[Scan]
initial_time=2015-12-15T18:02:48
final_time=2015-12-15T18:03:08
ip_count=19
run=1017
dataset=2
scan=83
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=27.0
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.31692E-2
qbias_imon=-3.78782E-6
ql1_vset=
ql1_vmon=-8.80021E1
ql1_imon=-7.67338E-10
ql2_vset=
ql2_vmon=-6.19888E-4
ql2_imon=1.47299E-9
ql3_vset=
ql3_vmon=-8.79999E1
ql3_imon=-2.36838E-9
ql4_vset=
ql4_vmon=-2.38419E-5
ql4_imon=1.59104E-8
mult1=-1.75427E-8
mult2=-2.66272E-9
rf_tmon=-4.36222E-3
rf_agc=3.35619E-2
counter1=3
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.88894E-3
ql5_imon=6.32954E-10
bslens_vset=-6.2E0
bslens_vmon=-6.68176E0
bslens_imon=2.44042E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19731E1
lens5a_imon=1.98523E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12504E2
lens4a_imon=2.04949E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53731E1
cs_ef1b_imon=2.84594E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04635E2
lens23_imon=1.02197E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05036E1
cs_ea1_imon=2.52345E-5
lens1_vset=-2.7E0
lens1_vmon=-2.96385E0
lens1_imon=1.60767E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64747E1
os_ef1alow_imon=2.9714E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03871E1
cs_ea2_imon=1.53858E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84209E1
cs_ef1a_imon=2.93456E-5
olens2_vset=9.7E-1
olens2_vmon=9.70364E-1
olens2_imon=1.23862E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11529E1
os_restr1_imon=4.29999E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15666E1
os_ea1_imon=2.3825E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63612E1
os_ef1bup_imon=3.07983E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23107E0
cs_ionrep_imon=1.19683E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91904E2
cs_nozzle_imon=1.93243E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02082E1
cs_anode1_imon=2.96897E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20518E0
olens4_imon=3.9164E-8
tplens_vset=1.4E-1
tplens_vmon=1.56272E0
tplens_imon=-2.70506E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26506E1
iondef3_imon=1.49352E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26891E1
iondef2_imon=1.57247E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02924E2
lens6_imon=2.98364E-4
ql6_vset=1.0E-1
ql6_vmon=9.29356E-2
ql6_imon=9.39E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.30137E0
ionrepsh_imon=1.77687E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33724E1
lens5b_imon=2.15791E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74785E1
cs_ef2b_imon=3.12709E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.35664E0
os_ea2_imon=-8.94163E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06078E2
lens4b_imon=2.00507E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71385E1
cs_ef2a_imon=3.17401E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06035E0
os_ef2alow_imon=-2.69274E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.92018E-1
os_ef2bup_imon=-5.39996E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10909E1
os_restr2_imon=3.41623E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23072E2
