[Scan]
initial_time=2015-12-15T17:52:25
final_time=2015-12-15T17:52:44
ip_count=19
run=1017
dataset=1
scan=60
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=27.0
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09565E0
qbias_imon=-1.08824E-4
ql1_vset=
ql1_vmon=-8.17299E-1
ql1_imon=1.35877E-8
ql2_vset=
ql2_vmon=-7.98011E-1
ql2_imon=2.11629E-9
ql3_vset=
ql3_vmon=-9.13115E0
ql3_imon=3.14665E-10
ql4_vset=
ql4_vmon=-9.14197E0
ql4_imon=-4.47392E-11
mult1=-9.27081E-9
mult2=-2.69466E-9
rf_tmon=-1.23793E-3
rf_agc=3.57068E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.88894E-3
ql5_imon=1.75128E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66326E0
bslens_imon=2.29904E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20196E1
lens5a_imon=1.99395E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1251E2
lens4a_imon=2.04934E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53766E1
cs_ef1b_imon=2.85046E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04599E2
lens23_imon=1.0216E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04805E1
cs_ea1_imon=2.51601E-5
lens1_vset=-5.0E0
lens1_vmon=-5.35958E0
lens1_imon=2.51494E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64898E1
os_ef1alow_imon=2.978E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04127E1
cs_ea2_imon=1.56709E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84232E1
cs_ef1a_imon=2.93804E-5
olens2_vset=9.7E-1
olens2_vmon=9.70197E-1
olens2_imon=1.24837E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1128E1
os_restr1_imon=4.30833E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15217E1
os_ea1_imon=2.38859E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.6356E1
os_ef1bup_imon=3.06732E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2639E0
cs_ionrep_imon=1.19545E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91873E2
cs_nozzle_imon=1.93335E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01804E1
cs_anode1_imon=2.96827E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2058E0
olens4_imon=3.23282E-8
tplens_vset=1.4E-1
tplens_vmon=1.57713E0
tplens_imon=-2.28099E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26254E1
iondef3_imon=1.47825E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.27101E1
iondef2_imon=1.55754E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02958E2
lens6_imon=2.98339E-4
ql6_vset=1.0E-1
ql6_vmon=9.29356E-2
ql6_imon=4.09012E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27687E0
ionrepsh_imon=1.75893E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33593E1
lens5b_imon=2.19074E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7471E1
cs_ef2b_imon=3.12501E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.32938E0
os_ea2_imon=-7.41313E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06099E2
lens4b_imon=2.00456E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71466E1
cs_ef2a_imon=3.17366E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06267E0
os_ef2alow_imon=-2.73792E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.96072E-1
os_ef2bup_imon=-5.4938E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10828E1
os_restr2_imon=3.42562E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23075E2
cs_ionfoca_imon=6.27769E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01786E1
cs_anode2_imon=2.25967E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73081E1
iondef1_imon=1.08113E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67884E1
iondef4_imon=1.06766E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71788E1
olens3_imon=4.44577E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81951E-1
olens1_imon=7.33918E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14868E0
cs_ionaccel_imon=-1.84825E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02059E2
cs_ionfocb_imon=1.47233E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56185E1
einzel_imon=7.57316E-6
window_vset=0.0E0
window_vmon=1.8525E-1
window_imon=-1.17058E-6
mask1_vset=-4.8E2
mask1_vmon=-4.826E2
mask1_imon=2.38956E-4
mask2_vset=0.0E0
mask2_vmon=-1.8624E1
mask2_imon=-7.04896E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92605E3
multa_neg_imon=7.99749E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93727E3
defgrida_imon=6.71976E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50095E3
multb_neg_imon=7.64001E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.39965E0
defgridb_imon=6.25256E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33335E1
os_fil1_imon=9.41088E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07294E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63825E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30852E1
cs_fil1_imon=9.94161E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61937E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66187E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.26858E-2
