[Scan]
initial_time=2015-12-15T17:53:28
final_time=2015-12-15T17:53:48
ip_count=19
run=1017
dataset=2
scan=62
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=27.0
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.37874E-2
qbias_imon=-3.89573E-6
ql1_vset=
ql1_vmon=-8.79995E1
ql1_imon=-1.919E-9
ql2_vset=
ql2_vmon=-2.6226E-4
ql2_imon=1.60236E-9
ql3_vset=
ql3_vmon=-8.80002E1
ql3_imon=-5.91321E-9
ql4_vset=
ql4_vmon=1.43051E-4
ql4_imon=1.6162E-8
mult1=-1.41954E-8
mult2=-2.72061E-9
rf_tmon=-4.01374E-3
rf_agc=3.3646E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=6.1512E-3
ql5_imon=7.14719E-10
bslens_vset=-6.2E0
bslens_vmon=-6.6497E0
bslens_imon=2.5291E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.2019E1
lens5a_imon=1.9766E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12492E2
lens4a_imon=2.0522E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53652E1
cs_ef1b_imon=2.86449E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04659E2
lens23_imon=1.02079E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05082E1
cs_ea1_imon=2.49973E-5
lens1_vset=-2.7E0
lens1_vmon=-2.99467E0
lens1_imon=1.43188E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64302E1
os_ef1alow_imon=2.96612E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03678E1
cs_ea2_imon=1.54727E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84424E1
cs_ef1a_imon=2.94738E-5
olens2_vset=9.7E-1
olens2_vmon=9.69958E-1
olens2_imon=1.24994E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.114E1
os_restr1_imon=4.29418E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15406E1
os_ea1_imon=2.37549E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63779E1
os_ef1bup_imon=3.0883E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24915E0
cs_ionrep_imon=1.20926E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91898E2
cs_nozzle_imon=1.93346E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01869E1
cs_anode1_imon=2.95603E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20535E0
olens4_imon=3.93442E-8
tplens_vset=1.4E-1
tplens_vmon=1.5789E0
tplens_imon=-1.92705E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.262E1
iondef3_imon=1.48887E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26933E1
iondef2_imon=1.56072E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02965E2
lens6_imon=2.98307E-4
ql6_vset=1.0E-1
ql6_vmon=9.30071E-2
ql6_imon=1.03457E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26272E0
ionrepsh_imon=1.76884E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33681E1
lens5b_imon=2.18189E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74645E1
cs_ef2b_imon=3.12253E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.34648E0
os_ea2_imon=-6.17434E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.061E2
lens4b_imon=2.00609E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7127E1
cs_ef2a_imon=3.16362E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07078E0
os_ef2alow_imon=-2.6123E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.79404E-1
os_ef2bup_imon=-5.35131E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10931E1
os_restr2_imon=3.43031E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23103E2
cs_ionfoca_imon=6.30353E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01395E1
