[Scan]
initial_time=2015-12-15T17:59:15
final_time=2015-12-15T17:59:35
ip_count=19
run=1017
dataset=2
scan=75
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=27.0
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.30918E-2
qbias_imon=-3.88262E-6
ql1_vset=
ql1_vmon=-8.80012E1
ql1_imon=-9.2206E-10
ql2_vset=
ql2_vmon=-6.19888E-4
ql2_imon=1.50614E-9
ql3_vset=
ql3_vmon=-8.79998E1
ql3_imon=-2.72346E-9
ql4_vset=
ql4_vmon=-2.86102E-4
ql4_imon=1.58908E-8
mult1=-2.06853E-8
mult2=-2.69067E-9
rf_tmon=-4.68066E-3
rf_agc=3.3628E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=6.34193E-3
ql5_imon=6.10602E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64253E0
bslens_imon=2.24614E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.1995E1
lens5a_imon=2.00061E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12532E2
lens4a_imon=2.05003E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53771E1
cs_ef1b_imon=2.85184E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04598E2
lens23_imon=1.02302E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05162E1
cs_ea1_imon=2.52586E-5
lens1_vset=-2.7E0
lens1_vmon=-2.98035E0
lens1_imon=1.39447E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64776E1
os_ef1alow_imon=2.96451E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03534E1
cs_ea2_imon=1.52923E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84499E1
cs_ef1a_imon=2.93651E-5
olens2_vset=9.7E-1
olens2_vmon=9.70316E-1
olens2_imon=1.24522E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1134E1
os_restr1_imon=4.30427E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15323E1
os_ea1_imon=2.35066E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63843E1
os_ef1bup_imon=3.07513E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25673E0
cs_ionrep_imon=1.20768E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91878E2
cs_nozzle_imon=1.93253E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01895E1
cs_anode1_imon=2.96895E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20556E0
olens4_imon=3.92737E-8
tplens_vset=1.4E-1
tplens_vmon=1.56148E0
tplens_imon=-4.61826E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2617E1
iondef3_imon=1.51011E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26536E1
iondef2_imon=1.57999E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02984E2
lens6_imon=2.98377E-4
ql6_vset=1.0E-1
ql6_vmon=9.29117E-2
ql6_imon=1.03092E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26137E0
ionrepsh_imon=1.77987E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33762E1
lens5b_imon=2.15565E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74518E1
cs_ef2b_imon=3.11474E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.30482E0
os_ea2_imon=-6.21732E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06109E2
lens4b_imon=2.00602E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71207E1
cs_ef2a_imon=3.16971E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07305E0
os_ef2alow_imon=-2.68475E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.85474E-1
os_ef2bup_imon=-5.45715E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10901E1
os_restr2_imon=3.42066E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23081E2
