[Scan]
initial_time=2015-12-15T17:57:28
final_time=2015-12-15T17:57:48
ip_count=19
run=1017
dataset=2
scan=71
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=27.0
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.41738E-2
qbias_imon=-3.8368E-6
ql1_vset=
ql1_vmon=-8.80012E1
ql1_imon=-1.03638E-9
ql2_vset=
ql2_vmon=-8.34465E-4
ql2_imon=1.5002E-9
ql3_vset=
ql3_vmon=-8.80002E1
ql3_imon=-2.91994E-9
ql4_vset=
ql4_vmon=1.43051E-4
ql4_imon=1.5918E-8
mult1=-1.96778E-8
mult2=-2.67622E-9
rf_tmon=-4.26762E-3
rf_agc=3.30378E-2
counter1=5
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.79357E-3
ql5_imon=6.06585E-10
bslens_vset=-6.2E0
bslens_vmon=-6.60846E0
bslens_imon=2.46205E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19767E1
lens5a_imon=1.96577E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12469E2
lens4a_imon=2.05154E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53628E1
cs_ef1b_imon=2.83746E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04624E2
lens23_imon=1.0197E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05403E1
cs_ea1_imon=2.52778E-5
lens1_vset=-2.7E0
lens1_vmon=-2.99629E0
lens1_imon=1.18229E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64957E1
os_ef1alow_imon=2.9791E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0366E1
cs_ea2_imon=1.5375E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84442E1
cs_ef1a_imon=2.93044E-5
olens2_vset=9.7E-1
olens2_vmon=9.70292E-1
olens2_imon=1.24523E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1128E1
os_restr1_imon=4.31112E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15167E1
os_ea1_imon=2.3706E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63671E1
os_ef1bup_imon=3.07028E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26171E0
cs_ionrep_imon=1.20224E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91858E2
cs_nozzle_imon=1.93402E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01923E1
cs_anode1_imon=2.97729E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20566E0
olens4_imon=3.92833E-8
tplens_vset=1.4E-1
tplens_vmon=1.59156E0
tplens_imon=-3.71445E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26195E1
iondef3_imon=1.4928E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26944E1
iondef2_imon=1.57751E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02963E2
lens6_imon=2.98234E-4
ql6_vset=1.0E-1
ql6_vmon=9.29356E-2
ql6_imon=9.75812E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28875E0
ionrepsh_imon=1.78155E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33646E1
lens5b_imon=2.1608E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74501E1
cs_ef2b_imon=3.12109E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.35304E0
os_ea2_imon=-7.9683E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06095E2
lens4b_imon=2.00529E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7136E1
cs_ef2a_imon=3.17623E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-3.9981E0
os_ef2alow_imon=-2.66275E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.99226E-1
os_ef2bup_imon=-5.45582E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10907E1
os_restr2_imon=3.42563E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23088E2
