[Scan]
initial_time=2015-12-15T17:58:21
final_time=2015-12-15T17:58:41
ip_count=19
run=1017
dataset=2
scan=73
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=27.0
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.3401E-2
qbias_imon=-3.81889E-6
ql1_vset=
ql1_vmon=-8.80018E1
ql1_imon=-9.61995E-10
ql2_vset=
ql2_vmon=-4.05312E-4
ql2_imon=1.49852E-9
ql3_vset=
ql3_vmon=-8.80004E1
ql3_imon=-2.8492E-9
ql4_vset=
ql4_vmon=-2.38419E-5
ql4_imon=1.58695E-8
mult1=-2.18766E-8
mult2=-2.82517E-9
rf_tmon=-4.9696E-3
rf_agc=3.30731E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.88894E-3
ql5_imon=6.33562E-10
bslens_vset=-6.2E0
bslens_vmon=-6.69738E0
bslens_imon=2.41879E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19628E1
lens5a_imon=1.97658E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12483E2
lens4a_imon=2.04851E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53783E1
cs_ef1b_imon=2.84525E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04603E2
lens23_imon=1.02377E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05258E1
cs_ea1_imon=2.50507E-5
lens1_vset=-2.7E0
lens1_vmon=-3.03535E0
lens1_imon=1.57523E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64603E1
os_ef1alow_imon=2.97557E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03979E1
cs_ea2_imon=1.55588E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84603E1
cs_ef1a_imon=2.92483E-5
olens2_vset=9.7E-1
olens2_vmon=9.70459E-1
olens2_imon=1.24651E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11343E1
os_restr1_imon=4.3052E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15167E1
os_ea1_imon=2.36303E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63711E1
os_ef1bup_imon=3.07288E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22626E0
cs_ionrep_imon=1.20512E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91897E2
cs_nozzle_imon=1.93323E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01989E1
cs_anode1_imon=2.9707E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20585E0
olens4_imon=3.92767E-8
tplens_vset=1.4E-1
tplens_vmon=1.55431E0
tplens_imon=-4.61569E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26101E1
iondef3_imon=1.50938E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2672E1
iondef2_imon=1.55336E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02973E2
lens6_imon=2.98562E-4
ql6_vset=1.0E-1
ql6_vmon=9.31978E-2
ql6_imon=9.93347E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28094E0
ionrepsh_imon=1.77182E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33832E1
lens5b_imon=2.1954E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74681E1
cs_ef2b_imon=3.11388E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.30617E0
os_ea2_imon=-1.00231E-6
lens4b_vset=-4.05E2
lens4b_vmon=-4.06116E2
lens4b_imon=2.00666E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7109E1
cs_ef2a_imon=3.17713E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07657E0
os_ef2alow_imon=-2.74139E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.89122E-1
os_ef2bup_imon=-5.40691E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10834E1
os_restr2_imon=3.41797E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23073E2
cs_ionfoca_imon=6.31226E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01665E1
