[Scan]
initial_time=2015-12-15T17:54:48
final_time=2015-12-15T17:55:07
ip_count=19
run=1017
dataset=2
scan=65
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=27.0
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.33239E-2
qbias_imon=-3.85987E-6
ql1_vset=
ql1_vmon=-8.80003E1
ql1_imon=-1.27175E-9
ql2_vset=
ql2_vmon=-4.05312E-4
ql2_imon=1.52611E-9
ql3_vset=
ql3_vmon=-8.80003E1
ql3_imon=-3.86685E-9
ql4_vset=
ql4_vmon=0.0E0
ql4_imon=1.5946E-8
mult1=-2.21061E-8
mult2=-2.8284E-9
rf_tmon=-4.56049E-3
rf_agc=3.33816E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.48363E-3
ql5_imon=6.54352E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66914E0
bslens_imon=2.45123E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19809E1
lens5a_imon=1.98127E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12482E2
lens4a_imon=2.04797E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53826E1
cs_ef1b_imon=2.85152E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04616E2
lens23_imon=1.02226E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05192E1
cs_ea1_imon=2.5267E-5
lens1_vset=-2.7E0
lens1_vmon=-2.97827E0
lens1_imon=1.35893E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64813E1
os_ef1alow_imon=2.97765E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03606E1
cs_ea2_imon=1.53894E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84418E1
cs_ef1a_imon=2.93909E-5
olens2_vset=9.7E-1
olens2_vmon=9.70149E-1
olens2_imon=1.24869E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11189E1
os_restr1_imon=4.30752E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15432E1
os_ea1_imon=2.35763E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63707E1
os_ef1bup_imon=3.07352E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24188E0
cs_ionrep_imon=1.17124E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91878E2
cs_nozzle_imon=1.93344E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02055E1
cs_anode1_imon=2.98594E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2057E0
olens4_imon=3.93174E-8
tplens_vset=1.4E-1
tplens_vmon=1.62281E0
tplens_imon=-2.92136E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26092E1
iondef3_imon=1.50037E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26651E1
iondef2_imon=1.57607E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02934E2
lens6_imon=2.9805E-4
ql6_vset=1.0E-1
ql6_vmon=9.29594E-2
ql6_imon=1.01546E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24489E0
ionrepsh_imon=1.78408E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33844E1
lens5b_imon=2.1763E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74639E1
cs_ef2b_imon=3.11064E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.33021E0
os_ea2_imon=-8.47299E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06103E2
lens4b_imon=2.0063E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7142E1
cs_ef2a_imon=3.17912E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.03594E0
os_ef2alow_imon=-2.7997E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.6679E-1
os_ef2bup_imon=-5.47745E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11069E1
os_restr2_imon=3.42995E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23058E2
cs_ionfoca_imon=6.31514E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01911E1
cs_anode2_imon=2.25614E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72877E1
iondef1_imon=1.09048E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6822E1
iondef4_imon=1.07512E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=4.45939E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82165E-1
olens1_imon=7.32738E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12714E0
cs_ionaccel_imon=-1.76897E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02064E2
cs_ionfocb_imon=1.47129E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56453E1
einzel_imon=7.67342E-6
window_vset=0.0E0
window_vmon=1.3325E-1
window_imon=-1.27162E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82607E2
mask1_imon=2.39178E-4
mask2_vset=0.0E0
mask2_vmon=-1.86062E1
mask2_imon=-6.87777E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92628E3
multa_neg_imon=7.34676E-5
defgrida_vset=2.902E3
defgrida_vmon=2.937E3
defgrida_imon=6.52844E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50129E3
multb_neg_imon=7.04755E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.50683E0
defgridb_imon=6.03095E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33342E1
os_fil1_imon=9.41129E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07798E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63942E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30933E1
cs_fil1_imon=9.9511E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62978E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66076E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.24138E-2
