[Scan]
initial_time=2015-12-15T18:02:22
final_time=2015-12-15T18:02:41
ip_count=19
run=1017
dataset=2
scan=82
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=27.0
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.286E-2
qbias_imon=-3.81707E-6
ql1_vset=
ql1_vmon=-8.80021E1
ql1_imon=-8.90172E-10
ql2_vset=
ql2_vmon=-8.82149E-4
ql2_imon=1.52529E-9
ql3_vset=
ql3_vmon=-8.79999E1
ql3_imon=-2.51375E-9
ql4_vset=
ql4_vmon=2.38419E-5
ql4_imon=1.58564E-8
mult1=-1.67239E-8
mult2=-2.71063E-9
rf_tmon=-4.45835E-3
rf_agc=3.32074E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.91278E-3
ql5_imon=6.2083E-10
bslens_vset=-6.2E0
bslens_vmon=-6.67329E0
bslens_imon=2.61051E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.1999E1
lens5a_imon=1.96988E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1248E2
lens4a_imon=2.04987E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53778E1
cs_ef1b_imon=2.83314E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0462E2
lens23_imon=1.02071E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05118E1
cs_ea1_imon=2.52556E-5
lens1_vset=-2.7E0
lens1_vmon=-2.98169E0
lens1_imon=1.36464E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64488E1
os_ef1alow_imon=2.97117E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03743E1
cs_ea2_imon=1.52781E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84304E1
cs_ef1a_imon=2.94378E-5
olens2_vset=9.7E-1
olens2_vmon=9.70149E-1
olens2_imon=1.23705E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11159E1
os_restr1_imon=4.32374E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15217E1
os_ea1_imon=2.35036E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63653E1
os_ef1bup_imon=3.06956E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25269E0
cs_ionrep_imon=1.19616E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91884E2
cs_nozzle_imon=1.93275E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02067E1
cs_anode1_imon=2.96612E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20556E0
olens4_imon=3.91666E-8
tplens_vset=1.4E-1
tplens_vmon=1.56829E0
tplens_imon=-3.80294E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26314E1
iondef3_imon=1.49524E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26741E1
iondef2_imon=1.58196E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02946E2
lens6_imon=2.98388E-4
ql6_vset=1.0E-1
ql6_vmon=9.32932E-2
ql6_imon=9.8784E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2987E0
ionrepsh_imon=1.75857E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33634E1
lens5b_imon=2.16348E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7473E1
cs_ef2b_imon=3.11172E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.34648E0
os_ea2_imon=-6.4221E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06076E2
lens4b_imon=2.0046E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71462E1
cs_ef2a_imon=3.17804E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04435E0
os_ef2alow_imon=-2.67356E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.92619E-1
os_ef2bup_imon=-5.39816E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11099E1
os_restr2_imon=3.40905E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23095E2
