[Scan]
initial_time=2015-12-15T18:04:08
final_time=2015-12-15T18:04:28
ip_count=19
run=1017
dataset=2
scan=86
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=27.0
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.27828E-2
qbias_imon=-3.82669E-6
ql1_vset=
ql1_vmon=-8.80021E1
ql1_imon=-8.25703E-10
ql2_vset=
ql2_vmon=-1.43051E-4
ql2_imon=1.51607E-9
ql3_vset=
ql3_vmon=-8.79999E1
ql3_imon=-2.44468E-9
ql4_vset=
ql4_vmon=0.0E0
ql4_imon=1.58409E-8
mult1=-1.63146E-8
mult2=-2.69266E-9
rf_tmon=-3.62921E-3
rf_agc=3.37121E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.84126E-3
ql5_imon=6.28352E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65619E0
bslens_imon=2.45123E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19748E1
lens5a_imon=1.95253E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.125E2
lens4a_imon=2.0516E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53682E1
cs_ef1b_imon=2.84034E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04604E2
lens23_imon=1.02128E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04964E1
cs_ea1_imon=2.54185E-5
lens1_vset=-2.7E0
lens1_vmon=-2.97225E0
lens1_imon=1.38587E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64741E1
os_ef1alow_imon=2.96468E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03761E1
cs_ea2_imon=1.5455E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84442E1
cs_ef1a_imon=2.929E-5
olens2_vset=9.7E-1
olens2_vmon=9.70435E-1
olens2_imon=1.23331E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11448E1
os_restr1_imon=4.30427E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15388E1
os_ea1_imon=2.39744E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63491E1
os_ef1bup_imon=3.08361E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25387E0
cs_ionrep_imon=1.18413E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91876E2
cs_nozzle_imon=1.93314E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02037E1
cs_anode1_imon=2.95855E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2058E0
olens4_imon=3.91378E-8
tplens_vset=1.4E-1
tplens_vmon=1.59601E0
tplens_imon=-4.75858E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26386E1
iondef3_imon=1.4917E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26561E1
iondef2_imon=1.56815E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02949E2
lens6_imon=2.98491E-4
ql6_vset=1.0E-1
ql6_vmon=9.28164E-2
ql6_imon=1.01163E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.3105E0
ionrepsh_imon=1.77415E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33888E1
lens5b_imon=2.16738E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74663E1
cs_ef2b_imon=3.12109E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.32879E0
os_ea2_imon=-8.12101E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06075E2
lens4b_imon=2.0064E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71204E1
cs_ef2a_imon=3.17443E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07618E0
os_ef2alow_imon=-2.6123E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.83008E-1
os_ef2bup_imon=-5.47024E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10991E1
os_restr2_imon=3.40941E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23103E2
