[Scan]
initial_time=2015-12-15T18:01:28
final_time=2015-12-15T18:01:48
ip_count=19
run=1017
dataset=2
scan=80
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=27.0
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.34782E-2
qbias_imon=-3.74058E-6
ql1_vset=
ql1_vmon=-8.80019E1
ql1_imon=-8.81267E-10
ql2_vset=
ql2_vmon=-3.8147E-4
ql2_imon=1.48709E-9
ql3_vset=
ql3_vmon=-8.80002E1
ql3_imon=-2.47912E-9
ql4_vset=
ql4_vmon=1.90735E-4
ql4_imon=1.58924E-8
mult1=-2.02341E-8
mult2=-2.69142E-9
rf_tmon=-4.90727E-3
rf_agc=3.38426E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=6.05583E-3
ql5_imon=6.33359E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64321E0
bslens_imon=2.60697E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19936E1
lens5a_imon=2.00209E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12494E2
lens4a_imon=2.05047E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53616E1
cs_ef1b_imon=2.85116E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0463E2
lens23_imon=1.02319E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05018E1
cs_ea1_imon=2.51459E-5
lens1_vset=-2.7E0
lens1_vmon=-3.01295E0
lens1_imon=1.28677E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64747E1
os_ef1alow_imon=2.96576E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03537E1
cs_ea2_imon=1.55789E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84376E1
cs_ef1a_imon=2.93441E-5
olens2_vset=9.7E-1
olens2_vmon=9.70078E-1
olens2_imon=1.23984E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11442E1
os_restr1_imon=4.29923E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15223E1
os_ea1_imon=2.37302E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63839E1
os_ef1bup_imon=3.07965E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24974E0
cs_ionrep_imon=1.1813E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91869E2
cs_nozzle_imon=1.93335E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02043E1
cs_anode1_imon=2.9636E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20587E0
olens4_imon=3.92421E-8
tplens_vset=1.4E-1
tplens_vmon=1.57477E0
tplens_imon=-4.68779E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26303E1
iondef3_imon=1.49453E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26572E1
iondef2_imon=1.57453E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02945E2
lens6_imon=2.98286E-4
ql6_vset=1.0E-1
ql6_vmon=9.31978E-2
ql6_imon=9.71937E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24738E0
ionrepsh_imon=1.78335E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33976E1
lens5b_imon=2.18366E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74856E1
cs_ef2b_imon=3.13154E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.33704E0
os_ea2_imon=-7.94404E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06125E2
lens4b_imon=2.00531E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7124E1
cs_ef2a_imon=3.17876E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05996E0
os_ef2alow_imon=-2.59788E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.96823E-1
os_ef2bup_imon=-5.39816E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10811E1
os_restr2_imon=3.40869E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23077E2
cs_ionfoca_imon=6.30034E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01857E1
