[Scan]
initial_time=2015-12-15T17:56:08
final_time=2015-12-15T17:56:28
ip_count=19
run=1017
dataset=2
scan=68
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=27.0
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.36328E-2
qbias_imon=-3.84554E-6
ql1_vset=
ql1_vmon=-8.8001E1
ql1_imon=-1.05363E-9
ql2_vset=
ql2_vmon=-7.39098E-4
ql2_imon=1.53708E-9
ql3_vset=
ql3_vmon=-8.80002E1
ql3_imon=-3.26364E-9
ql4_vset=
ql4_vmon=3.09944E-4
ql4_imon=1.59344E-8
mult1=-2.58387E-8
mult2=-2.75454E-9
rf_tmon=-5.12527E-3
rf_agc=3.29911E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.79357E-3
ql5_imon=6.23131E-10
bslens_vset=-6.2E0
bslens_vmon=-6.61687E0
bslens_imon=2.29983E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19947E1
lens5a_imon=1.98704E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12498E2
lens4a_imon=2.04786E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5373E1
cs_ef1b_imon=2.84142E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04602E2
lens23_imon=1.02316E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05144E1
cs_ea1_imon=2.5303E-5
lens1_vset=-2.7E0
lens1_vmon=-3.01913E0
lens1_imon=1.43103E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64861E1
os_ef1alow_imon=2.97441E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03931E1
cs_ea2_imon=1.5411E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84286E1
cs_ef1a_imon=2.93873E-5
olens2_vset=9.7E-1
olens2_vmon=9.70292E-1
olens2_imon=1.24814E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11376E1
os_restr1_imon=4.31292E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14999E1
os_ea1_imon=2.35979E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63611E1
os_ef1bup_imon=3.07676E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23527E0
cs_ionrep_imon=1.19214E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91886E2
cs_nozzle_imon=1.93449E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02043E1
cs_anode1_imon=2.97765E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20597E0
olens4_imon=3.92784E-8
tplens_vset=1.4E-1
tplens_vmon=1.57114E0
tplens_imon=-4.0389E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26801E1
iondef3_imon=1.50902E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.265E1
iondef2_imon=1.57283E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02923E2
lens6_imon=2.98292E-4
ql6_vset=1.0E-1
ql6_vmon=9.31263E-2
ql6_imon=9.88483E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27733E0
ionrepsh_imon=1.78228E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33694E1
lens5b_imon=2.15575E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74615E1
cs_ef2b_imon=3.11641E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.29656E0
os_ea2_imon=-6.77866E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06128E2
lens4b_imon=2.00381E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.713E1
cs_ef2a_imon=3.18452E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.03894E0
os_ef2alow_imon=-2.57986E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.70995E-1
os_ef2bup_imon=-5.44501E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10811E1
os_restr2_imon=3.4332E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23044E2
cs_ionfoca_imon=6.2982E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01851E1
