[Scan]
initial_time=2015-12-15T17:57:01
final_time=2015-12-15T17:57:21
ip_count=19
run=1017
dataset=2
scan=70
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=27.0
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.21643E-2
qbias_imon=-3.80185E-6
ql1_vset=
ql1_vmon=-8.80018E1
ql1_imon=-9.31716E-10
ql2_vset=
ql2_vmon=-3.57628E-4
ql2_imon=1.47054E-9
ql3_vset=
ql3_vmon=-8.80004E1
ql3_imon=-2.91104E-9
ql4_vset=
ql4_vmon=1.66893E-4
ql4_imon=1.5856E-8
mult1=-1.3786E-8
mult2=-2.7226E-9
rf_tmon=-4.67465E-3
rf_agc=3.33396E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=6.03199E-3
ql5_imon=6.05786E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64992E0
bslens_imon=2.43681E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20085E1
lens5a_imon=1.96721E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12536E2
lens4a_imon=2.05197E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53713E1
cs_ef1b_imon=2.85289E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04637E2
lens23_imon=1.02143E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05012E1
cs_ea1_imon=2.5285E-5
lens1_vset=-2.7E0
lens1_vmon=-3.01011E0
lens1_imon=1.49232E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64776E1
os_ef1alow_imon=2.97314E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04207E1
cs_ea2_imon=1.53425E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84574E1
cs_ef1a_imon=2.93143E-5
olens2_vset=9.7E-1
olens2_vmon=9.70364E-1
olens2_imon=1.24707E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11262E1
os_restr1_imon=4.3118E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15378E1
os_ea1_imon=2.36339E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63769E1
os_ef1bup_imon=3.06905E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2503E0
cs_ionrep_imon=1.21269E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91901E2
cs_nozzle_imon=1.93312E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02174E1
cs_anode1_imon=2.97175E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20587E0
olens4_imon=3.93307E-8
tplens_vset=1.4E-1
tplens_vmon=1.57054E0
tplens_imon=-3.42605E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26428E1
iondef3_imon=1.47009E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26579E1
iondef2_imon=1.58328E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02936E2
lens6_imon=2.98331E-4
ql6_vset=1.0E-1
ql6_vmon=9.31501E-2
ql6_imon=9.82916E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26952E0
ionrepsh_imon=1.78768E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33658E1
lens5b_imon=2.18243E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74785E1
cs_ef2b_imon=3.13126E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.34162E0
os_ea2_imon=-4.90409E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06085E2
lens4b_imon=2.00392E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71292E1
cs_ef2a_imon=3.17227E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06962E0
os_ef2alow_imon=-2.66146E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.98389E-1
os_ef2bup_imon=-5.37216E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10979E1
os_restr2_imon=3.42214E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23056E2
