[Scan]
initial_time=2015-12-15T17:58:49
final_time=2015-12-15T17:59:08
ip_count=19
run=1017
dataset=2
scan=74
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=27.0
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.32464E-2
qbias_imon=-3.83911E-6
ql1_vset=
ql1_vmon=-8.80012E1
ql1_imon=-8.89301E-10
ql2_vset=
ql2_vmon=-2.6226E-4
ql2_imon=1.47856E-9
ql3_vset=
ql3_vmon=-8.80003E1
ql3_imon=-2.75072E-9
ql4_vset=
ql4_vmon=0.0E0
ql4_imon=1.58461E-8
mult1=-1.66988E-8
mult2=-2.74481E-9
rf_tmon=-4.91651E-3
rf_agc=3.27841E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.98431E-3
ql5_imon=6.23012E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65442E0
bslens_imon=2.37691E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.1963E1
lens5a_imon=1.95466E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12504E2
lens4a_imon=2.04927E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53818E1
cs_ef1b_imon=2.84142E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04599E2
lens23_imon=1.0216E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0497E1
cs_ea1_imon=2.52627E-5
lens1_vset=-2.7E0
lens1_vmon=-3.06133E0
lens1_imon=1.4425E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64446E1
os_ef1alow_imon=2.9714E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04227E1
cs_ea2_imon=1.52957E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84336E1
cs_ef1a_imon=2.94255E-5
olens2_vset=9.7E-1
olens2_vmon=9.70125E-1
olens2_imon=1.24897E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1121E1
os_restr1_imon=4.31007E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15288E1
os_ea1_imon=2.37054E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63711E1
os_ef1bup_imon=3.0833E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26331E0
cs_ionrep_imon=1.20112E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91869E2
cs_nozzle_imon=1.9331E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01798E1
cs_anode1_imon=2.97418E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2057E0
olens4_imon=3.92565E-8
tplens_vset=1.4E-1
tplens_vmon=1.55649E0
tplens_imon=-4.90015E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26461E1
iondef3_imon=1.47011E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26614E1
iondef2_imon=1.58974E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02963E2
lens6_imon=2.98417E-4
ql6_vset=1.0E-1
ql6_vmon=9.27925E-2
ql6_imon=9.97281E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25977E0
ionrepsh_imon=1.76919E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33876E1
lens5b_imon=2.19215E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74623E1
cs_ef2b_imon=3.12466E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.35297E0
os_ea2_imon=-6.52828E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.061E2
lens4b_imon=2.00417E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71368E1
cs_ef2a_imon=3.17435E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.02792E0
os_ef2alow_imon=-2.74139E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.65374E-1
os_ef2bup_imon=-5.45557E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10892E1
os_restr2_imon=3.42075E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23067E2
cs_ionfoca_imon=6.30034E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01763E1
