[Scan]
initial_time=2015-12-15T18:03:41
final_time=2015-12-15T18:04:01
ip_count=19
run=1017
dataset=2
scan=85
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=27.0
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.36328E-2
qbias_imon=-3.82803E-6
ql1_vset=
ql1_vmon=-8.80024E1
ql1_imon=-8.42011E-10
ql2_vset=
ql2_vmon=-5.48363E-4
ql2_imon=1.51628E-9
ql3_vset=
ql3_vmon=-8.8E1
ql3_imon=-2.40848E-9
ql4_vset=
ql4_vmon=-2.38419E-4
ql4_imon=1.58988E-8
mult1=-2.43456E-8
mult2=-2.75254E-9
rf_tmon=-5.11325E-3
rf_agc=3.25765E-2
counter1=4
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=6.03199E-3
ql5_imon=6.16229E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66503E0
bslens_imon=2.41938E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20137E1
lens5a_imon=1.97696E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12496E2
lens4a_imon=2.04881E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53688E1
cs_ef1b_imon=2.84791E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04599E2
lens23_imon=1.0211E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05171E1
cs_ea1_imon=2.53937E-5
lens1_vset=-2.7E0
lens1_vmon=-3.02475E0
lens1_imon=1.43188E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64644E1
os_ef1alow_imon=2.95639E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0405E1
cs_ea2_imon=1.53913E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84238E1
cs_ef1a_imon=2.94234E-5
olens2_vset=9.7E-1
olens2_vmon=9.70578E-1
olens2_imon=1.2362E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11472E1
os_restr1_imon=4.29995E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15282E1
os_ea1_imon=2.35072E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63581E1
os_ef1bup_imon=3.07857E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.19665E0
cs_ionrep_imon=1.2089E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91865E2
cs_nozzle_imon=1.93105E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01971E1
cs_anode1_imon=2.96792E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20554E0
olens4_imon=3.91414E-8
tplens_vset=1.4E-1
tplens_vmon=1.57005E0
tplens_imon=-4.22766E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26116E1
iondef3_imon=1.48958E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26777E1
iondef2_imon=1.57311E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02946E2
lens6_imon=2.98516E-4
ql6_vset=1.0E-1
ql6_vmon=9.30548E-2
ql6_imon=9.63593E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26567E0
ionrepsh_imon=1.77415E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33315E1
lens5b_imon=2.16667E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74645E1
cs_ef2b_imon=3.11749E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.34235E0
os_ea2_imon=-6.81143E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06109E2
lens4b_imon=2.00382E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71402E1
cs_ef2a_imon=3.17876E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04134E0
os_ef2alow_imon=-2.71681E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.00427E-1
os_ef2bup_imon=-5.36212E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11117E1
os_restr2_imon=3.42238E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23061E2