cs_ionfoca_imon=6.29372E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01974E1
cs_anode2_imon=2.24751E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73021E1
iondef1_imon=1.10792E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68274E1
iondef4_imon=1.08461E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=4.48957E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82237E-1
olens1_imon=7.30176E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.17396E0
cs_ionaccel_imon=-1.91313E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0208E2
cs_ionfocb_imon=1.47151E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56223E1
einzel_imon=7.63321E-6
window_vset=0.0E0
window_vmon=2.57966E-1
window_imon=-1.00834E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82618E2
mask1_imon=2.39101E-4
mask2_vset=0.0E0
mask2_vmon=-1.8602E1
mask2_imon=-6.3277E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92658E3
multa_neg_imon=7.13716E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93716E3
defgrida_imon=6.50101E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50165E3
multb_neg_imon=6.73044E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.3543E0
defgridb_imon=6.16382E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33345E1
os_fil1_imon=9.39205E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06863E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.637E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3088E1
cs_fil1_imon=9.94767E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62588E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65788E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.30725E-2
os_fil2_imon=-2.69347E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.9841E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.60362E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36459E-1
cs_fil2_imon=-2.36911E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.97216E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22168E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=2.01047E-1
chamber_ion_pmon=1.16823E-7
chamber_cvt_pmon=2.52169E-3
foreline_cvt_pmon=2.52169E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.24169E-1
res40_imon=-2.56184E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=161
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.434E3	2.0E0	1.47E2	4.1E1	-7.37103E-2	-8.80013E1	-6.4373E-4	-8.80004E1	1.90735E-4	5.91278E-3	9.32455E-2	2.73153E1	-3.26254E1	-3.26248E1	2.68112E1	1.16818E-7	2.51603E-3	2.51603E-3	6.31269E-3	2.01072E-1
2.0E0	1.18833E5	1.1E2	3.16E2	1.6E2	-7.30918E-2	-8.80012E1	-6.67572E-4	-8.8E1	1.66893E-4	6.19888E-3	9.30071E-2	2.73015E1	-3.26386E1	-3.26224E1	2.67956E1	1.1688E-7	2.52318E-3	2.52318E-3	6.31837E-3	2.00673E-1
3.0E0	1.7E1	0.0E0	4.85E2	2.79E2	-7.286E-2	-8.80015E1	-2.86102E-4	-8.8E1	1.43051E-4	6.03199E-3	9.34362E-2	2.7297E1	-3.26909E1	-3.26388E1	2.6803E1	1.16778E-7	2.51662E-3	2.51662E-3	6.34037E-3	2.00151E-1
