[Scan]
initial_time=2015-12-15T18:00:35
final_time=2015-12-15T18:00:55
ip_count=19
run=1017
dataset=2
scan=78
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=27.0
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.24736E-2
qbias_imon=-3.82854E-6
ql1_vset=
ql1_vmon=-8.80018E1
ql1_imon=-8.82208E-10
ql2_vset=
ql2_vmon=-2.14577E-4
ql2_imon=1.47113E-9
ql3_vset=
ql3_vmon=-8.8E1
ql3_imon=-2.5357E-9
ql4_vset=
ql4_vmon=4.76837E-5
ql4_imon=1.58641E-8
mult1=-2.2094E-8
mult2=-2.70663E-9
rf_tmon=-4.60255E-3
rf_agc=3.34357E-2
counter1=3
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=6.03199E-3
ql5_imon=6.4944E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65324E0
bslens_imon=2.5468E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20078E1
lens5a_imon=1.98227E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1249E2
lens4a_imon=2.04962E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53718E1
cs_ef1b_imon=2.84179E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04631E2
lens23_imon=1.02025E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04894E1
cs_ea1_imon=2.53335E-5
lens1_vset=-2.7E0
lens1_vmon=-3.02829E0
lens1_imon=1.34694E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64644E1
os_ef1alow_imon=2.96756E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0382E1
cs_ea2_imon=1.55789E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84388E1
cs_ef1a_imon=2.94089E-5
olens2_vset=9.7E-1
olens2_vmon=9.69815E-1
olens2_imon=1.23923E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11201E1
os_restr1_imon=4.31076E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15412E1
os_ea1_imon=2.37266E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63779E1
os_ef1bup_imon=3.07496E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26449E0
cs_ionrep_imon=1.19439E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91897E2
cs_nozzle_imon=1.93353E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01929E1
cs_anode1_imon=2.97982E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20585E0
olens4_imon=3.92304E-8
tplens_vset=1.4E-1
tplens_vmon=1.58126E0
tplens_imon=-4.22766E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26266E1
iondef3_imon=1.47188E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26452E1
iondef2_imon=1.59187E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02969E2
lens6_imon=2.98448E-4
ql6_vset=1.0E-1
ql6_vmon=9.29594E-2
ql6_imon=9.9324E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2639E0
ionrepsh_imon=1.77238E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34059E1
lens5b_imon=2.18012E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74808E1
cs_ef2b_imon=3.11533E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.32407E0
os_ea2_imon=-7.30695E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06103E2
lens4b_imon=2.00407E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71192E1
cs_ef2a_imon=3.18164E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07138E0
os_ef2alow_imon=-2.63392E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.99827E-1
os_ef2bup_imon=-5.35131E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10919E1
os_restr2_imon=3.41265E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23061E2