cs_ionfoca_imon=6.29568E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.0189E1
cs_anode2_imon=2.24333E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73105E1
iondef1_imon=1.09085E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68151E1
iondef4_imon=1.08017E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=4.4754E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82261E-1
olens1_imon=7.27011E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.17822E0
cs_ionaccel_imon=-1.85868E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02062E2
cs_ionfocb_imon=1.47198E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56341E1
einzel_imon=7.60443E-6
window_vset=0.0E0
window_vmon=2.21161E-1
window_imon=-8.36956E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82632E2
mask1_imon=2.38928E-4
mask2_vset=0.0E0
mask2_vmon=-1.86049E1
mask2_imon=-6.9447E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92652E3
multa_neg_imon=7.10883E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93736E3
defgrida_imon=6.48518E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50148E3
multb_neg_imon=7.11244E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.23615E0
defgridb_imon=6.07061E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33336E1
os_fil1_imon=9.41082E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.0693E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63497E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30874E1
cs_fil1_imon=9.96182E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62905E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65882E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.42194E-2
os_fil2_imon=-2.74448E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.82547E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.7845E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36643E-1
cs_fil2_imon=-2.24057E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=7.48146E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22342E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=2.01391E-1
chamber_ion_pmon=1.16923E-7
chamber_cvt_pmon=2.52492E-3
foreline_cvt_pmon=2.52492E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.93379E-1
res40_imon=-2.55373E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=152
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.475E3	6.0E0	1.47E2	4.1E1	-7.32464E-2	-8.8002E1	-3.8147E-4	-8.80001E1	1.19209E-4	6.12736E-3	9.31025E-2	2.72866E1	-3.26486E1	-3.26498E1	2.68262E1	1.16923E-7	2.52384E-3	2.52384E-3	6.29665E-3	2.00534E-1
2.0E0	1.18708E5	1.11E2	3.16E2	1.6E2	-7.39421E-2	-8.80019E1	-5.96046E-4	-8.79999E1	2.14577E-4	6.22272E-3	9.29356E-2	2.72996E1	-3.2694E1	-3.2626E1	2.6828E1	1.16774E-7	2.52169E-3	2.52169E-3	6.30202E-3	2.02424E-1
3.0E0	2.1E1	0.0E0	4.85E2	2.79E2	-7.40967E-2	-8.80019E1	-3.57628E-4	-8.80001E1	3.8147E-4	5.91278E-3	9.30786E-2	2.73482E1	-3.2662E1	-3.26555E1	2.68262E1	1.16886E-7	2.51693E-3	2.51693E-3	6.31299E-3	2.00463E-1
