[Scan]
initial_time=2015-12-15T18:00:08
final_time=2015-12-15T18:00:28
ip_count=19
run=1017
dataset=2
scan=77
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=27.0
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.17779E-2
qbias_imon=-3.88262E-6
ql1_vset=
ql1_vmon=-8.80014E1
ql1_imon=-8.48615E-10
ql2_vset=
ql2_vmon=-6.91414E-4
ql2_imon=1.4868E-9
ql3_vset=
ql3_vmon=-8.80002E1
ql3_imon=-2.55017E-9
ql4_vset=
ql4_vmon=-3.09944E-4
ql4_imon=1.58637E-8
mult1=-1.85429E-8
mult2=-2.67622E-9
rf_tmon=-4.13194E-3
rf_agc=3.36041E-2
counter1=4
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.96046E-3
ql5_imon=6.45626E-10
bslens_vset=-6.2E0
bslens_vmon=-6.67093E0
bslens_imon=2.6636E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19936E1
lens5a_imon=1.97625E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1253E2
lens4a_imon=2.0516E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53754E1
cs_ef1b_imon=2.8407E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04619E2
lens23_imon=1.01898E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04858E1
cs_ea1_imon=2.52273E-5
lens1_vset=-2.7E0
lens1_vmon=-3.01767E0
lens1_imon=1.6938E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6462E1
os_ef1alow_imon=2.97333E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0346E1
cs_ea2_imon=1.54515E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84472E1
cs_ef1a_imon=2.93657E-5
olens2_vset=9.7E-1
olens2_vmon=9.69982E-1
olens2_imon=1.2503E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11322E1
os_restr1_imon=4.31112E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15406E1
os_ea1_imon=2.37195E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63695E1
os_ef1bup_imon=3.06739E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23912E0
cs_ionrep_imon=1.20041E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91889E2
cs_nozzle_imon=1.93431E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01887E1
cs_anode1_imon=2.98018E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20585E0
olens4_imon=3.92884E-8
tplens_vset=1.4E-1
tplens_vmon=1.59896E0
tplens_imon=-4.36924E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26472E1
iondef3_imon=1.46799E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26372E1
iondef2_imon=1.57877E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02943E2
lens6_imon=2.98346E-4
ql6_vset=1.0E-1
ql6_vmon=9.29356E-2
ql6_imon=9.969E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28631E0
ionrepsh_imon=1.79291E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33764E1
lens5b_imon=2.17339E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74874E1
cs_ef2b_imon=3.11244E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.36064E0
os_ea2_imon=-7.34234E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06087E2
lens4b_imon=2.00481E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71126E1
cs_ef2a_imon=3.1802E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06237E0
os_ef2alow_imon=-2.74564E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.14843E-1
os_ef2bup_imon=-5.5243E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10943E1
os_restr2_imon=3.42599E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23056E2