cs_ionfoca_imon=6.3007E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01731E1
cs_anode2_imon=2.26443E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73303E1
iondef1_imon=1.09387E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68134E1
iondef4_imon=1.08305E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=4.47836E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82761E-1
olens1_imon=7.26142E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12293E0
cs_ionaccel_imon=-1.978E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02068E2
cs_ionfocb_imon=1.47028E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56507E1
einzel_imon=7.66982E-6
window_vset=0.0E0
window_vmon=2.96029E-1
window_imon=-7.67065E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82586E2
mask1_imon=2.3912E-4
mask2_vset=0.0E0
mask2_vmon=-1.86002E1
mask2_imon=-7.34629E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92662E3
multa_neg_imon=7.32146E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93707E3
defgrida_imon=6.63128E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50195E3
multb_neg_imon=6.9569E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.32583E0
defgridb_imon=5.91277E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33333E1
os_fil1_imon=9.41159E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07395E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63666E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30886E1
cs_fil1_imon=9.95404E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62732E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65851E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.36988E-2
os_fil2_imon=-2.68999E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.80295E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.76202E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35996E-1
cs_fil2_imon=-2.72003E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=5.89615E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2212E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=1.9985E-1
chamber_ion_pmon=1.16923E-7
chamber_cvt_pmon=2.51847E-3
foreline_cvt_pmon=2.51847E-3
chamber_tmon=1.40075E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.9353E-1
res40_imon=-2.56544E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=167
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.449E3	3.0E0	1.47E2	4.1E1	-7.41738E-2	-8.80021E1	-5.48363E-4	-8.8E1	9.53674E-5	5.84126E-3	9.26971E-2	2.72871E1	-3.26573E1	-3.26494E1	2.68088E1	1.16829E-7	2.5188E-3	2.5188E-3	6.31288E-3	1.98247E-1
2.0E0	1.18965E5	1.07E2	3.16E2	1.6E2	-7.44059E-2	-8.8002E1	-3.8147E-4	-8.79999E1	3.8147E-4	5.84126E-3	9.31501E-2	2.72955E1	-3.26939E1	-3.26398E1	2.68238E1	1.16829E-7	2.5188E-3	2.5188E-3	6.30192E-3	1.98937E-1
3.0E0	3.4E1	0.0E0	4.85E2	2.79E2	-7.37103E-2	-8.80023E1	-5.96046E-4	-8.79998E1	1.19209E-4	6.07967E-3	9.32217E-2	2.73015E1	-3.26236E1	-3.26182E1	2.67949E1	1.16829E-7	2.52209E-3	2.52209E-3	6.33486E-3	2.00673E-1