cs_ionfoca_imon=6.3007E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01791E1
cs_anode2_imon=2.24641E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73351E1
iondef1_imon=1.0875E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6798E1
iondef4_imon=1.07224E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71788E1
olens3_imon=4.49616E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82094E-1
olens1_imon=7.2241E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13254E0
cs_ionaccel_imon=-1.81221E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02067E2
cs_ionfocb_imon=1.4701E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56297E1
einzel_imon=7.72388E-6
window_vset=0.0E0
window_vmon=2.00524E-1
window_imon=-1.18152E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82617E2
mask1_imon=2.39138E-4
mask2_vset=0.0E0
mask2_vmon=-1.86104E1
mask2_imon=-7.92292E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9267E3
multa_neg_imon=7.3427E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93709E3
defgrida_imon=6.42245E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50192E3
multb_neg_imon=7.05246E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.39374E0
defgridb_imon=5.90216E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33328E1
os_fil1_imon=9.40612E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07581E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63439E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30937E1
cs_fil1_imon=9.94732E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63195E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65692E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.26858E-2
os_fil2_imon=-2.74405E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.86902E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.75949E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.37291E-1
cs_fil2_imon=-2.6059E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=2.77271E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22203E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33436E-3
inlet_lpb_pmon=2.00192E-1
chamber_ion_pmon=1.16873E-7
chamber_cvt_pmon=2.51417E-3
foreline_cvt_pmon=2.51417E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.05543E-1
res40_imon=-2.63752E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=173
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.502E3	2.0E0	1.47E2	4.1E1	-7.286E-2	-8.8002E1	-1.07288E-3	-8.80002E1	3.57628E-4	6.29425E-3	9.30548E-2	2.7308E1	-3.26679E1	-3.2659E1	2.67966E1	1.16823E-7	2.52276E-3	2.52276E-3	6.32356E-3	2.00363E-1
2.0E0	1.18274E5	1.05E2	3.16E2	1.6E2	-7.23964E-2	-8.80019E1	-7.86781E-4	-8.79999E1	1.90735E-4	6.27041E-3	9.30071E-2	2.73275E1	-3.26809E1	-3.26537E1	2.67937E1	1.16823E-7	2.51954E-3	2.51954E-3	6.31817E-3	2.00192E-1
3.0E0	2.0E1	0.0E0	4.85E2	2.79E2	-7.25507E-2	-8.8002E1	-9.77516E-4	-8.79998E1	-2.38419E-4	6.17504E-3	9.3174E-2	2.73045E1	-3.26224E1	-3.26254E1	2.683E1	1.16671E-7	2.52342E-3	2.52342E-3	6.32328E-3	2.00064E-1
