[Scan]
initial_time=2015-12-15T17:55:15
final_time=2015-12-15T17:55:34
ip_count=19
run=1017
dataset=2
scan=66
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=27.0
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.30146E-2
qbias_imon=-3.851E-6
ql1_vset=
ql1_vmon=-8.80007E1
ql1_imon=-1.1861E-9
ql2_vset=
ql2_vmon=-4.29153E-4
ql2_imon=1.49829E-9
ql3_vset=
ql3_vmon=-8.80004E1
ql3_imon=-3.55043E-9
ql4_vset=
ql4_vmon=-9.53674E-5
ql4_imon=1.59631E-8
mult1=-1.39907E-8
mult2=-2.77849E-9
rf_tmon=-4.96905E-3
rf_agc=3.30692E-2
counter1=4
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.88894E-3
ql5_imon=6.25217E-10
bslens_vset=-6.2E0
bslens_vmon=-6.6355E0
bslens_imon=2.69637E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19905E1
lens5a_imon=1.97009E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12514E2
lens4a_imon=2.05032E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54007E1
cs_ef1b_imon=2.84863E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04635E2
lens23_imon=1.01998E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05024E1
cs_ea1_imon=2.50867E-5
lens1_vset=-2.7E0
lens1_vmon=-3.02153E0
lens1_imon=1.29765E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64542E1
os_ef1alow_imon=2.96468E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03979E1
cs_ea2_imon=1.54255E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84352E1
cs_ef1a_imon=2.93981E-5
olens2_vset=9.7E-1
olens2_vmon=9.69815E-1
olens2_imon=1.25225E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11352E1
os_restr1_imon=4.30427E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15444E1
os_ea1_imon=2.37493E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63749E1
os_ef1bup_imon=3.08649E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2533E0
cs_ionrep_imon=1.20584E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9189E2
cs_nozzle_imon=1.93427E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01869E1
cs_anode1_imon=2.97261E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20546E0
olens4_imon=3.9306E-8
tplens_vset=1.4E-1
tplens_vmon=1.57474E0
tplens_imon=-3.4621E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2593E1
iondef3_imon=1.49316E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26603E1
iondef2_imon=1.56886E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02957E2
lens6_imon=2.98367E-4
ql6_vset=1.0E-1
ql6_vmon=9.32217E-2
ql6_imon=1.00126E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26351E0
ionrepsh_imon=1.783E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33868E1
lens5b_imon=2.16116E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74796E1
cs_ef2b_imon=3.12181E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.33141E0
os_ea2_imon=-5.66113E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06117E2
lens4b_imon=2.00511E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7115E1
cs_ef2a_imon=3.17371E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05216E0
os_ef2alow_imon=-2.70239E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.04632E-1
os_ef2bup_imon=-5.49907E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10883E1
os_restr2_imon=3.42779E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23083E2
cs_ionfoca_imon=6.30217E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01767E1