cs_anode2_imon=2.24389E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73204E1
iondef1_imon=1.07865E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68214E1
iondef4_imon=1.08053E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71789E1
olens3_imon=4.48605E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82237E-1
olens1_imon=7.27054E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13735E0
cs_ionaccel_imon=-1.84465E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0206E2
cs_ionfocb_imon=1.47143E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56405E1
einzel_imon=7.6554E-6
window_vset=0.0E0
window_vmon=1.41059E-1
window_imon=-9.65283E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82614E2
mask1_imon=2.38998E-4
mask2_vset=0.0E0
mask2_vmon=-1.8617E1
mask2_imon=-5.65243E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92606E3
multa_neg_imon=7.15511E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9369E3
defgrida_imon=6.50032E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50104E3
multb_neg_imon=6.9392E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.40851E0
defgridb_imon=6.24548E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33322E1
os_fil1_imon=9.42216E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06975E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63651E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30867E1
cs_fil1_imon=9.96161E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62768E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65805E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.20526E-2
os_fil2_imon=-2.73805E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.82698E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.68103E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35219E-1
cs_fil2_imon=-2.43772E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.0341E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22217E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32858E-3
inlet_lpb_pmon=1.99061E-1
chamber_ion_pmon=1.16769E-7
chamber_cvt_pmon=2.51182E-3
foreline_cvt_pmon=2.51182E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.4848E-1
res40_imon=-2.55824E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=204
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.484E3	0.0E0	1.47E2	4.1E1	-7.22418E-2	-8.80016E1	-7.62939E-4	-8.79998E1	1.19209E-4	5.93662E-3	9.26733E-2	2.72769E1	-3.26861E1	-3.26615E1	2.68273E1	1.17023E-7	2.51096E-3	2.51096E-3	6.32356E-3	1.9951E-1
2.0E0	1.18547E5	9.9E1	3.16E2	1.6E2	-7.12368E-2	-8.80015E1	-3.09944E-4	-8.80001E1	5.00679E-4	6.19888E-3	9.30071E-2	2.73254E1	-3.27036E1	-3.26457E1	2.68076E1	1.16823E-7	2.51739E-3	2.51739E-3	6.31817E-3	1.9917E-1
3.0E0	2.9E1	0.0E0	4.85E2	2.79E2	-7.23964E-2	-8.80016E1	-5.96046E-4	-8.80003E1	3.57628E-4	5.67436E-3	9.30548E-2	2.73236E1	-3.27019E1	-3.26243E1	2.68226E1	1.16867E-7	2.52553E-3	2.52553E-3	6.30212E-3	2.01747E-1
