[Scan]
initial_time=2015-12-15T17:55:41
final_time=2015-12-15T17:56:01
ip_count=19
run=1017
dataset=2
scan=67
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=27.0
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.25507E-2
qbias_imon=-3.7736E-6
ql1_vset=
ql1_vmon=-8.80004E1
ql1_imon=-1.0667E-9
ql2_vset=
ql2_vmon=-8.34465E-4
ql2_imon=1.51824E-9
ql3_vset=
ql3_vmon=-8.80004E1
ql3_imon=-3.25843E-9
ql4_vset=
ql4_vmon=-1.19209E-4
ql4_imon=1.593E-8
mult1=-1.95053E-8
mult2=-2.71063E-9
rf_tmon=-4.31415E-3
rf_agc=3.32254E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.79357E-3
ql5_imon=6.60384E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64557E0
bslens_imon=2.45477E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19777E1
lens5a_imon=1.99359E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12504E2
lens4a_imon=2.0504E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53586E1
cs_ef1b_imon=2.85476E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04603E2
lens23_imon=1.02114E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05141E1
cs_ea1_imon=2.53264E-5
lens1_vset=-2.7E0
lens1_vmon=-2.99821E0
lens1_imon=1.31508E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64674E1
os_ef1alow_imon=2.95711E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04239E1
cs_ea2_imon=1.5363E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84214E1
cs_ef1a_imon=2.94702E-5
olens2_vset=9.7E-1
olens2_vmon=9.70125E-1
olens2_imon=1.24708E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1146E1
os_restr1_imon=4.28914E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15235E1
os_ea1_imon=2.35744E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63557E1
os_ef1bup_imon=3.08902E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24679E0
cs_ionrep_imon=1.19545E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9185E2
cs_nozzle_imon=1.93409E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01815E1
cs_anode1_imon=2.96E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20561E0
olens4_imon=3.93175E-8
tplens_vset=1.4E-1
tplens_vmon=1.60014E0
tplens_imon=-3.4136E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.262E1
iondef3_imon=1.49029E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26687E1
iondef2_imon=1.56143E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02933E2
lens6_imon=2.98137E-4
ql6_vset=1.0E-1
ql6_vmon=9.30071E-2
ql6_imon=9.7388E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28867E0
ionrepsh_imon=1.79361E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33481E1
lens5b_imon=2.17835E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74772E1
cs_ef2b_imon=3.13371E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.31758E0
os_ea2_imon=-6.59907E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06143E2
lens4b_imon=2.00407E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7115E1
cs_ef2a_imon=3.17083E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06657E0
os_ef2alow_imon=-2.59788E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.98025E-1
os_ef2bup_imon=-5.46664E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10757E1
os_restr2_imon=3.42058E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23102E2
cs_ionfoca_imon=6.29503E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01599E1