cs_anode2_imon=2.24713E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73363E1
iondef1_imon=1.07823E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6825E1
iondef4_imon=1.08017E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=4.52446E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81998E-1
olens1_imon=7.33811E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13435E0
cs_ionaccel_imon=-1.93835E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02062E2
cs_ionfocb_imon=1.4714E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56321E1
einzel_imon=7.43917E-6
window_vset=0.0E0
window_vmon=1.783E-1
window_imon=-9.90511E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82588E2
mask1_imon=2.39196E-4
mask2_vset=0.0E0
mask2_vmon=-1.8602E1
mask2_imon=-8.7158E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9262E3
multa_neg_imon=7.42607E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93691E3
defgrida_imon=6.56809E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50149E3
multb_neg_imon=7.13046E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.40758E0
defgridb_imon=5.94083E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33318E1
os_fil1_imon=9.41681E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06747E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63655E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3093E1
cs_fil1_imon=9.94437E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63291E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66225E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.24138E-2
os_fil2_imon=-2.7861E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.95312E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.62724E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.38068E-1
cs_fil2_imon=-2.82214E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.68031E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22248E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.34037E-3
inlet_lpb_pmon=2.00325E-1
chamber_ion_pmon=1.16778E-7
chamber_cvt_pmon=2.5188E-3
foreline_cvt_pmon=2.5188E-3
chamber_tmon=1.40056E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.06744E-1
res40_imon=-2.71321E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=218
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.392E3	0.0E0	1.47E2	4.1E1	-7.26282E-2	-8.80004E1	-5.24521E-4	-8.80005E1	-2.86102E-4	5.91278E-3	9.27687E-2	2.73069E1	-3.26669E1	-3.26518E1	2.68136E1	1.1688E-7	2.52318E-3	2.52318E-3	6.34588E-3	2.01022E-1
2.0E0	1.19455E5	1.01E2	3.16E2	1.6E2	-7.23964E-2	-8.80007E1	-6.19888E-4	-8.80003E1	-7.15256E-5	5.6982E-3	9.28879E-2	2.73382E1	-3.26664E1	-3.26064E1	2.68088E1	1.16873E-7	2.52169E-3	2.52169E-3	6.30202E-3	2.01047E-1
3.0E0	1.6E1	0.0E0	4.85E2	2.79E2	-7.30918E-2	-8.80006E1	-4.05312E-4	-8.80002E1	-1.19209E-4	5.65052E-3	9.30071E-2	2.73045E1	-3.26579E1	-3.26072E1	2.68117E1	1.17405E-7	2.51693E-3	2.51693E-3	6.3074E-3	2.00996E-1
4.0E0	2.3272E4	9.0E0	6.55E2	3.98E2	-7.26282E-2	-8.80007E1	-4.52995E-4	-8.80005E1	9.53674E-5	5.79357E-3	9.31025E-2	2.73308E1	-3.26529E1	-3.26285E1	2.68157E1	1.17112E-7	2.51287E-3	2.51287E-3	6.3074E-3	2.00064E-1