cs_anode2_imon=2.25063E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73193E1
iondef1_imon=1.07511E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68304E1
iondef4_imon=1.07912E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=4.42838E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82356E-1
olens1_imon=7.31981E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10755E0
cs_ionaccel_imon=-1.90038E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02075E2
cs_ionfocb_imon=1.47181E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56243E1
einzel_imon=7.56273E-6
window_vset=0.0E0
window_vmon=2.20003E-1
window_imon=-1.02809E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82612E2
mask1_imon=2.39063E-4
mask2_vset=0.0E0
mask2_vmon=-1.86199E1
mask2_imon=-7.88302E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92663E3
multa_neg_imon=7.36747E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93729E3
defgrida_imon=6.2207E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5011E3
multb_neg_imon=7.49489E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.32288E0
defgridb_imon=6.22778E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33338E1
os_fil1_imon=9.4136E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06976E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63697E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30904E1
cs_fil1_imon=9.95661E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63009E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66196E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.0913E-2
os_fil2_imon=-2.69815E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.86023E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.69621E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34771E-1
cs_fil2_imon=-2.59389E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.97206E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22248E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=1.9951E-1
chamber_ion_pmon=1.16774E-7
chamber_cvt_pmon=2.52061E-3
foreline_cvt_pmon=2.52061E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-2.70587E-1
res40_imon=-2.52593E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=161
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.329E3	1.0E0	1.47E2	4.1E1	-7.29374E-2	-8.80016E1	-4.05312E-4	-8.80002E1	-5.24521E-4	6.29425E-3	9.2721E-2	2.73157E1	-3.26685E1	-3.26549E1	2.68022E1	1.16829E-7	2.51771E-3	2.51771E-3	6.32386E-3	1.9911E-1
2.0E0	1.1958E5	9.5E1	3.16E2	1.6E2	-7.32464E-2	-8.80018E1	-4.76837E-4	-8.80003E1	0.0E0	5.79357E-3	9.3174E-2	2.731E1	-3.26566E1	-3.26572E1	2.6816E1	1.1672E-7	2.51919E-3	2.51919E-3	6.32328E-3	2.00399E-1
3.0E0	2.3E1	0.0E0	4.85E2	2.79E2	-7.30146E-2	-8.80017E1	-8.10623E-4	-8.80003E1	1.66893E-4	6.10352E-3	9.27448E-2	2.73248E1	-3.26961E1	-3.26098E1	2.68059E1	1.16893E-7	2.52521E-3	2.52521E-3	6.33592E-3	2.00425E-1
