[Scan]
initial_time=2015-12-15T17:54:21
final_time=2015-12-15T17:54:41
ip_count=19
run=1017
dataset=2
scan=64
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=27.0
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.37103E-2
qbias_imon=-3.84383E-6
ql1_vset=
ql1_vmon=-8.80001E1
ql1_imon=-1.34395E-9
ql2_vset=
ql2_vmon=-5.72205E-4
ql2_imon=1.58277E-9
ql3_vset=
ql3_vmon=-8.80001E1
ql3_imon=-4.21408E-9
ql4_vset=
ql4_vmon=2.14577E-4
ql4_imon=1.60025E-8
mult1=-2.15522E-8
mult2=-2.70663E-9
rf_tmon=-6.12865E-3
rf_agc=3.27568E-2
counter1=4
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.98431E-3
ql5_imon=6.75893E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66975E0
bslens_imon=2.49017E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19913E1
lens5a_imon=1.9805E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12492E2
lens4a_imon=2.05051E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53796E1
cs_ef1b_imon=2.84899E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04637E2
lens23_imon=1.02178E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04994E1
cs_ea1_imon=2.51884E-5
lens1_vset=-2.7E0
lens1_vmon=-3.02593E0
lens1_imon=1.3257E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65119E1
os_ef1alow_imon=2.96901E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03944E1
cs_ea2_imon=1.54409E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84364E1
cs_ef1a_imon=2.93729E-5
olens2_vset=9.7E-1
olens2_vmon=9.70006E-1
olens2_imon=1.24862E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11448E1
os_restr1_imon=4.29923E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.154E1
os_ea1_imon=2.36381E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63888E1
os_ef1bup_imon=3.08433E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26803E0
cs_ionrep_imon=1.19475E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91876E2
cs_nozzle_imon=1.9324E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01899E1
cs_anode1_imon=2.97189E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20611E0
olens4_imon=3.93622E-8
tplens_vset=1.4E-1
tplens_vmon=1.57713E0
tplens_imon=-3.90912E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26344E1
iondef3_imon=1.49701E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26554E1
iondef2_imon=1.56745E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02935E2
lens6_imon=2.98346E-4
ql6_vset=1.0E-1
ql6_vmon=9.27925E-2
ql6_imon=1.00082E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27746E0
ionrepsh_imon=1.77592E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33917E1
lens5b_imon=2.17835E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74537E1
cs_ef2b_imon=3.11244E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.33291E0
os_ea2_imon=-7.44853E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0614E2
lens4b_imon=2.00566E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71396E1
cs_ef2a_imon=3.18092E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07378E0
os_ef2alow_imon=-2.73483E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.9382E-1
os_ef2bup_imon=-5.29725E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11093E1
os_restr2_imon=3.42671E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23065E2