cs_anode2_imon=2.24353E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73171E1
iondef1_imon=1.07865E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68166E1
iondef4_imon=1.09386E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71788E1
olens3_imon=4.46159E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82285E-1
olens1_imon=7.32949E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14095E0
cs_ionaccel_imon=-1.84465E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02085E2
cs_ionfocb_imon=1.47262E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56321E1
einzel_imon=7.52206E-6
window_vset=0.0E0
window_vmon=1.86108E-1
window_imon=-1.00853E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82608E2
mask1_imon=2.38835E-4
mask2_vset=0.0E0
mask2_vmon=-1.86374E1
mask2_imon=-6.80569E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9265E3
multa_neg_imon=7.37101E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93714E3
defgrida_imon=6.3552E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50136E3
multb_neg_imon=7.10202E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.26382E0
defgridb_imon=5.82429E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33325E1
os_fil1_imon=9.41777E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06909E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63821E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30935E1
cs_fil1_imon=9.9517E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63225E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65992E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.23059E-2
os_fil2_imon=-2.68399E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.76691E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.56207E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35867E-1
cs_fil2_imon=-2.06531E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=5.17535E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22222E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30202E-3
inlet_lpb_pmon=2.00534E-1
chamber_ion_pmon=1.16923E-7
chamber_cvt_pmon=2.51954E-3
foreline_cvt_pmon=2.51954E-3
chamber_tmon=1.40071E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.45186E-1
res40_imon=-2.47534E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=149
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.441E3	2.0E0	1.47E2	4.1E1	-7.34782E-2	-8.80004E1	-9.29832E-4	-8.80001E1	0.0E0	5.81741E-3	9.27448E-2	2.73045E1	-3.26596E1	-3.26301E1	2.68146E1	1.16724E-7	2.51847E-3	2.51847E-3	6.30202E-3	2.00363E-1
2.0E0	1.19655E5	8.9E1	3.16E2	1.6E2	-7.3401E-2	-8.80007E1	-8.10623E-4	-8.80003E1	0.0E0	6.27041E-3	9.30071E-2	2.7302E1	-3.26774E1	-3.26003E1	2.6825E1	1.16916E-7	2.51919E-3	2.51919E-3	6.3445E-3	2.00064E-1
3.0E0	3.1E1	0.0E0	4.85E2	2.79E2	-7.34782E-2	-8.80009E1	-4.05312E-4	-8.80005E1	-2.38419E-4	6.24657E-3	9.28164E-2	2.73284E1	-3.26681E1	-3.263E1	2.68134E1	1.1699E-7	2.51693E-3	2.51693E-3	6.31858E-3	2.00818E-1