cs_anode2_imon=2.25902E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73087E1
iondef1_imon=1.07859E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68292E1
iondef4_imon=1.08089E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7179E1
olens3_imon=4.45812E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81903E-1
olens1_imon=7.31941E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.16738E0
cs_ionaccel_imon=-1.82663E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02061E2
cs_ionfocb_imon=1.4719E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56357E1
einzel_imon=7.60855E-6
window_vset=0.0E0
window_vmon=1.99923E-1
window_imon=-1.00132E-6
mask1_vset=-4.8E2
mask1_vmon=-4.8264E2
mask1_imon=2.39066E-4
mask2_vset=0.0E0
mask2_vmon=-1.85918E1
mask2_imon=-6.12094E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9264E3
multa_neg_imon=7.55945E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93704E3
defgrida_imon=6.4275E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50154E3
multb_neg_imon=6.64379E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.44969E0
defgridb_imon=6.07061E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33338E1
os_fil1_imon=9.41459E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07287E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63657E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30915E1
cs_fil1_imon=9.95218E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6221E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66317E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.21558E-2
os_fil2_imon=-2.73204E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.81496E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.53701E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35608E-1
cs_fil2_imon=-2.68999E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=6.07634E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22208E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33436E-3
inlet_lpb_pmon=1.9951E-1
chamber_ion_pmon=1.16774E-7
chamber_cvt_pmon=2.51847E-3
foreline_cvt_pmon=2.51847E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.19048E-1
res40_imon=-2.49336E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=179
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.446E3	2.0E0	1.47E2	4.1E1	-7.38649E-2	-8.80008E1	-5.24521E-4	-8.80002E1	3.57628E-4	6.05583E-3	9.2721E-2	2.73213E1	-3.26486E1	-3.26683E1	2.68123E1	1.16829E-7	2.52209E-3	2.52209E-3	6.34037E-3	1.99283E-1
2.0E0	1.18097E5	1.21E2	3.16E2	1.6E2	-7.38649E-2	-8.80009E1	-4.29153E-4	-8.80002E1	3.09944E-4	5.88894E-3	9.26733E-2	2.73051E1	-3.26366E1	-3.2649E1	2.68082E1	1.16867E-7	2.51919E-3	2.51919E-3	6.31798E-3	1.98229E-1
3.0E0	2.4E1	0.0E0	4.85E2	2.79E2	-7.38649E-2	-8.80007E1	-2.14577E-4	-8.80004E1	4.29153E-4	6.03199E-3	9.32455E-2	2.73153E1	-3.26488E1	-3.26404E1	2.68113E1	1.17112E-7	2.52659E-3	2.52659E-3	6.30212E-3	1.98395E-1