cs_ionfoca_imon=6.29645E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02049E1
cs_anode2_imon=2.25182E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72949E1
iondef1_imon=1.09317E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68058E1
iondef4_imon=1.07188E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=4.49024E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81975E-1
olens1_imon=7.35561E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14276E0
cs_ionaccel_imon=-1.96358E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02062E2
cs_ionfocb_imon=1.47125E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56429E1
einzel_imon=7.72028E-6
window_vset=0.0E0
window_vmon=9.54084E-2
window_imon=-1.10584E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82631E2
mask1_imon=2.39059E-4
mask2_vset=0.0E0
mask2_vmon=-1.85978E1
mask2_imon=-7.20213E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92636E3
multa_neg_imon=7.58692E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93731E3
defgrida_imon=6.21009E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50095E3
multb_neg_imon=7.48427E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.26972E0
defgridb_imon=6.25256E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33296E1
os_fil1_imon=9.41285E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.05791E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63915E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30858E1
cs_fil1_imon=9.9284E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63525E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66181E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.21793E-2
os_fil2_imon=-2.87019E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.86902E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.65065E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34442E-1
cs_fil2_imon=-2.44973E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.65919E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22229E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29665E-3
inlet_lpb_pmon=1.9985E-1
chamber_ion_pmon=1.16923E-7
chamber_cvt_pmon=2.51954E-3
foreline_cvt_pmon=2.51954E-3
chamber_tmon=1.40055E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.09147E-1
res40_imon=-2.55463E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=166
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.472E3	0.0E0	1.47E2	4.1E1	-7.286E-2	-8.79996E1	-2.14577E-4	-8.80002E1	7.15256E-5	5.67436E-3	9.31978E-2	2.73237E1	-3.26657E1	-3.26188E1	2.67821E1	1.16873E-7	2.52169E-3	2.52169E-3	6.29665E-3	2.00021E-1
2.0E0	1.20082E5	1.21E2	3.16E2	1.6E2	-7.27828E-2	-8.79997E1	-3.8147E-4	-8.80001E1	-2.14577E-4	5.74589E-3	9.32455E-2	2.73112E1	-3.26597E1	-3.26352E1	2.68244E1	1.16727E-7	2.52318E-3	2.52318E-3	6.33486E-3	2.01022E-1
3.0E0	2.9E1	0.0E0	4.85E2	2.79E2	-7.26282E-2	-8.79993E1	-1.43051E-4	-8.8E1	9.53674E-5	5.72205E-3	9.32693E-2	2.73283E1	-3.26573E1	-3.2622E1	2.67984E1	1.16938E-7	2.5225E-3	2.5225E-3	6.31299E-3	2.0064E-1
4.0E0	2.3062E4	9.0E0	6.55E2	3.98E2	-7.30918E-2	-8.79995E1	-2.14577E-4	-8.79999E1	1.19209E-4	5.88894E-3	9.33409E-2	2.73151E1	-3.26655E1	-3.2649E1	2.68274E1	1.17063E-7	2.52236E-3	2.52236E-3	6.31798E-3	2.00735E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.38649E-2	-8.79997E1	-3.8147E-4	-8.80002E1	-1.43051E-4	5.98431E-3	9.30548E-2	2.73369E1	-3.26303E1	-3.26407E1	2.6795E1	1.16724E-7	2.52276E-3	2.52276E-3	6.31817E-3	2.01047E-1