cs_anode2_imon=2.26453E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72898E1
iondef1_imon=1.11103E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68154E1
iondef4_imon=1.07808E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=4.49541E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.8238E-1
olens1_imon=7.30807E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12493E0
cs_ionaccel_imon=-1.90733E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02072E2
cs_ionfocb_imon=1.4715E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56365E1
einzel_imon=7.75734E-6
window_vset=0.0E0
window_vmon=2.26374E-1
window_imon=-1.042E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82612E2
mask1_imon=2.39032E-4
mask2_vset=0.0E0
mask2_vmon=-1.86008E1
mask2_imon=-7.15322E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92646E3
multa_neg_imon=7.24222E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93716E3
defgrida_imon=6.69426E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5015E3
multb_neg_imon=6.87451E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.16697E0
defgridb_imon=6.16073E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33334E1
os_fil1_imon=9.41476E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06964E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64026E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30927E1
cs_fil1_imon=9.94873E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62459E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66184E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.16399E-2
os_fil2_imon=-2.72711E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.78493E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.44807E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35894E-1
cs_fil2_imon=-2.78503E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.0725E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22322E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=1.98153E-1
chamber_ion_pmon=1.16774E-7
chamber_cvt_pmon=2.52599E-3
foreline_cvt_pmon=2.52599E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.06701E-1
res40_imon=-2.63366E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=206
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.486E3	1.0E0	1.47E2	4.1E1	-7.25507E-2	-8.80015E1	-5.24521E-4	-8.79998E1	1.43051E-4	6.22272E-3	9.32217E-2	2.73057E1	-3.26856E1	-3.26419E1	2.68166E1	1.16774E-7	2.51525E-3	2.51525E-3	6.32356E-3	2.00534E-1
2.0E0	1.19211E5	1.09E2	3.16E2	1.6E2	-7.30918E-2	-8.80014E1	-4.29153E-4	-8.80001E1	-2.38419E-5	6.07967E-3	9.30786E-2	2.72935E1	-3.25703E1	-3.26285E1	2.68088E1	1.17032E-7	2.51771E-3	2.51771E-3	6.36244E-3	2.00499E-1
3.0E0	1.8E1	0.0E0	4.85E2	2.79E2	-7.33239E-2	-8.80012E1	-3.57628E-4	-8.80003E1	-7.15256E-5	6.00815E-3	9.31263E-2	2.72767E1	-3.26289E1	-3.26422E1	2.68088E1	1.1693E-7	2.51443E-3	2.51443E-3	6.32386E-3	2.00847E-1