cs_ionfoca_imon=6.30388E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01917E1
cs_anode2_imon=2.24605E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72927E1
iondef1_imon=1.08892E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68169E1
iondef4_imon=1.07873E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71788E1
olens3_imon=4.53858E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82428E-1
olens1_imon=7.2993E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10251E0
cs_ionaccel_imon=-1.92394E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0209E2
cs_ionfocb_imon=1.47194E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56231E1
einzel_imon=7.61576E-6
window_vset=0.0E0
window_vmon=1.48867E-1
window_imon=-1.12386E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82628E2
mask1_imon=2.39044E-4
mask2_vset=0.0E0
mask2_vmon=-1.86026E1
mask2_imon=-6.80569E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92634E3
multa_neg_imon=7.49135E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93706E3
defgrida_imon=6.44015E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50068E3
multb_neg_imon=7.59045E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.44394E0
defgridb_imon=6.14284E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33319E1
os_fil1_imon=9.41681E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.0662E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63765E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3088E1
cs_fil1_imon=9.94582E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6257E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66167E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.1926E-2
os_fil2_imon=-2.70801E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.99516E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.73798E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.37161E-1
cs_fil2_imon=-2.70201E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.2143E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22246E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3131E-3
inlet_lpb_pmon=1.98804E-1
chamber_ion_pmon=1.16841E-7
chamber_cvt_pmon=2.51498E-3
foreline_cvt_pmon=2.51498E-3
chamber_tmon=1.40035E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.31662E-1
res40_imon=-2.46453E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=164
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.525E3	0.0E0	1.47E2	4.1E1	-7.3401E-2	-8.80016E1	-2.6226E-4	-8.80002E1	0.0E0	6.17504E-3	9.29356E-2	2.72997E1	-3.26741E1	-3.26585E1	2.68163E1	1.16823E-7	2.52169E-3	2.52169E-3	6.31817E-3	1.9934E-1
2.0E0	1.17883E5	1.13E2	3.16E2	1.6E2	-7.35556E-2	-8.80016E1	-5.00679E-4	-8.80001E1	1.90735E-4	6.03199E-3	9.30071E-2	2.73381E1	-3.26675E1	-3.26164E1	2.67995E1	1.17083E-7	2.51334E-3	2.51334E-3	6.33486E-3	1.99283E-1
3.0E0	2.0E1	0.0E0	4.85E2	2.79E2	-7.40192E-2	-8.80015E1	-2.6226E-4	-8.79999E1	3.09944E-4	5.93662E-3	9.29117E-2	2.73115E1	-3.26868E1	-3.2604E1	2.6814E1	1.16829E-7	2.5199E-3	2.5199E-3	6.31288E-3	1.9911E-1
4.0E0	2.3114E4	1.6E1	6.55E2	3.98E2	-7.37874E-2	-8.80015E1	-6.19888E-4	-8.80001E1	3.57628E-4	6.19888E-3	9.2864E-2	2.72907E1	-3.26314E1	-3.26218E1	2.67926E1	1.16769E-7	2.51919E-3	2.51919E-3	6.32858E-3	2.00064E-1