4.0E0	2.2723E4	1.3E1	6.55E2	3.98E2	-7.44059E-2	-8.80007E1	-7.39098E-4	-8.80005E1	-4.76837E-5	6.12736E-3	9.2721E-2	2.72877E1	-3.26813E1	-3.26254E1	2.67956E1	1.16867E-7	2.52025E-3	2.52025E-3	6.28103E-3	2.00399E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.39421E-2	-8.80008E1	-3.33786E-4	-8.80005E1	-2.14577E-4	5.76973E-3	9.28164E-2	2.73375E1	-3.26536E1	-3.26799E1	2.6834E1	1.16873E-7	2.51847E-3	2.51847E-3	6.31278E-3	2.00534E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.45602E-2	-8.80006E1	-6.67572E-4	-8.80001E1	-1.43051E-4	5.72205E-3	9.2721E-2	2.7301E1	-3.26579E1	-3.26296E1	2.68028E1	1.16677E-7	2.52099E-3	2.52099E-3	6.28006E-3	1.99977E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.35556E-2	-8.80007E1	-8.34465E-4	-8.8E1	-2.86102E-4	5.74589E-3	9.27687E-2	2.72949E1	-3.2635E1	-3.25912E1	2.68094E1	1.16823E-7	2.52061E-3	2.52061E-3	6.3074E-3	1.9951E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.40192E-2	-8.80006E1	-8.10623E-4	-8.8E1	0.0E0	5.81741E-3	9.27448E-2	2.73069E1	-3.26885E1	-3.26148E1	2.68198E1	1.16829E-7	2.52318E-3	2.52318E-3	6.29645E-3	1.99456E-1
1.2E1	3.14E2	0.0E0	4.85E2	3.23E2	-7.27828E-2	-8.80004E1	-5.96046E-4	-8.8E1	-4.76837E-5	5.6982E-3	9.28402E-2	2.72913E1	-3.26699E1	-3.26506E1	2.6837E1	1.1693E-7	2.52318E-3	2.52318E-3	6.32386E-3	2.00325E-1
1.3E1	2.8E1	0.0E0	5.25E2	3.53E2	-7.3401E-2	-8.80006E1	-2.14577E-4	-8.79999E1	-4.76837E-5	5.84126E-3	9.29594E-2	2.73051E1	-3.26615E1	-3.2629E1	2.6822E1	1.1693E-7	2.51552E-3	2.51552E-3	6.33486E-3	2.00151E-1
1.4E1	3.643E3	1.0E0	5.66E2	3.82E2	-7.32464E-2	-8.80004E1	-3.57628E-4	-8.80002E1	-2.38419E-5	5.8651E-3	9.29594E-2	2.73165E1	-3.26488E1	-3.26356E1	2.68232E1	1.16727E-7	2.52209E-3	2.52209E-3	6.31837E-3	2.00151E-1
1.5E1	1.43E2	0.0E0	6.06E2	4.11E2	-7.26282E-2	-8.80006E1	-4.29153E-4	-8.8E1	1.90735E-4	5.79357E-3	9.29117E-2	2.7288E1	-3.26384E1	-3.26372E1	2.68076E1	1.16677E-7	2.52099E-3	2.52099E-3	6.31837E-3	2.00847E-1
1.6E1	1.234E3	6.0E0	6.47E2	4.41E2	-7.34782E-2	-8.80002E1	-4.76837E-4	-8.79997E1	-2.14577E-4	5.74589E-3	9.31501E-2	2.73051E1	-3.26621E1	-3.26308E1	2.68178E1	1.16774E-7	2.52384E-3	2.52384E-3	6.3074E-3	2.00192E-1
1.7E1	1.657E3	1.0E0	6.87E2	4.7E2	-7.31692E-2	-8.80007E1	-5.48363E-4	-8.80001E1	-1.19209E-4	5.81741E-3	9.31978E-2	2.72991E1	-3.26807E1	-3.26512E1	2.67974E1	1.16829E-7	2.5188E-3	2.5188E-3	6.30192E-3	2.00412E-1
1.8E1	6.945E3	3.0E0	7.27E2	5.0E2	-7.34782E-2	-8.80008E1	-6.19888E-4	-8.8E1	1.90735E-4	5.65052E-3	9.34839E-2	2.73352E1	-3.26756E1	-3.26012E1	2.68123E1					
1.9E1	2.676E3	2.0E0	7.68E2	5.29E2	-7.30918E-2	-8.80005E1	-7.15256E-4	-8.80002E1	-2.38419E-5	5.53131E-3	9.3317E-2	2.72805E1	-3.26831E1	-3.26302E1	2.68322E1	1.17023E-7	2.52169E-3	2.52169E-3	6.32896E-3	2.00363E-1
2.0E1	3.0784E4	1.4E1	8.08E2	5.58E2	-7.34782E-2	-8.80008E1	-5.00679E-4	-8.80001E1	-9.53674E-5	5.88894E-3	9.31978E-2	2.73514E1	-3.2653E1	-3.26164E1	2.68142E1	1.16923E-7	2.51954E-3	2.51954E-3	6.29128E-3	2.00363E-1
2.1E1	6.0E1	0.0E0	8.49E2	5.88E2	-7.30146E-2	-8.80006E1	-6.67572E-4	-8.80003E1	2.14577E-4	5.67436E-3	9.30309E-2	2.74225E1	-3.28024E1	-3.25865E1	2.68105E1	1.17032E-7	2.51662E-3	2.51662E-3	6.30192E-3	1.98937E-1
2.2E1	2.171E3	0.0E0	8.89E2	6.17E2	-7.31692E-2	-8.80005E1	-6.91414E-4	-8.80004E1	3.33786E-4	5.76973E-3	9.3174E-2	2.73045E1	-3.26411E1	-3.26156E1	2.68256E1	1.16823E-7	2.52276E-3	2.52276E-3	6.29665E-3	1.9951E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.25507E-2	-8.80004E1	-8.34465E-4	-8.80004E1	-1.19209E-4	5.79357E-3	9.30071E-2	2.73171E1	-3.26687E1	-3.262E1	2.68166E1	1.16923E-7	2.51954E-3	2.51954E-3	6.30202E-3	2.00534E-1