cs_ionfoca_imon=6.31262E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01977E1
cs_anode2_imon=2.25758E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73198E1
iondef1_imon=1.09373E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67995E1
iondef4_imon=1.07764E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=4.50041E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82141E-1
olens1_imon=7.31651E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15056E0
cs_ionaccel_imon=-1.77978E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02058E2
cs_ionfocb_imon=1.4706E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56327E1
einzel_imon=7.59414E-6
window_vset=0.0E0
window_vmon=1.92115E-1
window_imon=-1.15629E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82628E2
mask1_imon=2.39052E-4
mask2_vset=0.0E0
mask2_vmon=-1.8608E1
mask2_imon=-7.59857E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92646E3
multa_neg_imon=7.3035E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93735E3
defgrida_imon=6.4275E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50112E3
multb_neg_imon=7.14128E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.11284E0
defgridb_imon=6.02014E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33362E1
os_fil1_imon=9.41303E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06897E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63965E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30901E1
cs_fil1_imon=9.95501E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62348E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66198E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.28007E-2
os_fil2_imon=-2.84617E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.83298E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.55635E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36255E-1
cs_fil2_imon=-2.61792E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=6.01628E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22228E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.2863E-3
inlet_lpb_pmon=2.00567E-1
chamber_ion_pmon=1.16916E-7
chamber_cvt_pmon=2.52977E-3
foreline_cvt_pmon=2.52977E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.44275E-1
res40_imon=-2.50057E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=166
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.51E3	1.0E0	1.47E2	4.1E1	-7.44059E-2	-8.80011E1	-1.66893E-4	-8.80004E1	-7.15256E-5	5.67436E-3	9.33647E-2	2.73237E1	-3.26717E1	-3.26374E1	2.68208E1	1.16829E-7	2.52867E-3	2.52867E-3	6.31288E-3	2.00673E-1
2.0E0	1.1943E5	1.25E2	3.16E2	1.6E2	-7.43285E-2	-8.80008E1	-2.86102E-4	-8.80004E1	-7.15256E-5	5.88894E-3	9.30548E-2	2.73418E1	-3.2648E1	-3.26401E1	2.6835E1	1.16923E-7	2.52384E-3	2.52384E-3	6.32896E-3	1.9985E-1
3.0E0	2.0E1	0.0E0	4.85E2	2.79E2	-7.29374E-2	-8.80008E1	-5.00679E-4	-8.80001E1	-2.6226E-4	5.8651E-3	9.30548E-2	2.73207E1	-3.26944E1	-3.26411E1	2.68104E1	1.1668E-7	2.52139E-3	2.52139E-3	6.34099E-3	2.00818E-1