5.0E0	0.0E0	1.0E0	8.24E2	5.17E2	-7.42513E-2	-8.80015E1	-3.57628E-4	-8.80002E1	3.57628E-4	6.48499E-3	9.29117E-2	2.73004E1	-3.26478E1	-3.25936E1	2.68208E1	1.16677E-7	2.52977E-3	2.52977E-3	6.29645E-3	2.00499E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.30918E-2	-8.80017E1	-3.33786E-4	-8.80001E1	2.86102E-4	6.27041E-3	9.29117E-2	2.73145E1	-3.26449E1	-3.26083E1	2.68148E1	1.16623E-7	2.52448E-3	2.52448E-3	6.3074E-3	1.99729E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.37103E-2	-8.80015E1	-5.72205E-4	-8.8E1	3.8147E-4	6.36578E-3	9.29832E-2	2.72848E1	-3.26776E1	-3.25912E1	2.6825E1	1.16778E-7	2.52647E-3	2.52647E-3	6.3074E-3	1.98592E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.38649E-2	-8.80018E1	-7.15256E-4	-8.80002E1	5.00679E-4	6.07967E-3	9.31978E-2	2.72907E1	-3.26687E1	-3.26218E1	2.68009E1	1.16867E-7	2.52131E-3	2.52131E-3	6.30212E-3	1.98063E-1
1.2E1	3.23E2	1.0E0	4.85E2	3.23E2	-7.37103E-2	-8.80018E1	-7.39098E-4	-8.79999E1	2.38419E-4	6.00815E-3	9.3174E-2	2.73004E1	-3.26756E1	-3.25983E1	2.68029E1	1.16829E-7	2.51334E-3	2.51334E-3	6.32936E-3	1.99803E-1
1.3E1	1.2E1	0.0E0	5.25E2	3.53E2	-7.44059E-2	-8.80019E1	-6.67572E-4	-8.80001E1	2.38419E-4	5.96046E-3	9.31025E-2	2.73187E1	-3.26703E1	-3.26189E1	2.68094E1	1.17023E-7	2.51739E-3	2.51739E-3	6.33436E-3	1.9985E-1
1.4E1	3.661E3	2.0E0	5.66E2	3.82E2	-7.36328E-2	-8.80021E1	-6.91414E-4	-8.80002E1	2.6226E-4	6.1512E-3	9.28402E-2	2.73181E1	-3.2682E1	-3.2613E1	2.68065E1	1.16724E-7	2.52492E-3	2.52492E-3	6.31817E-3	2.00192E-1
1.5E1	1.46E2	0.0E0	6.06E2	4.11E2	-7.44059E-2	-8.8002E1	-5.72205E-4	-8.79998E1	-2.38419E-5	6.46114E-3	9.29356E-2	2.73057E1	-3.26579E1	-3.26502E1	2.68273E1	1.17073E-7	2.52061E-3	2.52061E-3	6.33436E-3	2.01047E-1
1.6E1	1.25E3	0.0E0	6.47E2	4.41E2	-7.34782E-2	-8.80018E1	-2.14577E-4	-8.79999E1	3.33786E-4	6.03199E-3	9.2864E-2	2.73289E1	-3.26793E1	-3.26538E1	2.68004E1	1.16867E-7	2.52659E-3	2.52659E-3	6.32328E-3	2.00231E-1
1.7E1	1.623E3	0.0E0	6.87E2	4.7E2	-7.286E-2	-8.80017E1	-3.57628E-4	-8.8E1	-4.76837E-5	6.07967E-3	9.26971E-2	2.7301E1	-3.26366E1	-3.26697E1	2.68256E1	1.16823E-7	2.52438E-3	2.52438E-3	6.32087E-3	2.00876E-1
1.8E1	6.908E3	5.0E0	7.27E2	5.0E2	-7.37874E-2	-8.80017E1	-5.96046E-4	-8.80003E1	-1.66893E-4	6.00815E-3	9.27925E-2	2.73075E1	-3.26987E1	-3.26543E1	2.68232E1					
1.9E1	2.582E3	4.0E0	7.68E2	5.29E2	-7.39421E-2	-8.80018E1	-5.00679E-4	-8.79998E1	-9.53674E-5	6.19888E-3	9.30548E-2	2.73129E1	-3.26302E1	-3.26639E1	2.68034E1	1.1688E-7	2.51771E-3	2.51771E-3	6.31288E-3	2.02248E-1
2.0E1	3.0469E4	1.4E1	8.08E2	5.58E2	-7.36328E-2	-8.80019E1	-4.29153E-4	-8.80001E1	-2.14577E-4	6.07967E-3	9.28879E-2	2.73322E1	-3.26608E1	-3.26638E1	2.6825E1	1.16981E-7	2.52538E-3	2.52538E-3	6.29645E-3	1.98937E-1
2.1E1	5.8E1	0.0E0	8.49E2	5.88E2	-7.31692E-2	-8.80016E1	-7.39098E-4	-8.80002E1	-2.14577E-4	5.93662E-3	9.29832E-2	2.73509E1	-3.27077E1	-3.25941E1	2.68149E1	1.16973E-7	2.52061E-3	2.52061E-3	6.31817E-3	1.9883E-1
2.2E1	2.204E3	2.0E0	8.89E2	6.17E2	-7.27053E-2	-8.80016E1	-6.19888E-4	-8.80001E1	-1.19209E-4	5.6982E-3	9.29117E-2	2.73271E1	-3.26652E1	-3.26015E1	2.68263E1	1.16957E-7	2.52093E-3	2.52093E-3	6.3074E-3	1.99447E-1
2.3E1	4.0E0	0.0E0	9.3E2	6.47E2	-7.17779E-2	-8.80014E1	-6.91414E-4	-8.80002E1	-3.09944E-4	5.96046E-3	9.29356E-2	2.72927E1	-3.26372E1	-3.26472E1	2.68169E1	1.16841E-7	2.51498E-3	2.51498E-3	6.3131E-3	1.98804E-1