4.0E0	2.2754E4	1.2E1	6.55E2	3.98E2	-7.37103E-2	-8.80013E1	-3.57628E-4	-8.8E1	7.15256E-5	6.07967E-3	9.31025E-2	2.73104E1	-3.26738E1	-3.2652E1	2.68148E1	1.16867E-7	2.51814E-3	2.51814E-3	6.32328E-3	1.98894E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.40192E-2	-8.80013E1	-5.00679E-4	-8.79999E1	-1.43051E-4	6.10352E-3	9.31501E-2	2.72849E1	-3.26548E1	-3.26487E1	2.6798E1	1.1688E-7	2.51771E-3	2.51771E-3	6.32386E-3	1.9911E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.34782E-2	-8.80014E1	-4.29153E-4	-8.80001E1	4.29153E-4	6.05583E-3	9.25541E-2	2.73009E1	-3.26711E1	-3.26188E1	2.68286E1	1.16626E-7	2.51771E-3	2.51771E-3	6.29098E-3	1.99803E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.29374E-2	-8.80013E1	-1.43051E-4	-8.8E1	2.38419E-4	5.91278E-3	9.27925E-2	2.72691E1	-3.26331E1	-3.26071E1	2.6798E1	1.16778E-7	2.5188E-3	2.5188E-3	6.3074E-3	1.99977E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.40192E-2	-8.80012E1	-3.8147E-4	-8.8E1	2.86102E-4	5.84126E-3	9.32455E-2	2.73069E1	-3.26561E1	-3.26062E1	2.6822E1	1.16823E-7	2.52707E-3	2.52707E-3	6.33977E-3	2.00876E-1
1.2E1	3.32E2	0.0E0	4.85E2	3.23E2	-7.33239E-2	-8.80013E1	-3.8147E-4	-8.80002E1	3.33786E-4	6.24657E-3	9.3174E-2	2.73458E1	-3.26437E1	-3.26142E1	2.68128E1	1.1688E-7	2.52099E-3	2.52099E-3	6.31837E-3	1.99977E-1
1.3E1	2.3E1	0.0E0	5.25E2	3.53E2	-7.36328E-2	-8.80013E1	-6.67572E-4	-8.80003E1	2.38419E-4	5.91278E-3	9.2864E-2	2.72985E1	-3.26615E1	-3.26104E1	2.6816E1	1.17073E-7	2.51417E-3	2.51417E-3	6.33977E-3	1.9951E-1
1.4E1	3.747E3	2.0E0	5.66E2	3.82E2	-7.286E-2	-8.80014E1	-6.91414E-4	-8.8E1	0.0E0	6.36578E-3	9.31025E-2	2.73249E1	-3.26861E1	-3.25912E1	2.68034E1	1.1688E-7	2.52977E-3	2.52977E-3	6.3514E-3	2.00499E-1
1.5E1	1.29E2	0.0E0	6.06E2	4.11E2	-7.34782E-2	-8.80014E1	-5.00679E-4	-8.79998E1	-2.86102E-4	6.17504E-3	9.27925E-2	2.73287E1	-3.26903E1	-3.2613E1	2.68106E1	1.1693E-7	2.51662E-3	2.51662E-3	6.32386E-3	1.9963E-1
1.6E1	1.257E3	0.0E0	6.47E2	4.41E2	-7.37874E-2	-8.80012E1	-1.43051E-4	-8.79999E1	-4.76837E-5	6.00815E-3	9.30548E-2	2.73087E1	-3.26693E1	-3.26362E1	2.68316E1	1.16923E-7	2.51632E-3	2.51632E-3	6.32356E-3	1.9985E-1
1.7E1	1.783E3	0.0E0	6.87E2	4.7E2	-7.26282E-2	-8.80012E1	-5.72205E-4	-8.79999E1	-2.14577E-4	6.07967E-3	9.26256E-2	2.73237E1	-3.26573E1	-3.26182E1	2.68157E1	1.16829E-7	2.52867E-3	2.52867E-3	6.33486E-3	2.00847E-1
1.8E1	7.174E3	2.0E0	7.27E2	5.0E2	-7.40192E-2	-8.80012E1	-3.33786E-4	-8.79998E1	-1.43051E-4	6.1512E-3	9.2864E-2	2.73009E1	-3.26687E1	-3.26621E1	2.68046E1	1.16626E-7	2.52099E-3	2.52099E-3	6.32936E-3	2.01197E-1
1.9E1	2.58E3	0.0E0	7.68E2	5.29E2	-7.44831E-2	-8.80012E1	-3.33786E-4	-8.79997E1	-3.09944E-4	6.00815E-3	9.27448E-2	2.73039E1	-3.26638E1	-3.26231E1	2.6828E1	1.16981E-7	2.51552E-3	2.51552E-3	6.34588E-3	2.00325E-1
2.0E1	3.0839E4	1.6E1	8.08E2	5.58E2	-7.40967E-2	-8.80011E1	-5.00679E-4	-8.80002E1	4.76837E-5	6.10352E-3	9.26495E-2	2.73219E1	-3.26609E1	-3.26416E1	2.6801E1	1.16873E-7	2.52384E-3	2.52384E-3	6.32356E-3	2.00192E-1
2.1E1	7.7E1	0.0E0	8.49E2	5.88E2	-7.37103E-2	-8.80011E1	-4.76837E-4	-8.80001E1	-2.6226E-4	5.96046E-3	9.29832E-2	2.73237E1	-3.26975E1	-3.2629E1	2.68214E1	1.1693E-7	2.5199E-3	2.5199E-3	6.31288E-3	1.99803E-1
2.2E1	2.141E3	0.0E0	8.89E2	6.17E2	-7.33239E-2	-8.80012E1	-4.76837E-4	-8.80003E1	9.53674E-5	6.00815E-3	9.30309E-2	2.73617E1	-3.2652E1	-3.2603E1	2.68076E1	1.16727E-7	2.5188E-3	2.5188E-3	6.30192E-3	1.99456E-1
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.30918E-2	-8.80012E1	-6.19888E-4	-8.79998E1	-2.86102E-4	6.34193E-3	9.29117E-2	2.73021E1	-3.26536E1	-3.2617E1	2.68274E1	1.16823E-7	2.52169E-3	2.52169E-3	6.31817E-3	2.01047E-1