[Scan]
initial_time=2015-12-15T17:57:55
final_time=2015-12-15T17:58:14
ip_count=19
run=1017
dataset=2
scan=72
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=27.0
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.32464E-2
qbias_imon=-3.83902E-6
ql1_vset=
ql1_vmon=-8.80011E1
ql1_imon=-9.31537E-10
ql2_vset=
ql2_vmon=-7.62939E-4
ql2_imon=1.47752E-9
ql3_vset=
ql3_vmon=-8.80002E1
ql3_imon=-2.89044E-9
ql4_vset=
ql4_vmon=5.24521E-4
ql4_imon=1.58776E-8
mult1=-2.07335E-8
mult2=-2.78648E-9
rf_tmon=-3.97769E-3
rf_agc=3.35318E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=6.31809E-3
ql5_imon=6.20198E-10
bslens_vset=-6.2E0
bslens_vmon=-6.6427E0
bslens_imon=2.39716E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19893E1
lens5a_imon=1.97298E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12466E2
lens4a_imon=2.04992E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5364E1
cs_ef1b_imon=2.85007E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04627E2
lens23_imon=1.02146E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05162E1
cs_ea1_imon=2.52634E-5
lens1_vset=-2.7E0
lens1_vmon=-3.05157E0
lens1_imon=1.23997E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64819E1
os_ef1alow_imon=2.97729E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03822E1
cs_ea2_imon=1.5667E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84286E1
cs_ef1a_imon=2.93693E-5
olens2_vset=9.7E-1
olens2_vmon=9.70173E-1
olens2_imon=1.24616E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1146E1
os_restr1_imon=4.30608E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1539E1
os_ea1_imon=2.37745E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63563E1
os_ef1bup_imon=3.07785E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25751E0
cs_ionrep_imon=1.20044E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9189E2
cs_nozzle_imon=1.93359E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02049E1
cs_anode1_imon=2.97621E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20563E0
olens4_imon=3.93174E-8
tplens_vset=1.4E-1
tplens_vmon=1.55852E0
tplens_imon=-5.12038E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26182E1
iondef3_imon=1.48018E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26855E1
iondef2_imon=1.57968E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02971E2
lens6_imon=2.98414E-4
ql6_vset=1.0E-1
ql6_vmon=9.29356E-2
ql6_imon=9.78541E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29115E0
ionrepsh_imon=1.78047E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33622E1
lens5b_imon=2.14782E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74585E1
cs_ef2b_imon=3.13154E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.3266E0
os_ea2_imon=-6.81471E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06086E2
lens4b_imon=2.00439E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71318E1
cs_ef2a_imon=3.16002E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06837E0
os_ef2alow_imon=-2.54742E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.94421E-1
os_ef2bup_imon=-5.30085E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10835E1
os_restr2_imon=3.43031E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.231E2