4.0E0	2.2823E4	1.1E1	6.55E2	3.98E2	-7.35556E-2	-8.80015E1	-4.29153E-4	-8.80003E1	3.8147E-4	5.81741E-3	9.29117E-2	2.73334E1	-3.26815E1	-3.26296E1	2.68134E1	1.16973E-7	2.52492E-3	2.52492E-3	6.29665E-3	1.9934E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.30918E-2	-8.80016E1	-4.76837E-4	-8.80002E1	5.00679E-4	5.98431E-3	9.29356E-2	2.73104E1	-3.26526E1	-3.26431E1	2.68076E1	1.16724E-7	2.51847E-3	2.51847E-3	6.3074E-3	1.9917E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.32464E-2	-8.80017E1	-4.05312E-4	-8.8E1	2.14577E-4	5.84126E-3	9.29356E-2	2.73387E1	-3.26492E1	-3.26318E1	2.68094E1	1.16823E-7	2.51847E-3	2.51847E-3	6.30202E-3	1.97984E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.37103E-2	-8.80022E1	-5.48363E-4	-8.80001E1	7.15256E-5	6.10352E-3	9.30786E-2	2.72843E1	-3.2675E1	-3.26181E1	2.6804E1	1.16818E-7	2.53083E-3	2.53083E-3	6.32858E-3	1.98229E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.37103E-2	-8.80019E1	-5.00679E-4	-8.80002E1	7.15256E-5	6.27041E-3	9.3174E-2	2.72769E1	-3.26861E1	-3.26134E1	2.68214E1	1.17032E-7	2.51771E-3	2.51771E-3	6.31837E-3	2.00325E-1
1.2E1	3.04E2	0.0E0	4.85E2	3.23E2	-7.37874E-2	-8.80017E1	-5.00679E-4	-8.80002E1	-2.38419E-5	6.10352E-3	9.30071E-2	2.72992E1	-3.26124E1	-3.26626E1	2.68232E1	1.1688E-7	2.5188E-3	2.5188E-3	6.32386E-3	2.00325E-1
1.3E1	2.0E1	0.0E0	5.25E2	3.53E2	-7.32464E-2	-8.80016E1	-5.96046E-4	-8.80002E1	1.19209E-4	5.98431E-3	9.30071E-2	2.73265E1	-3.26505E1	-3.25893E1	2.68034E1	1.16677E-7	2.52099E-3	2.52099E-3	6.33486E-3	2.00499E-1
1.4E1	3.666E3	2.0E0	5.66E2	3.82E2	-7.38649E-2	-8.80019E1	-6.4373E-4	-8.80004E1	7.15256E-5	6.24657E-3	9.31501E-2	2.72721E1	-3.27215E1	-3.26272E1	2.6804E1	1.16886E-7	2.52139E-3	2.52139E-3	6.32418E-3	1.97119E-1
1.5E1	1.58E2	0.0E0	6.06E2	4.11E2	-7.35556E-2	-8.80017E1	-8.34465E-4	-8.80002E1	-9.53674E-5	6.1512E-3	9.30309E-2	2.73393E1	-3.26807E1	-3.2638E1	2.68268E1	1.16724E-7	2.52061E-3	2.52061E-3	6.31278E-3	1.97478E-1
1.6E1	1.253E3	0.0E0	6.47E2	4.41E2	-7.40967E-2	-8.8002E1	-6.91414E-4	-8.8E1	-7.15256E-5	6.19888E-3	9.31501E-2	2.73183E1	-3.26627E1	-3.26392E1	2.68202E1	1.17083E-7	2.5188E-3	2.5188E-3	6.32386E-3	1.96874E-1
1.7E1	1.66E3	3.0E0	6.87E2	4.7E2	-7.31692E-2	-8.80018E1	-7.86781E-4	-8.8E1	-1.19209E-4	5.84126E-3	9.32217E-2	2.73193E1	-3.2649E1	-3.26384E1	2.6819E1	1.1693E-7	2.52318E-3	2.52318E-3	6.29645E-3	1.98937E-1
1.8E1	6.998E3	4.0E0	7.27E2	5.0E2	-7.37874E-2	-8.80019E1	-5.96046E-4	-8.80003E1	2.38419E-4	5.79357E-3	9.31025E-2	2.73225E1	-3.26597E1	-3.26609E1	2.67897E1	1.16778E-7	2.52099E-3	2.52099E-3	6.33486E-3	2.00499E-1
1.9E1	2.612E3	0.0E0	7.68E2	5.29E2	-7.26282E-2	-8.80018E1	-5.00679E-4	-8.80003E1	3.33786E-4	5.74589E-3	9.29832E-2	2.73081E1	-3.26627E1	-3.265E1	2.6819E1	1.16774E-7	2.52384E-3	2.52384E-3	6.28592E-3	2.01047E-1
2.0E1	3.0144E4	2.2E1	8.08E2	5.58E2	-7.30918E-2	-8.80019E1	-1.43051E-4	-8.8E1	1.66893E-4	6.17504E-3	9.32932E-2	2.73033E1	-3.26502E1	-3.26455E1	2.68022E1	1.1693E-7	2.52318E-3	2.52318E-3	6.32936E-3	1.98247E-1
2.1E1	6.6E1	0.0E0	8.49E2	5.88E2	-7.27828E-2	-8.8002E1	-4.05312E-4	-8.80005E1	4.05312E-4	6.1512E-3	9.32932E-2	2.73196E1	-3.26498E1	-3.26324E1	2.67984E1	1.16981E-7	2.5199E-3	2.5199E-3	6.29098E-3	1.98592E-1
2.2E1	2.285E3	0.0E0	8.89E2	6.17E2	-7.31692E-2	-8.8002E1	-7.15256E-5	-8.80001E1	3.57628E-4	6.36578E-3	9.31263E-2	2.72906E1	-3.26666E1	-3.26411E1	2.68128E1	1.17014E-7	2.52131E-3	2.52131E-3	6.32328E-3	1.97897E-1
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.34782E-2	-8.80019E1	-3.8147E-4	-8.80002E1	1.90735E-4	6.05583E-3	9.31978E-2	2.73204E1	-3.26572E1	-3.26303E1	2.68214E1	1.16769E-7	2.51182E-3	2.51182E-3	6.32858E-3	1.99061E-1