cs_ionfoca_imon=6.29503E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01965E1
cs_anode2_imon=2.2583E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73255E1
iondef1_imon=1.08927E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68268E1
iondef4_imon=1.09062E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=4.44719E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81903E-1
olens1_imon=7.24352E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.17819E0
cs_ionaccel_imon=-2.03206E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02082E2
cs_ionfocb_imon=1.47305E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56261E1
einzel_imon=7.67342E-6
window_vset=0.0E0
window_vmon=1.00214E-1
window_imon=-8.82392E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82633E2
mask1_imon=2.39062E-4
mask2_vset=0.0E0
mask2_vmon=-1.86128E1
mask2_imon=-7.56253E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92639E3
multa_neg_imon=6.95336E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93708E3
defgrida_imon=6.32335E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50139E3
multb_neg_imon=7.47719E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.2461E0
defgridb_imon=6.27026E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33318E1
os_fil1_imon=9.41015E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07485E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6328E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30883E1
cs_fil1_imon=9.94846E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62594E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65411E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.33189E-2
os_fil2_imon=-2.67197E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.79094E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.77721E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36255E-1
cs_fil2_imon=-2.89422E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.83939E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22194E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31269E-3
inlet_lpb_pmon=2.00399E-1
chamber_ion_pmon=1.16867E-7
chamber_cvt_pmon=2.52342E-3
foreline_cvt_pmon=2.52342E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.49681E-1
res40_imon=-2.48976E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=172
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.501E3	1.0E0	1.47E2	4.1E1	-7.3401E-2	-8.8002E1	-7.15256E-5	-8.80001E1	2.38419E-4	6.24657E-3	9.29832E-2	2.72732E1	-3.2675E1	-3.26195E1	2.68099E1	1.16774E-7	2.51847E-3	2.51847E-3	6.34518E-3	2.00534E-1
2.0E0	1.17238E5	1.26E2	3.16E2	1.6E2	-7.286E-2	-8.8002E1	-2.38419E-4	-8.80001E1	2.14577E-4	6.17504E-3	9.30548E-2	2.73307E1	-3.26728E1	-3.26154E1	2.68057E1	1.16823E-7	2.52492E-3	2.52492E-3	6.31278E-3	2.01391E-1
3.0E0	2.5E1	0.0E0	4.85E2	2.79E2	-7.30918E-2	-8.80019E1	-5.72205E-4	-8.8E1	7.15256E-5	6.07967E-3	9.26256E-2	2.73313E1	-3.26738E1	-3.26317E1	2.6829E1	1.16731E-7	2.52139E-3	2.52139E-3	6.31858E-3	1.98696E-1