cs_ionfoca_imon=6.27946E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01755E1
cs_anode2_imon=2.24785E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73075E1
iondef1_imon=1.0875E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6816E1
iondef4_imon=1.07873E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71793E1
olens3_imon=4.5329E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82404E-1
olens1_imon=7.27449E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13975E0
cs_ionaccel_imon=-1.92754E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0206E2
cs_ionfocb_imon=1.47237E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56681E1
einzel_imon=7.51485E-6
window_vset=0.0E0
window_vmon=3.00834E-1
window_imon=-8.93203E-7
mask1_vset=-4.8E2
mask1_vmon=-4.826E2
mask1_imon=2.38994E-4
mask2_vset=0.0E0
mask2_vmon=-1.86188E1
mask2_imon=-7.09401E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92628E3
multa_neg_imon=7.29668E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93706E3
defgrida_imon=6.30565E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50132E3
multb_neg_imon=7.056E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.52367E0
defgridb_imon=6.13576E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33313E1
os_fil1_imon=9.40528E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06735E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63431E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30873E1
cs_fil1_imon=9.93224E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62594E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65735E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.2939E-2
os_fil2_imon=-2.7861E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.89906E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.78354E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.37032E-1
cs_fil2_imon=-2.68399E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.14222E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22185E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=2.00705E-1
chamber_ion_pmon=1.16973E-7
chamber_cvt_pmon=2.52169E-3
foreline_cvt_pmon=2.52169E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.15754E-1
res40_imon=-2.56184E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=183
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.413E3	0.0E0	1.47E2	4.1E1	-7.27828E-2	-8.80015E1	-7.86781E-4	-8.79999E1	-7.15256E-5	5.96046E-3	9.29117E-2	2.72958E1	-3.26608E1	-3.26104E1	2.68151E1	1.1693E-7	2.52647E-3	2.52647E-3	6.31288E-3	2.00673E-1
2.0E0	1.18856E5	1.14E2	3.16E2	1.6E2	-7.30146E-2	-8.80018E1	-1.00136E-3	-8.80002E1	0.0E0	6.03199E-3	9.2721E-2	2.73092E1	-3.26602E1	-3.259E1	2.68146E1	1.16916E-7	2.51919E-3	2.51919E-3	6.33388E-3	2.00399E-1
3.0E0	1.3E1	0.0E0	4.85E2	2.79E2	-7.32464E-2	-8.80017E1	-8.82149E-4	-8.79997E1	-7.15256E-5	6.19888E-3	9.29356E-2	2.73174E1	-3.26646E1	-3.2626E1	2.68121E1	1.16823E-7	2.51632E-3	2.51632E-3	6.32356E-3	2.00021E-1
4.0E0	2.2763E4	1.2E1	6.55E2	3.98E2	-7.30146E-2	-8.80016E1	-5.96046E-4	-8.80002E1	-1.19209E-4	6.19888E-3	9.30309E-2	2.73007E1	-3.2679E1	-3.2621E1	2.68032E1	1.17044E-7	2.52568E-3	2.52568E-3	6.32784E-3	1.99983E-1