cs_anode2_imon=2.26443E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73087E1
iondef1_imon=1.08821E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68256E1
iondef4_imon=1.08557E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=4.52611E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82475E-1
olens1_imon=7.34764E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13795E0
cs_ionaccel_imon=-2.03566E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02063E2
cs_ionfocb_imon=1.47122E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56387E1
einzel_imon=7.52927E-6
window_vset=0.0E0
window_vmon=7.61873E-2
window_imon=-9.97719E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82607E2
mask1_imon=2.38951E-4
mask2_vset=0.0E0
mask2_vmon=-1.86116E1
mask2_imon=-7.09401E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9263E3
multa_neg_imon=7.47365E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9373E3
defgrida_imon=6.38706E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50127E3
multb_neg_imon=7.74619E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.30516E0
defgridb_imon=5.99064E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33351E1
os_fil1_imon=9.40804E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07365E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63837E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3095E1
cs_fil1_imon=9.9729E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.64132E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66214E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.30657E-2
os_fil2_imon=-2.58188E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.82097E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.66078E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.39233E-1
cs_fil2_imon=-2.30557E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.53906E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22246E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=1.98592E-1
chamber_ion_pmon=1.16829E-7
chamber_cvt_pmon=2.52318E-3
foreline_cvt_pmon=2.52318E-3
chamber_tmon=1.40093E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.22051E-1
res40_imon=-2.57986E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=218
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.472E3	0.0E0	1.47E2	4.1E1	-7.26282E-2	-8.79988E1	-5.96046E-4	-8.80006E1	4.29153E-4	5.88894E-3	9.32932E-2	2.73273E1	-3.26639E1	-3.26597E1	2.68274E1	1.17173E-7	2.52384E-3	2.52384E-3	6.32356E-3	1.9968E-1
2.0E0	1.19555E5	1.21E2	3.16E2	1.6E2	-7.27053E-2	-8.79986E1	-3.8147E-4	-8.80009E1	1.43051E-4	5.65052E-3	9.33647E-2	2.73027E1	-3.26762E1	-3.26291E1	2.6825E1	1.16981E-7	2.52099E-3	2.52099E-3	6.3514E-3	2.00499E-1
3.0E0	2.1E1	0.0E0	4.85E2	2.79E2	-7.15461E-2	-8.79986E1	-7.39098E-4	-8.80005E1	1.66893E-4	5.93662E-3	9.33647E-2	2.73187E1	-3.26685E1	-3.26172E1	2.68294E1	1.16783E-7	2.51915E-3	2.51915E-3	6.30182E-3	1.99931E-1