os_fil2_imon=-2.63443E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.83706E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.58358E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36519E-1
cs_fil2_imon=-2.57651E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.50869E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2219E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31288E-3
inlet_lpb_pmon=1.99456E-1
chamber_ion_pmon=1.1693E-7
chamber_cvt_pmon=2.51116E-3
foreline_cvt_pmon=2.51116E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.01488E-1
res40_imon=-2.64409E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=165
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	6.0E0	0.0E0	1.47E2	4.1E1	-2.09673E0	-8.17299E-1	-7.98178E-1	-9.13088E0	-9.14156E0	6.07967E-3	9.30309E-2	2.73201E1	-3.26783E1	-3.26512E1	2.68232E1	1.17023E-7	2.51847E-3	2.51847E-3	6.32356E-3	1.9934E-1
2.0E0	2.3E1	0.0E0	3.16E2	1.6E2	-2.09642E0	-8.17108E-1	-7.98345E-1	-9.13117E0	-9.14161E0	6.10352E-3	9.29117E-2	2.73418E1	-3.2645E1	-3.26168E1	2.67995E1	1.16873E-7	2.52276E-3	2.52276E-3	6.32896E-3	1.9934E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09657E0	-8.17275E-1	-7.98178E-1	-9.13115E0	-9.14166E0	5.93662E-3	9.28402E-2	2.72848E1	-3.26642E1	-3.26231E1	2.6818E1	1.17157E-7	2.51725E-3	2.51725E-3	6.3131E-3	2.00064E-1
4.0E0	2.0E0	0.0E0	6.55E2	3.98E2	-2.0968E0	-8.1706E-1	-7.98273E-1	-9.1311E0	-9.14197E0	6.19888E-3	9.30548E-2	2.73352E1	-3.26779E1	-3.26154E1	2.68192E1	1.17161E-7	2.51603E-3	2.51603E-3	6.2863E-3	1.98063E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09657E0	-8.17156E-1	-7.9813E-1	-9.13093E0	-9.14202E0	5.96046E-3	9.30071E-2	2.73189E1	-3.26825E1	-3.26428E1	2.68112E1	1.16923E-7	2.52384E-3	2.52384E-3	6.32356E-3	1.97815E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09758E0	-8.16965E-1	-7.97749E-1	-9.13103E0	-9.14204E0	5.6982E-3	9.2721E-2	2.73213E1	-3.26891E1	-3.26182E1	2.68004E1	1.16973E-7	2.52707E-3	2.52707E-3	6.33436E-3	1.9917E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09704E0	-8.16965E-1	-7.98035E-1	-9.13138E0	-9.14197E0	5.91278E-3	9.27925E-2	2.73057E1	-3.26332E1	-3.26717E1	2.681E1	1.16854E-7	2.51716E-3	2.51716E-3	6.32112E-3	1.98505E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09734E0	-8.16941E-1	-7.97796E-1	-9.13098E0	-9.1419E0	5.8651E-3	9.29832E-2	2.72787E1	-3.26338E1	-3.2644E1	2.68046E1					
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0965E0	-8.17132E-1	-7.97939E-1	-9.131E0	-9.14173E0	6.00815E-3	9.29117E-2	2.72825E1	-3.26747E1	-3.26254E1	2.67955E1	1.16778E-7	2.52538E-3	2.52538E-3	6.31837E-3	1.97903E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09603E0	-8.17227E-1	-7.97892E-1	-9.13115E0	-9.14187E0	5.88894E-3	9.29594E-2	2.72919E1	-3.26518E1	-3.265E1	2.67836E1	1.16867E-7	2.52342E-3	2.52342E-3	6.29684E-3	1.99227E-1
1.4E1	3.0E0	0.0E0	5.66E2	3.82E2	-2.09627E0	-8.17037E-1	-7.97963E-1	-9.13093E0	-9.14183E0	6.00815E-3	9.30071E-2	2.73141E1	-3.26549E1	-3.25894E1	2.68316E1	1.16835E-7	2.52473E-3	2.52473E-3	6.33538E-3	1.99401E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09557E0	-8.16989E-1	-7.97915E-1	-9.13134E0	-9.14173E0	5.93662E-3	9.27687E-2	2.72961E1	-3.26747E1	-3.26296E1	2.6816E1	1.16923E-7	2.52276E-3	2.52276E-3	6.30202E-3	2.00876E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09572E0	-8.1737E-1	-7.98082E-1	-9.13134E0	-9.14207E0	6.12736E-3	9.30548E-2	2.73057E1	-3.2675E1	-3.26101E1	2.68448E1	1.16981E-7	2.51662E-3	2.51662E-3	6.29098E-3	1.99803E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09588E0	-8.17347E-1	-7.98678E-1	-9.13122E0	-9.14159E0	6.07967E-3	9.25779E-2	2.73163E1	-3.26841E1	-3.26385E1	2.68193E1	1.17134E-7	2.51552E-3	2.51552E-3	6.33486E-3	2.01197E-1
1.8E1	4.0E0	0.0E0	7.27E2	5.0E2	-2.09557E0	-8.17013E-1	-7.98225E-1	-9.1311E0	-9.14187E0	6.17504E-3	9.30309E-2	2.73093E1	-3.26669E1	-3.26452E1	2.68142E1	1.16948E-7	2.52152E-3	2.52152E-3	6.31962E-3	2.01058E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09557E0	-8.17204E-1	-7.98249E-1	-9.13122E0	-9.14209E0	5.93662E-3	9.29594E-2	2.72903E1	-3.26608E1	-3.26183E1	2.68065E1	1.1688E-7	2.51662E-3	2.51662E-3	6.31837E-3	2.00673E-1
2.0E1	1.0E0	0.0E0	8.08E2	5.58E2	-2.09611E0	-8.1718E-1	-7.98273E-1	-9.13138E0	-9.14197E0	6.05583E-3	9.27687E-2	2.73159E1	-3.26843E1	-3.26344E1	2.6816E1	1.16923E-7	2.5131E-3	2.5131E-3	6.29128E-3	2.00363E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09549E0	-8.17204E-1	-7.98345E-1	-9.131E0	-9.14173E0	5.8651E-3	9.30071E-2	2.73181E1	-3.26484E1	-3.26561E1	2.68268E1	1.1688E-7	2.5199E-3	2.5199E-3	6.31288E-3	2.00151E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.0958E0	-8.17227E-1	-7.98345E-1	-9.13095E0	-9.14195E0	5.88894E-3	9.30071E-2	2.7308E1	-3.26402E1	-3.26467E1	2.68012E1	1.16823E-7	2.51954E-3	2.51954E-3	6.32356E-3	1.9985E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09565E0	-8.17299E-1	-7.98011E-1	-9.13115E0	-9.14197E0	5.88894E-3	9.29356E-2	2.73081E1	-3.27101E1	-3.26254E1	2.67884E1	1.1693E-7	2.51116E-3	2.51116E-3	6.31288E-3	1.99456E-1