4.0E0	2.2879E4	5.0E0	6.55E2	3.98E2	-7.32464E-2	-8.80021E1	-7.86781E-4	-8.79999E1	-4.76837E-5	6.53267E-3	9.32455E-2	2.7299E1	-3.26676E1	-3.26162E1	2.68022E1	1.16731E-7	2.52585E-3	2.52585E-3	6.32418E-3	2.00818E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.37103E-2	-8.80022E1	-8.10623E-4	-8.79999E1	-1.19209E-4	6.10352E-3	9.34362E-2	2.72981E1	-3.26816E1	-3.25994E1	2.68117E1	1.1693E-7	2.52099E-3	2.52099E-3	6.33486E-3	2.00325E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.34782E-2	-8.80017E1	-9.53674E-4	-8.79998E1	-1.66893E-4	6.1512E-3	9.31978E-2	2.7318E1	-3.26462E1	-3.26444E1	2.68196E1	1.1672E-7	2.51709E-3	2.51709E-3	6.3445E-3	2.01072E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.38649E-2	-8.8002E1	-1.00136E-3	-8.79999E1	9.53674E-5	6.10352E-3	9.31978E-2	2.72973E1	-3.26735E1	-3.26422E1	2.68334E1	1.1699E-7	2.52473E-3	2.52473E-3	6.29624E-3	2.0064E-1
8.0E0	0.0E0	1.0E0	1.332E3	8.73E2	-7.33239E-2	-8.8002E1	-1.21593E-3	-8.79999E1	-2.38419E-5	6.07967E-3	9.31263E-2	2.72992E1	-3.26732E1	-3.26071E1	2.68052E1	1.17032E-7	2.52318E-3	2.52318E-3	6.31837E-3	2.01372E-1
1.2E1	3.48E2	2.0E0	4.85E2	3.23E2	-7.37103E-2	-8.80021E1	-1.19209E-3	-8.80001E1	0.0E0	6.24657E-3	9.29117E-2	2.7288E1	-3.26443E1	-3.26142E1	2.68214E1	1.16823E-7	2.52169E-3	2.52169E-3	6.31278E-3	2.00363E-1
1.3E1	1.4E1	0.0E0	5.25E2	3.53E2	-7.3401E-2	-8.80021E1	-9.77516E-4	-8.80002E1	-1.19209E-4	5.79357E-3	9.29594E-2	2.73069E1	-3.26446E1	-3.26266E1	2.68244E1	1.16829E-7	2.52757E-3	2.52757E-3	6.3074E-3	1.99977E-1
1.4E1	3.704E3	1.0E0	5.66E2	3.82E2	-7.3401E-2	-8.80018E1	-7.86781E-4	-8.79999E1	-2.6226E-4	5.79357E-3	9.29832E-2	2.72978E1	-3.26621E1	-3.26501E1	2.68009E1	1.17073E-7	2.52599E-3	2.52599E-3	6.33436E-3	2.00876E-1
1.5E1	1.7E2	0.0E0	6.06E2	4.11E2	-7.36328E-2	-8.8002E1	-6.19888E-4	-8.79997E1	-1.90735E-4	6.1512E-3	9.32217E-2	2.73448E1	-3.26573E1	-3.26074E1	2.68232E1	1.17232E-7	2.52308E-3	2.52308E-3	6.32652E-3	2.00291E-1
1.6E1	1.162E3	0.0E0	6.47E2	4.41E2	-7.29374E-2	-8.80019E1	-9.53674E-4	-8.8E1	2.14577E-4	6.05583E-3	9.30548E-2	2.72949E1	-3.26314E1	-3.2623E1	2.68047E1	1.17083E-7	2.5199E-3	2.5199E-3	6.30192E-3	2.00847E-1
1.7E1	1.653E3	2.0E0	6.87E2	4.7E2	-7.31692E-2	-8.80022E1	-5.00679E-4	-8.80001E1	-1.19209E-4	6.10352E-3	9.30071E-2	2.73139E1	-3.26644E1	-3.26337E1	2.68166E1	1.1688E-7	2.51662E-3	2.51662E-3	6.32386E-3	1.99977E-1
1.8E1	7.029E3	4.0E0	7.27E2	5.0E2	-7.38649E-2	-8.80022E1	-6.91414E-4	-8.8E1	-4.05312E-4	5.96046E-3	9.31501E-2	2.72892E1	-3.26567E1	-3.26325E1	2.6819E1	1.16973E-7	2.52276E-3	2.52276E-3	6.32896E-3	2.00192E-1
1.9E1	2.598E3	1.0E0	7.68E2	5.29E2	-7.39421E-2	-8.80024E1	-2.38419E-4	-8.8E1	-2.6226E-4	6.07967E-3	9.30548E-2	2.72855E1	-3.26444E1	-3.26383E1	2.6816E1	1.16905E-7	2.51662E-3	2.51662E-3	6.32112E-3	1.9989E-1
2.0E1	3.0522E4	1.8E1	8.08E2	5.58E2	-7.40967E-2	-8.80021E1	-3.8147E-4	-8.79999E1	1.19209E-4	5.72205E-3	9.28879E-2	2.72992E1	-3.26431E1	-3.26478E1	2.68206E1					
2.1E1	6.9E1	0.0E0	8.49E2	5.88E2	-7.29374E-2	-8.80023E1	-5.24521E-4	-8.79998E1	1.90735E-4	6.31809E-3	9.28164E-2	2.73369E1	-3.26825E1	-3.25858E1	2.6797E1	1.16724E-7	2.51954E-3	2.51954E-3	6.29665E-3	2.00876E-1
2.2E1	2.255E3	2.0E0	8.89E2	6.17E2	-7.37103E-2	-8.80023E1	-6.19888E-4	-8.79999E1	-2.38419E-5	6.00815E-3	9.32455E-2	2.72842E1	-3.2637E1	-3.25941E1	2.68028E1	1.1688E-7	2.52099E-3	2.52099E-3	6.30192E-3	2.00847E-1
2.3E1	4.0E0	0.0E0	9.3E2	6.47E2	-7.36328E-2	-8.80024E1	-5.48363E-4	-8.8E1	-2.38419E-4	6.03199E-3	9.30548E-2	2.73351E1	-3.26777E1	-3.26116E1	2.6798E1	1.16873E-7	2.51417E-3	2.51417E-3	6.33436E-3	2.00192E-1