[Scan]
initial_time=2015-12-15T18:04:35
final_time=2015-12-15T18:04:54
ip_count=19
run=1017
dataset=2
scan=87
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=27.0
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.30918E-2
qbias_imon=-3.80581E-6
ql1_vset=
ql1_vmon=-8.80021E1
ql1_imon=-8.33285E-10
ql2_vset=
ql2_vmon=-3.8147E-4
ql2_imon=1.50584E-9
ql3_vset=
ql3_vmon=-8.80003E1
ql3_imon=-2.36125E-9
ql4_vset=
ql4_vmon=1.43051E-4
ql4_imon=1.58734E-8
mult1=-2.57062E-8
mult2=-2.74456E-9
rf_tmon=-4.41028E-3
rf_agc=3.38022E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=6.17504E-3
ql5_imon=6.24085E-10
bslens_vset=-6.2E0
bslens_vmon=-6.67565E0
bslens_imon=2.5468E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19706E1
lens5a_imon=1.97412E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1246E2
lens4a_imon=2.04923E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53813E1
cs_ef1b_imon=2.84514E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04591E2
lens23_imon=1.02224E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04764E1
cs_ea1_imon=2.5199E-5
lens1_vset=-2.7E0
lens1_vmon=-3.00175E0
lens1_imon=1.29739E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64788E1
os_ef1alow_imon=2.95271E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04174E1
cs_ea2_imon=1.57134E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84126E1
cs_ef1a_imon=2.93572E-5
olens2_vset=9.7E-1
olens2_vmon=9.70602E-1
olens2_imon=1.22987E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11495E1
os_restr1_imon=4.29802E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15536E1
os_ea1_imon=2.38753E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63597E1
os_ef1bup_imon=3.08222E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23499E0
cs_ionrep_imon=1.2036E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91887E2
cs_nozzle_imon=1.93201E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01945E1
cs_anode1_imon=2.96722E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20599E0
olens4_imon=3.91589E-8
tplens_vset=1.4E-1
tplens_vmon=1.56593E0
tplens_imon=-4.58161E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26332E1
iondef3_imon=1.46905E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26609E1
iondef2_imon=1.57559E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02969E2
lens6_imon=2.98565E-4
ql6_vset=1.0E-1
ql6_vmon=9.30548E-2
ql6_imon=9.43232E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27097E0
ionrepsh_imon=1.76884E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33858E1
lens5b_imon=2.19286E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74548E1
cs_ef2b_imon=3.12291E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.30932E0
os_ea2_imon=-9.28902E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06102E2
lens4b_imon=2.00463E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71216E1
cs_ef2a_imon=3.16714E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05603E0
os_ef2alow_imon=-2.63733E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.84646E-1
os_ef2bup_imon=-5.44331E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10911E1
os_restr2_imon=3.41801E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23053E2
cs_ionfoca_imon=6.28654E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01296E1