6.0E0	1.0E0	0.0E0	9.93E2	6.35E2	-7.35556E-2	-8.79998E1	-5.24521E-4	-8.80001E1	-9.53674E-5	5.8651E-3	9.29117E-2	2.73305E1	-3.26744E1	-3.26343E1	2.68134E1	1.1668E-7	2.51693E-3	2.51693E-3	6.31299E-3	2.00463E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.35556E-2	-8.79998E1	-1.90735E-4	-8.8E1	-4.76837E-5	5.81741E-3	9.3174E-2	2.73153E1	-3.26663E1	-3.26543E1	2.68207E1	1.16923E-7	2.51847E-3	2.51847E-3	6.33436E-3	2.00192E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.36328E-2	-8.79996E1	-1.66893E-4	-8.80003E1	7.15256E-5	5.60284E-3	9.30548E-2	2.72904E1	-3.2648E1	-3.25734E1	2.6804E1	1.16727E-7	2.51771E-3	2.51771E-3	6.31288E-3	2.01022E-1
1.2E1	3.35E2	0.0E0	4.85E2	3.23E2	-7.35556E-2	-8.8E1	-2.14577E-4	-8.80001E1	1.19209E-4	5.79357E-3	9.29117E-2	2.73405E1	-3.26296E1	-3.2616E1	2.68005E1	1.1699E-7	2.52473E-3	2.52473E-3	6.29067E-3	2.00818E-1
1.3E1	2.4E1	0.0E0	5.25E2	3.53E2	-7.31692E-2	-8.79998E1	-2.14577E-4	-8.80004E1	1.66893E-4	6.07967E-3	9.31978E-2	2.73327E1	-3.26609E1	-3.26446E1	2.68002E1	1.16873E-7	2.52276E-3	2.52276E-3	6.33436E-3	2.01219E-1
1.4E1	3.667E3	0.0E0	5.66E2	3.82E2	-7.24736E-2	-8.80001E1	-1.43051E-4	-8.80002E1	-2.38419E-5	5.91278E-3	9.3317E-2	2.73016E1	-3.26644E1	-3.26183E1	2.68348E1	1.16677E-7	2.51007E-3	2.51007E-3	6.33486E-3	2.00847E-1
1.5E1	1.37E2	0.0E0	6.06E2	4.11E2	-7.29374E-2	-8.80001E1	-2.14577E-4	-8.80004E1	-2.38419E-5	5.81741E-3	9.29832E-2	2.73285E1	-3.26422E1	-3.26224E1	2.68064E1	1.16674E-7	2.52492E-3	2.52492E-3	6.34518E-3	1.9985E-1
1.6E1	1.234E3	0.0E0	6.47E2	4.41E2	-7.29374E-2	-8.8E1	-4.05312E-4	-8.80004E1	-1.90735E-4	5.98431E-3	9.31978E-2	2.72978E1	-3.27001E1	-3.26266E1	2.68419E1	1.16829E-7	2.52977E-3	2.52977E-3	6.31837E-3	1.9963E-1
1.7E1	1.602E3	2.0E0	6.87E2	4.7E2	-7.40967E-2	-8.80002E1	-5.96046E-4	-8.80002E1	1.66893E-4	5.81741E-3	9.31501E-2	2.73015E1	-3.26699E1	-3.26242E1	2.68088E1	1.16835E-7	2.52473E-3	2.52473E-3	6.29624E-3	2.00285E-1
1.8E1	6.99E3	2.0E0	7.27E2	5.0E2	-7.29374E-2	-8.79999E1	-3.57628E-4	-8.80006E1	9.53674E-5	5.91278E-3	9.28879E-2	2.73315E1	-3.26482E1	-3.26188E1	2.68198E1	1.1693E-7	2.5188E-3	2.5188E-3	6.32386E-3	1.99803E-1
1.9E1	2.589E3	0.0E0	7.68E2	5.29E2	-7.29374E-2	-8.79997E1	-7.15256E-4	-8.80005E1	1.90735E-4	6.27041E-3	9.30548E-2	2.73075E1	-3.26826E1	-3.26343E1	2.68292E1	1.16778E-7	2.51771E-3	2.51771E-3	6.29645E-3	1.98592E-1
2.0E1	3.0387E4	2.3E1	8.08E2	5.58E2	-7.26282E-2	-8.79999E1	-6.19888E-4	-8.80006E1	7.15256E-5	6.17504E-3	9.31263E-2	2.73063E1	-3.26723E1	-3.26446E1	2.68154E1	1.16774E-7	2.52384E-3	2.52384E-3	6.3074E-3	1.98153E-1
2.1E1	6.4E1	0.0E0	8.49E2	5.88E2	-7.23189E-2	-8.8E1	-7.15256E-4	-8.80006E1	-2.38419E-5	5.79357E-3	9.27925E-2	2.72018E1	-3.2602E1	-3.2739E1	2.68058E1	1.16829E-7	2.51552E-3	2.51552E-3	6.29098E-3	1.99977E-1
2.2E1	2.254E3	0.0E0	8.89E2	6.17E2	-7.32464E-2	-8.8E1	-3.8147E-4	-8.80005E1	2.38419E-4	6.07967E-3	9.28402E-2	2.72998E1	-3.26714E1	-3.26408E1	2.68214E1	1.16727E-7	2.51552E-3	2.51552E-3	6.33486E-3	2.00499E-1
2.3E1	4.0E0	0.0E0	9.3E2	6.47E2	-7.37103E-2	-8.80001E1	-5.72205E-4	-8.80001E1	2.14577E-4	5.98431E-3	9.27925E-2	2.72949E1	-3.26554E1	-3.26344E1	2.68058E1	1.16923E-7	2.51954E-3	2.51954E-3	6.29665E-3	1.9985E-1