4.0E0	2.3226E4	1.2E1	6.55E2	3.98E2	-7.22418E-2	-8.79987E1	-9.29832E-4	-8.80004E1	2.86102E-4	6.07967E-3	9.29594E-2	2.72786E1	-3.26685E1	-3.26266E1	2.68094E1	1.17123E-7	2.51417E-3	2.51417E-3	6.3074E-3	2.01391E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.16233E-2	-8.7999E1	-7.86781E-4	-8.80007E1	3.57628E-4	5.96046E-3	9.31501E-2	2.72865E1	-3.26603E1	-3.26543E1	2.6822E1	1.16923E-7	2.51847E-3	2.51847E-3	6.31278E-3	2.01047E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.26282E-2	-8.79993E1	-7.39098E-4	-8.80005E1	4.76837E-4	5.93662E-3	9.29832E-2	2.73051E1	-3.26655E1	-3.2616E1	2.68094E1	1.16778E-7	2.52099E-3	2.52099E-3	6.31837E-3	1.99803E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.23964E-2	-8.79991E1	-8.10623E-4	-8.80007E1	3.33786E-4	5.79357E-3	9.29832E-2	2.73417E1	-3.26705E1	-3.26164E1	2.68262E1	1.1688E-7	2.52209E-3	2.52209E-3	6.29645E-3	1.98592E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.33239E-2	-8.7999E1	-3.09944E-4	-8.80009E1	2.14577E-4	5.88894E-3	9.28879E-2	2.73057E1	-3.26518E1	-3.26188E1	2.68244E1	1.16774E-7	2.52384E-3	2.52384E-3	6.31278E-3	1.97815E-1
1.2E1	3.17E2	0.0E0	4.85E2	3.23E2	-7.33239E-2	-8.79988E1	-5.96046E-4	-8.80008E1	3.09944E-4	5.79357E-3	9.30071E-2	2.73105E1	-3.26609E1	-3.26603E1	2.6807E1	1.16829E-7	2.52209E-3	2.52209E-3	6.37351E-3	1.97388E-1
1.3E1	3.2E1	0.0E0	5.25E2	3.53E2	-7.30918E-2	-8.7999E1	-5.96046E-4	-8.80009E1	1.66893E-4	5.8651E-3	9.29356E-2	2.73093E1	-3.26488E1	-3.26278E1	2.6801E1	1.16778E-7	2.52099E-3	2.52099E-3	6.31837E-3	1.97731E-1
1.4E1	3.649E3	2.0E0	5.66E2	3.82E2	-7.33239E-2	-8.79993E1	-7.15256E-5	-8.80003E1	2.38419E-5	5.96046E-3	9.2864E-2	2.73243E1	-3.26699E1	-3.2608E1	2.68274E1	1.17083E-7	2.5199E-3	2.5199E-3	6.29098E-3	1.9911E-1
1.5E1	1.32E2	0.0E0	6.06E2	4.11E2	-7.29374E-2	-8.79996E1	-1.19209E-4	-8.80005E1	2.38419E-4	5.98431E-3	9.30548E-2	2.73399E1	-3.26434E1	-3.26428E1	2.68094E1	1.1693E-7	2.5188E-3	2.5188E-3	6.3514E-3	2.01547E-1
1.6E1	1.2E3	1.0E0	6.47E2	4.41E2	-7.27828E-2	-8.79995E1	-3.09944E-4	-8.80009E1	0.0E0	5.93662E-3	9.25303E-2	2.73273E1	-3.26567E1	-3.26554E1	2.68352E1	1.16778E-7	2.52318E-3	2.52318E-3	6.3074E-3	2.00151E-1
1.7E1	1.64E3	1.0E0	6.87E2	4.7E2	-7.35556E-2	-8.79996E1	-2.86102E-4	-8.8001E1	-2.14577E-4	5.84126E-3	9.30548E-2	2.7298E1	-3.26555E1	-3.2636E1	2.68088E1	1.16778E-7	2.5199E-3	2.5199E-3	6.30192E-3	1.97559E-1
1.8E1	7.105E3	2.0E0	7.27E2	5.0E2	-7.35556E-2	-8.79997E1	-3.33786E-4	-8.80007E1	-2.14577E-4	5.8651E-3	9.29356E-2	2.72973E1	-3.26681E1	-3.2623E1	2.68172E1	1.16823E-7	2.52061E-3	2.52061E-3	6.32896E-3	1.97815E-1
1.9E1	2.652E3	1.0E0	7.68E2	5.29E2	-7.37103E-2	-8.79996E1	-3.09944E-4	-8.80006E1	-2.38419E-4	6.34193E-3	9.27448E-2	2.73393E1	-3.26697E1	-3.26437E1	2.68046E1	1.1688E-7	2.5199E-3	2.5199E-3	6.27461E-3	1.97731E-1
2.0E1	3.0278E4	1.1E1	8.08E2	5.58E2	-7.46377E-2	-8.79994E1	-4.05312E-4	-8.80006E1	-2.38419E-5	5.81741E-3	9.31263E-2	2.72751E1	-3.26738E1	-3.2626E1	2.68178E1	1.16778E-7	2.52099E-3	2.52099E-3	6.3074E-3	1.98075E-1
2.1E1	5.7E1	0.0E0	8.49E2	5.88E2	-7.31692E-2	-8.79996E1	-4.29153E-4	-8.80006E1	2.86102E-4	5.53131E-3	9.31025E-2	2.73246E1	-3.26679E1	-3.25535E1	2.68106E1	1.17032E-7	2.52099E-3	2.52099E-3	6.33486E-3	2.00673E-1
2.2E1	2.2E3	0.0E0	8.89E2	6.17E2	-7.23964E-2	-8.79996E1	-2.38419E-4	-8.80004E1	1.66893E-4	5.93662E-3	9.31501E-2	2.72974E1	-3.26644E1	-3.25971E1	2.68007E1	1.16848E-7	2.51793E-3	2.51793E-3	6.32087E-3	2.00021E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.37874E-2	-8.79995E1	-2.6226E-4	-8.80002E1	1.43051E-4	6.1512E-3	9.30071E-2	2.73087E1	-3.26933E1	-3.262E1	2.68256E1	1.16829E-7	2.52318E-3	2.52318E-3	6.3074E-3	1.98592E-1