1					
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09426E0	-8.1737E-1	-7.98082E-1	-9.13124E0	-9.14178E0	6.05583E-3	9.2864E-2	2.72961E1	-3.26777E1	-3.26332E1	2.67842E1	1.1929E-7	2.51771E-3	2.51771E-3	6.3074E-3	2.02952E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0948E0	-8.17466E-1	-7.98273E-1	-9.13124E0	-9.14156E0	6.34193E-3	9.27687E-2	2.73259E1	-3.2634E1	-3.26217E1	2.68286E1	1.19238E-7	2.52318E-3	2.52318E-3	6.3074E-3	2.02952E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09472E0	-8.17442E-1	-7.9813E-1	-9.1316E0	-9.14149E0	6.19888E-3	9.30548E-2	2.72853E1	-3.27113E1	-3.26278E1	2.68436E1	1.19238E-7	2.51225E-3	2.51225E-3	6.32386E-3	2.01722E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0948E0	-8.17251E-1	-7.98464E-1	-9.13129E0	-9.14183E0	5.98431E-3	9.27687E-2	2.72691E1	-3.2649E1	-3.26018E1	2.68184E1	1.1929E-7	2.51771E-3	2.51771E-3	6.31837E-3	2.00325E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0958E0	-8.17347E-1	-7.98202E-1	-9.13124E0	-9.14195E0	5.93662E-3	9.31978E-2	2.72955E1	-3.26657E1	-3.2653E1	2.6786E1	1.19188E-7	2.52061E-3	2.52061E-3	6.32896E-3	2.00363E-1
1.4E1	4.0E0	0.0E0	5.66E2	3.82E2	-2.09603E0	-8.17537E-1	-7.98249E-1	-9.13112E0	-9.14202E0	5.74589E-3	9.26971E-2	2.72943E1	-3.26422E1	-3.2632E1	2.68004E1	1.19238E-7	2.50789E-3	2.50789E-3	6.34037E-3	2.00151E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09541E0	-8.17442E-1	-7.98273E-1	-9.13117E0	-9.14214E0	6.19888E-3	9.3317E-2	2.73099E1	-3.26693E1	-3.26494E1	2.68244E1	1.18773E-7	2.5188E-3	2.5188E-3	6.32386E-3	2.01197E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09565E0	-8.1749E-1	-7.98321E-1	-9.13124E0	-9.14199E0	6.05583E-3	9.30071E-2	2.73021E1	-3.26862E1	-3.25953E1	2.6825E1	1.16778E-7	2.52209E-3	2.52209E-3	6.32936E-3	2.00499E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09503E0	-8.1749E-1	-7.98154E-1	-9.13105E0	-9.14187E0	5.98431E-3	9.28879E-2	2.73087E1	-3.26795E1	-3.26338E1	2.6798E1	1.1693E-7	2.52428E-3	2.52428E-3	6.32386E-3	1.98764E-1
1.8E1	6.0E0	0.0E0	7.27E2	5.0E2	-2.09541E0	-8.1749E-1	-7.98297E-1	-9.13098E0	-9.14214E0	5.88894E-3	9.30786E-2	2.73231E1	-3.26302E1	-3.26188E1	2.6837E1	1.1693E-7	2.52538E-3	2.52538E-3	6.32386E-3	1.9963E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09503E0	-8.17466E-1	-7.98297E-1	-9.13105E0	-9.14195E0	5.60284E-3	9.3317E-2	2.73213E1	-3.27119E1	-3.2623E1	2.6816E1	1.16829E-7	2.5188E-3	2.5188E-3	6.32936E-3	2.01197E-1
2.0E1	6.0E0	0.0E0	8.08E2	5.58E2	-2.09518E0	-8.1749E-1	-7.98392E-1	-9.13124E0	-9.14204E0	5.67436E-3	9.30309E-2	2.73147E1	-3.26224E1	-3.26524E1	2.68052E1	1.17123E-7	2.52061E-3	2.52061E-3	6.33977E-3	1.9985E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09557E0	-8.17418E-1	-7.98106E-1	-9.13095E0	-9.14202E0	5.84126E-3	9.28164E-2	2.72933E1	-3.26738E1	-3.26225E1	2.68208E1	1.16727E-7	2.52538E-3	2.52538E-3	6.32936E-3	1.99283E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09595E0	-8.17037E-1	-7.98059E-1	-9.13107E0	-9.14173E0	5.88894E-3	9.31263E-2	2.73476E1	-3.26962E1	-3.26136E1	2.68082E1	1.16829E-7	2.51662E-3	2.51662E-3	6.31837E-3	1.9911E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09657E0	-8.17251E-1	-7.98106E-1	-9.13091E0	-9.14173E0	6.03199E-3	9.29117E-2	2.72727E1	-3.26726E1	-3.26437E1	2.68226E1	1.16769E-7	2.52448E-3	2.52448E-3	6.29684E-3	1.99227E-1