cs_ionfoca_imon=6.2982E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01947E1
cs_anode2_imon=2.25398E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73165E1
iondef1_imon=1.09373E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68262E1
iondef4_imon=1.08846E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=4.4559E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82571E-1
olens1_imon=7.32125E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15777E0
cs_ionaccel_imon=-1.80501E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02094E2
cs_ionfocb_imon=1.47125E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56249E1
einzel_imon=7.59053E-6
window_vset=0.0E0
window_vmon=1.71092E-1
window_imon=-1.17071E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82619E2
mask1_imon=2.39034E-4
mask2_vset=0.0E0
mask2_vmon=-1.86176E1
mask2_imon=-7.59857E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9263E3
multa_neg_imon=7.50538E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93703E3
defgrida_imon=6.58251E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50116E3
multb_neg_imon=7.48735E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.26622E0
defgridb_imon=6.18597E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33336E1
os_fil1_imon=9.41351E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06759E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63906E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30914E1
cs_fil1_imon=9.97783E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6296E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66157E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.33166E-2
os_fil2_imon=-2.61191E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.9351E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.64915E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36255E-1
cs_fil2_imon=-2.40768E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.95952E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22243E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=1.99977E-1
chamber_ion_pmon=1.1693E-7
chamber_cvt_pmon=2.52647E-3
foreline_cvt_pmon=2.52647E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.41873E-1
res40_imon=-2.59428E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=163
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.469E3	2.0E0	1.47E2	4.1E1	-7.31692E-2	-8.80012E1	-3.57628E-4	-8.80006E1	-9.53674E-5	5.91278E-3	9.30548E-2	2.7321E1	-3.26442E1	-3.26448E1	2.68244E1	1.16873E-7	2.51739E-3	2.51739E-3	6.32896E-3	2.00876E-1
2.0E0	1.1857E5	1.13E2	3.16E2	1.6E2	-7.37874E-2	-8.80015E1	-6.67572E-4	-8.79998E1	-1.43051E-4	5.88894E-3	9.33647E-2	2.73155E1	-3.26597E1	-3.26156E1	2.682E1	1.16621E-7	2.52405E-3	2.52405E-3	6.323E-3	1.99119E-1
3.0E0	1.1E1	0.0E0	4.85E2	2.79E2	-7.32464E-2	-8.8001E1	-4.29153E-4	-8.80001E1	-2.38419E-4	6.10352E-3	9.30548E-2	2.73305E1	-3.26891E1	-3.26089E1	2.68024E1	1.16835E-7	2.52027E-3	2.52027E-3	6.31299E-3	1.99401E-1