4.0E0	2.2763E4	7.0E0	6.55E2	3.98E2	-7.29374E-2	-8.80023E1	-6.67572E-4	-8.80002E1	2.6226E-4	5.93662E-3	9.29832E-2	2.73275E1	-3.26384E1	-3.26095E1	2.68142E1	1.16965E-7	2.52236E-3	2.52236E-3	6.30212E-3	2.00903E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.34782E-2	-8.80016E1	-5.24521E-4	-8.80002E1	1.43051E-4	6.07967E-3	9.29832E-2	2.73204E1	-3.26561E1	-3.26626E1	2.68094E1	1.16727E-7	2.52209E-3	2.52209E-3	6.32386E-3	2.00499E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.36328E-2	-8.80023E1	-6.19888E-4	-8.8E1	-9.53674E-5	5.88894E-3	9.32693E-2	2.72933E1	-3.26508E1	-3.26042E1	2.68376E1	1.17112E-7	2.53083E-3	2.53083E-3	6.32858E-3	2.00231E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.30146E-2	-8.80023E1	-6.67572E-4	-8.80003E1	2.38419E-5	5.6982E-3	9.30548E-2	2.73081E1	-3.26422E1	-3.25912E1	2.68004E1	1.16829E-7	2.52099E-3	2.52099E-3	6.32386E-3	1.99803E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.42513E-2	-8.80022E1	-3.57628E-4	-8.79999E1	9.53674E-5	6.10352E-3	9.30786E-2	2.72721E1	-3.26691E1	-3.26242E1	2.68202E1	1.16823E-7	2.51525E-3	2.51525E-3	6.32896E-3	2.00363E-1
1.2E1	3.3E2	2.0E0	4.85E2	3.23E2	-7.40967E-2	-8.80021E1	-4.76837E-4	-8.79999E1	2.14577E-4	6.10352E-3	9.27448E-2	2.73104E1	-3.26661E1	-3.26006E1	2.67891E1	1.16981E-7	2.51552E-3	2.51552E-3	6.31837E-3	2.00151E-1
1.3E1	2.0E1	0.0E0	5.25E2	3.53E2	-7.32464E-2	-8.80022E1	-5.96046E-4	-8.80001E1	1.43051E-4	5.91278E-3	9.30309E-2	2.73315E1	-3.26422E1	-3.26164E1	2.68478E1	1.16873E-7	2.52384E-3	2.52384E-3	6.31817E-3	1.9968E-1
1.4E1	3.677E3	2.0E0	5.66E2	3.82E2	-7.32464E-2	-8.80018E1	-1.43051E-4	-8.80001E1	0.0E0	6.1512E-3	9.28164E-2	2.73091E1	-3.26579E1	-3.26653E1	2.67974E1	1.16778E-7	2.52318E-3	2.52318E-3	6.31288E-3	2.01022E-1
1.5E1	1.53E2	0.0E0	6.06E2	4.11E2	-7.46377E-2	-8.8002E1	-1.66893E-4	-8.80002E1	1.90735E-4	6.00815E-3	9.29594E-2	2.73107E1	-3.26659E1	-3.26135E1	2.68044E1	1.16808E-7	2.52262E-3	2.52262E-3	6.29211E-3	1.99498E-1
1.6E1	1.208E3	1.0E0	6.47E2	4.41E2	-7.40967E-2	-8.80023E1	-1.90735E-4	-8.80002E1	1.19209E-4	5.84126E-3	9.30071E-2	2.73339E1	-3.26332E1	-3.26152E1	2.68376E1	1.16901E-7	2.52106E-3	2.52106E-3	6.3016E-3	1.98369E-1
1.7E1	1.6E3	0.0E0	6.87E2	4.7E2	-7.43285E-2	-8.80024E1	0.0E0	-8.80003E1	-2.38419E-5	6.19888E-3	9.29117E-2	2.73213E1	-3.26687E1	-3.26224E1	2.6807E1	1.17032E-7	2.52428E-3	2.52428E-3	6.3074E-3	1.98247E-1
1.8E1	7.204E3	8.0E0	7.27E2	5.0E2	-7.47923E-2	-8.80023E1	2.38419E-5	-8.80002E1	1.90735E-4	6.1512E-3	9.29594E-2	2.73027E1	-3.26639E1	-3.26639E1	2.68215E1	1.16778E-7	2.51443E-3	2.51443E-3	6.32386E-3	1.98247E-1
1.9E1	2.512E3	1.0E0	7.68E2	5.29E2	-7.42513E-2	-8.80023E1	0.0E0	-8.80001E1	9.53674E-5	5.88894E-3	9.29356E-2	2.72907E1	-3.26506E1	-3.26056E1	2.68196E1	1.17023E-7	2.52276E-3	2.52276E-3	6.30202E-3	1.9917E-1
2.0E1	3.0467E4	1.0E1	8.08E2	5.58E2	-7.37103E-2	-8.80023E1	-2.6226E-4	-8.79999E1	-2.86102E-4	5.8651E-3	9.25779E-2	2.72696E1	-3.26434E1	-3.262E1	2.67944E1	1.16727E-7	2.52209E-3	2.52209E-3	6.33486E-3	2.01022E-1
2.1E1	6.3E1	0.0E0	8.49E2	5.88E2	-7.35556E-2	-8.80023E1	-4.05312E-4	-8.80002E1	1.66893E-4	5.96046E-3	9.2864E-2	2.73387E1	-3.26655E1	-3.2629E1	2.68052E1	1.17032E-7	2.5188E-3	2.5188E-3	6.3074E-3	1.99977E-1
2.2E1	2.208E3	0.0E0	8.89E2	6.17E2	-7.27828E-2	-8.80019E1	-2.38419E-4	-8.80002E1	7.15256E-5	5.74589E-3	9.28402E-2	2.73086E1	-3.26679E1	-3.26124E1	2.68436E1	1.1693E-7	2.52318E-3	2.52318E-3	6.31288E-3	1.99803E-1
2.3E1	3.0E0	0.0E0	9.3E2	6.47E2	-7.31692E-2	-8.80021E1	-6.19888E-4	-8.79999E1	-2.38419E-5	5.88894E-3	9.29356E-2	2.73105E1	-3.26891E1	-3.26506E1	2.68151E1	1.16923E-7	2.52492E-3	2.52492E-3	6.31278E-3	2.01391E-1