5.0E0	0.0E0	1.0E0	8.24E2	5.17E2	-7.30146E-2	-8.80017E1	-6.4373E-4	-8.80001E1	-7.15256E-5	6.24657E-3	9.32455E-2	2.73358E1	-3.26844E1	-3.26396E1	2.6837E1	1.1663E-7	2.51952E-3	2.51952E-3	6.31879E-3	1.99523E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.31692E-2	-8.80014E1	-3.33786E-4	-8.80001E1	2.6226E-4	6.17504E-3	9.30548E-2	2.73147E1	-3.26747E1	-3.25954E1	2.68046E1	1.16873E-7	2.52492E-3	2.52492E-3	6.31278E-3	1.97815E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.30146E-2	-8.80014E1	-6.4373E-4	-8.8E1	-4.76837E-5	5.76973E-3	9.30548E-2	2.73183E1	-3.26633E1	-3.25894E1	2.67908E1	1.1693E-7	2.52099E-3	2.52099E-3	6.29645E-3	1.98764E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.20871E-2	-8.80014E1	-5.96046E-4	-8.80003E1	2.38419E-5	6.22272E-3	9.32217E-2	2.72817E1	-3.26633E1	-3.26302E1	2.68395E1	1.1688E-7	2.51443E-3	2.51443E-3	6.33486E-3	1.9963E-1
1.2E1	3.09E2	0.0E0	4.85E2	3.23E2	-7.15461E-2	-8.80012E1	-6.91414E-4	-8.79999E1	-1.90735E-4	5.84126E-3	9.29594E-2	2.72787E1	-3.26777E1	-3.25942E1	2.68208E1	1.17173E-7	2.52276E-3	2.52276E-3	6.31817E-3	1.9985E-1
1.3E1	1.5E1	0.0E0	5.25E2	3.53E2	-7.17779E-2	-8.80017E1	-6.67572E-4	-8.80001E1	0.0E0	5.96046E-3	9.31025E-2	2.73051E1	-3.26697E1	-3.26455E1	2.68124E1	1.16938E-7	2.52139E-3	2.52139E-3	6.31858E-3	1.99931E-1
1.4E1	3.608E3	1.0E0	5.66E2	3.82E2	-7.26282E-2	-8.80017E1	-8.10623E-4	-8.80001E1	1.19209E-4	5.79357E-3	9.28879E-2	2.73201E1	-3.26999E1	-3.26272E1	2.68238E1	1.16823E-7	2.51847E-3	2.51847E-3	6.32896E-3	2.00705E-1
1.5E1	1.45E2	0.0E0	6.06E2	4.11E2	-7.23964E-2	-8.80015E1	-5.96046E-4	-8.79998E1	-1.66893E-4	5.96046E-3	9.29594E-2	2.73033E1	-3.26434E1	-3.26188E1	2.6801E1	1.16778E-7	2.5188E-3	2.5188E-3	6.33486E-3	1.99977E-1
1.6E1	1.204E3	0.0E0	6.47E2	4.41E2	-7.29374E-2	-8.80016E1	-6.67572E-4	-8.80002E1	-1.90735E-4	6.00815E-3	9.29356E-2	2.73169E1	-3.2672E1	-3.26242E1	2.67974E1	1.16677E-7	2.52428E-3	2.52428E-3	6.31288E-3	2.00673E-1
1.7E1	1.715E3	2.0E0	6.87E2	4.7E2	-7.15461E-2	-8.80018E1	-9.53674E-4	-8.80003E1	2.38419E-5	5.6982E-3	9.3174E-2	2.72775E1	-3.26711E1	-3.2632E1	2.68196E1	1.16823E-7	2.51739E-3	2.51739E-3	6.31817E-3	2.00876E-1
1.8E1	7.146E3	1.1E1	7.27E2	5.0E2	-7.26282E-2	-8.80016E1	-5.24521E-4	-8.80001E1	-2.86102E-4	6.05583E-3	9.33886E-2	2.72971E1	-3.26389E1	-3.26199E1	2.6804E1	1.17134E-7	2.52428E-3	2.52428E-3	6.31288E-3	1.99803E-1
1.9E1	2.603E3	1.0E0	7.68E2	5.29E2	-7.32464E-2	-8.80018E1	-6.91414E-4	-8.79999E1	-3.09944E-4	5.98431E-3	9.31501E-2	2.73175E1	-3.26744E1	-3.26083E1	2.68088E1	1.16981E-7	2.52099E-3	2.52099E-3	6.34037E-3	2.00673E-1
2.0E1	3.1043E4	9.0E0	8.08E2	5.58E2	-7.25507E-2	-8.8002E1	-8.58307E-4	-8.79998E1	-1.19209E-4	5.81741E-3	9.27687E-2	2.73508E1	-3.26831E1	-3.2632E1	2.68154E1	1.16626E-7	2.52428E-3	2.52428E-3	6.32936E-3	1.99803E-1
2.1E1	6.0E1	0.0E0	8.49E2	5.88E2	-7.29374E-2	-8.80018E1	-8.10623E-4	-8.80002E1	-2.14577E-4	6.12736E-3	9.31978E-2	2.7324E1	-3.26614E1	-3.26378E1	2.68106E1	1.1693E-7	2.5199E-3	2.5199E-3	6.32936E-3	2.01547E-1
2.2E1	2.234E3	4.0E0	8.89E2	6.17E2	-7.36328E-2	-8.8002E1	-5.72205E-4	-8.80002E1	-1.19209E-4	5.98431E-3	9.28879E-2	2.72874E1	-3.26815E1	-3.26531E1	2.68128E1	1.16923E-7	2.52492E-3	2.52492E-3	6.32896E-3	2.00021E-1
2.3E1	3.0E0	0.0E0	9.3E2	6.47E2	-7.24736E-2	-8.80018E1	-2.14577E-4	-8.8E1	4.76837E-5	6.03199E-3	9.29594E-2	2.73075E1	-3.26452E1	-3.26266E1	2.6816E1	1.16973E-7	2.52169E-3	2.52169E-3	6.3074E-3	2.00705E-1