cs_anode2_imon=2.25281E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73009E1
iondef1_imon=1.10803E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68047E1
iondef4_imon=1.09184E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7179E1
olens3_imon=4.43826E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82666E-1
olens1_imon=7.24572E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11127E0
cs_ionaccel_imon=-1.83056E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02078E2
cs_ionfocb_imon=1.47237E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56317E1
einzel_imon=7.72322E-6
window_vset=0.0E0
window_vmon=1.63556E-1
window_imon=-7.76107E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82594E2
mask1_imon=2.39077E-4
mask2_vset=0.0E0
mask2_vmon=-1.86391E1
mask2_imon=-8.32722E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92641E3
multa_neg_imon=7.53382E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93716E3
defgrida_imon=6.64897E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50156E3
multb_neg_imon=7.10202E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.40851E0
defgridb_imon=6.13576E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33328E1
os_fil1_imon=9.41459E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06969E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63261E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30866E1
cs_fil1_imon=9.94995E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62631E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65355E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.26858E-2
os_fil2_imon=-2.87991E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.72006E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.89996E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34673E-1
cs_fil2_imon=-2.72068E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=6.23142E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22032E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31269E-3
inlet_lpb_pmon=2.0124E-1
chamber_ion_pmon=1.17063E-7
chamber_cvt_pmon=2.52131E-3
foreline_cvt_pmon=2.52131E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.28877E-1
res40_imon=-2.54533E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=202
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.39E3	1.0E0	1.47E2	4.1E1	-7.18554E-2	-8.80021E1	-8.34465E-4	-8.8E1	2.38419E-5	5.76973E-3	9.32455E-2	2.73075E1	-3.26467E1	-3.26036E1	2.67858E1	1.16923E-7	2.52707E-3	2.52707E-3	6.32896E-3	1.9883E-1
2.0E0	1.16508E5	9.2E1	3.16E2	1.6E2	-7.201E-2	-8.80021E1	-8.10623E-4	-8.80002E1	3.57628E-4	5.98431E-3	9.31978E-2	2.73163E1	-3.26714E1	-3.2626E1	2.67854E1	1.1693E-7	2.5188E-3	2.5188E-3	6.3514E-3	2.00499E-1
3.0E0	2.7E1	0.0E0	4.85E2	2.79E2	-7.15461E-2	-8.80018E1	-3.33786E-4	-8.8E1	2.14577E-4	5.88894E-3	9.29832E-2	2.73357E1	-3.26829E1	-3.26407E1	2.68208E1	1.16873E-7	2.52061E-3	2.52061E-3	6.3074E-3	1.9934E-1