cs_ionfoca_imon=6.27513E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01954E1
cs_anode2_imon=2.25897E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73069E1
iondef1_imon=1.09697E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68112E1
iondef4_imon=1.0899E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=4.45867E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82571E-1
olens1_imon=7.31783E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15389E0
cs_ionaccel_imon=-1.76832E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02066E2
cs_ionfocb_imon=1.47112E-4
einzel_vset=-2.1E1
einzel_vmon=-2.5622E1
einzel_imon=7.59748E-6
window_vset=0.0E0
window_vmon=1.72508E-1
window_imon=-1.03157E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82606E2
mask1_imon=2.39032E-4
mask2_vset=0.0E0
mask2_vmon=-1.86182E1
mask2_imon=-6.8752E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92634E3
multa_neg_imon=7.01871E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93707E3
defgrida_imon=6.64379E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5014E3
multb_neg_imon=6.65821E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.35344E0
defgridb_imon=6.18957E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33336E1
os_fil1_imon=9.40619E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06947E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6398E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30918E1
cs_fil1_imon=9.95041E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62824E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66186E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.37035E-2
os_fil2_imon=-2.67498E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.79651E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.63755E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35894E-1
cs_fil2_imon=-2.35062E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.4082E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22182E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30202E-3
inlet_lpb_pmon=1.9951E-1
chamber_ion_pmon=1.16823E-7
chamber_cvt_pmon=2.52061E-3
foreline_cvt_pmon=2.52061E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.64998E-1
res40_imon=-2.60933E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=157
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.442E3	1.0E0	1.47E2	4.1E1	-7.27828E-2	-8.80012E1	1.66893E-4	-8.80005E1	9.53674E-5	6.00815E-3	9.28879E-2	2.73177E1	-3.26579E1	-3.26567E1	2.68069E1	1.17123E-7	2.52169E-3	2.52169E-3	6.29128E-3	2.00534E-1
2.0E0	1.19479E5	1.16E2	3.16E2	1.6E2	-7.25507E-2	-8.80017E1	-4.76837E-5	-8.80003E1	-2.14577E-4	5.55515E-3	9.31263E-2	2.73357E1	-3.26759E1	-3.26272E1	2.68172E1	1.16938E-7	2.52027E-3	2.52027E-3	6.31858E-3	2.00285E-1
3.0E0	3.1E1	0.0E0	4.85E2	2.79E2	-7.27053E-2	-8.80014E1	-4.52995E-4	-8.80006E1	4.76837E-5	5.62668E-3	9.30071E-2	2.73128E1	-3.26826E1	-3.26225E1	2.68169E1	1.1688E-7	2.51116E-3	2.51116E-3	6.31288E-3	2.01022E-1