4.0E0	2.271E4	1.1E1	6.55E2	3.98E2	-7.36328E-2	-8.80023E1	-5.24521E-4	-8.79998E1	1.43051E-4	6.36578E-3	9.31501E-2	2.72817E1	-3.26464E1	-3.26561E1	2.68382E1	1.16765E-7	2.51783E-3	2.51783E-3	6.28667E-3	1.98465E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.37103E-2	-8.80019E1	-9.29832E-4	-8.79998E1	9.53674E-5	6.22272E-3	9.31501E-2	2.72666E1	-3.26338E1	-3.2599E1	2.6813E1	1.16806E-7	2.51512E-3	2.51512E-3	6.31847E-3	2.00393E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.35556E-2	-8.8002E1	-5.24521E-4	-8.79997E1	-2.38419E-5	6.24657E-3	9.29832E-2	2.73151E1	-3.26425E1	-3.26248E1	2.68238E1					
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.21643E-2	-8.8002E1	-2.86102E-4	-8.79999E1	-2.38419E-5	5.79357E-3	9.29117E-2	2.73238E1	-3.26828E1	-3.26135E1	2.68119E1	1.16923E-7	2.51525E-3	2.51525E-3	6.31278E-3	2.01562E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.27053E-2	-8.80022E1	-6.19888E-4	-8.79998E1	4.76837E-5	5.81741E-3	9.2864E-2	2.72721E1	-3.26323E1	-3.25577E1	2.67879E1	1.16938E-7	2.51693E-3	2.51693E-3	6.3074E-3	2.00463E-1
1.2E1	3.14E2	0.0E0	4.85E2	3.23E2	-7.286E-2	-8.8002E1	-2.86102E-4	-8.79999E1	-7.15256E-5	6.05583E-3	9.2864E-2	2.72788E1	-3.26444E1	-3.26003E1	2.6768E1	1.16867E-7	2.52236E-3	2.52236E-3	6.3074E-3	2.00903E-1
1.3E1	2.6E1	0.0E0	5.25E2	3.53E2	-7.29374E-2	-8.80022E1	-5.00679E-4	-8.79997E1	2.38419E-5	5.84126E-3	9.27925E-2	2.73021E1	-3.26667E1	-3.25871E1	2.68052E1	1.16677E-7	2.52099E-3	2.52099E-3	6.34037E-3	1.9963E-1
1.4E1	3.702E3	1.0E0	5.66E2	3.82E2	-7.286E-2	-8.80023E1	-2.86102E-4	-8.79998E1	2.38419E-5	6.1512E-3	9.2721E-2	2.73081E1	-3.26939E1	-3.26092E1	2.68064E1	1.16774E-7	2.52169E-3	2.52169E-3	6.30202E-3	1.9951E-1
1.5E1	1.29E2	0.0E0	6.06E2	4.11E2	-7.3401E-2	-8.80022E1	-7.15256E-5	-8.79995E1	1.43051E-4	6.12736E-3	9.25541E-2	2.73399E1	-3.26687E1	-3.26182E1	2.68352E1	1.1688E-7	2.51771E-3	2.51771E-3	6.3074E-3	2.00673E-1
1.6E1	1.183E3	0.0E0	6.47E2	4.41E2	-7.3401E-2	-8.80023E1	-1.43051E-4	-8.79998E1	7.15256E-5	5.93662E-3	9.29356E-2	2.73015E1	-3.26711E1	-3.26344E1	2.68131E1	1.17032E-7	2.51443E-3	2.51443E-3	6.32386E-3	2.00499E-1
1.7E1	1.715E3	1.0E0	6.87E2	4.7E2	-7.23964E-2	-8.80022E1	-3.8147E-4	-8.79997E1	-9.53674E-5	5.88894E-3	9.29832E-2	2.72979E1	-3.26603E1	-3.2608E1	2.6825E1	1.16778E-7	2.52867E-3	2.52867E-3	6.3074E-3	1.9963E-1
1.8E1	7.089E3	3.0E0	7.27E2	5.0E2	-7.35556E-2	-8.80021E1	-2.38419E-5	-8.79997E1	-2.6226E-4	6.10352E-3	9.28879E-2	2.72955E1	-3.26549E1	-3.26212E1	2.68186E1	1.16835E-7	2.51804E-3	2.51804E-3	6.31858E-3	2.00996E-1
1.9E1	2.621E3	1.0E0	7.68E2	5.29E2	-7.40967E-2	-8.80022E1	-5.72205E-4	-8.79997E1	1.43051E-4	6.24657E-3	9.29117E-2	2.72991E1	-3.26711E1	-3.26326E1	2.68214E1	1.16973E-7	2.52061E-3	2.52061E-3	6.29128E-3	2.00705E-1
2.0E1	3.0434E4	2.2E1	8.08E2	5.58E2	-7.30918E-2	-8.80021E1	-6.67572E-4	-8.79996E1	-1.90735E-4	5.45979E-3	9.31501E-2	2.73081E1	-3.26795E1	-3.26344E1	2.68148E1	1.1688E-7	2.5188E-3	2.5188E-3	6.31288E-3	2.00325E-1
2.1E1	6.7E1	0.0E0	8.49E2	5.88E2	-7.38649E-2	-8.80021E1	-3.09944E-4	-8.79999E1	2.38419E-5	5.79357E-3	9.2864E-2	2.72958E1	-3.26098E1	-3.26272E1	2.6813E1	1.1693E-7	2.51552E-3	2.51552E-3	6.3074E-3	1.98937E-1
2.2E1	2.206E3	0.0E0	8.89E2	6.17E2	-7.30918E-2	-8.80021E1	-3.09944E-4	-8.79998E1	4.76837E-5	5.79357E-3	9.29117E-2	2.72862E1	-3.26738E1	-3.26248E1	2.68001E1	1.16724E-7	2.5131E-3	2.5131E-3	6.33977E-3	1.9917E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.27828E-2	-8.80021E1	-1.43051E-4	-8.79999E1	0.0E0	5.84126E-3	9.28164E-2	2.73255E1	-3.26561E1	-3.26386E1	2.68268E1	1.16867E-7	2.52342E-3	2.52342E-3	6.31269E-3	2.00399E-1