[Scan]
initial_time=2015-12-15T18:03:15
final_time=2015-12-15T18:03:34
ip_count=19
run=1017
dataset=2
scan=84
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=27.0
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.29374E-2
qbias_imon=-3.81274E-6
ql1_vset=
ql1_vmon=-8.8002E1
ql1_imon=-8.15797E-10
ql2_vset=
ql2_vmon=-7.86781E-4
ql2_imon=1.50611E-9
ql3_vset=
ql3_vmon=-8.79999E1
ql3_imon=-2.41646E-9
ql4_vset=
ql4_vmon=1.90735E-4
ql4_imon=1.58662E-8
mult1=-2.41289E-8
mult2=-2.69266E-9
rf_tmon=-6.0986E-3
rf_agc=3.13328E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=6.55651E-3
ql5_imon=6.15942E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65501E0
bslens_imon=2.57157E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19854E1
lens5a_imon=1.96952E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12483E2
lens4a_imon=2.0504E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53784E1
cs_ef1b_imon=2.84539E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04631E2
lens23_imon=1.01916E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04622E1
cs_ea1_imon=2.52132E-5
lens1_vset=-2.7E0
lens1_vmon=-3.02711E0
lens1_imon=1.58054E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64578E1
os_ef1alow_imon=2.9636E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03472E1
cs_ea2_imon=1.53949E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84508E1
cs_ef1a_imon=2.94053E-5
olens2_vset=9.7E-1
olens2_vmon=9.70244E-1
olens2_imon=1.23576E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11472E1
os_restr1_imon=4.29815E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15612E1
os_ea1_imon=2.39142E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63996E1
os_ef1bup_imon=3.08685E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24148E0
cs_ionrep_imon=1.18944E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91864E2
cs_nozzle_imon=1.93378E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01683E1
cs_anode1_imon=2.97549E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20577E0
olens4_imon=3.91387E-8
tplens_vset=1.4E-1
tplens_vmon=1.54528E0
tplens_imon=-3.94451E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2587E1
iondef3_imon=1.48144E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26675E1
iondef2_imon=1.57594E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02942E2
lens6_imon=2.98349E-4
ql6_vset=1.0E-1
ql6_vmon=9.29832E-2
ql6_imon=9.79865E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29103E0
ionrepsh_imon=1.76672E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33929E1
lens5b_imon=2.18153E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74814E1
cs_ef2b_imon=3.12145E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.30637E0
os_ea2_imon=-7.6255E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06085E2
lens4b_imon=2.00591E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71312E1
cs_ef2a_imon=3.17731E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05816E0
os_ef2alow_imon=-2.57986E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.91417E-1
os_ef2bup_imon=-5.38735E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10901E1
os_restr2_imon=3.4177E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2304E2