4.0E0	2.3228E4	1.3E1	6.55E2	3.98E2	-7.286E-2	-8.80011E1	-4.29153E-4	-8.80002E1	4.05312E-4	5.96046E-3	9.29117E-2	2.7299E1	-3.26602E1	-3.26316E1	2.68248E1	1.17093E-7	2.52027E-3	2.52027E-3	6.3074E-3	1.99401E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.37874E-2	-8.80009E1	-5.72205E-4	-8.80002E1	7.15256E-5	6.00815E-3	9.29832E-2	2.72961E1	-3.2647E1	-3.26158E1	2.68178E1	1.17036E-7	2.52384E-3	2.52384E-3	6.31135E-3	2.00032E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.44059E-2	-8.8001E1	-5.96046E-4	-8.80007E1	-4.76837E-5	6.05583E-3	9.28879E-2	2.73127E1	-3.2644E1	-3.26129E1	2.68061E1	1.17032E-7	2.52209E-3	2.52209E-3	6.32386E-3	2.00499E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.27053E-2	-8.8001E1	-9.05991E-4	-8.80003E1	2.38419E-5	5.96046E-3	9.29832E-2	2.73198E1	-3.27092E1	-3.26201E1	2.67972E1	1.16874E-7	2.52157E-3	2.52157E-3	6.29482E-3	2.00614E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.30918E-2	-8.80007E1	-9.53674E-4	-8.80002E1	1.66893E-4	5.91278E-3	9.31025E-2	2.73249E1	-3.26705E1	-3.26398E1	2.68268E1	1.16724E-7	2.51847E-3	2.51847E-3	6.31817E-3	2.01219E-1
1.2E1	3.35E2	1.0E0	4.85E2	3.23E2	-7.31692E-2	-8.80008E1	-4.76837E-4	-8.80005E1	-9.53674E-5	6.12736E-3	9.26971E-2	2.73031E1	-3.26291E1	-3.26336E1	2.68153E1	1.1693E-7	2.52538E-3	2.52538E-3	6.34588E-3	1.99977E-1
1.3E1	3.4E1	0.0E0	5.25E2	3.53E2	-7.35556E-2	-8.80009E1	-3.57628E-4	-8.80005E1	-4.76837E-5	6.27041E-3	9.26733E-2	2.73138E1	-3.26224E1	-3.26714E1	2.68001E1	1.1691E-7	2.51959E-3	2.51959E-3	6.3445E-3	2.01683E-1
1.4E1	3.782E3	2.0E0	5.66E2	3.82E2	-7.34782E-2	-8.8001E1	-5.00679E-4	-8.80002E1	3.57628E-4	6.19888E-3	9.28164E-2	2.72886E1	-3.26573E1	-3.26354E1	2.68076E1	1.16768E-7	2.5199E-3	2.5199E-3	6.3074E-3	2.00952E-1
1.5E1	1.32E2	0.0E0	6.06E2	4.11E2	-7.40192E-2	-8.8001E1	-3.57628E-4	-8.80002E1	4.05312E-4	6.1512E-3	9.29117E-2	2.73165E1	-3.26657E1	-3.26338E1	2.6813E1	1.16774E-7	2.52384E-3	2.52384E-3	6.33436E-3	2.00363E-1
1.6E1	1.189E3	1.0E0	6.47E2	4.41E2	-7.41738E-2	-8.80007E1	-6.4373E-4	-8.80004E1	5.72205E-4	5.84126E-3	9.2721E-2	2.7308E1	-3.26579E1	-3.26254E1	2.68184E1	1.16774E-7	2.52276E-3	2.52276E-3	6.32356E-3	2.00534E-1
1.7E1	1.67E3	1.0E0	6.87E2	4.7E2	-7.40192E-2	-8.8001E1	-8.10623E-4	-8.80006E1	2.38419E-4	6.17504E-3	9.28402E-2	2.73311E1	-3.2659E1	-3.26667E1	2.68146E1	1.16778E-7	2.52538E-3	2.52538E-3	6.28006E-3	1.99803E-1
1.8E1	7.073E3	2.0E0	7.27E2	5.0E2	-7.32464E-2	-8.80009E1	-9.05991E-4	-8.80007E1	2.6226E-4	6.19888E-3	9.30309E-2	2.73472E1	-3.26452E1	-3.26723E1	2.68142E1	1.16774E-7	2.52384E-3	2.52384E-3	6.3074E-3	2.00021E-1
1.9E1	2.624E3	0.0E0	7.68E2	5.29E2	-7.30918E-2	-8.80006E1	-1.07288E-3	-8.80005E1	2.6226E-4	6.05583E-3	9.29356E-2	2.73135E1	-3.26386E1	-3.26536E1	2.68352E1	1.16677E-7	2.52428E-3	2.52428E-3	6.32386E-3	1.98247E-1
2.0E1	3.0492E4	1.4E1	8.08E2	5.58E2	-7.41738E-2	-8.80005E1	-9.53674E-4	-8.79999E1	1.66893E-4	6.34193E-3	9.27925E-2	2.73323E1	-3.27036E1	-3.26411E1	2.68053E1	1.17173E-7	2.52061E-3	2.52061E-3	6.32356E-3	2.01391E-1
2.1E1	6.5E1	0.0E0	8.49E2	5.88E2	-7.35556E-2	-8.80006E1	-4.52995E-4	-8.80004E1	1.19209E-4	5.98431E-3	9.26733E-2	2.74086E1	-3.27778E1	-3.25323E1	2.68088E1	1.17014E-7	2.51287E-3	2.51287E-3	6.31798E-3	2.00903E-1
2.2E1	2.19E3	0.0E0	8.89E2	6.17E2	-7.33239E-2	-8.80009E1	-5.48363E-4	-8.80004E1	1.66893E-4	5.8651E-3	9.29356E-2	2.73169E1	-3.26915E1	-3.2636E1	2.68046E1	1.16783E-7	2.52585E-3	2.52585E-3	6.31299E-3	2.00108E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.36328E-2	-8.8001E1	-7.39098E-4	-8.80002E1	3.09944E-4	5.79357E-3	9.31263E-2	2.73087E1	-3.265E1	-3.26801E1	2.68292E1	1.16774E-7	2.51847E-3	2.51847E-3	6.33436E-3	1.9951E-1