[Scan]
initial_time=2015-12-15T17:53:01
final_time=2015-12-15T17:53:21
ip_count=19
run=1017
dataset=2
scan=61
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=27.0
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.47923E-2
qbias_imon=-3.81917E-6
ql1_vset=
ql1_vmon=-8.79989E1
ql1_imon=-3.43995E-9
ql2_vset=
ql2_vmon=-9.29832E-4
ql2_imon=1.62753E-9
ql3_vset=
ql3_vmon=-8.80009E1
ql3_imon=-9.50153E-9
ql4_vset=
ql4_vmon=-7.15256E-5
ql4_imon=1.65102E-8
mult1=-2.32861E-8
mult2=-2.68468E-9
rf_tmon=-4.03777E-3
rf_agc=3.35859E-2
counter1=3
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.98431E-3
ql5_imon=7.95639E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64369E0
bslens_imon=2.65633E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19897E1
lens5a_imon=2.00304E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12527E2
lens4a_imon=2.05003E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53644E1
cs_ef1b_imon=2.84838E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04607E2
lens23_imon=1.02142E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05191E1
cs_ea1_imon=2.48137E-5
lens1_vset=-2.7E0
lens1_vmon=-3.01048E0
lens1_imon=1.22413E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64464E1
os_ef1alow_imon=2.97696E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03708E1
cs_ea2_imon=1.54105E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84249E1
cs_ef1a_imon=2.93352E-5
olens2_vset=9.7E-1
olens2_vmon=9.69791E-1
olens2_imon=1.2508E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11326E1
os_restr1_imon=4.31806E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15398E1
os_ea1_imon=2.3736E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63653E1
os_ef1bup_imon=3.07427E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26484E0
cs_ionrep_imon=1.19482E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91864E2
cs_nozzle_imon=1.93264E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01919E1
cs_anode1_imon=2.97557E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20589E0
olens4_imon=3.94206E-8
tplens_vset=1.4E-1
tplens_vmon=1.55163E0
tplens_imon=-2.63683E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26446E1
iondef3_imon=1.48474E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26819E1
iondef2_imon=1.58416E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02966E2
lens6_imon=2.98342E-4
ql6_vset=1.0E-1
ql6_vmon=9.26971E-2
ql6_imon=1.0967E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28802E0
ionrepsh_imon=1.77709E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33565E1
lens5b_imon=2.18172E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74652E1
cs_ef2b_imon=3.12327E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.32915E0
os_ea2_imon=-6.77351E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06125E2
lens4b_imon=2.00518E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71408E1
cs_ef2a_imon=3.17644E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08352E0
os_ef2alow_imon=-2.67536E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.97231E-1
os_ef2bup_imon=-5.32003E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10874E1
os_restr2_imon=3.43048E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23087E2