cs_ionfoca_imon=6.29574E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02151E1
cs_anode2_imon=2.2583E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73411E1
iondef1_imon=1.07972E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68406E1
iondef4_imon=1.08557E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71792E1
olens3_imon=4.43231E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82094E-1
olens1_imon=7.24179E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10131E0
cs_ionaccel_imon=-1.92033E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02058E2
cs_ionfocb_imon=1.47017E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56531E1
einzel_imon=7.73469E-6
window_vset=0.0E0
window_vmon=1.2424E-1
window_imon=-1.06619E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82642E2
mask1_imon=2.39037E-4
mask2_vset=0.0E0
mask2_vmon=-1.86164E1
mask2_imon=-7.45441E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92632E3
multa_neg_imon=7.28253E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93714E3
defgrida_imon=6.82948E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50088E3
multb_neg_imon=7.31792E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.33469E0
defgridb_imon=5.91277E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33313E1
os_fil1_imon=9.39591E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06903E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63566E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30911E1
cs_fil1_imon=9.93765E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63135E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65657E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.33189E-2
os_fil2_imon=-2.63593E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.89906E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.72532E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.37032E-1
cs_fil2_imon=-2.07732E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.47899E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22222E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30202E-3
inlet_lpb_pmon=2.00363E-1
chamber_ion_pmon=1.16774E-7
chamber_cvt_pmon=2.52276E-3
foreline_cvt_pmon=2.52276E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.31371E-1
res40_imon=-2.7096E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=162
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.48E3	1.0E0	1.47E2	4.1E1	-7.34782E-2	-8.8002E1	-6.4373E-4	-8.79999E1	4.76837E-5	5.91278E-3	9.29117E-2	2.7321E1	-3.26915E1	-3.26354E1	2.6813E1	1.16778E-7	2.52099E-3	2.52099E-3	6.31837E-3	2.00499E-1
2.0E0	1.18053E5	1.18E2	3.16E2	1.6E2	-7.30918E-2	-8.80022E1	-3.8147E-4	-8.80001E1	1.90735E-4	5.98431E-3	9.2721E-2	2.7312E1	-3.2679E1	-3.26572E1	2.68514E1	1.16973E-7	2.52276E-3	2.52276E-3	6.31278E-3	2.00705E-1
3.0E0	1.3E1	0.0E0	4.85E2	2.79E2	-7.25507E-2	-8.80022E1	-6.91414E-4	-8.80004E1	-1.43051E-4	6.1512E-3	9.31978E-2	2.73155E1	-3.26492E1	-3.26081E1	2.68186E1	1.17093E-7	2.52362E-3	2.52362E-3	6.31299E-3	2.00996E-1