5.0E0	1.0E0	0.0E0	8.24E2	5.17E2	-7.20871E-2	-8.80006E1	-4.76837E-4	-8.80006E1	1.43051E-4	5.88894E-3	9.28402E-2	2.73063E1	-3.26714E1	-3.26048E1	2.68209E1	1.18239E-7	2.52362E-3	2.52362E-3	6.34099E-3	2.01174E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.24736E-2	-8.80004E1	-2.14577E-4	-8.80008E1	2.38419E-5	6.00815E-3	9.28402E-2	2.73198E1	-3.26891E1	-3.26567E1	2.68202E1	1.1929E-7	2.51954E-3	2.51954E-3	6.36144E-3	2.02079E-1
7.0E0	1.0E0	0.0E0	1.163E3	7.54E2	-7.20871E-2	-8.80006E1	-4.76837E-5	-8.80004E1	1.43051E-4	5.93662E-3	9.29832E-2	2.73016E1	-3.26496E1	-3.25918E1	2.6807E1	1.19188E-7	2.5131E-3	2.5131E-3	6.32896E-3	2.01391E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.31692E-2	-8.80007E1	-4.76837E-4	-8.80004E1	9.53674E-5	5.74589E-3	9.29832E-2	2.73021E1	-3.26402E1	-3.26278E1	2.68172E1	1.18075E-7	2.52169E-3	2.52169E-3	6.31278E-3	1.9951E-1
1.2E1	3.21E2	1.0E0	4.85E2	3.23E2	-7.25507E-2	-8.80006E1	-2.86102E-4	-8.80006E1	9.53674E-5	5.88894E-3	9.27925E-2	2.73092E1	-3.2675E1	-3.26337E1	2.68296E1	1.16973E-7	2.51739E-3	2.51739E-3	6.29665E-3	1.9934E-1
1.3E1	2.4E1	0.0E0	5.25E2	3.53E2	-7.23964E-2	-8.80005E1	-4.29153E-4	-8.80005E1	2.14577E-4	5.84126E-3	9.29594E-2	2.73364E1	-3.26667E1	-3.26425E1	2.68214E1	1.16823E-7	2.52599E-3	2.52599E-3	6.29665E-3	1.98661E-1
1.4E1	3.651E3	1.0E0	5.66E2	3.82E2	-7.12368E-2	-8.80006E1	-3.8147E-4	-8.80004E1	1.90735E-4	5.6982E-3	9.29832E-2	2.72958E1	-3.26451E1	-3.26225E1	2.67931E1	1.16973E-7	2.52169E-3	2.52169E-3	6.3074E-3	2.00021E-1
1.5E1	1.43E2	0.0E0	6.06E2	4.11E2	-7.22418E-2	-8.80007E1	-2.38419E-4	-8.80003E1	-2.38419E-5	5.76973E-3	9.32693E-2	2.73189E1	-3.26368E1	-3.26056E1	2.67992E1	1.16867E-7	2.51814E-3	2.51814E-3	6.31798E-3	2.00903E-1
1.6E1	1.283E3	0.0E0	6.47E2	4.41E2	-7.22418E-2	-8.80008E1	-5.48363E-4	-8.80005E1	1.43051E-4	5.60284E-3	9.33409E-2	2.73275E1	-3.26526E1	-3.26437E1	2.68099E1	1.17083E-7	2.5188E-3	2.5188E-3	6.31288E-3	2.01197E-1
1.7E1	1.664E3	2.0E0	6.87E2	4.7E2	-7.22418E-2	-8.80006E1	-3.57628E-4	-8.80007E1	9.53674E-5	5.84126E-3	9.29832E-2	2.73159E1	-3.26705E1	-3.26158E1	2.68112E1	1.16724E-7	2.51847E-3	2.51847E-3	6.29665E-3	1.9985E-1
1.8E1	6.993E3	3.0E0	7.27E2	5.0E2	-7.23189E-2	-8.80005E1	-4.29153E-4	-8.80003E1	-2.38419E-4	5.93662E-3	9.30786E-2	2.73417E1	-3.26939E1	-3.2614E1	2.681E1	1.1693E-7	2.52209E-3	2.52209E-3	6.34037E-3	2.00673E-1
1.9E1	2.621E3	0.0E0	7.68E2	5.29E2	-7.27828E-2	-8.80007E1	-5.96046E-4	-8.80003E1	-9.53674E-5	5.65052E-3	9.31501E-2	2.73027E1	-3.26699E1	-3.2626E1	2.67896E1	1.16829E-7	2.51225E-3	2.51225E-3	6.30192E-3	2.00673E-1
2.0E1	3.0881E4	1.0E1	8.08E2	5.58E2	-7.23964E-2	-8.80007E1	-5.00679E-4	-8.80003E1	2.14577E-4	6.00815E-3	9.30309E-2	2.72797E1	-3.26815E1	-3.26691E1	2.68064E1	1.1693E-7	2.51443E-3	2.51443E-3	6.31837E-3	2.00499E-1
2.1E1	8.5E1	0.0E0	8.49E2	5.88E2	-7.30146E-2	-8.8001E1	-5.24521E-4	-8.8E1	7.15256E-5	6.00815E-3	9.28402E-2	2.72727E1	-3.27192E1	-3.2767E1	2.68209E1	1.17023E-7	2.52276E-3	2.52276E-3	6.34518E-3	2.00876E-1
2.2E1	2.179E3	2.0E0	8.89E2	6.17E2	-7.38649E-2	-8.80005E1	-6.67572E-4	-8.80002E1	1.66893E-4	5.53131E-3	9.30786E-2	2.72973E1	-3.26933E1	-3.2632E1	2.68142E1	1.16873E-7	2.51525E-3	2.51525E-3	6.31817E-3	2.00876E-1
2.3E1	4.0E0	0.0E0	9.3E2	6.47E2	-7.30146E-2	-8.80007E1	-4.29153E-4	-8.80004E1	-9.53674E-5	5.88894E-3	9.32217E-2	2.73363E1	-3.26603E1	-3.2593E1	2.6825E1	1.16778E-7	2.5188E-3	2.5188E-3	6.34037E-3	2.00325E-1