cs_ionfoca_imon=6.30554E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02029E1
cs_anode2_imon=2.2628E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72997E1
iondef1_imon=1.0815E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6822E1
iondef4_imon=1.07947E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=4.48836E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82022E-1
olens1_imon=7.33831E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.16258E0
cs_ionaccel_imon=-1.84478E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02048E2
cs_ionfocb_imon=1.47153E-4
einzel_vset=-2.1E1
einzel_vmon=-2.5637E1
einzel_imon=7.58706E-6
window_vset=0.0E0
window_vmon=2.04364E-1
window_imon=-1.03505E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82609E2
mask1_imon=2.38973E-4
mask2_vset=0.0E0
mask2_vmon=-1.86147E1
mask2_imon=-6.90995E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92635E3
multa_neg_imon=7.68292E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93712E3
defgrida_imon=6.49754E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5012E3
multb_neg_imon=7.4083E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.42971E0
defgridb_imon=5.93091E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33321E1
os_fil1_imon=9.39958E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07248E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6391E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30881E1
cs_fil1_imon=9.93819E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63171E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66358E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.20775E-2
os_fil2_imon=-2.79082E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.86602E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.55391E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35769E-1
cs_fil2_imon=-2.79082E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.34473E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22156E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33486E-3
inlet_lpb_pmon=2.00151E-1
chamber_ion_pmon=1.16981E-7
chamber_cvt_pmon=2.52428E-3
foreline_cvt_pmon=2.52428E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-2.26567E-1
res40_imon=-2.61281E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=189
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.517E3	1.0E0	1.47E2	4.1E1	-7.31692E-2	-8.79984E1	-6.4373E-4	-8.80009E1	1.19209E-4	5.76973E-3	9.26971E-2	2.73249E1	-3.26903E1	-3.26242E1	2.68004E1	1.16774E-7	2.51954E-3	2.51954E-3	6.29665E-3	2.00705E-1
2.0E0	1.18491E5	1.17E2	3.16E2	1.6E2	-7.37874E-2	-8.79984E1	-5.48363E-4	-8.80012E1	4.52995E-4	6.12736E-3	9.28402E-2	2.72953E1	-3.27184E1	-3.26229E1	2.68338E1	1.16923E-7	2.51847E-3	2.51847E-3	6.29665E-3	2.00534E-1
3.0E0	1.5E1	0.0E0	4.85E2	2.79E2	-7.37874E-2	-8.79984E1	-4.29153E-4	-8.80007E1	9.53674E-5	6.17504E-3	9.26971E-2	2.73005E1	-3.26347E1	-3.26104E1	2.68227E1	1.16783E-7	2.51804E-3	2.51804E-3	6.32418E-3	2.0064E-1