4.0E0	2.2749E4	1.1E1	6.55E2	3.98E2	-7.38649E-2	-8.80021E1	-7.86781E-4	-8.79997E1	9.53674E-5	5.98431E-3	9.31978E-2	2.73087E1	-3.26458E1	-3.2638E1	2.68094E1	1.16873E-7	2.51417E-3	2.51417E-3	6.30202E-3	2.00192E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.286E-2	-8.80018E1	-4.52995E-4	-8.8E1	-4.76837E-5	6.00815E-3	9.31025E-2	2.72909E1	-3.26514E1	-3.26402E1	2.68196E1	1.1688E-7	2.51771E-3	2.51771E-3	6.33486E-3	2.00847E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.27828E-2	-8.8002E1	-5.24521E-4	-8.8E1	1.43051E-4	6.00815E-3	9.27925E-2	2.73429E1	-3.26434E1	-3.2623E1	2.68106E1	1.16981E-7	2.51771E-3	2.51771E-3	6.28552E-3	2.00847E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.3401E-2	-8.80017E1	-5.96046E-4	-8.8E1	-2.38419E-5	5.98431E-3	9.29117E-2	2.72684E1	-3.26452E1	-3.26194E1	2.68142E1	1.17123E-7	2.51739E-3	2.51739E-3	6.32356E-3	2.00534E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.20871E-2	-8.80015E1	-6.67572E-4	-8.79999E1	7.15256E-5	5.76973E-3	9.29356E-2	2.73213E1	-3.26873E1	-3.26272E1	2.68268E1	1.16727E-7	2.52318E-3	2.52318E-3	6.32386E-3	1.98764E-1
1.2E1	3.41E2	0.0E0	4.85E2	3.23E2	-7.18554E-2	-8.80017E1	-1.43051E-4	-8.80002E1	-4.76837E-5	6.00815E-3	9.2864E-2	2.72715E1	-3.26738E1	-3.25983E1	2.68178E1	1.1688E-7	2.5188E-3	2.5188E-3	6.30192E-3	1.99716E-1
1.3E1	3.0E1	0.0E0	5.25E2	3.53E2	-7.37103E-2	-8.80017E1	-3.57628E-4	-8.80003E1	4.76837E-5	5.91278E-3	9.30071E-2	2.73269E1	-3.26897E1	-3.26166E1	2.68163E1					
1.4E1	3.693E3	1.0E0	5.66E2	3.82E2	-7.3401E-2	-8.80018E1	-5.00679E-4	-8.8E1	-2.38419E-5	5.98431E-3	9.31501E-2	2.73222E1	-3.26738E1	-3.26413E1	2.68058E1	1.16624E-7	2.52061E-3	2.52061E-3	6.32356E-3	2.01219E-1
1.5E1	1.57E2	0.0E0	6.06E2	4.11E2	-7.41738E-2	-8.80017E1	-4.52995E-4	-8.80002E1	-9.53674E-5	6.19888E-3	9.30309E-2	2.73321E1	-3.26458E1	-3.26374E1	2.68016E1	1.1693E-7	2.52209E-3	2.52209E-3	6.3074E-3	2.00847E-1
1.6E1	1.139E3	0.0E0	6.47E2	4.41E2	-7.41738E-2	-8.8002E1	-5.72205E-4	-8.8E1	1.19209E-4	5.91278E-3	9.29594E-2	2.72951E1	-3.26714E1	-3.26301E1	2.68232E1	1.16981E-7	2.52209E-3	2.52209E-3	6.3074E-3	2.00499E-1
1.7E1	1.592E3	0.0E0	6.87E2	4.7E2	-7.37103E-2	-8.80019E1	-7.39098E-4	-8.79998E1	-1.43051E-4	5.67436E-3	9.30786E-2	2.73466E1	-3.26621E1	-3.26567E1	2.6813E1	1.16727E-7	2.52209E-3	2.52209E-3	6.3074E-3	2.00151E-1
1.8E1	7.008E3	2.0E0	7.27E2	5.0E2	-7.286E-2	-8.80018E1	-4.05312E-4	-8.80002E1	0.0E0	6.1512E-3	9.30309E-2	2.73105E1	-3.26633E1	-3.26134E1	2.6804E1	1.17032E-7	2.52099E-3	2.52099E-3	6.31837E-3	2.00847E-1
1.9E1	2.611E3	1.0E0	7.68E2	5.29E2	-7.30146E-2	-8.80021E1	-3.57628E-4	-8.8E1	-1.66893E-4	6.00815E-3	9.29117E-2	2.72968E1	-3.26744E1	-3.26319E1	2.6822E1	1.16973E-7	2.51954E-3	2.51954E-3	6.32356E-3	2.00876E-1
2.0E1	3.0327E4	1.0E1	8.08E2	5.58E2	-7.27828E-2	-8.80019E1	-5.24521E-4	-8.80002E1	-2.14577E-4	6.17504E-3	9.29594E-2	2.73117E1	-3.26843E1	-3.26206E1	2.68128E1	1.17388E-7	2.52647E-3	2.52647E-3	6.28552E-3	2.01022E-1
2.1E1	7.7E1	0.0E0	8.49E2	5.88E2	-7.30146E-2	-8.80019E1	-5.96046E-4	-8.80004E1	2.38419E-5	6.05583E-3	9.27448E-2	2.73175E1	-3.26708E1	-3.26195E1	2.6786E1	1.16674E-7	2.51954E-3	2.51954E-3	6.3074E-3	2.00534E-1
2.2E1	2.229E3	0.0E0	8.89E2	6.17E2	-7.27053E-2	-8.8002E1	-8.10623E-4	-8.80002E1	2.38419E-5	6.12736E-3	9.29117E-2	2.72626E1	-3.26579E1	-3.26307E1	2.67998E1	1.16677E-7	2.51662E-3	2.51662E-3	6.29645E-3	2.00673E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.286E-2	-8.80021E1	-8.82149E-4	-8.79999E1	2.38419E-5	5.91278E-3	9.32932E-2	2.73303E1	-3.26741E1	-3.26314E1	2.68134E1	1.16923E-7	2.51847E-3	2.51847E-3	6.3074E-3	1.9985E-1