4.0E0	2.23E4	8.0E0	6.55E2	3.98E2	-7.21643E-2	-8.80019E1	-5.72205E-4	-8.80004E1	1.43051E-4	6.12736E-3	9.29356E-2	2.72567E1	-3.26708E1	-3.25912E1	2.68325E1	1.1693E-7	2.52647E-3	2.52647E-3	6.31837E-3	1.97731E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.27053E-2	-8.80018E1	-5.72205E-4	-8.80001E1	3.09944E-4	6.05583E-3	9.30548E-2	2.72898E1	-3.26596E1	-3.26484E1	2.68034E1	1.17173E-7	2.52169E-3	2.52169E-3	6.32356E-3	1.97142E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.23189E-2	-8.80021E1	-5.72205E-4	-8.8E1	2.38419E-5	5.98431E-3	9.28164E-2	2.73381E1	-3.26843E1	-3.2614E1	2.68142E1	1.17023E-7	2.52492E-3	2.52492E-3	6.28592E-3	1.97647E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.29374E-2	-8.80023E1	-5.00679E-4	-8.80002E1	-1.66893E-4	5.98431E-3	9.28879E-2	2.7311E1	-3.26408E1	-3.26508E1	2.67902E1	1.16778E-7	2.52209E-3	2.52209E-3	6.32386E-3	1.99283E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.27053E-2	-8.80021E1	-7.39098E-4	-8.80001E1	1.43051E-4	6.00815E-3	9.29356E-2	2.73002E1	-3.26695E1	-3.26407E1	2.68448E1	1.16873E-7	2.52384E-3	2.52384E-3	6.3074E-3	2.00192E-1
1.2E1	3.08E2	0.0E0	4.85E2	3.23E2	-7.286E-2	-8.80022E1	-8.10623E-4	-8.8E1	7.15256E-5	6.31809E-3	9.3174E-2	2.72895E1	-3.26675E1	-3.26194E1	2.684E1	1.16835E-7	2.52027E-3	2.52027E-3	6.32418E-3	2.00996E-1
1.3E1	1.6E1	0.0E0	5.25E2	3.53E2	-7.27053E-2	-8.80021E1	-5.24521E-4	-8.79999E1	1.19209E-4	6.10352E-3	9.28164E-2	2.73263E1	-3.26691E1	-3.26254E1	2.68106E1	1.16677E-7	2.52538E-3	2.52538E-3	6.3074E-3	2.00499E-1
1.4E1	3.657E3	0.0E0	5.66E2	3.82E2	-7.32464E-2	-8.80017E1	-8.34465E-4	-8.8E1	-1.43051E-4	6.27041E-3	9.30309E-2	2.73315E1	-3.26807E1	-3.26212E1	2.68004E1	1.16774E-7	2.52276E-3	2.52276E-3	6.3074E-3	1.9951E-1
1.5E1	1.33E2	0.0E0	6.06E2	4.11E2	-7.29374E-2	-8.80018E1	-7.62939E-4	-8.8E1	7.15256E-5	6.38962E-3	9.29117E-2	2.73111E1	-3.26675E1	-3.25918E1	2.6801E1	1.16829E-7	2.52318E-3	2.52318E-3	6.32386E-3	2.00673E-1
1.6E1	1.183E3	1.0E0	6.47E2	4.41E2	-7.30146E-2	-8.8002E1	-5.72205E-4	-8.79999E1	9.53674E-5	6.38962E-3	9.28879E-2	2.73216E1	-3.26567E1	-3.26018E1	2.68389E1	1.1699E-7	2.52473E-3	2.52473E-3	6.34099E-3	2.0064E-1
1.7E1	1.681E3	0.0E0	6.87E2	4.7E2	-7.31692E-2	-8.8002E1	-4.05312E-4	-8.80005E1	1.43051E-4	6.19888E-3	9.30309E-2	2.73075E1	-3.26362E1	-3.26404E1	2.68232E1	1.16818E-7	2.51498E-3	2.51498E-3	6.32328E-3	2.00567E-1
1.8E1	6.838E3	1.0E0	7.27E2	5.0E2	-7.42513E-2	-8.8002E1	-7.39098E-4	-8.80003E1	9.53674E-5	6.34193E-3	9.28879E-2	2.73111E1	-3.26536E1	-3.26278E1	2.6783E1	1.17083E-7	2.52757E-3	2.52757E-3	6.31288E-3	2.00151E-1
1.9E1	2.567E3	2.0E0	7.68E2	5.29E2	-7.23189E-2	-8.80019E1	-7.39098E-4	-8.80001E1	2.14577E-4	5.98431E-3	9.3174E-2	2.73159E1	-3.26236E1	-3.2632E1	2.68082E1	1.1693E-7	2.52318E-3	2.52318E-3	6.32936E-3	2.01372E-1
2.0E1	3.0305E4	1.5E1	8.08E2	5.58E2	-7.286E-2	-8.80019E1	-7.15256E-4	-8.8E1	2.86102E-4	6.10352E-3	9.29832E-2	2.72732E1	-3.26343E1	-3.26496E1	2.68478E1	1.16778E-7	2.52318E-3	2.52318E-3	6.31288E-3	2.00673E-1
2.1E1	7.0E1	1.0E0	8.49E2	5.88E2	-7.31692E-2	-8.80019E1	-4.76837E-4	-8.80005E1	1.90735E-4	6.17504E-3	9.29594E-2	2.73297E1	-3.26783E1	-3.26326E1	2.6807E1	1.17123E-7	2.51954E-3	2.51954E-3	6.29128E-3	1.9951E-1
2.2E1	2.203E3	2.0E0	8.89E2	6.17E2	-7.27053E-2	-8.80018E1	-6.91414E-4	-8.80002E1	3.33786E-4	6.12736E-3	9.30548E-2	2.73462E1	-3.26915E1	-3.2655E1	2.68064E1	1.16778E-7	2.5188E-3	2.5188E-3	6.31837E-3	2.00499E-1
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.30918E-2	-8.80021E1	-3.8147E-4	-8.80003E1	1.43051E-4	6.17504E-3	9.30548E-2	2.73009E1	-3.26609E1	-3.26332E1	2.68047E1	1.17063E-7	2.52131E-3	2.52131E-3	6.31269E-3	2.0124E-1