4.0E0	2.2972E4	1.3E1	6.55E2	3.98E2	-7.37874E-2	-8.80011E1	-3.8147E-4	-8.80002E1	-3.09944E-4	5.57899E-3	9.32932E-2	2.73175E1	-3.2672E1	-3.25829E1	2.6798E1	1.16769E-7	2.51498E-3	2.51498E-3	6.31798E-3	2.00231E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.34782E-2	-8.80008E1	-5.00679E-4	-8.8E1	-2.38419E-5	5.93662E-3	9.30548E-2	2.73123E1	-3.26693E1	-3.26302E1	2.67986E1	1.17173E-7	2.51954E-3	2.51954E-3	6.31817E-3	2.01047E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.33239E-2	-8.80008E1	-5.96046E-4	-8.80005E1	9.53674E-5	5.65052E-3	9.30309E-2	2.73305E1	-3.26691E1	-3.26207E1	2.68157E1	1.16829E-7	2.5199E-3	2.5199E-3	6.32936E-3	1.9963E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.24736E-2	-8.80008E1	-5.96046E-4	-8.80001E1	-4.76837E-5	5.79357E-3	9.30071E-2	2.73017E1	-3.26738E1	-3.26277E1	2.68105E1	1.16724E-7	2.52276E-3	2.52276E-3	6.33436E-3	1.9951E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.32464E-2	-8.80009E1	-4.05312E-4	-8.79999E1	2.38419E-5	5.84126E-3	9.30548E-2	2.73093E1	-3.26825E1	-3.26314E1	2.68136E1	1.17198E-7	2.51886E-3	2.51886E-3	6.3543E-3	2.006E-1
1.2E1	3.41E2	0.0E0	4.85E2	3.23E2	-7.34782E-2	-8.80011E1	-2.38419E-4	-8.79999E1	-7.15256E-5	5.93662E-3	9.32217E-2	2.73293E1	-3.26714E1	-3.26378E1	2.68172E1	1.1688E-7	2.52757E-3	2.52757E-3	6.33486E-3	2.00325E-1
1.3E1	1.3E1	0.0E0	5.25E2	3.53E2	-7.32464E-2	-8.8001E1	-8.58307E-4	-8.79999E1	1.90735E-4	5.72205E-3	9.3174E-2	2.73033E1	-3.26645E1	-3.26122E1	2.68142E1	1.16778E-7	2.5188E-3	2.5188E-3	6.29098E-3	1.99803E-1
1.4E1	3.736E3	5.0E0	5.66E2	3.82E2	-7.34782E-2	-8.80013E1	-4.05312E-4	-8.8E1	0.0E0	5.4121E-3	9.31263E-2	2.73075E1	-3.26651E1	-3.26194E1	2.68569E1	1.16724E-7	2.52061E-3	2.52061E-3	6.31278E-3	1.9968E-1
1.5E1	1.38E2	1.0E0	6.06E2	4.11E2	-7.16233E-2	-8.80011E1	-1.00136E-3	-8.8E1	2.38419E-4	6.00815E-3	9.34601E-2	2.73063E1	-3.26494E1	-3.26356E1	2.67824E1	1.16938E-7	2.52139E-3	2.52139E-3	6.29624E-3	2.00463E-1
1.6E1	1.134E3	0.0E0	6.47E2	4.41E2	-7.286E-2	-8.80011E1	-5.00679E-4	-8.8E1	-3.8147E-4	6.05583E-3	9.35316E-2	2.72986E1	-3.26567E1	-3.2659E1	2.68244E1	1.16626E-7	2.51771E-3	2.51771E-3	6.29098E-3	1.99456E-1
1.7E1	1.678E3	1.0E0	6.87E2	4.7E2	-7.30146E-2	-8.80014E1	-5.72205E-4	-8.79998E1	-4.76837E-5	5.88894E-3	9.31978E-2	2.73243E1	-3.26999E1	-3.26122E1	2.6801E1	1.16873E-7	2.51954E-3	2.51954E-3	6.3074E-3	2.01391E-1
1.8E1	7.161E3	2.0E0	7.27E2	5.0E2	-7.39421E-2	-8.80015E1	-5.24521E-4	-8.79999E1	-2.6226E-4	5.91278E-3	9.32693E-2	2.72925E1	-3.26597E1	-3.26422E1	2.68286E1	1.16981E-7	2.52209E-3	2.52209E-3	6.32386E-3	2.00673E-1
1.9E1	2.563E3	1.0E0	7.68E2	5.29E2	-7.23964E-2	-8.80012E1	-7.86781E-4	-8.79998E1	4.76837E-5	5.91278E-3	9.32693E-2	2.73021E1	-3.26729E1	-3.26452E1	2.68034E1	1.16927E-7	2.52189E-3	2.52189E-3	6.31283E-3	1.99999E-1
2.0E1	3.1015E4	1.1E1	8.08E2	5.58E2	-7.27828E-2	-8.80009E1	-5.24521E-4	-8.79998E1	7.15256E-5	5.98431E-3	9.31978E-2	2.73105E1	-3.26741E1	-3.265E1	2.68088E1					
2.1E1	7.4E1	0.0E0	8.49E2	5.88E2	-7.30918E-2	-8.8001E1	-4.29153E-4	-8.8E1	-7.15256E-5	5.76973E-3	9.27925E-2	2.7393E1	-3.2698E1	-3.25664E1	2.68106E1	1.16829E-7	2.5188E-3	2.5188E-3	6.25827E-3	2.00325E-1
2.2E1	2.266E3	5.0E0	8.89E2	6.17E2	-7.29374E-2	-8.80011E1	-7.62939E-4	-8.80002E1	0.0E0	5.55515E-3	9.29594E-2	2.73228E1	-3.26514E1	-3.26313E1	2.67995E1	1.16626E-7	2.52209E-3	2.52209E-3	6.28552E-3	1.99977E-1
2.3E1	5.0E0	0.0E0	9.3E2	6.47E2	-7.41738E-2	-8.80012E1	-8.34465E-4	-8.80002E1	1.43051E-4	5.79357E-3	9.29356E-2	2.73198E1	-3.26944E1	-3.26195E1	2.67995E1	1.16916E-7	2.52977E-3	2.52977E-3	6.2863E-3	2.00567E-1