4.0E0	2.2589E4	1.0E1	6.55E2	3.98E2	-7.31692E-2	-8.80014E1	-1.00136E-3	-8.80003E1	-1.19209E-4	6.29425E-3	9.26495E-2	2.73057E1	-3.26506E1	-3.26158E1	2.6819E1	1.17112E-7	2.52553E-3	2.52553E-3	6.3074E-3	2.01409E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.27828E-2	-8.80014E1	-7.86781E-4	-8.80002E1	1.90735E-4	6.34193E-3	9.29832E-2	2.73181E1	-3.26396E1	-3.26296E1	2.68151E1	1.17023E-7	2.51632E-3	2.51632E-3	6.3074E-3	1.9968E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.26282E-2	-8.80013E1	-7.39098E-4	-8.80002E1	-2.38419E-5	6.34193E-3	9.28879E-2	2.7334E1	-3.26691E1	-3.26331E1	2.68058E1	1.16823E-7	2.52061E-3	2.52061E-3	6.31817E-3	2.00534E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.27828E-2	-8.80016E1	-5.00679E-4	-8.80003E1	7.15256E-5	6.36578E-3	9.27925E-2	2.73165E1	-3.26597E1	-3.26194E1	2.68004E1	1.16981E-7	2.51552E-3	2.51552E-3	6.31837E-3	2.00151E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.22418E-2	-8.80013E1	-1.90735E-4	-8.80002E1	-2.38419E-5	6.36578E-3	9.27925E-2	2.73228E1	-3.26644E1	-3.26124E1	2.68124E1	1.16724E-7	2.52384E-3	2.52384E-3	6.33977E-3	2.00705E-1
1.2E1	3.38E2	0.0E0	4.85E2	3.23E2	-7.20871E-2	-8.80015E1	-7.15256E-5	-8.80001E1	1.66893E-4	6.12736E-3	9.27448E-2	2.7292E1	-3.26232E1	-3.25879E1	2.68339E1	1.16923E-7	2.52169E-3	2.52169E-3	6.3074E-3	2.00534E-1
1.3E1	3.1E1	0.0E0	5.25E2	3.53E2	-7.23964E-2	-8.80013E1	-3.8147E-4	-8.8E1	2.38419E-5	5.84126E-3	9.2721E-2	2.73102E1	-3.26553E1	-3.26171E1	2.67926E1	1.16916E-7	2.52871E-3	2.52871E-3	6.33388E-3	1.99896E-1
1.4E1	3.605E3	0.0E0	5.66E2	3.82E2	-7.286E-2	-8.80012E1	-5.00679E-4	-8.80001E1	-2.14577E-4	5.98431E-3	9.26256E-2	2.73189E1	-3.26723E1	-3.2605E1	2.6807E1	1.16999E-7	2.52521E-3	2.52521E-3	6.30171E-3	2.01331E-1
1.5E1	1.5E2	0.0E0	6.06E2	4.11E2	-7.27053E-2	-8.80015E1	-4.29153E-4	-8.8E1	-1.90735E-4	6.00815E-3	9.26018E-2	2.73171E1	-3.26987E1	-3.26368E1	2.68076E1	1.16981E-7	2.5188E-3	2.5188E-3	6.29645E-3	2.00847E-1
1.6E1	1.205E3	0.0E0	6.47E2	4.41E2	-7.26282E-2	-8.80014E1	-6.19888E-4	-8.8E1	4.76837E-5	5.91278E-3	9.29594E-2	2.73237E1	-3.26903E1	-3.26008E1	2.68105E1	1.16727E-7	2.5188E-3	2.5188E-3	6.29645E-3	1.9963E-1
1.7E1	1.644E3	0.0E0	6.87E2	4.7E2	-7.26282E-2	-8.80013E1	-5.96046E-4	-8.80002E1	7.15256E-5	6.00815E-3	9.29594E-2	2.7278E1	-3.26531E1	-3.26006E1	2.6807E1	1.16981E-7	2.52647E-3	2.52647E-3	6.31288E-3	2.00151E-1
1.8E1	7.026E3	0.0E0	7.27E2	5.0E2	-7.26282E-2	-8.80014E1	-6.4373E-4	-8.80002E1	-2.38419E-5	6.22272E-3	9.30309E-2	2.73255E1	-3.26567E1	-3.26398E1	2.68142E1	1.17032E-7	2.51771E-3	2.51771E-3	6.31288E-3	2.00325E-1
1.9E1	2.559E3	0.0E0	7.68E2	5.29E2	-7.3401E-2	-8.80012E1	-1.43051E-4	-8.80002E1	1.43051E-4	6.03199E-3	9.30071E-2	2.73092E1	-3.26661E1	-3.26307E1	2.68028E1	1.16674E-7	2.51739E-3	2.51739E-3	6.31278E-3	2.00705E-1
2.0E1	3.0357E4	8.0E0	8.08E2	5.58E2	-7.32464E-2	-8.80013E1	-1.43051E-4	-8.80004E1	2.38419E-4	5.96046E-3	9.27687E-2	2.73369E1	-3.26867E1	-3.26368E1	2.68208E1	1.16923E-7	2.52169E-3	2.52169E-3	6.32356E-3	2.00021E-1
2.1E1	6.2E1	0.0E0	8.49E2	5.88E2	-7.30918E-2	-8.80013E1	2.38419E-4	-8.80003E1	9.53674E-5	5.81741E-3	9.28879E-2	2.73009E1	-3.2647E1	-3.25996E1	2.68082E1	1.1693E-7	2.51771E-3	2.51771E-3	6.30192E-3	2.00151E-1
2.2E1	2.173E3	1.0E0	8.89E2	6.17E2	-7.26282E-2	-8.80013E1	-3.57628E-4	-8.80004E1	1.90735E-4	6.03199E-3	9.26495E-2	2.7308E1	-3.26997E1	-3.26767E1	2.67878E1	1.1693E-7	2.52647E-3	2.52647E-3	6.34588E-3	1.99283E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.32464E-2	-8.80012E1	-2.6226E-4	-8.80003E1	0.0E0	5.98431E-3	9.27925E-2	2.73193E1	-3.26614E1	-3.26461E1	2.68304E1	1.16774E-7	2.52061E-3	2.52061E-3	6.31817E-3	1.9951E-1