4.0E0	2.2888E4	1.9E1	6.55E2	3.98E2	-7.32464E-2	-8.80023E1	-5.48363E-4	-8.80006E1	2.38419E-4	5.79357E-3	9.30309E-2	2.73075E1	-3.26417E1	-3.26308E1	2.68099E1	1.16916E-7	2.51814E-3	2.51814E-3	6.33388E-3	2.00735E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.26282E-2	-8.80022E1	-3.33786E-4	-8.80008E1	-2.38419E-5	6.12736E-3	9.30548E-2	2.73114E1	-3.26503E1	-3.26521E1	2.67902E1	1.16886E-7	2.52265E-3	2.52265E-3	6.30511E-3	2.00738E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.27053E-2	-8.80023E1	-6.67572E-4	-8.80005E1	1.66893E-4	6.24657E-3	9.30309E-2	2.72772E1	-3.26458E1	-3.26422E1	2.68073E1					
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.34782E-2	-8.80022E1	-3.57628E-4	-8.8E1	0.0E0	6.46114E-3	9.31501E-2	2.72666E1	-3.26879E1	-3.26242E1	2.68094E1	1.16885E-7	2.52353E-3	2.52353E-3	6.31519E-3	2.00682E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.39421E-2	-8.80022E1	-1.66893E-4	-8.8E1	-2.38419E-5	6.17504E-3	9.31501E-2	2.73141E1	-3.26536E1	-3.26476E1	2.68172E1	1.1688E-7	2.5188E-3	2.5188E-3	6.32386E-3	2.00673E-1
1.2E1	3.03E2	1.0E0	4.85E2	3.23E2	-7.33239E-2	-8.8002E1	-5.48363E-4	-8.8E1	-7.15256E-5	6.05583E-3	9.28879E-2	2.72913E1	-3.26446E1	-3.26386E1	2.681E1	1.16626E-7	2.52099E-3	2.52099E-3	6.31288E-3	2.00325E-1
1.3E1	2.4E1	0.0E0	5.25E2	3.53E2	-7.34782E-2	-8.8002E1	-6.67572E-4	-8.80001E1	2.86102E-4	6.31809E-3	9.30548E-2	2.72889E1	-3.26663E1	-3.25996E1	2.67962E1	1.1693E-7	2.52209E-3	2.52209E-3	6.32936E-3	1.99977E-1
1.4E1	3.566E3	3.0E0	5.66E2	3.82E2	-7.43285E-2	-8.80021E1	-4.76837E-4	-8.80003E1	3.33786E-4	6.17504E-3	9.30786E-2	2.72992E1	-3.26608E1	-3.26714E1	2.68226E1	1.16727E-7	2.51771E-3	2.51771E-3	6.32386E-3	2.00151E-1
1.5E1	1.1E2	0.0E0	6.06E2	4.11E2	-7.30146E-2	-8.8002E1	-3.57628E-4	-8.79999E1	7.15256E-5	6.17504E-3	9.30548E-2	2.72937E1	-3.26651E1	-3.26362E1	2.68163E1	1.16923E-7	2.51739E-3	2.51739E-3	6.32896E-3	2.00534E-1
1.6E1	1.146E3	2.0E0	6.47E2	4.41E2	-7.39421E-2	-8.80018E1	-5.00679E-4	-8.80003E1	-7.15256E-5	6.19888E-3	9.30786E-2	2.73261E1	-3.26969E1	-3.26392E1	2.67968E1	1.17032E-7	2.51662E-3	2.51662E-3	6.32386E-3	2.00499E-1
1.7E1	1.621E3	0.0E0	6.87E2	4.7E2	-7.3401E-2	-8.80021E1	-4.05312E-4	-8.80001E1	1.43051E-4	6.27041E-3	9.29117E-2	2.72921E1	-3.26502E1	-3.26649E1	2.68076E1	1.16981E-7	2.52318E-3	2.52318E-3	6.32386E-3	2.01197E-1
1.8E1	6.976E3	5.0E0	7.27E2	5.0E2	-7.34782E-2	-8.8002E1	-6.19888E-4	-8.8E1	4.76837E-5	6.07967E-3	9.27687E-2	2.73369E1	-3.26634E1	-3.25954E1	2.67752E1	1.1688E-7	2.51443E-3	2.51443E-3	6.34037E-3	1.99977E-1
1.9E1	2.685E3	0.0E0	7.68E2	5.29E2	-7.40967E-2	-8.8002E1	-5.96046E-4	-8.79997E1	1.19209E-4	5.88894E-3	9.29356E-2	2.73004E1	-3.26626E1	-3.2649E1	2.68298E1	1.16829E-7	2.51334E-3	2.51334E-3	6.30192E-3	1.9911E-1
2.0E1	3.039E4	2.2E1	8.08E2	5.58E2	-7.31692E-2	-8.80022E1	-5.24521E-4	-8.79998E1	3.09944E-4	6.36578E-3	9.28402E-2	2.72877E1	-3.26663E1	-3.26747E1	2.67884E1	1.16823E-7	2.52384E-3	2.52384E-3	6.30202E-3	1.9951E-1
2.1E1	6.2E1	0.0E0	8.49E2	5.88E2	-7.24736E-2	-8.8002E1	-4.76837E-4	-8.79998E1	7.15256E-5	6.17504E-3	9.29117E-2	2.7265E1	-3.2659E1	-3.26372E1	2.68412E1	1.17134E-7	2.52209E-3	2.52209E-3	6.32936E-3	2.00151E-1
2.2E1	2.221E3	1.0E0	8.89E2	6.17E2	-7.32464E-2	-8.80024E1	-7.15256E-4	-8.79998E1	2.38419E-4	6.31809E-3	9.30071E-2	2.73128E1	-3.26767E1	-3.26113E1	2.68065E1	1.17023E-7	2.51954E-3	2.51954E-3	6.33436E-3	1.9985E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.29374E-2	-8.8002E1	-7.86781E-4	-8.79999E1	1.90735E-4	6.55651E-3	9.29832E-2	2.73411E1	-3.26675E1	-3.2587E1	2.68406E1	1.16774E-7	2.52276E-3	2.52276E-3	6.30202E-3	2.00363E-1