4.0E0	2.293E4	1.4E1	6.55E2	3.98E2	-7.36328E-2	-8.80013E1	-8.82149E-4	-8.80003E1	-4.76837E-5	6.31809E-3	9.31501E-2	2.72957E1	-3.26791E1	-3.26508E1	2.67998E1	1.16973E-7	2.51954E-3	2.51954E-3	6.30202E-3	2.00192E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.286E-2	-8.80013E1	-8.58307E-4	-8.80003E1	-1.19209E-4	6.00815E-3	9.30309E-2	2.72998E1	-3.2672E1	-3.2639E1	2.68151E1	1.16823E-7	2.51417E-3	2.51417E-3	6.29665E-3	2.00192E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.27053E-2	-8.80017E1	-3.33786E-4	-8.8E1	-9.53674E-5	5.53131E-3	9.31263E-2	2.73144E1	-3.26619E1	-3.25936E1	2.68233E1	1.16829E-7	2.52209E-3	2.52209E-3	6.32936E-3	1.9963E-1
7.0E0	1.0E0	0.0E0	1.163E3	7.54E2	-7.21643E-2	-8.80016E1	-4.05312E-4	-8.79999E1	1.43051E-4	6.07967E-3	9.30786E-2	2.73145E1	-3.26644E1	-3.26301E1	2.67931E1	1.16813E-7	2.51886E-3	2.51886E-3	6.34385E-3	1.99283E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.24736E-2	-8.80014E1	-5.48363E-4	-8.80001E1	2.38419E-5	6.27041E-3	9.31263E-2	2.73144E1	-3.26503E1	-3.2637E1	2.68058E1	1.16873E-7	2.51525E-3	2.51525E-3	6.34518E-3	2.00534E-1
1.2E1	3.44E2	0.0E0	4.85E2	3.23E2	-7.26282E-2	-8.80013E1	-6.19888E-4	-8.79999E1	1.90735E-4	5.98431E-3	9.29594E-2	2.73252E1	-3.26756E1	-3.26478E1	2.6814E1	1.1672E-7	2.51814E-3	2.51814E-3	6.3445E-3	2.00231E-1
1.3E1	2.7E1	0.0E0	5.25E2	3.53E2	-7.24736E-2	-8.80014E1	-6.67572E-4	-8.80003E1	2.38419E-5	5.96046E-3	9.30309E-2	2.73069E1	-3.27209E1	-3.26158E1	2.6804E1	1.17023E-7	2.52061E-3	2.52061E-3	6.31817E-3	2.01047E-1
1.4E1	3.694E3	2.0E0	5.66E2	3.82E2	-7.26282E-2	-8.80016E1	-5.96046E-4	-8.8E1	2.38419E-4	5.72205E-3	9.32693E-2	2.73257E1	-3.26691E1	-3.26178E1	2.68034E1	1.17134E-7	2.5188E-3	2.5188E-3	6.29098E-3	2.00325E-1
1.5E1	1.59E2	0.0E0	6.06E2	4.11E2	-7.26282E-2	-8.80012E1	-3.8147E-4	-8.79999E1	3.8147E-4	5.67436E-3	9.31025E-2	2.73246E1	-3.26661E1	-3.26366E1	2.68314E1	1.16823E-7	2.52276E-3	2.52276E-3	6.29665E-3	2.00705E-1
1.6E1	1.148E3	0.0E0	6.47E2	4.41E2	-7.29374E-2	-8.80012E1	-8.82149E-4	-8.80002E1	1.19209E-4	5.93662E-3	9.30071E-2	2.73169E1	-3.26708E1	-3.26343E1	2.68124E1	1.16981E-7	2.51771E-3	2.51771E-3	6.31837E-3	2.00847E-1
1.7E1	1.674E3	2.0E0	6.87E2	4.7E2	-7.23964E-2	-8.80012E1	-7.39098E-4	-8.79997E1	-1.19209E-4	6.07967E-3	9.29832E-2	2.73122E1	-3.26537E1	-3.26325E1	2.6807E1	1.16769E-7	2.51919E-3	2.51919E-3	6.31269E-3	1.99061E-1
1.8E1	6.993E3	6.0E0	7.27E2	5.0E2	-7.23189E-2	-8.80014E1	-3.09944E-4	-8.79999E1	2.38419E-4	6.03199E-3	9.29356E-2	2.72222E1	-3.26741E1	-3.26602E1	2.68094E1	1.16778E-7	2.5188E-3	2.5188E-3	6.32386E-3	1.99283E-1
1.9E1	2.613E3	2.0E0	7.68E2	5.29E2	-7.30918E-2	-8.80013E1	-1.0252E-3	-8.80004E1	3.33786E-4	5.79357E-3	9.29832E-2	2.73063E1	-3.26685E1	-3.2639E1	2.6818E1	1.16916E-7	2.52025E-3	2.52025E-3	6.32858E-3	2.00231E-1
2.0E1	3.066E4	1.5E1	8.08E2	5.58E2	-7.30146E-2	-8.80012E1	-7.39098E-4	-8.80004E1	0.0E0	5.93662E-3	9.31501E-2	2.7321E1	-3.26944E1	-3.26478E1	2.68172E1	1.16965E-7	2.51814E-3	2.51814E-3	6.2863E-3	1.99896E-1
2.1E1	6.7E1	0.0E0	8.49E2	5.88E2	-7.22418E-2	-8.80013E1	-7.62939E-4	-8.80002E1	3.09944E-4	6.1512E-3	9.30071E-2	2.73289E1	-3.26839E1	-3.26509E1	2.68041E1	1.16796E-7	2.52043E-3	2.52043E-3	6.31541E-3	2.01485E-1
2.2E1	2.243E3	2.0E0	8.89E2	6.17E2	-7.38649E-2	-8.80012E1	-9.05991E-4	-8.80001E1	3.57628E-4	6.31809E-3	9.30309E-2	2.73299E1	-3.26738E1	-3.2659E1	2.68148E1					
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.32464E-2	-8.80011E1	-7.62939E-4	-8.80002E1	5.24521E-4	6.31809E-3	9.29356E-2	2.73165E1	-3.26855E1	-3.26182E1	2.68262E1	1.1693E-7	2.52647E-3	2.52647E-3	6.3074E-3	1.99977E-1