4.0E0	2.2457E4	1.2E1	6.55E2	3.98E2	-7.40192E-2	-8.80014E1	-1.90735E-4	-8.80002E1	2.14577E-4	5.8651E-3	9.31501E-2	2.73159E1	-3.26549E1	-3.26392E1	2.68117E1	1.16923E-7	2.52276E-3	2.52276E-3	6.32356E-3	2.01562E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.42513E-2	-8.80012E1	-2.86102E-4	-8.79997E1	3.57628E-4	6.03199E-3	9.29832E-2	2.72819E1	-3.26625E1	-3.26109E1	2.68175E1	1.16823E-7	2.51847E-3	2.51847E-3	6.33436E-3	2.00534E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.37874E-2	-8.80014E1	-2.38419E-5	-8.79999E1	1.66893E-4	6.1512E-3	9.30071E-2	2.73257E1	-3.26734E1	-3.26104E1	2.68157E1	1.1672E-7	2.52765E-3	2.52765E-3	6.32328E-3	2.00735E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.32464E-2	-8.80011E1	-3.57628E-4	-8.8E1	2.38419E-4	5.8651E-3	9.27687E-2	2.72832E1	-3.26684E1	-3.26452E1	2.67987E1	1.16841E-7	2.52977E-3	2.52977E-3	6.34737E-3	2.00064E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.34782E-2	-8.80013E1	-2.14577E-4	-8.79999E1	3.57628E-4	5.65052E-3	9.28879E-2	2.72749E1	-3.2648E1	-3.26332E1	2.68158E1	1.17056E-7	2.5201E-3	2.5201E-3	6.34374E-3	1.99824E-1
1.2E1	3.2E2	0.0E0	4.85E2	3.23E2	-7.30146E-2	-8.80012E1	-2.38419E-4	-8.79999E1	1.90735E-4	5.93662E-3	9.28879E-2	2.73078E1	-3.2648E1	-3.26271E1	2.68406E1	1.17092E-7	2.52262E-3	2.52262E-3	6.32784E-3	1.99498E-1
1.3E1	1.7E1	0.0E0	5.25E2	3.53E2	-7.35556E-2	-8.80011E1	-5.48363E-4	-8.79998E1	-4.76837E-5	5.98431E-3	9.27925E-2	2.7308E1	-3.26642E1	-3.26098E1	2.68006E1	1.16844E-7	2.52384E-3	2.52384E-3	6.3074E-3	1.99595E-1
1.4E1	3.746E3	1.0E0	5.66E2	3.82E2	-7.3401E-2	-8.80012E1	-2.38419E-5	-8.8E1	-3.8147E-4	5.79357E-3	9.31501E-2	2.73381E1	-3.2641E1	-3.26068E1	2.68076E1	1.16847E-7	2.51758E-3	2.51758E-3	6.32483E-3	1.99926E-1
1.5E1	1.51E2	0.0E0	6.06E2	4.11E2	-7.37874E-2	-8.80012E1	-1.43051E-4	-8.80002E1	0.0E0	6.67572E-3	9.31978E-2	2.73316E1	-3.26661E1	-3.26697E1	2.68111E1	1.1688E-7	2.52538E-3	2.52538E-3	6.32936E-3	2.00847E-1
1.6E1	1.255E3	0.0E0	6.47E2	4.41E2	-7.35556E-2	-8.80016E1	-1.19209E-4	-8.80001E1	9.53674E-5	5.88894E-3	9.29832E-2	2.73123E1	-3.26657E1	-3.26164E1	2.6822E1	1.16873E-7	2.51525E-3	2.51525E-3	6.32356E-3	2.00534E-1
1.7E1	1.605E3	0.0E0	6.87E2	4.7E2	-7.30918E-2	-8.80015E1	-4.29153E-4	-8.80001E1	7.15256E-5	5.88894E-3	9.29594E-2	2.73123E1	-3.26621E1	-3.26356E1	2.6792E1	1.16854E-7	2.51935E-3	2.51935E-3	6.32936E-3	1.9937E-1
1.8E1	7.149E3	4.0E0	7.27E2	5.0E2	-7.27053E-2	-8.80012E1	-2.14577E-4	-8.80001E1	1.19209E-4	6.05583E-3	9.32693E-2	2.73142E1	-3.26612E1	-3.26365E1	2.68068E1					
1.9E1	2.607E3	0.0E0	7.68E2	5.29E2	-7.25507E-2	-8.80016E1	-3.57628E-4	-8.80003E1	2.38419E-5	6.31809E-3	9.30786E-2	2.73063E1	-3.26903E1	-3.26315E1	2.68064E1	1.16872E-7	2.52184E-3	2.52184E-3	6.30323E-3	2.00295E-1
2.0E1	3.0691E4	1.8E1	8.08E2	5.58E2	-7.26282E-2	-8.80012E1	-4.76837E-4	-8.8E1	-7.15256E-5	5.81741E-3	9.32693E-2	2.72962E1	-3.26537E1	-3.26124E1	2.6801E1	1.16886E-7	2.51693E-3	2.51693E-3	6.34661E-3	1.99931E-1
2.1E1	7.1E1	0.0E0	8.49E2	5.88E2	-7.25507E-2	-8.8001E1	-1.43051E-4	-8.79999E1	2.38419E-5	5.48363E-3	9.3174E-2	2.73255E1	-3.26573E1	-3.26687E1	2.68198E1	1.17083E-7	2.52209E-3	2.52209E-3	6.29098E-3	1.98764E-1
2.2E1	2.166E3	3.0E0	8.89E2	6.17E2	-7.27828E-2	-8.80013E1	-4.29153E-4	-8.80001E1	-1.66893E-4	5.93662E-3	9.30548E-2	2.73228E1	-3.26632E1	-3.26655E1	2.67752E1	1.16873E-7	2.51417E-3	2.51417E-3	6.3074E-3	1.97984E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.3401E-2	-8.80018E1	-4.05312E-4	-8.80004E1	-2.38419E-5	5.88894E-3	9.31978E-2	2.72898E1	-3.2672E1	-3.26101E1	2.68154E1	1.16774E-7	2.52599E-3	2.52599E-3	6.3074E-3	1.98153E-1