4.0E0	2.2712E4	1.0E1	6.55E2	3.98E2	-7.31692E-2	-8.79994E1	-8.34465E-4	-8.8001E1	2.14577E-4	6.05583E-3	9.2721E-2	2.73195E1	-3.2629E1	-3.26134E1	2.67986E1	1.16973E-7	2.5131E-3	2.5131E-3	6.29665E-3	2.01391E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.33239E-2	-8.7999E1	-6.4373E-4	-8.80012E1	3.33786E-4	6.03199E-3	9.25064E-2	2.72552E1	-3.26627E1	-3.26482E1	2.68184E1	1.16823E-7	2.52707E-3	2.52707E-3	6.32356E-3	2.00705E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.31692E-2	-8.79984E1	-5.72205E-4	-8.80009E1	2.86102E-4	6.10352E-3	9.26018E-2	2.72781E1	-3.26543E1	-3.2626E1	2.68136E1	1.17083E-7	2.52099E-3	2.52099E-3	6.34037E-3	1.99456E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.40192E-2	-8.79987E1	-3.57628E-4	-8.80008E1	3.33786E-4	6.29425E-3	9.30548E-2	2.73151E1	-3.26714E1	-3.26868E1	2.68036E1	1.17032E-7	2.52757E-3	2.52757E-3	6.3514E-3	1.98764E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.36328E-2	-8.79989E1	-1.90735E-4	-8.80008E1	2.86102E-4	5.96046E-3	9.2864E-2	2.73267E1	-3.26458E1	-3.26224E1	2.68166E1	1.17073E-7	2.51739E-3	2.51739E-3	6.31817E-3	1.9951E-1
1.2E1	3.11E2	0.0E0	4.85E2	3.23E2	-7.3401E-2	-8.79989E1	-5.72205E-4	-8.80004E1	2.14577E-4	6.1512E-3	9.2721E-2	2.73231E1	-3.26585E1	-3.26032E1	2.6813E1	1.16829E-7	2.5199E-3	2.5199E-3	6.29098E-3	1.99803E-1
1.3E1	1.6E1	0.0E0	5.25E2	3.53E2	-7.25507E-2	-8.79988E1	-3.57628E-4	-8.80009E1	3.8147E-4	6.17504E-3	9.26971E-2	2.73399E1	-3.26809E1	-3.26343E1	2.6836E1	1.17185E-7	2.52538E-3	2.52538E-3	6.27461E-3	1.99803E-1
1.4E1	3.698E3	7.0E0	5.66E2	3.82E2	-7.27828E-2	-8.79986E1	-4.05312E-4	-8.8001E1	4.05312E-4	5.98431E-3	9.30071E-2	2.73159E1	-3.26567E1	-3.2602E1	2.68007E1	1.16873E-7	2.52061E-3	2.52061E-3	6.29665E-3	2.01047E-1
1.5E1	1.52E2	0.0E0	6.06E2	4.11E2	-7.3401E-2	-8.79983E1	-3.8147E-4	-8.80011E1	3.33786E-4	6.36578E-3	9.27925E-2	2.73328E1	-3.26708E1	-3.26384E1	2.68151E1	1.16778E-7	2.52538E-3	2.52538E-3	6.34588E-3	2.00499E-1
1.6E1	1.176E3	0.0E0	6.47E2	4.41E2	-7.37103E-2	-8.79985E1	-3.33786E-4	-8.8001E1	4.05312E-4	6.07967E-3	9.28164E-2	2.72895E1	-3.26837E1	-3.2626E1	2.68162E1	1.16923E-7	2.52169E-3	2.52169E-3	6.33977E-3	2.00876E-1
1.7E1	1.675E3	0.0E0	6.87E2	4.7E2	-7.29374E-2	-8.79985E1	-2.6226E-4	-8.80007E1	0.0E0	6.19888E-3	9.28164E-2	2.72954E1	-3.27061E1	-3.26446E1	2.67537E1	1.16916E-7	2.51862E-3	2.51862E-3	6.34209E-3	1.9985E-1
1.8E1	7.109E3	6.0E0	7.27E2	5.0E2	-7.25507E-2	-8.79987E1	-3.09944E-4	-8.80011E1	1.43051E-4	6.00815E-3	9.26495E-2	2.73036E1	-3.26399E1	-3.25967E1	2.6819E1	1.17342E-7	2.5178E-3	2.5178E-3	6.32632E-3	1.99416E-1
1.9E1	2.447E3	1.0E0	7.68E2	5.29E2	-7.33239E-2	-8.79985E1	-3.09944E-4	-8.8001E1	0.0E0	6.07967E-3	9.29832E-2	2.73252E1	-3.26614E1	-3.2613E1	2.68178E1	1.1672E-7	2.51849E-3	2.51849E-3	6.32151E-3	1.99729E-1
2.0E1	3.0636E4	7.0E0	8.08E2	5.58E2	-7.37103E-2	-8.79986E1	-5.00679E-4	-8.8001E1	2.38419E-5	5.98431E-3	9.29117E-2	2.72739E1	-3.26428E1	-3.26248E1	2.68208E1	1.1693E-7	2.52538E-3	2.52538E-3	6.33486E-3	1.99456E-1
2.1E1	6.8E1	0.0E0	8.49E2	5.88E2	-7.33239E-2	-8.79986E1	-5.00679E-4	-8.80013E1	4.76837E-5	5.8651E-3	9.29356E-2	2.73324E1	-3.26903E1	-3.26084E1	2.683E1	1.16823E-7	2.52276E-3	2.52276E-3	6.33977E-3	2.01219E-1
2.2E1	2.212E3	0.0E0	8.89E2	6.17E2	-7.36328E-2	-8.79987E1	-1.14441E-3	-8.80012E1	4.76837E-5	5.57899E-3	9.31263E-2	2.73231E1	-3.26675E1	-3.26645E1	2.6846E1	1.16861E-7	2.52405E-3	2.52405E-3	6.30221E-3	2.00435E-1
2.3E1	3.0E0	0.0E0	9.3E2	6.47E2	-7.47923E-2	-8.79989E1	-9.29832E-4	-8.80009E1	-7.15256E-5	5.98431E-3	9.26971E-2	2.72997E1	-3.26819E1	-3.26446E1	2.6822E1	1.16981E-7	2.52428E-3	2.52428E-3	6.33486E-3	2.00151E-1