4.0E0	2.2822E4	1.5E1	6.55E2	3.98E2	-7.37874E-2	-8.8001E1	-6.91414E-4	-8.8E1	0.0E0	5.65052E-3	9.31025E-2	2.7297E1	-3.2659E1	-3.26428E1	2.68279E1	1.17014E-7	2.51919E-3	2.51919E-3	6.32858E-3	2.00399E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.37874E-2	-8.80011E1	-4.29153E-4	-8.80001E1	-2.14577E-4	5.57899E-3	9.31978E-2	2.72889E1	-3.26681E1	-3.2644E1	2.68094E1	1.16774E-7	2.52169E-3	2.52169E-3	6.33436E-3	2.02079E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.38649E-2	-8.80012E1	-3.09944E-4	-8.80001E1	-3.09944E-4	5.60284E-3	9.30548E-2	2.73189E1	-3.26416E1	-3.26392E1	2.6825E1	1.17123E-7	2.52707E-3	2.52707E-3	6.3074E-3	2.01391E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.44059E-2	-8.8001E1	-3.57628E-4	-8.80005E1	-3.33786E-4	5.65052E-3	9.34839E-2	2.72874E1	-3.26815E1	-3.26437E1	2.68166E1	1.16727E-7	2.51771E-3	2.51771E-3	6.3074E-3	1.9911E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.38649E-2	-8.80012E1	-4.05312E-4	-8.80003E1	-3.8147E-4	5.67436E-3	9.32693E-2	2.73188E1	-3.26579E1	-3.26101E1	2.68076E1	1.17032E-7	2.51443E-3	2.51443E-3	6.33486E-3	1.99283E-1
1.2E1	3.49E2	0.0E0	4.85E2	3.23E2	-7.35556E-2	-8.80007E1	-5.48363E-4	-8.80001E1	-3.33786E-4	6.05583E-3	9.29117E-2	2.73034E1	-3.26344E1	-3.26512E1	2.68104E1	1.16926E-7	2.52007E-3	2.52007E-3	6.33297E-3	1.99821E-1
1.3E1	2.1E1	1.0E0	5.25E2	3.53E2	-7.35556E-2	-8.80009E1	-7.62939E-4	-8.80001E1	-7.15256E-5	6.05583E-3	9.31978E-2	2.73118E1	-3.26615E1	-3.26211E1	2.68364E1					
1.4E1	3.726E3	3.0E0	5.66E2	3.82E2	-7.37103E-2	-8.80007E1	-7.39098E-4	-8.80003E1	9.53674E-5	5.93662E-3	9.30071E-2	2.73316E1	-3.26885E1	-3.26413E1	2.6825E1	1.16938E-7	2.52139E-3	2.52139E-3	6.3074E-3	2.01352E-1
1.5E1	1.49E2	2.0E0	6.06E2	4.11E2	-7.30918E-2	-8.80007E1	-5.96046E-4	-8.80001E1	-4.76837E-5	5.65052E-3	9.29356E-2	2.73099E1	-3.26681E1	-3.26194E1	2.68082E1	1.16973E-7	2.51096E-3	2.51096E-3	6.33436E-3	1.9985E-1
1.6E1	1.149E3	0.0E0	6.47E2	4.41E2	-7.19325E-2	-8.80007E1	-2.6226E-4	-8.8E1	0.0E0	6.03199E-3	9.29117E-2	2.73399E1	-3.26791E1	-3.26236E1	2.6825E1	1.17145E-7	2.51915E-3	2.51915E-3	6.33538E-3	2.00285E-1
1.7E1	1.666E3	0.0E0	6.87E2	4.7E2	-7.286E-2	-8.80009E1	-4.29153E-4	-8.80002E1	2.38419E-5	5.76973E-3	9.31025E-2	2.73147E1	-3.26765E1	-3.26392E1	2.68136E1	1.16774E-7	2.52169E-3	2.52169E-3	6.33436E-3	2.00876E-1
1.8E1	7.246E3	2.0E0	7.27E2	5.0E2	-7.34782E-2	-8.80012E1	-3.57628E-4	-8.80002E1	-4.76837E-5	5.74589E-3	9.30071E-2	2.73417E1	-3.26741E1	-3.26314E1	2.68196E1	1.17083E-7	2.52209E-3	2.52209E-3	6.31837E-3	2.00499E-1
1.9E1	2.656E3	2.0E0	7.68E2	5.29E2	-7.38649E-2	-8.80008E1	-5.00679E-4	-8.80002E1	-1.90735E-4	5.88894E-3	9.29832E-2	2.72919E1	-3.26681E1	-3.26488E1	2.67891E1	1.1693E-7	2.52209E-3	2.52209E-3	6.30192E-3	2.01022E-1
2.0E1	3.087E4	1.8E1	8.08E2	5.58E2	-7.36328E-2	-8.80007E1	-7.62939E-4	-8.8E1	1.19209E-4	5.62668E-3	9.30786E-2	2.73063E1	-3.26378E1	-3.26596E1	2.68232E1	1.16724E-7	2.51847E-3	2.51847E-3	6.31817E-3	2.01562E-1
2.1E1	7.2E1	0.0E0	8.49E2	5.88E2	-7.3401E-2	-8.80012E1	-5.00679E-4	-8.80002E1	-2.38419E-5	5.74589E-3	9.32932E-2	2.72973E1	-3.27143E1	-3.26819E1	2.68082E1	1.16981E-7	2.5188E-3	2.5188E-3	6.31837E-3	2.00499E-1
2.2E1	2.222E3	0.0E0	8.89E2	6.17E2	-7.21643E-2	-8.80019E1	-6.19888E-4	-8.80001E1	-4.76837E-5	6.07967E-3	9.32932E-2	2.73228E1	-3.26644E1	-3.26195E1	2.68262E1	1.16973E-7	2.52492E-3	2.52492E-3	6.31817E-3	2.00705E-1
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.21643E-2	-8.80018E1	-3.57628E-4	-8.80004E1	1.66893E-4	6.03199E-3	9.31501E-2	2.73069E1	-3.26579E1	-3.26428E1	2.68112E1	1.16823E-7	2.52061E-3	2.52061E-3	6.30202E-3	1.9951E-1