os_fil2_imon=-2.63593E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.72486E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.55248E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3755E-1
cs_fil2_imon=-2.37164E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=7.7582E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22229E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=
inlet_lpb_pmon=
chamber_ion_pmon=
chamber_cvt_pmon=
foreline_cvt_pmon=
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.62896E-1
res40_imon=-2.54022E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=158
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.517E3	0.0E0	1.47E2	4.1E1	-7.39421E-2	-8.80002E1	-6.19888E-4	-8.80002E1	2.38419E-4	5.96046E-3	9.30071E-2	2.72909E1	-3.26779E1	-3.26024E1	2.68047E1	1.17083E-7	2.52428E-3	2.52428E-3	6.31837E-3	1.98937E-1
2.0E0	1.19764E5	1.21E2	3.16E2	1.6E2	-7.40967E-2	-8.79999E1	-6.67572E-4	-8.80005E1	2.6226E-4	5.76973E-3	9.32932E-2	2.73394E1	-3.26695E1	-3.26487E1	2.67945E1	1.16575E-7	2.52169E-3	2.52169E-3	6.33436E-3	1.99E-1
3.0E0	2.3E1	1.0E0	4.85E2	2.79E2	-7.42513E-2	-8.80001E1	-6.91414E-4	-8.80005E1	4.76837E-5	6.1512E-3	9.31978E-2	2.73178E1	-3.26718E1	-3.26179E1	2.68169E1	1.16886E-7	2.52027E-3	2.52027E-3	6.32418E-3	1.99931E-1
4.0E0	2.3174E4	7.0E0	6.55E2	3.98E2	-7.26282E-2	-8.80001E1	-5.72205E-4	-8.80003E1	3.33786E-4	5.93662E-3	9.29594E-2	2.73399E1	-3.2644E1	-3.26422E1	2.6813E1	1.16965E-7	2.52342E-3	2.52342E-3	6.32858E-3	2.00567E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.25507E-2	-8.80004E1	-2.86102E-4	-8.80006E1	7.15256E-5	5.79357E-3	9.29356E-2	2.73105E1	-3.26416E1	-3.26116E1	2.68316E1	1.1688E-7	2.52428E-3	2.52428E-3	6.31837E-3	2.01022E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.22418E-2	-8.80006E1	-5.24521E-4	-8.80003E1	-1.66893E-4	5.67436E-3	9.28879E-2	2.73075E1	-3.26392E1	-3.2608E1	2.68226E1	1.1688E-7	2.52647E-3	2.52647E-3	6.33486E-3	2.01547E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.30918E-2	-8.80006E1	-4.52995E-4	-8.80005E1	1.43051E-4	5.62668E-3	9.31263E-2	2.7326E1	-3.26469E1	-3.26156E1	2.68169E1	1.17134E-7	2.51552E-3	2.51552E-3	6.34037E-3	2.00847E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.286E-2	-8.80006E1	-4.52995E-4	-8.80003E1	0.0E0	5.67436E-3	9.30786E-2	2.72883E1	-3.26464E1	-3.2647E1	2.68136E1	1.16813E-7	2.52197E-3	2.52197E-3	6.323E-3	2.006E-1
1.2E1	3.4E2	0.0E0	4.85E2	3.23E2	-7.3401E-2	-8.80006E1	-6.91414E-4	-8.80006E1	-4.29153E-4	5.6982E-3	9.33886E-2	2.73063E1	-3.26663E1	-3.26146E1	2.68142E1	1.16886E-7	2.52362E-3	2.52362E-3	6.31299E-3	2.00463E-1
1.3E1	2.1E1	0.0E0	5.25E2	3.53E2	-7.34782E-2	-8.80005E1	-7.86781E-4	-8.80001E1	0.0E0	5.60284E-3	9.32932E-2	2.73375E1	-3.26431E1	-3.26325E1	2.68004E1	1.1688E-7	2.51552E-3	2.51552E-3	6.33486E-3	2.00499E-1
1.4E1	3.646E3	1.0E0	5.66E2	3.82E2	-7.3401E-2	-8.80005E1	-7.15256E-4	-8.80001E1	-7.15256E-5	5.55515E-3	9.31263E-2	2.73169E1	-3.27039E1	-3.26573E1	2.68146E1	1.16973E-7	2.52061E-3	2.52061E-3	6.32896E-3	2.01391E-1
1.5E1	1.15E2	0.0E0	6.06E2	4.11E2	-7.40192E-2	-8.80005E1	-1.66893E-4	-8.80001E1	2.38419E-4	5.76973E-3	9.32693E-2	2.73123E1	-3.26783E1	-3.26206E1	2.68172E1	1.17153E-7	2.52243E-3	2.52243E-3	6.32916E-3	2.01555E-1
1.6E1	1.18E3	2.0E0	6.47E2	4.41E2	-7.31692E-2	-8.80007E1	-3.57628E-4	-8.80005E1	4.76837E-5	5.45979E-3	9.32217E-2	2.72955E1	-3.26554E1	-3.25996E1	2.67872E1					
1.7E1	1.705E3	0.0E0	6.87E2	4.7E2	-7.34782E-2	-8.80005E1	-3.57628E-4	-8.80005E1	2.38419E-5	5.79357E-3	9.32217E-2	2.73243E1	-3.26597E1	-3.2647E1	2.68148E1	1.1688E-7	2.52757E-3	2.52757E-3	6.32936E-3	2.00499E-1
1.8E1	7.109E3	4.0E0	7.27E2	5.0E2	-7.30918E-2	-8.80008E1	-5.48363E-4	-8.80003E1	2.86102E-4	5.76973E-3	9.30309E-2	2.73122E1	-3.26419E1	-3.26248E1	2.68088E1	1.16726E-7	2.52623E-3	2.52623E-3	6.31012E-3	2.00171E-1
1.9E1	2.628E3	2.0E0	7.68E2	5.29E2	-7.34782E-2	-8.80003E1	-4.29153E-4	-8.80002E1	2.86102E-4	5.26905E-3	9.30548E-2	2.73171E1	-3.26729E1	-3.26476E1	2.67854E1					
2.0E1	3.0837E4	1.8E1	8.08E2	5.58E2	-7.33239E-2	-8.80003E1	-4.76837E-5	-8.80003E1	7.15256E-5	5.50747E-3	9.30071E-2	2.73027E1	-3.2647E1	-3.26512E1	2.67929E1	1.16677E-7	2.5199E-3	2.5199E-3	6.31288E-3	1.99977E-1
2.1E1	6.4E1	0.0E0	8.49E2	5.88E2	-7.31692E-2	-8.80006E1	-3.33786E-4	-8.80003E1	1.43051E-4	5.84126E-3	9.30548E-2	2.71585E1	-3.25895E1	-3.27048E1	2.68147E1	1.16829E-7	2.52538E-3	2.52538E-3	6.31288E-3	2.00499E-1
2.2E1	2.239E3	1.0E0	8.89E2	6.17E2	-7.38649E-2	-8.80008E1	-3.33786E-4	-8.80004E1	1.19209E-4	5.67436E-3	9.31025E-2	2.73316E1	-3.26349E1	-3.26555E1	2.68151E1	1.17092E-7	2.51883E-3	2.51883E-3	6.32609E-3	2.0072E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.33239E-2	-8.80003E1	-4.05312E-4	-8.80003E1	0.0E0	5.48363E-3	9.29594E-2	2.72877E1	-3.26651E1	-3.26092E1	2.6822E1